1. What is a PECVD boat?
1.1 Definition and core functions
PECVD boat (Plasma Enhanced Chemical Vapor Deposition) is a core tool used to carry wafers or substrates in the PECVD process. It...
Special graphite is a high purity, high density and high strength graphite material and has excellent corrosion resistance, high temperature stability and great electrical conductivity. It is made ...
In SiC crystal growth production lines, many engineers focus on hot-zone design, temperature control curves, and powder formulation. Yet when yield fluctuations arise, the root cause often traces b...
Material and structure of graphite boat
Graphite Boat is a high temperature process equipment, which is usually made of high purity graphite material and treated with SiC (silicon car...
Seals play a key role in the industrial field, and graphite bearings, as an important seal, are gradually showing broad application prospects. Especially in fields such as semiconductor manufacturi...
In various industrial applications, the need for reliable and effective sealing solutions is paramount. Graphite sealing rings have emerged as a top choice due to their exceptional performance and ...