SiC Coated Graphite Base Carriers

Short Description:

VET Energy SiC coated graphite carrier is a high-performance product designed to provide consistent and reliable performance over an extended period. It has super good heat resistance and thermal uniformity, high purity, erosion resistance, making it the perfect solution for wafer processing applications.

Place of Origin : China

Crystal Structure : FCCβ phase

Density : 3.21 g/cm

Hardness : 2500 Vickers

Grain Size : 2~10μm

Chemical Purity : 99.99995%

Heat Capacity : 640J·kg-1·K-1

Sublimation Temperature : 2700℃

Felexural Strength : 415 Mpa (RT 4-Point)

Young' s Modulus : 430 Gpa (4pt bend, 1300℃)

Thermal Expansion (C.T.E) : 4.5 10-6K-1

Thermal conductivity : 300（W/MK）

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Product Detail

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SiC coated graphite carrier is a key component used in various semiconductor manufacturing processes. We use our patented technology to make the silicon carbide carrier with extremely high purity, good coating uniformity and an excellent service life, as well as high chemical resistance and thermal stability properties.

Features of our products:

1. High temperature oxidation resistance up to 1700℃.
2. High purity and thermal uniformity
3. Excellent corrosion resistance: acid, alkali, salt and organic reagents.
4. High hardness, compact surface, fine particles.
5. Longer service life and more durable.

Silicon Carbide Coated Graphite Substrate for Semiconductor

https://www.vet-china.com/sic-carriersusceptor.html/

VET Energy is a professional manufacturer focusing on the R&D and production of high-end advanced materials such as graphite, silicon carbide, quartz, as well as the material treatment like SiC coating, TaC coating, glassy carbon coating, pyrolytic carbon coating, etc. The products are widely used in photovoltaic, semiconductor, new energy, metallurgy,etc..

Our technical team comes from top domestic research institutions, can provide more professional material solutions for you.

VET Energy advantages includes:
• Own factory and professional laboratory;
• Industry-leading purity levels and quality;
• Competive price & Fast delivery time;
• Multiple industry partnerships worldwide;

We welcome you to vist our factory and laboratory at any time!