Precision Graphite Boats for PECVD & Heat Treatment
Designed for high-throughput wafer processing, solar cell manufacturing, and battery powder sintering, our high-purity graphite boats feature exceptional mechanical strength and thermal stability. To significantly minimize particle generation and optimize film thickness uniformity in chemical vapor deposition, these carriers are frequently coated using advanced Siliconized Graphite or SiC technologies.
High Uniformity & Electrical Conductivity
Ensures stable plasma field distribution during photovoltaic PECVD processing.
Longer Service Life
Resists warping and thermal deformation under continuous rapid thermal cycles.
Customized Slots & Geometry
Precision CNC machining integrated with high-durability Graphite Plates for seamless loading.
| Application Type | Key Technical Advantage | Primary Process Application |
|---|---|---|
| PECVD Graphite Boat | High density, chemical gas erosion resistance, low color shadow | Solar SiNx anti-reflection coating deposition |
| LFP Battery Powder Saggars | High thermal capacity, low thermal expansion, cost efficiency | Lithium-ion battery cathode powder calcination |
| Semiconductor Carrier Boat | High purity (< 5 ppm), tight tolerance slotting | Diffusion and oxidation furnaces |
