Impamvu ubwato bwa SiC Ceramic Wafer ari ingenzi mu gukwirakwiza no gusiga ogisijeni mu matanura ya semiconductor

Uko ibikorwa byo gukora ibikoresho bya semiconductor bikomeje gutera imbere bigana ku bunini bwa wafer, ingengo y'imari ihamye y'ubushyuhe, no kwihanganira inenge nke, ibikoresho bikoreshwa mu bikoresho bikoresha ubushyuhe bwinshi byarushijeho kuba ingenzi. Muri ibi bikoresho by'ingenzi bikoreshwa n'ibikubiye mu miterere, ubwato bwa silicon carbide (SiC) bwa ceramic wafer bwagaragaye nk'imwe mu ikoranabuhanga ry'ingenzi rifasha mu mikoreshereze igezweho y'ibikoresho byo gukwirakwiza no gutwika.

Mu nganda zikora ibikoresho bya semiconductor zigezweho, zigira ingaruka ku buryo butaziguye ku bushyuhe, gukora uduce duto, gukwirakwiza imbaraga za wafer, kudahungabana kw'imikorere, ndetse no ku musaruro w'ibikoresho.

By’umwihariko mu gukora wafer ya 300mm, gukora semiconductor ikoresha ingufu, no gukora semiconductor yo mu gisekuru cya gatatu, ubwato bwa silicon carbide ceramic wafer burimo gusimbura vuba sisitemu zisanzwe zikoresha quartz bitewe n’ubushobozi bwazo bwiza bwo gushyuha no gukoresha ikoranabuhanga.

Ubwato bwa silicon carbide ceramic wafer ni iki?

Ubwato bwa silicon carbide ceramic wafer ni imiterere itwara wafer ishyushye cyane ikozwe mu bishushanyo mbonera bya silicon carbide. Intego yabwo y'ibanze ni ugushyigikira no gutwara wafer nyinshi za semiconductor mu buryo butekanye binyuze mu buryo bw'itanura rihagaze cyangwa ritambitse mu gihe cyo gutunganya ubushyuhe.

Ubwato busanzwe bwa wafer bugizwe n'imirongo myinshi ya wafer ikozwe neza cyane igamije kubungabunga intera hagati ya wafer n'iy'inyuma mu gihe cyo kuyitunganya. Bitewe n'uburyo ikoreshwa, imiterere ishobora kandi kuba irimo imirasire y'inkunga, amaboko ya cantilever, imiterere y'ikirere ikoresha umwuka mwiza, n'ibice byoroheje bigamije kugabanya ubushyuhe.

Mu buryo bwa semiconductor furnace, ubwato bwa wafer bukora neza nk'aho buhuza wafer n'ahantu ho gutunganya ubushyuhe. Uko ingano y'ibikoresho ikomeza kugabanuka igana ku ikoranabuhanga rigezweho, ndetse no kutagira ubushobozi bwo guhagarara neza mu buryo bwa wafer bishobora kugira ingaruka ku buryo ibintu bisubiramo ndetse no ku mikorere y'ubusembwa.

Iyi ni imwe mu mpamvu zituma abakora amatanura bateye imbere barushaho gukoresha ibice bya silicon carbide bya kera bifite isuku nyinshi aho gukoresha sisitemu za quartz zisanzwe.

Uruharesmu buryo bwo gukwirakwiza no gusiga ifuru

Gukwirakwiza no gutwika biracyari bimwe mu bikorwa by'ingenzi by'ubushyuhe mu nganda za semiconductor. Ibi bikorwa bikoreshwa cyane mu gukora dopant, gukura kwa oxide y'ubushyuhe, gutera, gukwirakwiza mu buryo bwa drive-in, no gukora dielectric.

Ubushyuhe busanzwe bwo gukoresha buri hagati ya 900°C na 1200°C bitewe n'uburyo ikoranabuhanga rikorwa n'ibikenewe mu gikoresho. Mu bikoresho bimwe na bimwe bigezweho bya semiconductor cyangwa SiC, imikorere y'ubushyuhe ishobora kurenga 1300°C.

Muri ibi bihe, ubwato bwa wafer bugomba kugumana ubusugire mu gihe cy'ubushyuhe bwinshi, mu gihe bigabanya ubwandu no kubungabunga intera y'ubwafer imwe.

