Ubuzima burambyeIgishyushya cya Graphite gikozwe muri SICkuri MOCVD K465i, Igishyushya cya Graphite cya epitaxy,
icyuma gishyushya cya grafiti, Igishyushya cya grafiti cya MOCVD, icyuma gishyushya, Igishyushya cya Graphite gikozwe muri SIC,
Igishyushya cya MOCVD, Ibikoresho byo Gushyushya bya MOCVD
Grafitiicyuma gishyushya:
Itsindaicyuma gishyushya cya grafitiIbice bikoreshwa mu itanura rifite ubushyuhe bwinshi, ubushyuhe bugera kuri dogere 2200 mu kirere gisukuye, na dogere 3000 mu kirere cya gazi cyakuwemo ogisijeni n'igishyizwemo.
Ibintu by'ingenzi biranga grafitiicyuma gishyushya:
1. imiterere y'ubushyuhe ingana.
2. amashanyarazi meza kandi afite umuvuduko mwinshi w'amashanyarazi.
3. kurwanya ingese.
4. kudakoresha ogisijeni.
5. ubuziranenge bwinshi bwa shimi.
6. imbaraga nyinshi za mekanike.
Akamaro ni ugukoresha ingufu nke, agaciro kanini no kudakoresha nabi.
Dushobora gukora anti-oxidation no kumara igihe kirekire graphite crucible, graphite mold n'ibice byose bya graphite heater.
Ibipimo by'ingenzi bya grifiti heater:
| Ibisobanuro bya tekiniki | VET-M3 |
| Ubucucike bw'umubyimba (g/cm3) | ≥1.85 |
| Ibikubiye mu ivu (PPM) | ≤500 |
| Ubukomere bw'Inkombe | ≥45 |
| Ubudahangarwa bwihariye (μ.Ω.m) | ≤12 |
| Imbaraga zo Kongera Uburemere (Mpa) | ≥40 |
| Imbaraga zo Gukanda (Mpa) | ≥70 |
| Ingano ya Garama (μm) | ≤43 |
| Ingano y'ubushyuhe Mm/°C | ≤4.4*10-6 |
Igishyushya cya grafiti cyo mu itanura ry'amashanyarazi gifite ubushobozi bwo kudashyuha, kudashyuha cyane, kudatwara amashanyarazi neza ndetse no kuba gifite imbaraga nyinshi. Dushobora gukoresha ubwoko butandukanye bw'igishyushya cya grafiti dukurikije imiterere y'abakiriya.
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