Sezvo maitiro ekugadzira ma semiconductor achiramba achichinja achienda kuhukuru hwakakura hwewafer, bhajeti rekupisa rakasimba, uye kushivirira kwakaderera kwezvikanganiso, zvinhu zvinoshandiswa mukati memidziyo yekupisa kwakanyanya zvave zvakanyanya kukosha. Pakati pezvinhu izvi zvakakosha zvinoshandiswa uye zvikamu zvemaumbirwo, mabhoti e ceramic wafer e silicon carbide (SiC) ave imwe yematekinoroji akakosha muhurongwa hwemazuva ano hwekupararira uye oxidation.
Munzvimbo dzepamusoro dzekugadzira semiconductor, zvinokanganisa zvakananga kufanana kwekupisa, kugadzirwa kwezvikamu, kugoverwa kwekumanikidzwa kwewafer, kugadzikana kwemaitiro, uye pakupedzisira, kugona kwemidziyo.
Kunyanya mukugadzira mawafer e300mm, kugadzira ma semiconductor ane simba, uye kugadzira ma semiconductor echizvarwa chechitatu, mawafer e silicon carbide ceramic ari kukurumidza kutsiva masisitimu ekare ekutakura akavakirwa pa quartz nekuda kwehunhu hwawo hwepamusoro hwekupisa uye hwemakanika.
Chii chinonzi silicon carbide ceramic wafer boat?
Chikepe chewafer chesilicon carbide ceramic imhando yewafer inotakurika tembiricha yepamusoro yakagadzirwa nesimbi dzesilicon carbide dzemhando yepamusoro. Chinangwa chayo chikuru ndechekutsigira nekutakura mawafer akawanda e semiconductor zvakachengeteka kuburikidza nesystem dzechoto dzakatwasuka kana dzakatwasuka panguva yekurapa kupisa.
Chikepe chewafer chinowanzo shandiswa chine nzvimbo dzakawanda dzewafer dzakagadzirwa nemazvo dzakagadzirirwa kuchengetedza nzvimbo dzakanyatsorongeka dzewafer panguva yekugadzirisa. Zvichienderana nekushandiswa kwacho, chimiro chacho chinogonawo kusanganisira matanda ekutsigira, maoko e cantilever, mageometri akagadziriswa nemhepo, uye zvikamu zvekusimbisa zvakareruka zvakagadzirirwa kuderedza kupisa.
Muma "semiconductor furnace systems", ma "wafer boats" anoshanda zvakanaka senzira yekubatanidza ma "wafers" nenzvimbo yekupisa. Sezvo saizi yemidziyo ichiramba ichiderera kuenda kuma "node" epamusoro-soro, kunyangwe kusagadzikana kudiki mukati mechimiro che "wafer" kunogona kukanganisa kudzokorora kwemaitiro uye mashandiro ezvikanganiso.
Ichi ndicho chimwe chezvikonzero nei vagadziri vemafurnace epamusoro vari kuwedzera kushandisa zvikamu zve ceramic zve silicon carbide zvakachena zvakanyanya pachinzvimbo chemasisitimu e quartz akasanganiswa echinyakare.
BasasmuSisitimu yeKupararira uye Oxidation Furnace
Kupararira nekuoxidation kuchiri pakati pezvinhu zvakakosha pakugadzira semiconductor. Maitiro aya anoshandiswa zvakanyanya pakuita kuti dopant activation, kukura kwethermal oxide, annealing, drive-in diffusion, uye dielectric formation.
Tembiricha dzekushanda dzinotangira pa900°C kusvika 1200°C zvichienderana nemakemikari ekushanda uye zvinodiwa nemudziyo. Mune mamwe mashandisirwo emagetsi epamusoro kana SiC device, ma thermal cycles anogona kudarika 1300°C.
Mumamiriro ezvinhu aya, chikepe chewafer chinofanira kuchengetedza kugadzikana kwehukuru panguva yekupisa kwenguva refu uku chichideredza kusvibiswa uye chichichengetedza nzvimbo yakafanana yewafer.
Magwa echinyakare equartz wafer ave achishandiswa kwenguva refu mumidziyo yekupararira nekuda kwekuchena kwawo kwakanyanya uye mutengo wakaderera. Zvisinei, zvinhu zvequartz zvinoratidza kupisa kwakaderera - kazhinji kunosvika 1.4 W/m·K patembiricha yemumba.
