Kev Taw Qhia: Lub Luag Haujlwm Tseem Ceeb ntawm Cov Khoom Siv Rau Hauv Lub Qhov Cub Hauv Kev Tsim Khoom Semiconductor
Hauv kev tsim cov wafer semiconductor, Diffusion Furnace Tube yog ib qho ntawm cov khoom siv kub siab tshaj plaws uas siv rau hauv cov khoom siv ua thermal. Nws muab ib puag ncig tswj kev ua haujlwm rau ntau cov txheej txheem semiconductor tseem ceeb, suav nrog:
- Kev ua kom sov sov;
- Kev sib kis ntawm cov tshuaj dopant;
- Kev kub hnyiab;
- Kev tso tawm ntawm LPCVD;
- Kev kho mob wafer kub heev.
Tsis zoo li cov khoom siv hauv chaw ua haujlwm ib txwm muaj, cov raj xa dej hauv chaw ua haujlwm semiconductor yuav tsum ua tau raws li cov kev cai nruj heev vim tias txawm tias muaj kev ua qias tuaj lossis kev tsim cov khoom me me tuaj yeem cuam tshuam ncaj qha rau cov wafer yield thiab kev ntseeg tau ntawm cov khoom siv.
Thaum lub sijhawm semiconductor diffusion thiab oxidation txheej txheem, cov raj cua sov feem ntau raug rau:
- Qhov kub thiab txias ntawm 800 ° C txog 1200 ° C;
- Cov pa roj oxidizing xws li O₂ thiab H₂O;
- Cov pa roj inert suav nrog N₂ thiab Ar;
- Cov khoom siv ua ntej ntawm cov tshuaj dopant xws li POCl₃ thiab BBr₃;
- Cov tshuaj lom neeg xws li HCl.
Yog li ntawd, cov ntaub ntawv siv rau lub raj xa dej yuav tsum muab cov hauv qab no tib lub sijhawm:
- Kev ntshiab tshuaj lom neeg siab heev;
- Kev ruaj khov thermal zoo heev;
- Cov hlau tsis muaj kuab paug;
- Kev tiv thaiv corrosion siab;
- Tsawg tsawg tiam neeg;
- Lub neej ua haujlwm ntev.
Raws li cov qauv khoom siv semiconductor thiab kev coj ua hauv kev lag luam, cov khoom siv raj cua sov uas siv dav tshaj plaws suav nrog:
- Quartz Purity Siab (Fused Silica, SiO₂)
- Silicon Carbide (SiC Ceramic)
- Alumina Ceramic (Al₂O₃)
- Silicon Nitride Tej Hub (Si₃N₄)
Siab Purity Quartz Raj
Ntawm txhua cov ntaub ntawv semiconductor cub tawg raj, cov raj quartz purity siab tseem yog qhov kev daws teeb meem tseem ceeb rau kev tsim cov silicon wafer ib txwm muaj vim nws qhov kev ntshiab zoo tshaj plaws, kev ruaj khov thermal thiab kev siv tshuab ua tiav.
Cov raj quartz semiconductor yog tsim los ntawm cov fused silica uas muaj purity siab, qhov twg cov khoom tseem ceeb yog silicon dioxide (SiO₂). Qib purity feem ntau tshaj 99.99%, nrog kev tswj hwm nruj ntawm cov khoom tsis huv xws li: Fe; Na; K; Cu; Al.
Hauv cov txheej txheem oxidation thermal, cov raj cua sov quartz muab qhov chaw zoo tshaj plaws rau kev tsim cov txheej silicon oxide.
Cov kev tshwm sim ib txwm muaj xws li:
Kev Oxidation Qhuav:
Si + O₂ → SiO₂
Kev Oxidation ntub dej:
Si + H₂O → SiO₂ + H₂
Cov txheej txheem oxidation no tseem ceeb rau:
- Rooj vag dielectric tsim;
- Kev ua kom nto nto;
- Cov qauv cais tawm.
Cov raj Quartz kuj tseem siv dav hauv cov txheej txheem dopant diffusion, suav nrog:
- Kev siv POCl₃ los ntawm kev siv phosphorus diffusion;
- Boron diffusion siv BBr₃;
- Cov txheej txheem diffusion ntawm arsenic.
Tsis tas li ntawd xwb, cov raj cua sov quartz tau siv dav hauv LPCVD systems rau:
- Kev tso tawm ntawm silicon nitride;
- Kev tso tawm ntawm polycrystalline silicon.
Cov txiaj ntsig tseem ceeb ntawm cov raj cua sov quartz muaj xws li:
- Kev Ntshiab Tshuaj Zoo heev
- Kev nthuav dav thermal qis
- Kev sib npaug zoo heev ntawm Thermal
Txawm li cas los xij, cov raj quartz kuj muaj qee qhov kev txwv. Qhov kev txwv tseem ceeb yog kev ruaj khov ntawm lub tshuab kub siab. Hauv kev ua haujlwm ntev tshaj li ntawm 1100–1200 ° C, quartz yuav muaj:
- Kev hloov pauv ntawm lub raj;
- Qaug zog;
- Txo lub zog kho tshuab.
Yog li ntawd, quartz tseem yog qhov kev xaiv zoo tshaj plaws rau kev tsim cov khoom siv semiconductor silicon tab sis tsis haum rau cov txheej txheem kub heev lossis corrosive heev.
Silicon Carbide Tube: Ib qho kev daws teeb meem kub siab rau kev tsim khoom semiconductor siab heev
Silicon carbide (SiC) ceramic tau tshwm sim los ua lwm yam khoom siv zoo rau cov raj cua sov siab heev.