Ubwato bwa quartz busanzwe bwamaze igihe kinini bukoreshwa mu itanura rikwirakwizwa kubera ko bufite ubuziranenge bwinshi kandi buhendutse. Ariko, ibikoresho bya quartz bigaragaza ubushyuhe buke cyane - ubusanzwe hafi 1.4 W/m·K mu bushyuhe bw'icyumba.

Ugereranije, keramike ya silikoni karubide isanzwe igaragaza agaciro k'ubushyuhe buri hagati ya 120 ~ 200 W/m·K bitewe n'urwego n'imiterere mito.

Iri tandukaniro rikomeye rituma ubushyuhe bungana mu buryo bugaragara mu itanura ryose.

Ubushobozi bwo hejuru bw'ubushyuhe butuma:

● Gushyushya wafer imwe

● Kugabanuka k'ubushyuhe

● Uburyo bwiza bwo guhuza wafer na wafer

● Kugabanuka k'ubushyuhe

● Ingaruka zo kugabanuka mu gihe cyo gusohora ogisijeni cyangwa gukwirakwira

Mu nganda zigezweho za semiconductor, aho amadirishya akoreshwa mu gutunganya ibintu akomeza kugabanuka, izi ntambwe zigira ingaruka ku buryo filime ingana kandi igahuza imikorere y’amashanyarazi.

Ubwato bwa SiC butanga ubukana bwinshi cyane bwa mekanike ugereranije n'imiterere ya quartz. Ibi birushaho kuba ingenzi mu buryo bwo gutunganya amatanura menshi ya 300 mm, aho uburebure bw'ubwato n'imitwaro ya mekanike bishobora kuba ingenzi.

Kugabanya imihindagurikire y'ikirere bifasha kubungabunga intera ihamye y'imvange y'amazi n'imyitwarire ihamye y'ibyuka mu gihe cyose cy'ubushyuhe.

Imiterere y'ingenzi y'ubwato bwa Silicon Carbide Ceramic Wafer

Gukundwa cyane kwa boti za silicon carbide wafer biterwa ahanini n'uruvange rwihariye rw'imiterere y'ubushyuhe, mekanike, n'imiti ya silicon carbide ceramics.

Ibiranga by'ingenzi by'umubiri

Iyi miterere ituma inyubako za silicon carbide zigumana ubuziranenge bw'ibipimo mu gihe cy'ubushyuhe burambye, mu gihe ibice bisanzwe bya quartz bishobora gutangira koroha cyangwa kwangirika.

Ubukana bwinshi bwa silicon carbide bugabanya kandi guhinda no kudahinduka kwa mekanike mu gihe cyo gupakira no gupakurura wafers mu itanura.

Ubwoko bw'ibikoresho by'ingenzi ku bwato bwa Silicon Carbide Wafer

Ubwato bugezweho bwa silikoni carbide wafer bukorwa hakoreshejwe ikoranabuhanga ritandukanye ry’ibikoresho, buri bumwe bukozwe neza hakurikijwe imiterere yihariye y’ibikorwa ndetse n’ibisabwa mu rwego rwo kugabanya ikiguzi.

Karubide ya silikoni ikoreshwa mu buryo bwa “recrystallized silicon carbide” (RSiC) ikoreshwa cyane mu ikoreshwa ry’itanura rishyuha cyane bitewe n’uko isuku yayo ihebuje kandi ihamye mu bushyuhe. Uburyo bwo gukora RSiC ntibusaba kongerwamo ibikoresho byinshi bifasha mu gutwika, ibyo bigafasha kugabanya ibyago byo kwandura mu duce duto.

Karubide ya silikoni ikoreshwa mu buryo bwa Reaction-sintered (RBSC cyangwa RBSiC) itanga imbaraga nyinshi za mekanike kandi igabanya ikiguzi cyo kuyikora. Ariko, silikoni isigaye idakoresha ibyuma ishobora kugabanya ubushobozi bwayo bwo kurwanya ingese mu bintu bimwe na bimwe byangiza.

Ku bijyanye n’imikorere ya semiconductor igezweho, sisitemu za grafiti zikozwe muri CVD silicon carbide zirimo kwiyongera cyane. Muri izi nyubako, substrate ya grafiti itanga ubufasha bworoheje bwa mekanike, mu gihe irangi rya silicon carbide rikozwe muri CVD rikora imiterere y’imikorere.

