Type, performance and use of the electrode
Electrode type
Carbonaceous electrodes can be classified into carbon electrodes, graphite electrodes and self-baking electrodes according to...
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1. SiC crystal growth technology route
PVT (sublimation method),
HTCVD (high temperature CVD),
LPE (liquid phase method)
are three common SiC crystal growth methods;
The most recognized meth...
TaC coating is a high-performance ceramic layer, critical for advanced semiconductor fabrication. It is essential for SiC single crystal growth and GaN/SiC epitaxial growth processes. The GaN/SiC ...
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Chemical Vapor Deposition (CVD) is an important thin film deposition technology, often used to prepare various functional films and thin-layer materials, and is widely used in semiconductor manufac...