SiC yog ib qho khoom sib xyaw ua los ntawm cov khoom siv ceramic uas muaj cov silicon thiab cov carbon atoms. Cov khoom siv ceramic SiC semiconductor-grade feem ntau muaj xws li:
- Cov tshuaj tiv thaiv SiC;
- Sintered SiC;
- Cov ntaub ntawv CVD SiC purity siab.
Piv nrog quartz, SiC muab kev txhim kho zoo heev:
- Kub tsis kam;
- Lub zog kho tshuab;
- Kev ua tau zoo ntawm cov cua sov;
- Kev ruaj khov ntawm tshuaj lom neeg.
Ib qho ntawm cov txiaj ntsig tseem ceeb tshaj plaws ntawm SiC lub raj cua sov yog lawv lub peev xwm kub siab.
Txawm hais tias feem ntau quartz tsuas yog txwv rau kwv yees li 1200 ° C kev ua haujlwm, SiC ceramics tuaj yeem tiv taus qhov kub siab tshaj 1500 ° C, ua rau lawv haum rau cov txheej txheem thermal siab heev.
Qhov sib txawv ntawm thermal conductivity kuj tseem ceeb heev:
- Quartz: ~1.4 W/m·K
- Silicon Carbide: 120–200 W/m·K
Qhov thermal conductivity siab dua ntawm SiC ua rau:
- Kev teb sai dua ntawm thermal;
- Kev sib npaug ntawm qhov kub thiab txias zoo dua;
- Txo cov kev hloov pauv thermal.
Hauv cov ntawv thov semiconductor, SiC furnace tubes feem ntau yog xav txog rau:
- Kev kub hnyiab siab;
- Cov txheej txheem diffusion siab heev;
- Silicon carbide fais fab khoom siv tsim khoom;
- Kev ua tiav ntawm GaN semiconductor
Alumina Raj (Al₂O₃): Cov Khoom Siv Ceramic Kub Siab Uas Pheej Yig
Cov raj alumina ceramic feem ntau yog tsim los ntawm txhuas oxide (Al₂O₃), feem ntau nrog cov qib kev huv ntawm 95% txog 99.8%.
Lub peev xwm ua haujlwm kub ntawm alumina ceramics tuaj yeem ncav cuag kwv yees li: 1400–1700 ° C. uas yog siab dua li cov quartz ib txwm muaj.
Vim yog cov yam ntxwv no, cov raj alumina rauv feem ntau siv rau hauv:
Cov cub tawg semiconductor hauv chav kuaj;
- l Cov khoom siv tshawb fawb thiab kev txhim kho;
- l Cov txheej txheem ua haujlwm thermal sim.
Txawm li cas los xij, alumina muaj kev siv tsawg hauv kev tsim khoom semiconductor ntau. Qhov laj thawj tseem ceeb yog kev tswj kev ua qias tuaj.
Piv nrog quartz, alumina ceramics tej zaum yuav qhia txog:
- Kev ua qias tuaj ntawm txhuas;
- l Cov qib impurity siab dua.
Rau kev tsim cov khoom siv semiconductor siab heev uas xav tau cov qib kev ua qias tuaj tsawg heev, quartz thiab SiC uas muaj kev ntshiab siab tseem yog cov kev xaiv zoo tshaj plaws.
Silicon Nitride Tube (Si₃N₄): Cov Khoom Siv Ua Los Ntawm Av nplaum Zoo Tshaj Plaws Rau Kev Tiv Thaiv Kev Kub Ntxhov Thermal
Silicon nitride (Si₃N₄) yog lwm yam khoom siv ceramic uas paub txog nws cov khoom siv kho tshuab zoo heev. Cov ntawv thov semiconductor muaj xws li:
- Cov khoom siv cua sov tshwj xeeb;
- Tshawb nrhiav cov khoom siv semiconductor;
- Cov qauv ceramic kub siab.
Txawm li cas los xij, cov raj Si₃N₄ tsis tau siv dav hauv cov cub tawg semiconductor diffusion vim yog:
- Kev tsim khoom nyuaj dua;
- Tus nqi siab dua;
- Kev loj hlob ntawm cov khoom siv hauv kev lag luam tsawg.
Xaus lus
Lub raj cua sov Diffusion yog ib qho tseem ceeb tab sis feem ntau tsis tau pom zoo hauv kev tsim khoom semiconductor. Nws cov khoom siv cuam tshuam ncaj qha rau:
- Cov qoob loo wafer;
- Kev ruaj khov ntawm cov txheej txheem;
- Kev ua tau zoo ntawm cov khoom me me;
- Lub neej siv khoom.
Tam sim no:
Cov raj Quartztswj cov txheej txheem oxidation thiab diffusion ib txwm muaj vim lawv qhov kev ntshiab thiab kev loj hlob zoo.
Cov raj SiCmuab kev muaj peev xwm thermal siab heev rau cov ntawv thov semiconductor tiam tom ntej.
Cov raj alumina thiab silicon nitride ua haujlwm rau cov ntawv thov kub siab tshwj xeeb uas qhov kev ua tau zoo ntawm cov khoom siv kho tshuab tau muab qhov tseem ceeb.
Raws li kev tsim khoom semiconductor txuas ntxiv mus rau qhov kub siab dua, cov wafers loj dua thiab cov khoom siv dav dav, cov khoom siv ceramic furnace tube yuav ua lub luag haujlwm tseem ceeb hauv cov khoom siv semiconductor yav tom ntej.
Lub sijhawm tshaj tawm: Lub Xya Hli-24-2026