Irangi rya CVD silicon carbide rifite igipimo gito cyane cyo gukora uduce duto kandi rifite ubuziranenge budasanzwe, bigatuma rikurura cyane mu gukora logic igezweho no gukora semiconductor ikoresha imbaraga. Ariko, ubuziranenge bw'irangi hamwe n'ibipimo bidahuye byo kwaguka k'ubushyuhe bigomba kugenzurwa neza kugira ngo hirindwe ko hacika cyangwa hagacikagurika mu gihe cy'ihindagurika ry'ubushyuhe.

Imbogamizi zisanzwe mu mikorere

Nubwo hari ibyiza by’imikorere y’ubwato bwa silicon carbide ceramic wafer, buracyahura n’ibibazo byinshi by’ubuhanga mu nganda zikora ibikoresho bya semiconductor.

Ukwanduza uduce duto tw’ibice bikomeje kuba kimwe mu bibazo by’ingenzi. Uko ingano y’ibikoresho igabanuka, igihombo cy’umusaruro giterwa n’uduce duto kigenda kirushaho gukomera. Ndetse n’imyanda ingana na mikorobe nke ikomoka ku mikorobe nto, gutandukana kw’ipamba, cyangwa kwangirika k’ubuso bishobora guteza ubumuga bukabije ku duce duto tw’ibice.

Gucika kw'imitsi y'ubushyuhe ni ikindi kibazo kimaze igihe kirekire. Nubwo karubide ya silikoni ifite ubushobozi bwo kudacika intege mu bushyuhe, iracyari ibikoresho bya ceramic byoroshye. Gushyushya vuba cyangwa kudahuza n'ubushyuhe bishobora gutera imiturire ku mfuruka z'imiterere, imiyoboro ya wafer, cyangwa aho imiyoboro ihurira.

Guhindagurika k'ubushyuhe igihe kirekire bishobora no gutuma habaho guhinduka cyangwa kwiroha buhoro buhoro, cyane cyane mu bwato bunini bwa wafer bukoreshwa mu buryo bw'itanura rihagaze. Ndetse n'impinduka nto zishobora guhindura intera hagati ya wafer n'uburyo umwuka utembera, bityo bigira ingaruka ku kugenzura ubunini bwa oxyde no ku buryo ikwirakwira ry'ibintu rihindagurika.

Gutandukanya CVD coatings ni ikindi kibazo cy’ingenzi mu buryo bwo kwizerwa muri sisitemu za SiC zipfutse. Kubera ko substrate ya grafiti n’ipfundo rya SiC bigaragaza imyitwarire itandukanye yo kwaguka k’ubushyuhe, guhindagurika kenshi kw’ubushyuhe bwinshi amaherezo bitera kwirundanya kw’imihangayiko ku gice cy’ubuso.

Umwanzuro

Mu buryo bwa semiconductor diffusion na oxidation furnace, boat za silicon carbide ceramic wafer boat zigira uruhare runini mu kubungabunga ubushyuhe, kugenzura ubwandu, no kwemeza ko inzira zigenda neza mu bihe bikomeye cyane. Uburyo bwazo bwo gutwara ubushyuhe bwinshi, gukomera kwa mekanike, kudakomera ku bushyuhe bwinshi, no kudahungabana mu binyabutabire bituma zirushaho kuba ingenzi mu nganda zigezweho za semiconductor.

Uko ikoranabuhanga rya semiconductor rikomeza gutera imbere, rirushaho kuba ingorabahizi, kandi ibisabwa mu kugenzura inenge birushaho gukomera, akamaro ka sisitemu zigezweho zo gutwara wafer zikozwe muri ceramic kazakomeza kwiyongera. Mu buryo bwa none, imbogamizi nyinshi zijyanye no kugenzura uduce duto, ubushyuhe bungana, no kwizerana bishobora gusubizwa inyuma ku buryo imikoranire iri hagati y’imyitwarire yo gusimbuka kw’ubushyuhe, guhagarara neza kw’ibikoresho, n’imiterere ya sisitemu yo gutwara wafer.

Kubera iyo mpamvu, ubwato bwa silicon carbide ceramic wafer boat burimo guhinduka vuba cyane kuva ku bikoresho by’inyongera byo mu itanura bikajya mu bice by’ingenzi byo gukora ibikoresho bya semiconductor byo mu gisekuru gitaha.