Zvinhu zveSemiconductor Diffusion Furnace Tube: Quartz, SiC uye Advanced Ceramic Solutions

Nhanganyaya: Basa Rakakosha reZvinhu zveTube yeFurnace muKugadzira Semiconductor

Mukugadzira wafer ye semiconductor, Diffusion Furnace Tube ndeimwe yezvikamu zvakakosha zvekupisa kwepamusoro-soro zvinoshandiswa mumichina yekupisa. Inopa nzvimbo inodzorwa yemhinduro kune akati wandei maitiro akakosha e semiconductor, anosanganisira:

• Kupisa kwemafuta;
• Kupararira kweDopant;
• Kunyungudutsa;
• Kuiswa kweLPCVD;
• Kurapa wafer inodziya zvakanyanya.

Kusiyana nezvinhu zvechinyakare zvemaindasitiri, machubhu e semiconductor furnace anofanira kusangana nezvinodiwa zvakanyanya nekuti kunyangwe kusvibiswa kwezvimedu kana kugadzirwa kwezvimedu zvinogona kukanganisa zvakananga kugadzirwa kwewafer uye kuvimbika kwemidziyo.

Munguva yekupararira kwe semiconductor uye maitiro e oxidation, machubhu evira anowanzoonekwa kune:

• Nzvimbo dzinopisa zvakanyanya dzinotangira pa800°C kusvika 1200°C;
• Magasi anooxidating akadai seO₂ neH₂O;
• Magasi asina simba anosanganisira N₂ naAr;
• Zvinotangira Dopant zvakaita sePOCl₃ naBBr₃;
• Makemikoro anoparadza akadai seHCl.

Nokudaro, zvinhu zvechitofu chechoto zvinofanira kupa panguva imwe chete:

• Kuchena kwemakemikari kwakanyanya;
• Kugadzikana kwakanaka kwekupisa;
• Kusvibiswa kwesimbi kushoma;
• Kudzivirira ngura zvakanyanya;
• Kugadzirwa kwezvikamu zvishoma;
• Nguva refu yekushanda.

Zvichienderana nezvinodiwa nemidziyo ye semiconductor uye maitiro eindasitiri, zvinhu zvinoshandiswa zvakanyanya muchoto zvinosanganisira:

• Quartz Yakachena Zvikuru (Fused Silica, SiO₂)
• Silicon Carbide (SiC Ceramic)
• Alumina Ceramic (Al₂O₃)
• Silicon Nitride Ceramic (Si₃N₄)

Chubhu yeQuartz Yakachena Kwazvo

Pakati pezvinhu zvese zve semiconductor furnace tube, high purity quartz tube ndiyo inoramba iri mhinduro huru yekugadzira silicon wafer nekuda kwekuchena kwayo kukuru, kugadzikana kwekupisa uye tekinoroji yekugadzira yakakura.

Machubhu equartz emhando ye semiconductor anogadzirwa kubva ku high-purity fused silica, uko chikamu chikuru chiri silicon dioxide (SiO₂). Hunhu hwekuchena hunowanzo pfuura 99.99%, nekudzora kwakasimba kwetsvina yesimbi inosanganisira: Fe; Na; K; Cu; Al.

Mumaitiro ekupisa, machubhu e quartz furnace anopa nzvimbo yakanaka yekuita zvinhu pakugadzira silicon oxide layers.

Maitiro akajairika anosanganisira:

Kuomesa Oxidation:

Si + O₂ → SiO₂

Kunyorova Kwemvura:

Si + H₂O → SiO₂ + H₂

Maitiro aya e oxidation akakosha kune:

• Kuumbwa kwegedhi re dielectric;
• Kusagadzikana pamusoro;
• Zvivako zvekuzviparadzanisa nevamwe.

Machubhu eQuartz anoshandiswawo zvakanyanya mukuita kwekuparara kwedopant, kusanganisira:

• Kupararira kwephosphorus uchishandisa POCl₃;
• Kupararira kweBoron uchishandisa BBr₃;
• Maitiro ekupararira kweArsenic.

Pamusoro pezvo, machubhu e quartz furnace anoshandiswa zvakanyanya mu LPCVD systems kune: 

• Kuisa silicon nitride;
• Kuiswa kwesilicon yepolycrystalline.

Zvakanakira zvikuru zvemachubhu echoto che quartz zvinosanganisira:

• Kuchena Kwemakemikari Kwakanaka
• Kuwedzera Kwekupisa Kwakaderera
• Kufanana Kwakanaka Kwekupisa

Zvisinei, machubhu e quartz ane zvimwe zvipingamupinyi. Chinonyanya kukosha ndechekugadzikana kwemuchina pakupisa kwakanyanya. Kana ikashanda kwenguva refu pamusoro peanenge 1100–1200°C, quartz inogona kusangana ne:

• Kushanduka kwechubhu;
• Kudonha;
• Simba remuchina rakadzikira.

Saka, quartz ichiri sarudzo inosarudzwa pakugadzirwa kwema silicon semiconductor asi haina kukodzera zvakanyanya pakugadzirwa kwekupisa kwakanyanya kana kupisa kwakanyanya.

Tubhu yeSilicon Carbide: Mhinduro yekupisa kwakanyanya yekugadzira Advanced Semiconductor

Silicon carbide (SiC) ceramic yave kushandiswa senzira yakanaka yekuisa machubhu emhando yepamusoro echoto.

