Chifukwa Chake Maboti a SiC Ceramic Wafer Ndi Ofunika Kwambiri pa Kufalikira kwa Semiconductor ndi Oxidation Furnaces

Pamene njira zopangira ma semiconductor zikupitilira kusintha kukhala zazikulu, bajeti yolimba ya kutentha, komanso kulekerera zolakwika zochepa, zipangizo zomwe zimagwiritsidwa ntchito mkati mwa zida zotenthetsera kwambiri zakhala zofunikira kwambiri. Pakati pa zinthu zofunika kwambiri zomwe zimagwiritsidwa ntchito komanso kapangidwe kake, maboti a ceramic a silicon carbide (SiC) akhala ngati imodzi mwa ukadaulo wofunikira kwambiri pamakina amakono ofalitsira ndi oxidation.

Mu malo apamwamba opangira zinthu zamagetsi, zimakhudza mwachindunji kufanana kwa kutentha, kupanga tinthu tating'onoting'ono, kugawa kwa kupsinjika kwa wafer, kukhazikika kwa njira, ndipo pamapeto pake, kuchuluka kwa zida.

Makamaka popanga ma wafer a 300mm, kupanga ma semiconductor amphamvu, ndi kupanga ma semiconductor a m'badwo wachitatu, ma wafer a silicon carbide ceramic akulowa m'malo mwachangu machitidwe onyamula achikhalidwe okhala ndi quartz chifukwa cha mphamvu zawo zapamwamba zotenthetsera komanso zamakaniko.

Kodi bwato la silicon carbide ceramic wafer ndi chiyani?

Boti la silicon carbide ceramic wafer ndi kapangidwe konyamula wafer kotentha kwambiri kopangidwa ndi ceramics zapamwamba zopangidwa ndi silicon carbide. Cholinga chake chachikulu ndikuthandiza ndikunyamula ma wafer angapo a semiconductor kudzera mumakina oyima kapena opingasa panthawi yokonza kutentha.

Boti la wafer lodziwika bwino limakhala ndi mipata yambiri yokonzedwa bwino yopangidwa kuti isunge malo otetezedwa bwino a wafer panthawi yokonza. Kutengera ndi momwe imagwiritsidwira ntchito, kapangidwe kake kangakhalenso ndi matabwa othandizira, manja a cantilever, mawonekedwe abwino a mpweya, ndi magawo opepuka olimbikitsira omwe adapangidwa kuti achepetse kutentha.

Mu makina opangira ma ng'anjo ya semiconductor, ma wafer boat amagwira ntchito bwino ngati njira yolumikizirana pakati pa ma wafer ndi malo opangira kutentha. Pamene kukula kwa chipangizocho kukupitirira kuchepa kupita ku ma node apamwamba aukadaulo, ngakhale kusakhazikika kwa microscopic mkati mwa kapangidwe ka chithandizo cha wafer kumatha kukhudza kubwerezabwereza kwa njira ndi magwiridwe antchito a cholakwika.

Ichi ndi chimodzi mwa zifukwa zomwe opanga ng'anjo zamakono akuchulukirachulukira kugwiritsa ntchito zida za ceramic za silicon carbide zoyera kwambiri m'malo mwa njira zachikhalidwe zosakanikirana za quartz.

Udindosmu Machitidwe a Ng'anjo Yofalikira ndi Yothira Oxidation

Kufalikira ndi kusungunuka kwa okosijeni ndi zina mwa njira zofunika kwambiri zotenthetsera popanga ma semiconductor. Njirazi zimagwiritsidwa ntchito kwambiri poyambitsa dopant, kukula kwa thermal oxide, annealing, drive-in diffusion, ndi mapangidwe a dielectric.

Kutentha kwanthawi zonse kogwirira ntchito kumayambira pafupifupi 900°C mpaka 1200°C kutengera kapangidwe kake ndi zofunikira pa chipangizocho. Mu mapulogalamu ena apamwamba a semiconductor kapena chipangizo cha SiC, ma thermal cycle amatha kupitirira 1300°C.

Pansi pa izi, bwato la wafer liyenera kukhala lolimba pa kutentha kwa nthawi yayitali pomwe likuchepetsa kuipitsidwa ndikusunga mtunda wofanana wa wafer.

