Vim li cas SiC Ceramic Wafer Boats yog qhov tseem ceeb rau Semiconductor Diffusion thiab Oxidation Furnaces

Raws li cov txheej txheem tsim khoom semiconductor txuas ntxiv mus rau qhov loj dua ntawm cov wafer, cov peev nyiaj thermal nruj dua, thiab qhov tsis zoo qis dua, cov ntaub ntawv siv hauv cov khoom siv kub siab tau dhau los ua qhov tseem ceeb. Ntawm cov khoom siv tseem ceeb thiab cov khoom siv qauv, silicon carbide (SiC) ceramic wafer nkoj tau tshwm sim ua ib qho ntawm cov thev naus laus zis tseem ceeb tshaj plaws hauv cov tshuab diffusion thiab oxidation niaj hnub.

Hauv cov chaw tsim khoom semiconductor siab heev, lawv cuam tshuam ncaj qha rau kev sib xws ntawm thermal, kev tsim cov khoom me me, kev faib tawm ntawm wafer, kev ruaj khov ntawm cov txheej txheem, thiab thaum kawg, cov khoom siv tawm.

Tshwj xeeb tshaj yog nyob rau hauv 300mm wafer manufacturing, fais fab semiconductor manufacturing, thiab peb-tiam semiconductor ntau lawm, silicon carbide ceramic wafer nkoj sai sai hloov cov ib txwm quartz-raws li carrier systems vim lawv cov thermal thiab mechanical zog zoo dua.

Lub nkoj silicon carbide ceramic wafer yog dab tsi?

Lub nkoj silicon carbide ceramic wafer yog lub qauv nqa wafer kub siab ua los ntawm cov khoom siv ceramic silicon carbide siab heev. Nws lub hom phiaj tseem ceeb yog los txhawb nqa thiab thauj ntau lub semiconductor wafers kom muaj kev nyab xeeb los ntawm cov kab ke cua sov ntsug lossis kab rov tav thaum lub sijhawm ua haujlwm kho cua sov.

Ib lub nkoj wafer feem ntau muaj ntau qhov chaw wafer uas tau tsim los kom tswj tau qhov sib nrug ntawm wafer thaum lub sijhawm ua tiav. Nyob ntawm daim ntawv thov, cov qauv kuj tseem yuav suav nrog cov nqaj txhawb nqa, caj npab cantilever, cov qauv geometries uas ua rau huab cua zoo, thiab cov seem txhawb nqa uas sib dua uas tsim los txo qhov hnyav ntawm thermal.

Hauv cov tshuab hluav taws xob semiconductor, cov nkoj wafer ua haujlwm zoo li qhov sib txuas ntawm cov wafer thiab qhov chaw ua haujlwm thermal. Raws li qhov loj ntawm cov khoom siv txuas ntxiv mus rau cov thev naus laus zis siab heev, txawm tias qhov tsis ruaj khov me me hauv cov qauv txhawb nqa wafer tuaj yeem cuam tshuam rau cov txheej txheem rov ua dua thiab kev ua haujlwm tsis zoo.

Qhov no yog ib qho ntawm cov laj thawj vim li cas cov chaw tsim khoom siv cua sov siab heev tau siv cov khoom siv silicon carbide ceramic uas muaj cov khoom siv siab dua es tsis txhob siv cov tshuab fused quartz ib txwm muaj.

Lub Luag Haujlwmsnyob rau hauv Diffusion thiab Oxidation Rauv Systems

Kev sib kis thiab kev oxidation tseem yog cov txheej txheem thermal tseem ceeb tshaj plaws hauv kev tsim khoom semiconductor. Cov txheej txheem no siv dav rau kev ua kom dopant, kev loj hlob ntawm thermal oxide, kev annealing, kev sib kis drive-in, thiab kev tsim dielectric.

Qhov kub ua haujlwm ib txwm muaj li ntawm 900 ° C txog 1200 ° C nyob ntawm cov txheej txheem tshuaj lom neeg thiab cov khoom siv xav tau. Hauv qee qhov kev siv hluav taws xob semiconductor lossis SiC, cov voj voog thermal yuav tshaj 1300 ° C.

Nyob rau hauv cov xwm txheej no, lub nkoj wafer yuav tsum tswj hwm qhov ruaj khov ntawm qhov ntev ntawm lub voj voog thermal ntev thaum txo qis kev ua qias tuaj thiab khaws cia qhov sib nrug ntawm wafer.

