Kayan Aikin Bututun Tanderu Mai Yaɗuwa na Semiconductor: Quartz, SiC da Maganin Ci Gaban Yumbu

Gabatarwa: Muhimmin Matsayin Kayan Bututun Tanderu a Masana'antar Semiconductor

A cikin ƙera wafer na semiconductor, Diffusion Furnace Tube yana ɗaya daga cikin mahimman abubuwan da ke cikin yanayin zafi mai zafi da ake amfani da su a cikin kayan aikin sarrafa zafi. Yana samar da yanayin amsawa mai sarrafawa don manyan hanyoyin semiconductor da yawa, gami da:

• Iskar shaka ta thermal;
• Yaɗuwar ƙwayoyin cuta;
• Zubar da jini;
• Takardar shaidar LPCVD;
• Maganin wafer mai zafi sosai.

Ba kamar kayan aikin murhun masana'antu na yau da kullun ba, bututun murhun semiconductor dole ne su cika ƙa'idodi masu tsauri saboda ko da gurɓataccen abu ko samar da barbashi na iya shafar yawan amfanin wafer da amincin na'urar.

A lokacin yaduwar semiconductor da kuma hanyoyin hada iskar shaka, bututun tanderu galibi suna fuskantar:

• Yanayin zafi mai yawa daga 800°C zuwa 1200°C;
• Iskar gas mai hana iskar oxygen kamar O₂ da H₂O;
• iskar gas marasa aiki, gami da N₂ da Ar;
• Abubuwan da suka fara aiki da dopant kamar POCl₃ da BBr₃;
• Nau'ikan sinadarai masu lalata kamar HCl.

Saboda haka, kayan bututun wutar lantarki dole ne su samar da waɗannan abubuwa a lokaci guda:

• Tsarkakakken sinadarai mai matuƙar girma;
• Kyakkyawan kwanciyar hankali na thermal;
• Ƙarancin gurɓatar ƙarfe;
• Babban juriya ga tsatsa;
• Ƙarancin samar da ƙwayoyin cuta;
• Tsawon rayuwar aiki.

Dangane da ka'idojin kayan aikin semiconductor da ayyukan masana'antu, kayan bututun tanderu da aka fi amfani da su sun haɗa da:

• Babban Tsarkakken Quartz (Fused Silica, SiO₂)
• Silicon Carbide (SiC Ceramic)
• Gilashin Alumina (Al₂O₃)
• Silinda Nitride Ceramic (Si₃N₄)

Babban Tsarkakakken Ma'adini Tube

Daga cikin dukkan kayan bututun tanderu na semiconductor, bututun quartz mai tsarki ya kasance babban mafita ga masana'antar wafer na silicon na gargajiya saboda kyawun tsarkinsa, kwanciyar hankali na zafi da fasahar sarrafa shi mai girma.

Ana ƙera bututun quartz na matakin semiconductor daga silica mai ƙarfi, inda babban ɓangaren shine silicon dioxide (SiO₂). Matsakaicin tsarkin yawanci ya wuce kashi 99.99%, tare da tsauraran matakan sarrafa ƙazanta na ƙarfe waɗanda suka haɗa da: Fe; Na; K; Cu; Al.

A cikin hanyoyin hada iskar shaka na thermal, bututun tanderu na quartz suna samar da yanayi mai kyau don samar da yadudduka na silicon oxide.

Halayen da aka saba gani sun haɗa da:

Busasshen Iskar Shaka:

Si + O₂ → SiO₂

Ruwan iskar oxygen mai laushi:

Si + H₂O → SiO₂ + H₂

Wadannan hanyoyin oxidation suna da mahimmanci ga:

• Tsarin dielectric na ƙofar;
• Rashin yarda da saman;
• Tsarin keɓewa.

Ana kuma amfani da bututun Quartz sosai a cikin hanyoyin watsawa na dopant, gami da:

• Yaɗuwar phosphorus ta amfani da POCl₃;
• Yaɗuwar boron ta amfani da BBr₃;
• Tsarin yaduwar arsenic.

Bugu da ƙari, ana amfani da bututun tanderu na quartz sosai a cikin tsarin LPCVD don: 

• Takardar shaidar silicon nitride;
• Takardar shaidar silicon polycrystalline.

Babban fa'idodin bututun wutar lantarki na quartz sun haɗa da:

• Tsarkakakken Sinadarai Mai Kyau
• Ƙarancin Faɗaɗawar Zafi
• Kyakkyawan Daidaito na thermal

Duk da haka, bututun quartz suma suna da wasu ƙuntatawa. Babban iyakancewa shine kwanciyar hankali na injiniya mai zafi. Idan aka yi aiki na tsawon lokaci sama da kusan 1100-1200°C, quartz na iya fuskantar:

• Nakasawar bututu;
• Tsagewa;
• Rage ƙarfin injina.

Saboda haka, quartz ya kasance zaɓi mafi kyau ga masana'antar silicon semiconductor na yau da kullun amma bai dace da yanayin zafi mai yawa ko kuma hanyoyin lalata ba.