Kana tichienzanisa, silicon carbide ceramics dzinowanzo ratidza kukosha kwekupisa kubva pa120 ~ 200 W/m·K zvichienderana nerudzi uye chimiro che microstructure.
Musiyano uyu unoshamisa unovandudza zvikuru kufanana kwetembiricha mukati memutoro wechoto.
Kupisa kwakanyanya kunogonesa:
● Kudziyisa kwakafanana kwewafer
● Kuderera kwekupisa
● Kugadzikana kwakagadziridzwa pakati pewafer newafer
● Kuunganidzwa kwekupisa kushoma
● Kuderedzwa kwemhedzisiro yemucheto panguva yekuoxidation kana kupararira
Mukugadzirwa kwema semiconductor epamusoro, uko mahwindo ekugadzirisa anoramba achiwedzera kuderera, kuvandudzwa uku kunokanganisa zvakananga kufanana kwemafirimu uye kuenderana kwekushanda kwemagetsi.
Mabhoti eSiC wafer anopawo kuomarara kwakanyanya kwemuchina kana tichienzanisa nemagadzirirwo equartz. Izvi zvinonyanya kukosha mukugadzira ma "vertical furnace systems" e300 mm wafers, uko kureba kwebhoti uye mutoro wemuchina zvinogona kuve zvakakosha.
Kuderedzwa kwekushanduka kwechinhu kunobatsira kuchengetedza nzvimbo chaiyo yewafer uye maitiro akagadzikana ekuyerera kwegasi mukati menguva yese yekupisa.
Hunhu Hunokosha hweSilicon Carbide Ceramic Wafer Boats
Kukurumbira kuri kuwedzera kwezvikepe zvesilicon carbide wafer kunonyanya kukonzerwa nekusanganiswa kwakasiyana kwehunhu hwekupisa, hwemakanika, uye hwemakemikari hwesilicon carbide ceramics.
Hunhu Hunokosha hweMuviri
| Pfuma | Maitiro Akajairika eSiC |
| Kupisa kwakanyanya kushanda | >1400°C munzvimbo dzinokonzera oxygen |
| Kufambisa kwekupisa | ~120–200 W/m·K |
| Kuwanda kwevanhu | ~3.0–3.2 g/cm³ |
| Kuomarara kweMohs | ~9.2 |
| Modulus yakasununguka | ~410 GPa |
| Kudzivirira kupisa kwekupisa | Zvakanakisa |
| Kuramba kwemakemikari | Kuramba kwakanyanya kune acids, alkalis, uye magasi e process |
| Kuomarara kwemuchina | Yakakwira zvikuru |
| Katsika kekugadzira tunhu tudiki | Yakaderera ine kupedzisa kwepamusoro kwakagadziridzwa |
Hunhu uhwu hunogonesa zvimiro zve silicon carbide ceramic kuchengetedza kugadzikana kwehukuru pasi pekupisa kwenguva refu, nepo zvikamu zve quartz zvechinyakare zvinogona kutanga kupfava kana kuora.
Kuomarara kwakanyanya kwesilicon carbide kunoderedzawo kudedera uye kusagadzikana kwemuchina panguva yekurodha nekuburitsa mawafer muchoto.
Mhando Dzakakura dzeZvinhu zveSilicon Carbide Wafer Boats
Mabhoti emazuva ano esilicon carbide wafer anogadzirwa achishandisa matekinoroji akasiyana-siyana, rimwe nerimwe rakagadziriswa kuti rienderane nemamiriro ezvinhu chaiwo ekushanda uye zvinodiwa pakushandisa mari zvakanaka.
Recrystallized silicon carbide (RSiC) inoshandiswa zvakanyanya mukushandiswa kwechoto chinopisa zvakanyanya nekuda kwekuchena kwayo kwakanyanya uye kugadzikana kwekupisa. Maitiro ekugadzira RSiC haadi kuwedzerwa huwandu hwakawanda hwezvinhu zvinobatsira pakupisa, izvo zvinobatsira kuderedza njodzi yekusvibiswa munzvimbo dzine semiconductor.
Reaction-sintered silicon carbide (RBSC kana RBSiC) inopa simba rakawanda remakanika uye mitengo yakaderera yekugadzira. Zvisinei, silicon isina chinhu yasara muchimiro inogona kuderedza kuramba kwayo ngura mune dzimwe nzvimbo dzinoita ngura.