Cov nkoj quartz wafer ib txwm muaj tau siv ntev hauv cov cub tawg vim lawv qhov huv siab thiab tus nqi qis. Txawm li cas los xij, cov ntaub ntawv quartz qhia txog kev ua kom sov thermal qis - feem ntau nyob ib puag ncig 1.4 W / m · K ntawm chav tsev kub.

Piv txwv li, cov khoom siv silicon carbide feem ntau muaj cov nqi thermal conductivity txij li ntawm 120 ~ 200 W / m · K nyob ntawm qib thiab microstructure.

Qhov sib txawv loj no ua rau qhov kub thiab txias sib npaug zoo dua thoob plaws hauv lub cub tawg.

Kev ua kom muaj cua sov siab dua ua rau:

● Kev ua kom sov wafer sib xws dua

● Txo cov cua sov hloov pauv

● Kev sib xws ntawm wafer-rau-wafer zoo dua

● Kev ntxhov siab thermal qis dua

● Txo cov teebmeem ntawm ntug thaum lub sijhawm oxidation lossis diffusion

Hauv kev tsim khoom semiconductor siab heev, qhov twg cov txheej txheem txuas ntxiv nqaim zuj zus, cov kev txhim kho no cuam tshuam ncaj qha rau qhov sib xws ntawm zaj duab xis thiab kev ua haujlwm hluav taws xob.

Cov nkoj SiC wafer kuj muab kev ruaj khov kho dua piv rau cov qauv quartz. Qhov no ua rau muaj kev tseem ceeb ntxiv rau hauv cov tshuab cua sov ntsug ua cov khoom loj ntawm 300 hli wafers, qhov twg qhov ntev ntawm lub nkoj thiab kev thauj khoom tuaj yeem ua rau muaj kev cuam tshuam loj.

Kev txo qis kev hloov pauv pab khaws cia qhov sib nrug ntawm wafer thiab kev coj tus cwj pwm roj ruaj khov thoob plaws hauv lub voj voog thermal.

Cov Khoom Siv Lub Cev Tseem Ceeb ntawm Silicon Carbide Ceramic Wafer Boats

Qhov nrov zuj zus ntawm cov nkoj wafer silicon carbide feem ntau yog vim muaj kev sib xyaw ua ke ntawm cov khoom siv thermal, mechanical, thiab chemical ntawm silicon carbide ceramics.

Cov Yam Ntxwv Tseem Ceeb ntawm Lub Cev

Cov khoom no ua rau cov qauv ceramic silicon carbide kom tswj tau qhov ruaj khov hauv qab lub sijhawm ntev thermal cycling, thaum cov khoom siv quartz ib txwm muaj peev xwm pib mos lossis deform.

Qhov siab tawv ntawm silicon carbide kuj txo qhov kev co thiab kev tsis ruaj khov thaum lub sijhawm thauj khoom thiab tshem tawm cov wafers hauv lub cub tawg.

Cov Khoom Siv Tseem Ceeb rau Silicon Carbide Wafer Boats

Cov nkoj silicon carbide wafer niaj hnub no yog tsim los ntawm kev siv ntau yam khoom siv sib txawv, txhua tus tau tsim kho kom zoo rau cov txheej txheem ib puag ncig thiab cov kev xav tau nyiaj txiag.

Recrystallized silicon carbide (RSiC) yog siv dav hauv cov ntawv thov cua sov kub vim nws qhov huv si zoo heev thiab thermal stability. Cov txheej txheem tsim khoom rau RSiC tsis tas yuav ntxiv ntau cov khoom siv sintering, uas pab txo qhov kev pheej hmoo ntawm kev ua qias tuaj hauv cov chaw semiconductor.

Cov silicon carbide uas raug sintered (RBSC lossis RBSiC) muaj zog dua thiab cov nqi tsim khoom qis dua. Txawm li cas los xij, cov silicon dawb uas seem hauv cov qauv yuav txo nws txoj kev tiv thaiv xeb hauv qee qhov chaw ua haujlwm corrosive.

Rau cov ntawv thov semiconductor siab heev, CVD silicon carbide-coated graphite systems tau dhau los ua ntau dua. Hauv cov qauv no, cov graphite substrate muab kev txhawb nqa lub cev sib dua, thaum cov tshuaj lom neeg vapor deposition (CVD) silicon carbide txheej tsim cov txheej txheem interface.

Cov txheej txheej silicon carbide CVD muaj cov nqi tsim cov khoom me me thiab cov khoom ntshiab tshwj xeeb, ua rau lawv zoo nkauj heev rau kev tsim cov logic thiab lub zog semiconductor siab heev. Txawm li cas los xij, kev ua kom zoo ntawm cov txheej txheem thiab cov coefficients tsis sib xws ntawm kev nthuav dav thermal yuav tsum tau tswj hwm kom zoo kom tiv thaiv kev tawg lossis delamination thaum lub sijhawm ua haujlwm thermal rov ua dua.

