He aha te poti karāpiti o te rā?

I roto i te umanga photovoltaic solar (PV) e tere whanake ana, he mea nui te tika me te auahatanga rauemi hei whakarei ake i te pai o te hurihanga pūngao. Kei roto i ngā toa kāore i te rongonuihia i roto i tēnei tukanga ko te Solar Graphite Boat, he wāhanga motuhake i hangaia mō te hanga semiconductor pāmahana teitei. I whakawhanakehia e VET Energy, he kaihanga matua o ngā rauemi matatau, he mahi nui tā ēnei poti graphite ki te whakaputa pūtau solar mahi teitei. Me tūhuratia ā rātou tono, ā rātou āhuatanga ā-tinana, me te take he mea nui rātou i roto i te hangarau solar hou.

Waka Karāhe PECVD mō te papa rā

He aha te poti karāpiti o te rā?

 

He hanganga kawe te Waka Karāhe Rā e whakamahia ana i roto i te tukanga Plasma Enhanced Chemical Vapor Deposition (PECVD), he taahiraa matua i roto i te hanga pūtau rā. Ka pupuri haumaru i ngā anga silicon i te wā e whakatakotoria ana ngā kiriata angiangi, pērā i ngā paninga ārai-whakaata me ngā paparanga passivation, he mea nui mō te whakanui ake i te mimiti mārama me te whakaiti i te ngaronga pūngao i roto i ngā pūtau rā.

Pūngao o VETNgā poti karāhe PECVDkua hangaia kia tū atu ki ngā āhuatanga tino kino, me te whakarite kia ōrite me te pono. Ka pā tika te hoahoa ki te kounga o ngā kiriata kua whakatakotoria, ā, ka whakatau i te whai huatanga me te roa o te hua whakamutunga o te rā.

Ngā Whakamahinga Matua i roto i te Hanganga Pūnaha Solar PV

 

1. Te Whakatakotoranga Paninga Ārai-Whakaata
Ka whakawhirinaki ngā pūtau rā ki ngā paninga ārai-whakaata hei whakaiti i te whakaata mārama me te whakanui ake i te mimiti o te photon. Mā te poti graphite ka whakarite kia ōrite te pānga o ngā papa silicon ki ngā hau tauhohe i te wā o te PECVD, ka hangaia he paninga ōrite e arotau ana i te hopu mārama.

2. Te Whakakorenga o te Mata
Ka whakamahia ngā paparanga whakangāwari (hei tauira, te silicon nitride) hei whakaiti i ngā hapa o te mata me ngā ngaronga whakakotahitanga. Ka mau tonu te whakahaere pāmahana tika me te tohatoha hau i roto i ngā poti a VET Energy, he mea nui mō te hanga i ngā paparanga whakangāwari kore-hapa e whakarei ake ana i te roa o te ora o te pūtau.

3. Te Whakaputa Huarahi-Tiketike
I hangaia kia hototahi ki ngā pūnaha PECVD tauine ahumahi, ka tautokohia e ēnei poti te tukatuka tere o ngā wafer maha i te wā kotahi, ka whakanui ake i te pai o te hanga mō ngā raina whakaputa panera rā nui.

Waka Karāhe PECVD

Ngā Āhuatanga Tinana Pai Rawa o ngā Waka Karāpiti a VET Energy

 

Ko te mahi a te poti karāhe e whakawhirinaki ana ki ngā āhuatanga o ōna rauemi. Ka whakakotahi a VET Energy i te hangarau karāhe matatau me ngā paninga motuhake hei whakatutuki i:

1. Te Pūmautanga Wera Tino Pai
- He maha ngā wā ka neke atu i te 1,200°C te pāmahana whakahaere i roto i te PECVD. Ka mau tonu te hanganga pai o ngā poti, ā, ka whakaitihia te whānui o te wera, kia rite tonu ai te tūnga o te angaanga ahakoa i raro i ngā huringa whakamahana/whakamatao tere.
- Mā te kawe wera teitei (23 W/m·K) ka tohatohahia te wera kia ōrite, ka ārai i ngā wāhi wera ka kino pea ki ngā papa.

2. Ātete Matū
- Ātete ki ngā hau waikura pēnei i te NH₃ me te SiH₄, e kitea whānuitia ana i roto i ngā tukanga PECVD. Mā tēnei ka roa ake te ora o te poti, ka whakaiti hoki i ngā tūponotanga poke.

3. Hoahoa Rere Hau Arotau
- Mā ngā hoahoa motuhake ka taurite te rere o te hau puta noa i ngā papa katoa, he mea nui mō te matotoru me te hanganga o te kiriata. Ka hua ake tēnei i te pai ake o te mahi a te pūtau rā.

