Dalilin da yasa Jiragen Ruwa na SiC na Ceramic Wafer suke da mahimmanci ga Yaɗuwar Semiconductor da Tanderu na Iskar Oxidation

Yayin da hanyoyin kera semiconductor ke ci gaba da bunkasa zuwa manyan girman wafer, tsauraran kasafin kuɗi na zafi, da kuma ƙarancin jure wa lahani, kayan da ake amfani da su a cikin kayan aikin sarrafa zafin jiki mai zafi sun zama masu mahimmanci. Daga cikin waɗannan mahimman abubuwan amfani da abubuwan gina jiki, jiragen ruwan wafer na silicon carbide (SiC) na yumbu sun bayyana a matsayin ɗaya daga cikin mahimman fasahohin da ke ba da damar amfani da su a cikin tsarin tanderu na zamani.

A cikin yanayin masana'antar semiconductor mai ci gaba, suna tasiri kai tsaye kan daidaiton zafi, samar da barbashi, rarraba damuwa ta wafer, kwanciyar hankali na tsari, da kuma ƙarshe, yawan amfanin na'ura.

Musamman a cikin kera wafer mai girman 300mm, kera semiconductor mai ƙarfin lantarki, da kuma samar da semiconductor na ƙarni na uku, jiragen ruwan wafer na silicon carbide na ciminti suna maye gurbin tsarin jigilar kayayyaki na gargajiya bisa ga quartz saboda kyawun halayensu na zafi da na inji.

Menene jirgin ruwan wafer na silicon carbide na seramiki?

Jirgin ruwan wafer na silicon carbide wani tsari ne mai ɗaukar wafer mai zafi mai zafi wanda aka yi da yumbu mai tushen silicon carbide na zamani. Babban manufarsa ita ce tallafawa da jigilar wafers na semiconductor da yawa cikin aminci ta hanyar tsarin murhu a tsaye ko a kwance yayin ayyukan sarrafa zafi.

Jirgin ruwan wafer na yau da kullun yana ɗauke da ramukan wafer da aka ƙera daidai gwargwado waɗanda aka tsara don kiyaye tazara mai kyau yayin sarrafawa. Dangane da aikace-aikacen, tsarin na iya haɗawa da sandunan tallafi, hannun cantilever, geometry da aka inganta daga iska, da sassan ƙarfafawa masu sauƙi waɗanda aka tsara don rage yawan zafi.

A cikin tsarin tanderun semiconductor, jiragen ruwan wafer suna aiki yadda ya kamata a matsayin hanyar haɗin tsakanin wafers da yanayin sarrafa zafi. Yayin da girman na'urori ke ci gaba da raguwa zuwa ga ci gaba da fasahar zamani, har ma da rashin daidaiton ƙananan abubuwa a cikin tsarin tallafawa wafer na iya shafar maimaita aiki da aikin lahani.

Wannan yana ɗaya daga cikin dalilan da ya sa masana'antun murhu na zamani ke ƙara ɗaukar kayan yumbu masu inganci na silicon carbide maimakon tsarin quartz na gargajiya da aka haɗa.

Matsayinsa cikin Tsarin Yaɗuwa da Tsarin Tanderu na Iskar Oxidation

Yaɗuwa da kuma haɗakar iskar oxygen har yanzu suna daga cikin muhimman hanyoyin samar da zafi a masana'antar semiconductor. Ana amfani da waɗannan hanyoyin sosai don kunna dopant, haɓakar thermal oxide, annealing, yaɗuwar tuƙi, da kuma samuwar dielectric.

Yanayin zafin aiki na yau da kullun yana tsakanin kimanin 900°C zuwa 1200°C dangane da sinadaran aiki da buƙatun na'urori. A wasu aikace-aikacen na'urorin lantarki masu ƙarfi ko SiC, zagayowar zafi na iya wuce 1300°C.

A ƙarƙashin waɗannan yanayi, jirgin ruwan wafer dole ne ya kiyaye daidaiton girma a tsawon zagayowar zafi mai tsawo yayin da yake rage gurɓatawa da kuma kiyaye tazara iri ɗaya ta wafer.

