In aerospace and automotive equipment, electronics often operate at high temperatures, such as aircraft engines, car engines, spacecraft on missions near the sun, and high-temperature equipment in ...
Before entering the PE furnace tube, check whether the graphite boat is in good condition again. It is recommended to pretreat (saturated) at normal time, it is recommended not to pretreat in empty...
Wide bandgap (WBG) semiconductors represented by silicon carbide (SiC) and gallium nitride (GaN) have received widespread attention. People have high expectations for the application prospects of s...
The global coated graphite tube market in 2020 is mainly focused on market trends, market share, scale and forecasts. This is a brief professional analysis of the current situation of the global co...
Silicon carbide coating technology is a method of forming silicon carbide layer on the surface of materials, usually using chemical vapor deposition, physicochemical vapor deposition, melt impregna...
1. What is a PECVD boat?
1.1 Definition and core functions
PECVD boat (Plasma Enhanced Chemical Vapor Deposition) is a core tool used to carry wafers or substrates in the PECVD process. It...