4. Te roa o te ora ratonga
- Mā ngā paninga CVD matatau (hei tauira, te silicon carbide, te tantalum carbide rānei) ka roa ake te mau. Hei tauira, ka tu atu ngā wāhanga kua pania ki te TaC a VET Energy i ngā pāmahana neke atu i te 2,500°C, ā, ka ātete hoki ki te waikura whakarewa rewa, ka toru ake te roa o te ora ki te whakataurite ki ngā rauemi tuku iho.

5. Ngā Āheinga Whakaritenga
- Ngā ine me ngā paninga kua whakaritea kia rite ki ngā taputapu motuhake (hei tauira, ngā rahi wafer mai i te 4-inihi ki te 12-inihi) me ngā whakaritenga tukanga, kia pai ai te whakaurunga ki ngā raina whakaputa o nāianei.

 

Waka karāhevs.poti kuata

 

He ātete pāmahana teitei tino pai

- Ka taea e ngā poti karāpiti te tu atu i ngā pāmahana tino tiketike o te 1,200°C~2,500°C, ā, he iti te tauwehenga whānui wera i roto i tēnei awhe (hei tauira, ko te tauwehenga whānui wera o ngā hua VET Energy he 4.8×10⁻⁶/°C), ka taea te pupuri i te pumau hanganga me te tika o te whakarārangi papa. He rerekē, ko te rohe pāmahana o runga o ngā poti quartz he 1,200°C te tikanga, ā, ki te whakamahia i te pāmahana teitei mō te wā roa, ka rerekē te āhua, ka pakaru rānei.

 

He pai te kawe wera me te ōritetanga

- He nui ake te kawe wera o te karāpeti (tata ki te 23 W/m·K) i tērā o te kuata (tata ki te 1.4 W/m·K), nō reira, i roto i ngā tukanga pēnei i te PECVD (plasma enhanced chemical vapor deposition), ka taea e ngā poti karāpeti te whakatutuki i te tohatoha wera ōrite ake, te whakaiti i ngā rerekētanga o te matotoru o te kiriata wafer, me te whakapai ake i te kounga o te paparanga passivation o ngā pūtau rā.

 

He ātete kaha ki te waikura matū

- He tino manawanui ngā poti karāpiti ki ngā hau waikura pērā i te NH₃ (haukini) me te SiH₄ (silane), ā, he pai mō ngā tukanga e hiahia ana kia maha ngā wā ka pāngia e ngā hau tauhohe (pērā i te paninga pūtau PERC ngongo). Hei tāpiri, mā te paninga i te mata ki te silicon carbide (SiC) te tantalum carbide rānei (TaC), ka taea te whakaroa ake i te roa o te mahi (hei tauira, ka taea e te paninga TaC a VET Energy te tu atu i ngā pāmahana teitei o te 2,500°C).

 

He oranga ōhanga me te roa

- He pakari ake ngā poti karāpiti, ā, ka taea te whakamahi anō i ngā rau wā i runga i ngā raina whakaputa ahumahi, ā, he iti ake te utu tiaki i ērā o ngā poti kuata. Hei tauira, ka taea e ngā poti karāpiti ritenga a VET Energy te tautoko i ngā hiahia whakaputa nui o ngā wafer 4~12-inihi mā te hoahoa kua arotauhia, ka whakaiti i te utu tukanga mō ia wafer.

Waka Quartz

He aha i whiriwhiri aiPūngao VET?

 

E tū motuhake ana a VET Energy i roto i te rāngai rauemi matatau nā āna:
- Ngā Tohungatanga R&D: He rōpū hangarau mai i ngā whare rangahau matua, tae atu ki te Chinese Academy of Sciences, e akiaki ana i te auahatanga i roto i te pūtaiao rauemi.
- Whakapūmau Kounga: Mā ngā pūnaha whakahaere kounga tino pakari me ngā hangarau paninga patent (hei tauira, ngā paparanga CVD kua piri pūmau) ka whakarite kia pono te hua.
- Urupare Tere: Mā ngā otinga ritenga me ngā wā tuku tere (hei tauira, 15 ngā rā mō ngā ota i raro i te 1,000 waeine) ka whakaitihia te wā kore mahi mō ngā kaihanga.
- Te mōhiotanga ki te kiritaki: Whai muri i ngā tau maha o te whakatō me te kohikohi hangarau, kua kaweakehia te poti karāhe a VET Energy mō te pūngao rā ki ngā whenua me ngā rohe neke atu i te 100, ā, ko tōna wāhi mākete i Ūropi me te Hononga o Amerika e eke ana ki te 70%, e whiwhi ana i te whakamoemiti nui me te whakanui whānui mai i ngā kiritaki. Koinei tonu tāu whiringa pai rawa atu.

Waka Karāhe PECVD mō te kawe wafer


Wā tuku: Paenga-whāwhā-22-2025
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