Cov Teeb Meem Feem Ntau ntawm Cov Txheej Txheem

Txawm hais tias muaj qhov zoo ntawm kev ua tau zoo ntawm cov nkoj silicon carbide ceramic wafer, lawv tseem ntsib ntau yam teeb meem engineering hauv cov chaw tsim khoom semiconductor tiag tiag.

Kev ua qias tuaj ntawm cov khoom me me tseem yog ib qho teeb meem tseem ceeb tshaj plaws. Thaum qhov loj me ntawm cov khoom siv me me zuj zus, kev poob qis ntawm cov khoom me me ua rau muaj kev puas tsuaj ntau zuj zus. Txawm tias cov khib nyiab me me uas tshwm sim los ntawm cov kab nrib pleb me me, cov txheej txheem delamination, lossis kev puas tsuaj ntawm qhov chaw tuaj yeem ua rau muaj qhov tsis zoo ntawm cov wafers siab heev.

Kev tawg ntawm kev ntxhov siab los ntawm cua sov yog lwm qhov kev sib tw uas tau muaj ntev los lawm. Txawm hais tias silicon carbide muaj kev ruaj khov zoo heev, nws tseem yog cov khoom siv ceramic uas tawg yooj yim. Kev ua kom sov sai lossis qhov kub tsis sib xws hauv zos tuaj yeem ua rau muaj kev tawg ntawm cov ces kaum ntawm cov qauv, cov wafer grooves, lossis cov kev sib tshuam ntawm lub beam.

Kev hloov pauv kub mus sij hawm ntev kuj tseem tuaj yeem ua rau maj mam hloov pauv lossis nkag mus, tshwj xeeb tshaj yog nyob rau hauv cov nkoj wafer loj uas siv rau hauv cov tshuab cua sov ntsug. Txawm tias qhov kev hloov pauv me me ntawm geometric tuaj yeem hloov pauv qhov sib nrug ntawm wafer thiab kev sib npaug ntawm cov roj ntws, yog li cuam tshuam rau kev tswj cov tuab ntawm oxide thiab kev faib tawm ntawm cov tshuaj dopant.

Kev tawg ntawm CVD txheej yog lwm qhov teeb meem tseem ceeb hauv kev ntseeg siab hauv cov txheej txheem SiC uas tau coated. Vim tias cov graphite substrate thiab SiC txheej qhia txog cov cwj pwm sib txawv ntawm kev nthuav dav thermal, kev rov ua dua qhov kub siab dua thaum kawg ua rau muaj kev ntxhov siab ntawm qhov interface.

Xaus lus

Hauv cov tshuab hluav taws xob semiconductor diffusion thiab oxidation furnace, silicon carbide ceramic wafer boats ua lub luag haujlwm tseem ceeb hauv kev tswj hwm thermal stability, tswj kev ua qias tuaj, thiab xyuas kom meej tias cov txheej txheem sib xws hauv qab cov xwm txheej ua haujlwm hnyav heev. Lawv cov thermal conductivity siab, kev ua haujlwm zoo heev, kev tiv taus kub siab, thiab kev ruaj khov tshuaj ua rau lawv tsis tseem ceeb hauv kev tsim khoom semiconductor siab heev.

Raws li cov txheej txheem semiconductor txuas ntxiv mus hloov zuj zus, ua rau muaj kev nyuaj ntxiv, thiab cov kev cai tswj hwm qhov tsis zoo zuj zus tuaj, qhov tseem ceeb ntawm cov txheej txheem ceramic wafer carrier yuav tsuas yog txuas ntxiv nce siab. Hauv cov fabs niaj hnub no, ntau yam kev cov nyom ntsig txog kev tswj cov khoom me me, kev sib npaug ntawm thermal, thiab kev ntseeg tau thaum kawg tuaj yeem taug qab mus rau kev sib cuam tshuam ntawm kev coj tus cwj pwm thermal cycling, kev ruaj khov ntawm cov khoom siv, thiab kev tsim qauv ntawm lub kaw lus wafer carrier.

Yog li ntawd, cov nkoj wafer ceramic silicon carbide tau hloov pauv sai sai los ntawm cov khoom siv hluav taws xob pabcuam mus rau hauv cov khoom tseem ceeb rau kev tsim khoom semiconductor tiam tom ntej.