Ubwato bwa Quartz bufite isuku nyinshi bwo gutunganya Wafer

Ubwato bwa Quartz Waferni igikoresho cy'ingenzi mu gukora semiconductor, gukora uturemangingo twa photovoltaic n'ubushakashatsi n'iterambere ry'ibikoresho bigezweho, cyagenewe kohereza no gushyira wafer mu mwanya wayo mu buryo buhamye mu bushyuhe bwinshi. Iki gicuruzwa cyakozwe muri silica ya fused (SiO2) ifite ubushyuhe bwinshi, irwanya ubushyuhe bwinshi, ihamye mu binyabutabire n'imiterere y'icyuma yanduye cyane, ikwiriye gukoreshwa mu itanura rikwirakwira, itanura rikoresha oxidation, PECVD/LPCVD n'ibindi bikoresho, ikoreshwa cyane mu gusiga wafer, gutera ion, gufunga ubushyuhe bwinshi n'ibindi bikorwa by'ingenzi.

Ibyiza by'ingenzi by'ubwato bwa quartz bwa VET Energy:

• Ibikoresho bifite isuku nyinshi cyane
  Ubuziranenge ≥99.99%: Ingano y'umwanda (Na, K, Fe, nibindi) <5ppm, birinda kwanduza wafer kandi bigatanga umusaruro mwiza.
  Imvura nke kandi ikanagwa: ubuso bukozwe neza cyane (Ra≤0.4μm) kugira ngo bigabanye gufatana kw'uduce duto n'ibisigazwa bya gaze.
• Ubushyuhe bwinshi burahamye
  Ubushyuhe ntarengwa: Ubushyuhe bw'igihe kirekire bwo gukora bwa 1100℃, impera y'igihe gito ya 1300℃, nta guhinduka kw'ikirere, nta mvura ya kristu.
  Igipimo cyo kwaguka k'ubushyuhe gito (5.5x10-7/℃), ubushobozi bwo kurwanya ubushyuhe cyane, bushobora kwihutisha kwiyongera no kugwa (urugero: RTP rapid annealing).
• Igishushanyo mbonera cy'inyubako gisobanutse neza
  Uburyo bwo gukora neza ± 0.1mm: guhuza wafers 2” kugeza kuri 12”, ikosa ryo gutandukanya hagati y’imyanya <0.05mm, kwemeza ko wafers nta kibazo zifite.
  Ubushobozi bwinshi bwo gutwara: Umutwaro ntarengwa wa wafer 50 (mu bijyanye na wafer 12”) mu bwato bumwe, bushyigikira ihererekanya rihamye rya wafer nto (≥100um).
• Ubumuga bw'ibinyabutabire
  Ubudahangarwa n'ubushyuhe: Irwanya aside (usibye HF), irwanya alkali na organic solvent corruption, ijyanye n'uburyo bwo gusukura CMP.
  Ubushobozi bwiza bwo gufunga gazi: Igipimo cyo gusohoka <5x10-10 Pa.m3/s, kibereye ahantu hadakoreshejwe umwuka kandi harinda gazi.
• Kuramba no kubungabunga ubuzima
  Igihe cy'ubuzima ≥ 5000 cycles (imiterere isanzwe y'akazi), ubuso bushobora gusukurwa no gukoreshwa inshuro nyinshi, bigabanura ikiguzi rusange.
  Igishushanyo mbonera cy'imashini: gishyigikira gusimbuza igice (urugero: iryinyo rimwe ry'ubwato), bigabanya igihe cyo gukora.

Dutanga ubuso bubonerana n'ubukonje hakurikijwe ibyo abakiriya bakeneye:

Ningbo VET Energy Technology Co., Ltd ni ikigo gikoresha ikoranabuhanga rihanitse cyibanda ku gukora no kugurisha ibikoresho bigezweho, ibikoresho n'ikoranabuhanga birimo grafiti, silicon carbide, ceramics, gutunganya ubuso nko gusiga SiC, gusiga TaC, gusiga ikirahure cya karuboni, gusiga pyrolytic karuboni, nibindi, ibi bicuruzwa bikoreshwa cyane mu gusiga photovoltaic, semiconductor, ingufu nshya, metallurgy, nibindi.

Itsinda ryacu rya tekiniki rikomoka mu bigo bikomeye by’ubushakashatsi mu gihugu, kandi ryakoze ikoranabuhanga ryihariye rijyanye n’ibiciro kugira ngo rirebe ko ibicuruzwa bikora neza kandi bifite ireme, rishobora kandi guha abakiriya ibisubizo by’ibikoresho by’umwuga.