Bututun Silikon Carbide: Mafita Mai Zafi Mai Yawa Don Ci Gaban Kera Semiconductor

Yumburan silicon carbide (SiC) ya fito a matsayin madadin kayan aiki mai kyau ga bututun tanderu na zamani.

SiC wani sinadari ne na yumbu mai hade da juna wanda ya kunshi silicon da atom na carbon. Tukwanen SiC na Semiconductor yawanci sun hada da:

• SiC mai haɗin amsawa;
• Sintered SiC;
• Babban tsarkin kayan CVD SiC.

Idan aka kwatanta da quartz, SiC yana ba da ingantaccen ci gaba:

• Juriyar yanayin zafi;
• Ƙarfin injina;
• Tsarin watsa zafi;
• Karfin sinadarai.

Ɗaya daga cikin mahimman fa'idodin bututun tanderu na SiC shine ƙarfin su na zafin jiki mai kyau.

Duk da cewa quartz gabaɗaya yana iyakance ga yanayin aiki na kimanin 1200°C, tukwanen SiC na iya jure yanayin zafi da ya wuce 1500°C, wanda hakan ya sa suka dace da hanyoyin zafi na zamani.

Bambancin zafin jiki yana da mahimmanci:

• Kwata: ~1.4 W/m·K
• Silicon Carbide: 120–200 W/m·K

Babban ƙarfin wutar lantarki na SiC yana ba da damar:

• Amsar zafi mai sauri;
• Inganta daidaiton zafin jiki;
• Rage yawan zafin jiki.

A aikace-aikacen semiconductor, bututun tanderu na SiC galibi ana la'akari da su don:

• Ƙara yawan zafin jiki;
• Tsarin yaɗuwa mai zurfi;
• ƙera na'urar samar da wutar lantarki ta silicon carbide;
• Tsarin sarrafa semiconductor na GaN.

Bututun Alumina (Al₂O₃): Kayan yumbu mai zafi mai inganci mai inganci

Ana ƙera bututun yumbu na Alumina musamman daga aluminum oxide (Al₂O₃), yawanci tare da matakan tsarki daga 95% zuwa 99.8%.

Ƙarfin zafin aiki na yumburan alumina zai iya kaiwa kimanin: 1400–1700°C. wanda ya fi na al'adar quartz.

Saboda waɗannan halaye, ana amfani da bututun tanderun aluminum a cikin:

Tanderun semiconductor na dakin gwaje-gwaje;

• l Kayan aikin bincike da haɓakawa;
• l Tsarin sarrafa zafi na gwaji.

Duk da haka, alumina tana da ƙarancin amfani a masana'antar semiconductor mai yawan gaske. Babban dalilin shine sarrafa gurɓatawa.

Idan aka kwatanta da quartz, za a iya samun nau'ikan ƙarfe na aluminum kamar haka:

• Gurɓatar aluminum;
• l Matakan ƙazanta mafi girma.

Don samar da ingantaccen semiconductor wanda ke buƙatar ƙarancin gurɓatawa, quartz da SiC mai tsabta sun kasance zaɓin da aka fi so.

Bututun Silicon Nitride (Si₃N₄): Yumbu Mai Ci Gaba Don Jure Girgizar Zafi

Silicon nitride (Si₃N₄) wani kayan yumbu ne na zamani wanda aka sani da kyawawan halayensa na injiniya. Akwai yiwuwar amfani da semiconductor:

• Kayan aikin murhu na musamman;
• Bincike kayan aikin semiconductor;
• Tsarin yumbu mai zafi mai zafi.

Duk da haka, ba a amfani da bututun tanderu na Si₃N₄ sosai a cikin manyan tanderun watsawa na semiconductor saboda:

• Babban sarkakiyar masana'antu;
• Mafi tsada;
• Ƙayyadadden lokacin da aka samu a sarkar samar da kayayyaki ta masana'antu.

Kammalawa

Bututun Tanderu Mai Yaɗuwa muhimmin abu ne amma galibi ba a yi la'akari da shi ba a fannin kera semiconductor. Kayansa suna tasiri kai tsaye:

• Yawan amfanin wafer;
• Tsarin kwanciyar hankali;
• Aikin barbashi;
• Tsawon rayuwar kayan aiki.

A halin yanzu:

Bututun ma'adinimamaye hanyoyin hada iskar shaka da yaɗuwa na gargajiya saboda tsarkinsu da balagarsu na musamman.

Bututun SiCsamar da ingantaccen ƙarfin zafi don aikace-aikacen semiconductor na gaba.

Bututun alumina da silicon nitride suna amfani da aikace-aikacen musamman na zafin jiki mai zafi inda aka fifita aikin injiniya.

Yayin da masana'antar semiconductor ke ci gaba da fuskantar yanayin zafi mai yawa, manyan wafers da na'urori masu faɗi, kayan bututun tanderu na yumbu na zamani za su taka muhimmiyar rawa a cikin kayan aikin sarrafa semiconductor na gaba.