An daɗe ana amfani da jiragen ruwan quartz na gargajiya a cikin tanderun watsawa saboda tsarkinsu mai yawa da ƙarancin farashi. Duk da haka, kayan quartz suna nuna ƙarancin ƙarfin zafi - yawanci kusan 1.4 W/m·K a zafin ɗaki.

Idan aka kwatanta, tukwanen silicon carbide yawanci suna nuna ƙimar wutar lantarki mai ɗumi daga kimanin 120 ~ 200 W/m·K ya danganta da matakin da kuma tsarin da aka yi amfani da shi.

Wannan babban bambanci yana inganta daidaiton zafin jiki a duk faɗin nauyin tanda.

Babban ƙarfin lantarki na thermal yana ba da damar:

● Ƙarin dumama wafer iri ɗaya

● Rage yanayin zafi

● Inganta daidaito tsakanin wafer da wafer

● Ƙara yawan tarin damuwa ta zafi

● Rage tasirin gefen yayin iskar shaka ko yaɗuwa

A cikin masana'antar semiconductor mai ci gaba, inda tagogi na tsari ke ci gaba da raguwa, waɗannan ci gaban suna tasiri kai tsaye kan daidaiton fim da daidaiton aikin lantarki.

Jiragen ruwan SiC wafer suma suna samar da ƙarfin injina mai yawa idan aka kwatanta da tsarin quartz. Wannan yana ƙara zama mahimmanci a cikin tsarin murhu mai tsaye wanda ke sarrafa manyan rukunin wafers masu girman mm 300, inda tsawon jirgin ruwa da nauyin injina na iya zama masu mahimmanci.

Rage nakasar yana taimakawa wajen kiyaye tazara mai kyau tsakanin wafer da kuma yanayin kwararar iskar gas a duk tsawon zagayowar zafi.

Muhimman Halayen Jiki na Kwale-kwalen Wafer na Silicon Carbide

Karuwar shaharar jiragen ruwa na silicon carbide da ke ƙarawa ya faru ne saboda haɗin keɓantaccen halayen zafi, na inji, da na sinadarai na tukwanen silicon carbide.

Muhimman Halayen Jiki

Waɗannan halaye suna ba da damar tsarin yumbu na silicon carbide don kiyaye daidaiton girma a ƙarƙashin zagayowar zafi mai tsawo, yayin da sassan quartz na gargajiya na iya fara laushi ko lalacewa.

Babban taurin silicon carbide yana rage girgiza da rashin kwanciyar hankali na injiniya yayin lodawa da sauke wafers a cikin tanderu.

Manyan Nau'ikan Kayan Aiki na Kwale-kwalen Silicon Carbide Wafer

Ana ƙera jiragen ruwa na zamani na silicon carbide ta amfani da fasahar kayan aiki daban-daban, kowannensu an inganta shi don takamaiman yanayin aiki da buƙatun inganci.

Ana amfani da silikon carbide mai sake yin amfani da shi (RSiC) sosai a aikace-aikacen tanderu mai zafi saboda kyawun tsarkinsa da kuma kwanciyar hankali na zafi. Tsarin kera RSiC ba ya buƙatar ƙarin adadi mai yawa na kayan aikin sintering, wanda ke taimakawa rage haɗarin gurɓatawa a cikin mahalli na semiconductor.

Silinda mai simintin silicon carbide (RBSC ko RBSiC) yana ba da ƙarfi mafi girma a fannin injiniya da kuma ƙarancin farashin masana'antu. Duk da haka, silinda mara simintin da ke cikin tsarin na iya rage juriyarsa ga tsatsa a wasu yanayin aikin lalata.

Don aikace-aikacen semiconductor na ci gaba, tsarin graphite mai rufi da silicon carbide na CVD yana ƙara zama ruwan dare. A cikin waɗannan tsare-tsare, substrate na graphite yana ba da tallafin injiniya mai sauƙi, yayin da murfin silicon carbide mai tsabta (CVD) mai tsabta yana samar da hanyar haɗin aiki.

