Isifudumezi se-Graphite esimbozwe yi-SIC esihlala isikhathi eside se-MOCVD K465i, Isifudumezi se-Graphite se-epitaxy

Incazelo emfushane:

I-Chemical Graphite

Inzuzo: Ukumelana nokushisa okuphezulu

Isicelo: MOCVD/Vacuum furnace/Hot Zone

Ubuningi Bobuningi: 1.68-1.91g/cm3

Amandla okugobeka: 30-46Mpa

Ukumelana: 7-12μΩm

Sithumelele i-imeyili Landa njenge-PDF

Imininingwane Yomkhiqizo

Amathegi Omkhiqizo

Impilo endeIsifudumezi se-Graphite Esimbozwe yi-SICye-MOCVD K465i, i-Graphite Heater ye-epitaxy,
isifudumezi se-graphite, Isifudumezi se-Graphite se-MOCVD, i-heater, Isifudumezi se-Graphite Esimbozwe yi-SIC,

I-MOCVD Substrate Heater, Izinto Zokushisa ze-MOCVD

I-Graphitei-heater:
Iisifudumezi se-graphiteIzingxenye zisetshenziswa esithandweni sokushisa okuphezulu lapho izinga lokushisa lifinyelela kuma-degree angu-2200 endaweni yokuhlanza kanye nama-degree angu-3000 endaweni yegesi ekhishwe i-oxidized nefakiwe.
Izici eziyinhloko ze-graphitei-heater:
1. ukufana kwesakhiwo sokushisa.
2. ugesi omuhle kanye nomthwalo omkhulu kagesi.
3. ukumelana nokugqwala.
4. ukungashisi.
5. ubumsulwa obuphezulu bamakhemikhali.
6. amandla aphezulu omshini.
Inzuzo ukuthi igcina ugesi ngendlela efanele, inenani eliphezulu kanye nokugcinwa kwayo kuphansi.
Singakhiqiza i-anti-oxidation kanye ne-graphite crucible ehlala isikhathi eside, isikhunta se-graphite nazo zonke izingxenye ze-graphite heater.
Amapharamitha ayinhloko we-graphite heater:

Ukucaciswa Kobuchwepheshe	I-VET-M3
Ubuningi (g/cm3)	≥1.85
Okuqukethwe Komlotha (PPM)	≤500
Ukuqina Kogu	≥45
Ukumelana Okuqondile (μ.Ω.m)	≤12
Amandla Okugobeka (i-Mpa)	≥40
Amandla Okucindezela (i-Mpa)	≥70
Usayizi Ophezulu Wokusanhlamvu (μm)	≤43
I-Coefficient Yokwanda Kokushisa Mm/°C	≤4.4*10-6

Isifudumezi se-graphite sesithando sikagesi sinezimpawu zokumelana nokushisa, ukumelana nokushiswa kwe-oxidation, ukuhanjiswa kukagesi okuhle kanye namandla angcono omshini. Singakwazi ukushisisa izinhlobo ezahlukene zesifudumezi se-graphite ngokwemiklamo yamakhasimende.