2. Te tipu o te kiriata angiangi epitaxial
Ka whakaratohia e te papa he paparanga tautoko ā-tinana, he paparanga kawe hiko rānei mō ngā taputapu hiko Ga2O3. Ko te paparanga nui e whai ake nei ko te paparanga hongere, te paparanga epitaxial rānei e whakamahia ana mō te ātete ngaohiko me te kawe kawe. Hei whakanui ake i te ngaohiko pakaru me te whakaiti i te ātete kawe hiko, ko te matotoru ka taea te whakahaere me te kukū tāpiritanga, me te kounga rauemi tino pai, ētahi o ngā whakaritenga. Ko ngā paparanga epitaxial Ga2O3 kounga teitei ka whakatakotoria mā te whakamahi i te epitaxy hihi ngota (MBE), te whakatakoto kohu matū waro whakarewa (MOCVD), te whakatakoto kohu halide (HVPE), te whakatakoto taiaho pulsed (PLD), me ngā tikanga whakatakoto e ahu mai ana i te kohu CVD.
Ripanga 2 Ētahi hangarau epitaxial māngai
2.1 Tikanga MBE
E mōhiotia ana te hangarau MBE mō tōna kaha ki te whakatipu i ngā kiriata β-Ga2O3 kounga teitei, kāore he hapa, me te whakakī momo-n ka taea te whakahaere nā te taiao korehau tino teitei me te parakore o ngā rauemi. Nō reira, kua noho ko tētahi o ngā hangarau whakakī kiriata angiangi β-Ga2O3 e tino rangahauhia ana, ā, e hokohokohia ana pea. Hei tāpiri, i angitu hoki te whakarite a te tikanga MBE i tētahi paparanga kiriata angiangi β-(AlXGa1-X)2O3/Ga2O3 heterostructure kounga teitei, iti te whakakī. Ka taea e te MBE te aroturuki i te hanganga mata me te āhua i te wā tūturu me te tika o te paparanga ngota mā te whakamahi i te whakaata irahiko pūngao teitei (RHEED). Heoi, he maha tonu ngā wero e pā ana ki ngā kiriata β-Ga2O3 i whakatipuria mā te whakamahi i te hangarau MBE, pērā i te tere tipu iti me te rahi kiriata iti. I kitea e te rangahau ko te tere tipu kei roto i te raupapa o (010)>(001)>(−201)>(100). I raro i ngā āhuatanga momona-Ga o te 650 ki te 750°C, ka whakaatuhia e te β-Ga2O3 (010) te tipu pai rawa atu me te mata maeneene me te tere tipu teitei. Mā te whakamahi i tēnei tikanga, i tutuki angitu te epitaxy β-Ga2O3 me te RMS roughness o te 0.1 nm. β-Ga2O3 I roto i te taiao momona-Ga, ka whakaaturia ngā kiriata MBE i whakatipuria i ngā pāmahana rerekē i roto i te pikitia. Kua angitu a Novel Crystal Technology Inc. ki te whakaputa epitaxial i ngā wafers β-Ga2O3MBE 10 × 15mm2. Ka whakaratohia e rātou he papa tioata kotahi β-Ga2O3 kounga teitei (010) me te matotoru o te 500 μm me te XRD FWHM i raro i te 150 hēkona arc. Ko te papa he Sn doped, he Fe doped rānei. Ko te papa kawe hiko Sn-doped he kukū doping o te 1E18 ki te 9E18cm−3, ko te papa haurua-whakamaroke rino he ātete teitei ake i te 10E10 Ω cm.
2.2 Tikanga MOCVD
Ka whakamahia e te MOCVD ngā matū whakarewa waro hei rauemi matua hei whakatipu i ngā kiriata angiangi, ā, ka tutuki ai te whakaputanga arumoni nui. Ina whakatipuria te Ga2O3 mā te whakamahi i te tikanga MOCVD, ko te trimethylgallium (TMGa), te triethylgallium (TEGa) me te Ga (dipentyl glycol formate) te nuinga o te wā e whakamahia ana hei pūtake Ga, ko te H2O, te O2, te N2O rānei te nuinga o te wā e whakamahia ana hei pūtake hāora. Ko te whakatipu mā te whakamahi i tēnei tikanga e hiahiatia ana he pāmahana teitei (>800°C). He pūmanawa tō tēnei hangarau ki te whakatutuki i te kukū iti o ngā kaikawe me te nekenekehanga irahiko pāmahana teitei me te pāmahana iti, nō reira he mea nui ki te whakatinanatanga o ngā taputapu hiko β-Ga2O3 mahi teitei. Ki te whakatauritea ki te tikanga whakatipu MBE, he painga tō te MOCVD ki te whakatutuki i ngā tere tipu tino teitei o ngā kiriata β-Ga2O3 nā ngā āhuatanga o te tipu pāmahana teitei me ngā tauhohenga matū.