Maboti achikhalidwe a quartz akhala akugwiritsidwa ntchito m'zitofu zofalitsa chifukwa cha kuyera kwawo kwakukulu komanso mtengo wake wotsika. Komabe, zipangizo za quartz zimakhala ndi kutentha kochepa - nthawi zambiri pafupifupi 1.4 W/m·K kutentha kwa chipinda.

Poyerekeza, ma ceramic a silicon carbide nthawi zambiri amakhala ndi mphamvu zoyendetsera kutentha kuyambira pafupifupi 120 ~ 200 W/m·K kutengera mtundu ndi kapangidwe kake.

Kusiyana kwakukulu kumeneku kumathandizira kwambiri kuti kutentha kukhale kofanana nthawi yonse yomwe ng'anjo ikuyaka.

Kutentha kwakukulu kumathandizira:

● Kutentha kofanana kwa wafer

● Kuchepa kwa kutentha

● Kusinthasintha kwabwino kwa wafer kuchokera ku wafer kupita ku wafer

● Kuchuluka kwa kutentha pang'ono

● Zotsatira zochepa za m'mphepete panthawi ya okosijeni kapena kufalikira

Mu kupanga zinthu zapamwamba za semiconductor, komwe mawindo opangira zinthu amapitilira kuchepa, kusintha kumeneku kumakhudza mwachindunji kufanana kwa filimu ndi magwiridwe antchito amagetsi.

Maboti a SiC wafer amaperekanso kulimba kwa makina kwambiri poyerekeza ndi mapangidwe a quartz. Izi zimakhala zofunika kwambiri mu makina owuma ozungulira omwe amakonza magulu akuluakulu a ma wafer a 300 mm, komwe kutalika kwa boti ndi katundu wamakina zimatha kukhala zofunika kwambiri.

Kuchepa kwa kusintha kwa kutentha kumathandiza kusunga mtunda wolondola wa wafer ndi kayendedwe ka mpweya kokhazikika panthawi yonse ya kutentha.

Zinthu Zofunika Kwambiri za Maboti a Silicon Carbide Ceramic Wafer

Kutchuka kwakukulu kwa maboti a silicon carbide wafer kumachitika makamaka chifukwa cha kuphatikiza kwapadera kwa kutentha, makina, ndi mankhwala a silicon carbide ceramics.

Makhalidwe Ofunika Kwambiri a Thupi

Zinthu zimenezi zimathandiza kuti mapangidwe a ceramic a silicon carbide akhalebe olimba panthawi ya kutentha kwa nthawi yayitali, pomwe zinthu zachikhalidwe za quartz zimatha kuyamba kufewa kapena kusokonekera.

Kulimba kwambiri kwa silicon carbide kumachepetsanso kugwedezeka ndi kusakhazikika kwa makina panthawi yokweza ndi kutsitsa ma wafer mu uvuni.

Mitundu Yaikulu ya Zinthu Zopangira Maboti a Silicon Carbide Wafer

Maboti amakono a silicon carbide wafer amapangidwa pogwiritsa ntchito ukadaulo wosiyanasiyana wa zinthu, uliwonse wokonzedwa bwino kuti ugwirizane ndi malo enaake ogwirira ntchito komanso zofunikira pamtengo wotsika.

Silikoni carbide yobwezeretsedwanso (RSiC) imagwiritsidwa ntchito kwambiri mu uvuni wotentha kwambiri chifukwa cha kuyera kwake bwino komanso kukhazikika kwa kutentha. Njira yopangira RSiC sifunikira kuwonjezera zinthu zambiri zothandizira kuyatsa, zomwe zimathandiza kuchepetsa chiopsezo cha kuipitsidwa m'malo okhala ndi semiconductor.

Silikoni carbide yopangidwa ndi Reaction-sintered (RBSC kapena RBSiC) imapereka mphamvu zambiri zamakanika komanso ndalama zochepa zopangira. Komabe, silikoni yotsala yopanda kanthu m'nyumbamo ingachepetse kukana kwake dzimbiri m'malo ena owononga.

Pa ntchito zapamwamba za semiconductor, machitidwe a graphite okhala ndi CVD silicon carbide akuchulukirachulukira. M'mapangidwe awa, gawo la graphite limapereka chithandizo chopepuka cha makina, pomwe chophimba cha silicon carbide chokhala ndi purity chemical vapor deposition (CVD) chimapanga mawonekedwe a process.

