Ⅰ. Kupu Whakataki
Ngā uku Silicon Carbide Porous (SiC Porous)he rauemi uku matatau e whakakotahi ana i ngā āhuatanga tino pai o te silicon carbide me te hanganga pūwero kua ata hangaia. He rerekē ki ngā uku SiC matotoru, ka whakauruhia e te SiC pūwero ngā pūwero e hono ana e whakarato ana i ngā mahi tāpiri, tae atu ki te uruhanga whakahaere, te hoahoa mama, te whakamarumaru wera, me te kaha kawe wai kua whakarei ake.
Nā te pai o te pumau o te wera, te ātete matū, me te pono o te miihini, kua piki haere te hiranga o ngā uku SiC porous i roto i ngā ahumahi pāmahana teitei, inā koa te hanga semiconductor, e hiahiatia ana he parakore teitei, he ātete ki te waikura, me te pumau mahi mō te wā roa i roto i ngā taiao tukanga.
Ⅱ. Ngā Āhuatanga Rauemi o ngā Uku Miraka Silicon Carbide
1. Te Pūmautanga o te Pāmahana Teitei
E mōhiotia ana te karawiti silicon mō tōna mahi tino pai i raro i ngā pāmahana tino wera nā tōna hononga honohono Si-C kaha. Ka mau tonu te hanganga o te SiC porous i roto i ngā taiao pāmahana teitei, ā, he pai mō te tukatuka wera o te haurua-ira, ngā pūnaha epitaxy, me ngā wāhanga oumu.
Ko te iti o te tauwehenga whānui wera me te ātete pai ki ngā ru wera ka āwhina i te whakaiti i te rerekētanga me te whakapai ake i te pumau o te tukanga.
2. Te Ātete Matū me te Plasma Pai Rawa
Ko te hanga i ngā hau whakawhiti hiko e uru ana ki ngā taiao pārūrū me ngā taiao parāuma, tae atu ki ngā hau hauwaiora, te parāuma wheori, me ngā āhuarangi tauhohe pāmahana teitei.
Ko ngā mea e tukuna ana e ngā uku SiC porous:
- He ātete pai rawa atu mō te waikura
- Te pumau matū teitei
- Te ātete kaha ki te horo o te plasma
- Ngā āhuatanga poke iti
Mā ēnei painga ka whakaiti i te whakaputanga matūriki me te whakaroa i te roanga o te ora o ngā wāhanga i roto i ngā taputapu haurua-waenga.
3. Te Pūngao me te Āheinga Hau e Whakahaeretia ana
Ko te painga matua o te SiC porous ko tōna hanganga pore ka taea te whakarerekē. Mā te whakahaere i te rahi o te pore, te tohatoha, me te hononga, ka taea e ngā kaihanga te arotau i te taurite i waenga i te kaha miihini me te uruhanga.
Mā tēnei āhuatanga ahurei ka taea e te SiC porous te mahi hei:
- Ngā rauemi horapa hau
- Ngā hanganga tātari
- Ngā wāhanga whakahaere wera
Ⅲ. Ngā Hangarau Tukatuka o ngā Ukume Silicon Carbide Porous
Ko te mahi a ngā uku SiC porous e whakawhirinaki ana ki ngā tikanga hanga me te hoahoa hanganga moroiti.
Te Whakaiti Warowaihā
Mā tēnei tukanga tuku iho ka puta he SiC porous mā roto i ngā tauhohenga pāmahana teitei i waenga i ngā rauemi kei roto he silicon me ngā pūtake waro. Mā tēnei ka taea te hanga i ngā anga SiC tino parakore me te pumau wera tino pai.
Te Whakatōtō Āhua Wai
Ka whakamahia e te sintering wai-wāhanga ngā tāpiringa hei whakapai ake i te hononga matūriki me te whakakīkī. Mā te whakarerekē i te pāmahana sintering me te matū tāpiringa, ka taea e ngā kaihanga te whakatutuki i te kaha miihini me te tohatoha o ngā pore.
Te Urunga o te Kohu Matū (CVI)
Ka whakauruhia e te CVI ngā matū hau ki roto i ngā hanganga pūwero, ka putunga te SiC ki ngā mata o roto. Ka whakapai ake tēnei tikanga i te kaha o te hanganga, te parakore, me te roa o te pāmahana.
Ngā Tikanga Whakahuka me te Tauira
Mā ngā hangarau pahuka me ngā hangarau e hangai ana ki te tauira ka hangaia he hanganga pūwero whakarōpū mā te whakahaere i ngā kaihopu pūwero, i ngā tauira patunga tapu rānei. Ka whakaratohia e ēnei tikanga he urunga pai rawa atu me ngā hanganga pūwero kua whakaritea.
Ⅳ. Ngā Whakamahinga i roto i te Hanganga Ārahi-Hau
Nā te huinga ahurei o ngā āhuatanga wera, matū, me te hanganga, kei te piki haere te whakamahinga o ngā uku SiC porous i roto i ngā tukanga semiconductor.
Ngā Wāhanga Tohatoha Hau
I roto i ngā pūnaha CVD, PECVD, me te ALD, ka taea e te SiC porous te mahi hei kaiwhakarara hau me hei pereti tohatoha hei whakatutuki i te rere ōrite o te hau tukanga me te whakapai ake i te ōritetanga o te whakatakotoranga kiriata.
Ngā Taputapu Tukatuka Plasma
I roto i ngā pūnaha whakairo me te horoi plasma, ka tukuna e ngā wāhanga SiC porous te ātete pai rawa atu ki ngā taiao plasma waikura, ka whakaiti i te poke o ngā matūriki me te whakapai ake i te pono o ngā taputapu.
Ngā Pūnaha Epitaxy SiC me GaN
Mō te hanga haurua-ā-ira o te whakatupuranga tuatoru, ka whai wāhi te SiC porous ki te whakapai ake i te whakahaere wera me te pumau o te tukanga i roto i ngā taiao tipu epitaxial pāmahana teitei.
Ngā Wāhanga Whakahaere Wafer
Ngā pūwero SiC porousmengā tautoko angiangihe tino tika, he iti te poke, ā, he tino ātete ki ngā matū mō te tirotiro i te papa, te hanga i te kohatu, me te tukatuka wera.
Ⅴ. Whakamutunga
Ngā uku karāpire silicon porouste tohu i te whanaketanga oNgā rauemi SiCmai i ngā uku hanganga tuku iho ki ngā wāhanga haurua-ā-ira mahi. Mā roto i ngā hangarau tukatuka matatau me te whakahaere hanganga pūwero tika, ka tutuki i te SiC pūwero te taurite pai i waenga i te kaha, te uruhanga, te mahi wera, me te pumau matū.
I te haere tonu o te hanga haurua-ā-ira ki te ahu whakamua ki ngā pāmahana teitei ake me te whakahaere parahanga pakari ake, ka nui haere te mahi a ngā uku SiC porous i roto i teNgā pūnaha CVD, ngā taputapu tukatuka plasma, te whakahaere wafer, me ngā hangarau hanga semiconductor o te whakatupuranga e whai ake nei.
Wā tuku: Hurae-31-2026