CVD SiC Coated Carbon-carbon Composite CFC Boat Mould

Short Description:

VET Energy SiC coated CFC boat/mold is a high-performance product designed to provide consistent and reliable performance over an extended period. It has super good heat resistance and thermal uniformity, high purity, erosion resistance, making it the perfect solution for wafer processing applications.


Product Detail

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Product Description

Carbon / carbon composites (hereinafter referred to as "C / C or CFC") is a kind of composite material which is based on carbon and reinforced by carbon fiber and its products (carbon fiber preform). It has both the inertia of carbon and the high strength of carbon fiber. It has good mechanical properties, heat resistance, corrosion resistance, friction damping and thermal and electrical conductivity characteristics

CVD-SiC coating has the characteristics of uniform structure, compact material, high temperature resistance, oxidation resistance, high purity, acid&alkali resistance and organic reagent, with stable physical and chemical properties.

Main features:

1. High temperature oxidation resistance: the oxidation resistance is still very good when the temperature is as high as 1600 C.
2. High purity: made by chemical vapor deposition under high temperature chlorination condition.
3. Erosion resistance: high hardness, compact surface, fine particles.
4. Corrosion resistance: acid, alkali, salt and organic reagents.

CVD SiC薄膜基本物理性能

Basic physical properties of CVD SiC coating

性质 / Property

典型数值 / Typical Value

晶体结构 / Crystal Structure

FCC β phase 多晶,主要为(111)取向

密度 / Density

3.21 g/cm³

硬度 / Hardness

2500 维氏硬度(500g load)

晶粒大小 / Grain SiZe

2~10μm

纯度 / Chemical Purity

99.99995%

热容 / Heat Capacity

640 J·kg-1·K-1

升华温度 / Sublimation Temperature

2700℃

抗弯强度 / Flexural Strength

415 MPa RT 4-point

杨氏模量 / Young' s Modulus

430 Gpa 4pt bend, 1300℃

导热系数 / Thermal Conductivity

300W·m-1·K-1

热膨胀系数 / Thermal Expansion(CTE)

4.5×10-6K-1

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VET Energy is the real manufacturer of customized graphite and silicon carbide products with different coatings like SiC coating, TaC coating, glassy carbon coating, pyrolytic carbon coating, etc., can supply various customized parts for semiconductor and photovoltaic industry.

Our technical team comes from top domestic research institutions, can provide more professional material solutions for you.

We continuously develop advanced processes to provide more advanced materials, and have worked out an exclusive patented technology, which can make the bonding between the coating and the substrate tighter and less prone to detachment.

Warmly welcome you to visit our factory, let's have further discussion!

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