Zophimba za CVD silicon carbide zimakhala ndi tinthu tating'onoting'ono tochepa kwambiri komanso kuyera kwapadera, zomwe zimapangitsa kuti zikhale zokongola kwambiri popanga zinthu zamakono komanso zamagetsi. Komabe, kulimba kwa zophimba ndi ma coefficients osagwirizana a kutentha kuyenera kulamulidwa mosamala kuti zisasweke kapena kusweka panthawi yobwerezabwereza kutentha.

Mavuto Omwe Amachitika Kawirikawiri

Ngakhale kuti maboti a silicon carbide ceramic wafer ali ndi ubwino wochita bwino, akukumanabe ndi mavuto ambiri aukadaulo m'malo opanga zinthu za semiconductor.

Kuipitsidwa ndi tinthu tating'onoting'ono kukupitirira kukhala vuto lalikulu kwambiri. Pamene kukula kwa zipangizo kumachepa, kutayika kwa zokolola zomwe zimayambitsidwa ndi tinthu tating'onoting'ono kukukulirakulira. Ngakhale zinyalala zazikulu zomwe zimachitika chifukwa cha ming'alu ya microscopic, disamination ya coating, kapena kuwonongeka kwa pamwamba zingayambitse zolakwika zoopsa pa ma wafers apamwamba.

Kusweka kwa kutentha ndi vuto lina lomwe lakhalapo kwa nthawi yayitali. Ngakhale kuti silicon carbide ili ndi kukhazikika kwa kutentha, imakhalabe yolimba ngati ceramic. Kutentha mwachangu kapena kutentha komwe sikufanana kungayambitse ming'alu pamakona a kapangidwe kake, mipata ya wafer, kapena malo olumikizirana ndi beam.

Kusinthasintha kwa kutentha kwa nthawi yayitali kungayambitsenso kusintha pang'onopang'ono kapena kukwera pang'onopang'ono, makamaka m'maboti akuluakulu a wafer omwe amagwiritsidwa ntchito mumakina owuma. Ngakhale kusintha pang'ono kwa geometry kumatha kusintha malo a wafer ndi kufanana kwa kayendedwe ka mpweya, motero kumakhudza kuwongolera makulidwe a oxide ndi kusinthasintha kwa magawidwe a dopant.

Kuchepa kwa CVD coating ndi vuto lina lofunika kwambiri pa kudalirika kwa makina a SiC ophimbidwa. Chifukwa chakuti graphite substrate ndi SiC coating zimakhala ndi machitidwe osiyanasiyana okulitsa kutentha, kusinthasintha kwa kutentha kwambiri mobwerezabwereza pamapeto pake kumabweretsa kupsinjika komwe kumasonkhana pamalo olumikizirana.

Mapeto

Mu makina oyeretsera ndi oxidation furnace, maboti a silicon carbide ceramic wafer amachita gawo lofunikira pakusunga bata la kutentha, kuwongolera kuipitsidwa, ndikuwonetsetsa kuti njira zikugwirizana pansi pa mikhalidwe yovuta kwambiri yogwirira ntchito. Kuchuluka kwa kutentha kwawo, kulimba kwa makina abwino kwambiri, kukana kutentha kwambiri, komanso kukhazikika kwa mankhwala zimapangitsa kuti akhale ofunikira kwambiri popanga ma semiconductor apamwamba.

Pamene ukadaulo wa njira za semiconductor ukupitirirabe kusintha, kukhala kovuta kwambiri, ndipo zofunikira pakulamulira zolakwika zikukulirakulira, kufunika kwa makina apamwamba onyamula ma wafer a ceramic kudzapitirirabe kukwera. M'zinthu zamakono, mavuto ambiri okhudzana ndi kuwongolera tinthu tating'onoting'ono, kufanana kwa kutentha, ndi kudalirika kumatha kutsatiridwa ndi mgwirizano pakati pa khalidwe la kutentha kwa kayendedwe ka kutentha, kukhazikika kwa zinthu, ndi kapangidwe ka makina onyamula ma wafer.

Chifukwa chake, maboti a silicon carbide ceramic wafer akusintha mwachangu kuchoka pa zida zothandizira uvuni kukhala zinthu zofunika kwambiri popanga ma semiconductor a m'badwo wotsatira.