Rufin CVD silicon carbide yana da ƙarancin yawan samar da barbashi da kuma tsarkin da ya keɓance, wanda hakan ke sa su zama masu jan hankali ga ci gaba da kera na'urori masu auna dabaru da ƙarfin semiconductor. Duk da haka, dole ne a kula da ingancin rufi da kuma rashin daidaiton ma'aunin faɗaɗa zafi don hana tsagewa ko wargajewa yayin maimaita zagayowar zafi.

Kalubalen Tsarin Aiki Na Yau Da Kullum

Duk da fa'idodin aiki na jiragen ruwan wafer na silicon carbide, har yanzu suna fuskantar ƙalubalen injiniya da yawa a cikin yanayin masana'antar semiconductor na gaske.

Gurɓatar ƙwayoyin cuta ta kasance ɗaya daga cikin manyan matsalolin. Yayin da girman na'urori ke raguwa, asarar yawan amfanin ƙasa da ƙwayoyin cuta ke haifarwa yana ƙara tsananta. Ko da tarkace masu girman ƙananan micron waɗanda suka samo asali daga ƙananan fasa, lalacewar shafi, ko lalacewar saman ƙasa na iya haifar da lahani mai tsanani ga wafers masu tasowa.

Fashewar matsin lamba na zafi wani ƙalubale ne da ya daɗe yana fuskanta. Duk da cewa silicon carbide yana da kyakkyawan kwanciyar hankali na zafi, har yanzu yana da kayan yumbu mai rauni. Saurin dumamawa ko rashin daidaito a yanayin zafi na iya haifar da tsagewa a kusurwoyin tsari, ramukan wafer, ko mahaɗar katako.

Zagayewar zafi na dogon lokaci kuma na iya haifar da lalacewa ko rarrafe a hankali, musamman a cikin manyan jiragen ruwa masu girman wafer da ake amfani da su a cikin tsarin murhu a tsaye. Ko da ƙananan canje-canje na geometric na iya canza tazara tsakanin wafer da daidaiton kwararar iskar gas, ta haka yana shafar sarrafa kauri na oxide da daidaiton rarrabawar dopant.

Rushewar rufin CVD wani muhimmin batu ne na aminci a cikin tsarin SiC mai rufi. Saboda substrate na graphite da murfin SiC suna nuna halaye daban-daban na faɗaɗa zafi, maimaita zagayowar zafin jiki mai yawa a ƙarshe yana haifar da tarin damuwa a mahaɗin.

Kammalawa

A cikin tsarin watsawa da kuma tsarin tanderun hadakar sinadarai, jiragen ruwan wafer na silicon carbide na seramiiki suna taka muhimmiyar rawa wajen kiyaye kwanciyar hankali na zafi, sarrafa gurɓatawa, da kuma tabbatar da daidaiton tsari a ƙarƙashin mawuyacin yanayi na aiki. Babban ƙarfin watsawar zafi, kyakkyawan juriyar injina, juriyar zafin jiki mai yawa, da kuma kwanciyar hankali na sinadarai sun sa su zama dole a cikin masana'antar semiconductor mai ci gaba.

Yayin da fasahar sarrafa semiconductor ke ci gaba da bunƙasa, tana ƙara zama mai rikitarwa, kuma buƙatun sarrafa lahani suna ƙara tsananta, mahimmancin tsarin ɗaukar wafer na yumbu mai ci gaba zai ci gaba da ƙaruwa. A cikin masana'antun zamani, ƙalubale da yawa da suka shafi sarrafa barbashi, daidaiton zafi, da aminci a ƙarshe za a iya gano su ta hanyar hulɗar da ke tsakanin halayen zagayowar zafi, kwanciyar hankali na abu, da ƙirar tsarin ɗaukar wafer.

Saboda haka, jiragen ruwan wafer na silicon carbide suna canzawa cikin sauri daga kayan aikin tanderu masu taimako zuwa mahimman abubuwa don kera semiconductor na zamani.