SiC imhando yesimbi yesimbi inoumbwa nemaatomu esilicon necarbon. SiC ceramics dzemhando ye semiconductor dzinowanzo sanganisira:

• SiC yakabatana nemhinduro;
• SiC yakacheneswa;
• Zvinhu zveCVD SiC zvakachena zvakanyanya.

Kana ichienzaniswa ne quartz, SiC inopa kuvandudzwa kwakakosha:

• Kudzivirira kupisa;
• Simba remuchina;
• Kufambisa kwekupisa;
• Kugara kwenguva refu kwemakemikari.

Chimwe chezvakanakira zvikuru zvemachubhu eSiC furnace ndiko kugona kwawo kupisa kwakanyanya.

Kunyange zvazvo quartz ichiwanzoganhurirwa kumamiriro ekushanda angangoita 1200°C, SiC ceramics inogona kutsungirira tembiricha inodarika 1500°C, zvichiita kuti dzikwanise kushandiswa pakupisa kwakanyanya.

Kusiyana kwekupisa kwemhepo kwakakoshawo:

• Quartz: ~1.4 W/m·K
• Silicon Carbide: 120–200 W/m·K

Kupisa kwakanyanya kweSiC kunogonesa:

• Mhinduro yekupisa inokurumidza;
• Kuvandudzwa kwekufanana kwekushisa;
• Kuderera kwekupisa kwemuviri.

Mukushandiswa kwe semiconductor, machubhu eSiC furnace anonyanya kutariswa nezve:

• Kupinza mvura pakupisa kwakanyanya;
• Maitiro ekuparadzira epamberi;
• Kugadzirwa kwemidziyo yemagetsi yesilicon carbide;
• Kugadziriswa kweGaN semiconductor.

Chubhu yeAlumina (Al₂O₃): Chinhu cheCeramic chinodhura uye chinodziya zvakanyanya

Machubhu eAlumina ceramic anogadzirwa zvakanyanya kubva kualuminium oxide (Al₂O₃), kazhinji ane mwero wekuchena uri pakati pe95% kusvika 99.8%.

Kugona kushanda kwe alumina ceramics kunogona kusvika pa: 1400–1700°C. iyo yakakwira kupfuura quartz yakajairika.

Nekuda kweizvi, machubhu e alumina furnace anowanzoshandiswa mu:

Zvitofu zve semiconductor zvemurabhoritari;

• l Midziyo yekutsvaga nekugadzira;
• l Masisitimu ekuyedza ekugadzirisa kupisa.

Zvisinei, alumina hainyanyi kushandiswa mukugadzira zvinhu zvakawanda zve semiconductor. Chikonzero chikuru ndechekudzora kusvibiswa.

Zvichienzaniswa ne quartz, alumina ceramics inogona kuunza:

• Kusvibiswa kwearuminiyamu;
• l Kusvibiswa kwakanyanya.

Pakugadzirwa kwema semiconductor epamusoro kunoda huwandu hwakaderera hwekusvibiswa, quartz ne high-pure SiC zvinoramba zviri sarudzo dzinofarirwa.

Silicon Nitride Tube (Si₃N₄): Ceramic Yepamusoro Yekudzivirira Kupisa Kunodzikira

Silicon nitride (Si₃N₄) chimwe chinhu chepurasitiki chemhando yepamusoro chinozivikanwa nehunyanzvi hwayo hwekugadzira zvinhu. Zvinogona kushandiswa semiconductor zvinosanganisira:

• Zvikamu zvechoto zvehunyanzvi;
• Tsvagiridzo yemidziyo yesemiconductor;
• Zvivakwa zveceramic zvinopisa zvakanyanya.

Zvisinei, machubhu eSi₃N₄ furnace haanyanyi kushandiswa mumachuni makuru e semiconductor diffusion nekuda kwe:

• Kuoma kwekugadzirwa kwezvinhu kwakanyanya;
• Mutengo wakakwira;
• Kusvika kwenguva pfupi pakutengeswa kwezvinhu mumaindasitiri.

Mhedziso

Diffusion Furnace Tube chinhu chakakosha asi chinowanzo shomeka mukugadzirwa kwema semiconductor. Zvinhu zvayo zvinopesvedzera zvakananga:

• Goho rewafer;
• Kugadzikana kwemaitiro;
• Kushanda kwezvikamu;
• Nguva yekushanda kwemidziyo.

Parizvino:

Machubhu eQuartzinodzora maitiro echinyakare e oxidation uye kupararira nekuda kwekuchena kwavo kwakanyanya uye kukura.

Machubhu eSiCinopa kugona kwekupisa kwepamusoro-soro kwekushandisa kwe semiconductor yechizvarwa chinotevera.

Machubhu eAlumina nesilicon nitride anoshandiswa zvakanyanya pakupisa kwepamusoro apo mashandiro emakanika anokosheswa.

Sezvo kugadzirwa kwema semiconductor kuchienderera mberi nekupisa kwakanyanya, mawafer makuru uye zvishandiso zvine gap yakakura, zvinhu zve ceramic furnace tube zvemhando yepamusoro zvichatamba basa rakakosha mune ramangwana rekushandisa semiconductor process.