Whakaahua 7 β-Ga2O3 (010) whakaahua AFM
Pikitia 8 β-Ga2O3 Te whanaungatanga i waenga i te μ me te ātete rau i inehia e Hall me te pāmahana
2.3 Tikanga HVPE
He hangarau epitaxial pakari te HVPE, ā, kua whānuitia te whakamahinga i roto i te tipu epitaxial o ngā semiconductors matū III-V. E mōhiotia ana te HVPE mō tōna utu whakaputa iti, te tere tipu tere, me te matotoru kiriata teitei. Me mōhio ko te HVPEβ-Ga2O3 te nuinga o te wā e whakaatu ana i te āhua mata taratara me te kiato teitei o ngā hapa mata me ngā poka. Nō reira, me whai tukanga whakakanapa matū me te miihini i mua i te hanga i te taputapu. Ko te hangarau HVPE mō te epitaxy β-Ga2O3 te tikanga e whakamahi ana i te hau GaCl me te O2 hei matūmua hei whakatairanga i te tauhohenga pāmahana teitei o te matrix (001) β-Ga2O3. E whakaatu ana te Pikitia 9 i te āhua o te mata me te tere tipu o te kiriata epitaxial hei mahi a te pāmahana. I ngā tau tata nei, kua angitu nui a Novel Crystal Technology Inc. o Hapani i roto i te HVPE homoepitaxial β-Ga2O3, me ngā matotoru paparanga epitaxial o te 5 ki te 10 μm me ngā rahi wafer o te 2 me te 4 inihi. Hei tāpiritanga, kua uru atu hoki ngā anga homoepitaxial HVPE β-Ga2O3 matotoru 20 μm i hangaia e te China Electronics Technology Group Corporation ki te wāhanga hokohoko.
Ahua 9 Tikanga HVPE β-Ga2O3
2.4 Tikanga PLD
Ko te hangarau PLD te mea nui hei whakatakoto i ngā kiriata waikura matatini me ngā hanganga hetero. I roto i te tukanga tipu PLD, ka honoa te kaha photon ki te rauemi ūnga mā te tukanga tuku irahiko. He rerekē ki te MBE, ka hangaia ngā matūriki pūtake PLD e te hihi laser me te kaha tino teitei (>100 eV) ā, ka whakatakotoria ki runga i te papa wera. Heoi, i roto i te tukanga tango, ka pā tika ētahi matūriki kaha-teitei ki te mata o te rauemi, ka hanga he hapa pūwāhi, ā, ka whakaiti i te kounga o te kiriata. He rite ki te tikanga MBE, ka taea te whakamahi i te RHEED hei aroturuki i te hanganga mata me te āhua o te rauemi i te wā tūturu i te tukanga whakatakoto PLD β-Ga2O3, e āhei ai ngā kairangahau ki te tiki tika i ngā mōhiohio tipu. E matapaetia ana ka whakatipuhia e te tikanga PLD ngā kiriata β-Ga2O3 tino kawe, ka waiho hei otinga whakapā ohmic kua arotauhia i roto i ngā taputapu hiko Ga2O3.
Ahua 10 Whakaahua AFM o te Ga2O3 kua whakaranua ki te Si
2.5 Tikanga MIST-CVD
He hangarau whakatipu kiriata angiangi ngāwari noa iho, ā, he iti hoki te utu o te MIST-CVD. Ko tēnei tikanga CVD e uru ana ki te tauhohenga o te rehu i tētahi matū whakapūkara kua whakakōpikopikotia ki runga i tētahi papa hei whakatutuki i te whakatakotoranga kiriata angiangi. Heoi, tae noa mai ki tēnei wā, kāore tonu i te pai ngā āhuatanga hiko o te Ga2O3 i whakatipuria mā te whakamahi i te mist CVD, ā, he nui ngā wāhi hei whakapai ake me te arotau i ngā rā kei te heke mai.
Wā tuku: Mei-30-2024