Pakushandisa ma semiconductor epamusoro, masisitimu e graphite ane CVD silicon carbide-coated ari kuwedzera kuwanda. Mumaumbirwo aya, graphite substrate inopa rutsigiro rwemakanika rwakareruka, nepo high-purity chemical vapor deposition (CVD) silicon carbide coating ichiumba process interface.
Machira eCVD silicon carbide ane mwero wakaderera wekugadzira zvidimbu uye kuchena kwakanyanya, zvichiita kuti akwezve zvikuru pakugadzirwa kwe logic uye power semiconductor. Zvisinei, kusimba kwemavara uye ma coefficients asina kuenzana ekuwedzera kwekupisa zvinofanirwa kudzorwa nokungwarira kudzivirira kutsemuka kana kupatsanuka panguva yekudzokorora thermal cycling.
Matambudziko Akajairika Emaitiro
Pasinei nemabhenefiti ekushanda kwezvikepe zve silicon carbide ceramic wafer, zvichiri kusangana nematambudziko akawanda einjiniya munzvimbo dzekugadzira zvinhu zve semiconductor.
Kusvibiswa kwezvimedu kuchiri chimwe chezvinhu zvakakosha zvikuru. Sezvo saizi yemidziyo ichiderera, kurasikirwa kwegoho kunokonzerwa nezvimedu kuri kuramba kuchikura. Kunyangwe marara emhando ye submicron anokonzerwa nekutsemuka kwemicroscope, kucheka kwecoating, kana kuora kwenzvimbo kunogona kukonzera zvikanganiso zvinouraya pamawafers epamusoro.
Kupwanya kushushikana kwekupisa ndeimwe dambudziko renguva refu. Kunyangwe silicon carbide iine kugadzikana kwakanaka kwekupisa, inoramba iri ceramic strainer isina kusimba. Kupisa nekukurumidza kana kusafanana kwekupisa kwenzvimbo kunogona kukonzera kutsemuka pamakona echivakwa, mawafer grooves, kana matanda ekusangana.
Kugara kwenguva refu kwekupisa kunogonawo kukonzera kuchinja zvishoma nezvishoma kana kukambaira, kunyanya muzvikepe zvikuru zvewafer zvinoshandiswa mumasystem e vertical furnace. Kunyangwe shanduko diki dzejometri dzinogona kuchinja nzvimbo yewafer uye kufanana kwegasi, nokudaro zvichikanganisa kudzora kwe oxide thickness uye dopant distribution consistency.
Kubviswa kweCVD coating delitatio imwe nyaya yakakosha yekuvimbika muma coated SiC systems. Nekuti graphite substrate ne SiC coating zvinoratidza maitiro akasiyana ekuwedzera kupisa, kudzokorora kupisa kwakanyanya kunozopedzisira kwakonzera kuunganidzwa kwestress panzvimbo yacho.
Mhedziso
Muma semiconductor diffusion uye oxidation furnace systems, silicon carbide ceramic wafer boats dzinoita basa rakakosha mukuchengetedza kugadzikana kwekupisa, kudzora kusvibiswa, uye kuona kuti maitiro akafanana mumamiriro ezvinhu akaoma zvikuru ekushanda. Kufambisa kwavo kupisa kwakanyanya, kuomarara kwemakanika kwakanaka, kuramba kupisa kwakanyanya, uye kugadzikana kwemakemikari zvinoita kuti zvive zvakakosha mukugadzira semiconductor yepamusoro.
Sezvo matekinoroji ekugadzirisa ma semiconductor achiramba achichinja, achiwedzera kuoma, uye zvinodiwa zvekudzora zvikanganiso zvichiramba zvichiwedzera kuoma, kukosha kwemasisitimu epamusoro ekutakura mawafer eceramic kucharamba kuchikwira. Mumazuva ano, matambudziko mazhinji ane chekuita nekudzora zvidimbu, kufanana kwekupisa, uye kuvimbika zvinogona kuteverwa kumashure kune hukama huripo pakati pemaitiro ekupisa, kugadzikana kwezvinhu, uye dhizaini yesisitimu yekutakura mawafer.
Nekuda kweizvozvo, mabhoti esimbi esimbi esimbi esimbi esimbi esimbi esimbi esimbi esimbi esimbi esimbi ari kuchinja nekukurumidza kubva pakugadzira zvinhu zvesimbi zvesimbi zvesimbi zvesimbi zvesimbi zvesimbi zvechizvarwa chinotevera.
Nguva yekutumira: Chivabvu-28-2026