Kodi TaC Coating ndi chiyani?

M'makampani omwe akukula mwachangu a semiconductor, zida zomwe zimakulitsa magwiridwe antchito, kulimba, komanso kuchita bwino ndizofunikira. Chimodzi mwazinthu zatsopanozi ndi zokutira za Tantalum Carbide (TaC), zosanjikiza zotchingira zoteteza zomwe zimagwiritsidwa ntchito pazinthu za graphite. Bulogu iyi imayang'ana tanthauzo la zokutira za TaC, zabwino zaukadaulo, ndikusintha kwake pakupanga ma semiconductor.

Ⅰ. Kodi TaC Coating ndi chiyani?

Kupaka kwa TaC ndi gawo la ceramic lapamwamba kwambiri lopangidwa ndi tantalum carbide (pawiri ya tantalum ndi kaboni) yoyikidwa pamalo a graphite. Chophimbacho chimagwiritsidwa ntchito pogwiritsa ntchito njira za Chemical Vapor Deposition (CVD) kapena Physical Vapor Deposition (PVD), kupanga chotchinga cholimba, choyera kwambiri chomwe chimateteza ma graphite ku zovuta kwambiri.

Zofunika Kwambiri za Kupaka kwa TaC

●Kukhazikika Kwambiri Kutentha: Imapirira kutentha kopitilira 2200 ° C, kupitilira zida zachikhalidwe monga silicon carbide (SiC), yomwe imatsika pamwamba pa 1600 ° C.

●Kukaniza Chemical: Imalimbana ndi dzimbiri kuchokera ku haidrojeni (H₂), ammonia (NH₃), nthunzi ya silicon, ndi zitsulo zosungunuka, zomwe ndizofunikira kwambiri pokonza ma semiconductor.

●Kuyera Kwambiri Kwambiri: Miyezo yonyansa pansi pa 5 ppm, kuchepetsa kuopsa kwa kuipitsidwa mu njira za kukula kwa kristalo.

●Kutentha Kwambiri ndi Makina Okhazikika: Kumamatira mwamphamvu kwa graphite, kutsika kwamafuta ochepa (6.3 × 10⁻⁶/K), ndi kuuma (~ 2000 HK) kumatsimikizira moyo wautali pansi pa njinga yamoto.

Ⅱ. Kupaka kwa TaC mu Semiconductor Manufacturing: Ntchito Zofunikira

Zida za graphite zokutira za TaC ndizofunikira kwambiri pakupanga zida zapamwamba za semiconductor, makamaka pazida za silicon carbide (SiC) ndi gallium nitride (GaN). M'munsimu muli zovuta zawo zogwiritsira ntchito:

1. SiC Single Crystal Kukula

Zowotcha za SiC ndizofunikira pamagetsi amagetsi ndi magalimoto amagetsi. Ma graphite crucibles okhala ndi TaC amagwiritsidwa ntchito mu Physical Vapor Transport (PVT) ndi High-Temperature CVD (HT-CVD) machitidwe kuti:

● Pewani Kuipitsidwa: Zomwe zili zonyansa za TaC (mwachitsanzo, boron <0.01 ppm vs. 1 ppm mu graphite) zimachepetsa zolakwika mu makristasi a SiC, kupititsa patsogolo kusinthika kwa wafer resistivity (4.5 ohm-cm vs. 0.1 ohm-cm kwa graphite yosatsekedwa).

● Kuwongolera Kutentha Kwambiri: Uniform emissivity (0.3 pa 1000 ° C) imatsimikizira kutentha kosasinthasintha, kukhathamiritsa khalidwe la kristalo.

2. Kukula kwa Epitaxial (GaN/SiC)

Mu ma reactor a Metal-Organic CVD (MOCVD), zinthu zokutidwa ndi TaC monga zonyamulira zopyapyala ndi majekeseni:

●Pewani Zochita za Gasi: Imakana kutenthedwa ndi ammonia ndi haidrojeni pa 1400 ° C, kusunga umphumphu wa reactor.

●Limbikitsani Zokolola: Pochepetsa kukhetsedwa kwa tinthu kuchokera ku graphite, zokutira za CVD TaC zimachepetsa zolakwika mu zigawo za epitaxial, zofunika kwambiri pama LED ochita bwino kwambiri ndi zida za RF.

3. Ntchito Zina za Semiconductor

●High-Temperature Reactors: Zoyatsira ndi zotenthetsera pakupanga kwa GaN zimapindula ndi kukhazikika kwa TaC m'malo okhala ndi haidrojeni.

●Kusamalira Wafer: Zida zokutira monga mphete ndi zivindikiro zimachepetsa kuipitsidwa ndi zitsulo panthawi yosuntha

Ⅲ. Chifukwa Chiyani Kupaka kwa TaC Kumapambana Njira Zina?

Kuyerekeza ndi zinthu wamba kumawonetsa kupambana kwa TaC:

Deta yochokera ku mafananidwe amakampani

IV. Chifukwa chiyani kusankha VET?

Pambuyo popitilira ndalama zofufuza zaukadaulo ndi chitukuko,VET's Tantalum carbide (TaC) yokutidwa ndi zigawo, mongaTaC yokutidwa ndi mphete ya graphite kalozera, CVD TaC coated mbale susceptor, TaC Coated Susceptor ya Epitaxy Equipment,Tantalum carbide yokutidwa porous graphite zakuthupindiWafer susceptor yokhala ndi zokutira za TaC, ndi otchuka kwambiri m'misika ya ku Ulaya ndi ku America. VET ikuyembekezera moona mtima kukhala bwenzi lanu lalitali.