TaC Coated Graphite Upper Halfmoon Manufacturer

Short Description:

VET Energy TaC Coated Graphite Upper Halfmoon Manufacturer is a high-performance product designed to provide consistent and reliable performance over an extended period. It has super good heat resistance and thermal uniformity, high purity, erosion resistance, making it the perfect solution for wafer processing applications.

Product Detail

Product Tags

TaC coated graphite upper half moon parts are parts used in high temperature and special process applications, with a structure of graphite substrate and TaC coating. They have high temperature stability, excellent thermal conductivity and corrosion resistance, can withstand stress and temperature under extreme conditions, and ensure the stability and efficiency of the process.

TaC coating is a kind of tantalum carbide (TaC) coating prepared by physical vapor deposition technology, it has the following characteristics:

1. High hardness: TaC coating hardness is high, usually can reach 2500-3000HV, is an excellent hard coating.

2. Wear resistance: TaC coating is very wear-resistant, which can effectively reduce the wear and damage of mechanical parts during use.

3. Good high temperature resistance: TaC coating can also maintain its excellent performance under high temperature environment.

4. Good chemical stability: TaC coating has good chemical stability and can resist many chemical reactions, such as acids and bases.

TaC Coating5
TaC Coating1


Physical properties of TaC coating

密度 / Density

14.3 (g/cm³)

比辐射率 / Specific emissivity


热膨胀系数 / Thermal expansion coefficient

6.3 10-6/K

努氏硬度 / Hardness (HK)

2000 HK

电阻 / Resistance

1×10-5 Ohm*cm

热稳定性 / Thermal stability


石墨尺寸变化 / Graphite size changes


涂层厚度 / Coating thickness

≥20um typical value (35um±10um)


Ningbo VET Energy Technology Co., Ltd is a high-tech enterprise focusing on the production and sales of high-end advanced materials, the materials and technology covering graphite, silicon carbide, ceramics, surface treatment and so on. The products are widely used in photovoltaic, semiconductor, new energy, metallurgy,etc..

Our technical team comes from top domestic research institutions, can provide more professional material solutions for you.

Warmly welcome you to visit our factory, let's have further discussion!





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