Qalabka Tuubada Foornada Kala-baxa Semiconductor-ka: Quartz, SiC iyo Xalalka Dhoobada Sare

Hordhac: Doorka Muhiimka ah ee Agabka Tuubada Foornada ee Soo-saarista Semiconductor-ka

Soo saarista wafer-ka semiconductor-ka, Tuubada Foornada Kala-baxa waa mid ka mid ah qaybaha ugu muhiimsan ee habka heerkulka sare ee loo isticmaalo qalabka farsamaynta kulaylka. Waxay bixisaa jawi falgal la xakameeyey oo loogu talagalay dhowr geeddi-socod oo muhiim ah oo semiconductor ah, oo ay ku jiraan:

• Oksaydhaynta kulaylka;
• Faafinta daawada;
• Qaboojinta;
• dhigista LPCVD;
• Daawaynta wafer-ka heerkulka sare leh.

Si ka duwan qaybaha foornada warshadaha ee caadiga ah, tuubooyinka foornada semiconductor-ka waa inay buuxiyaan shuruudo aad u adag sababtoo ah xitaa wasakheynta raadadka ama soo saarista walxaha waxay si toos ah u saameyn kartaa wax soo saarka wafer-ka iyo isku halaynta qalabka.

Inta lagu jiro hababka faafinta semiconductor-ka iyo oksaydhka, tuubooyinka foornada waxaa badanaa la kulma:

• Deegaanno heerkul sare leh oo u dhexeeya 800°C ilaa 1200°C;
• Gaasaska oksaydhka sida O₂ iyo H₂O;
• Gaasaska aan firfircoonayn oo ay ku jiraan N₂ iyo Ar;
• Horudhacyada Dopant sida POCl₃ iyo BBr₃;
• Noocyada kiimikada ee miiqan sida HCl.

Sidaa darteed, walxaha tuubada foornada waa inay isku mar bixiyaan:

• Nadiifnimo kiimiko oo aad u sareysa;
• Xasillooni kuleyl oo aad u fiican;
• Wasakhowga birta oo hooseeya;
• Iska caabinta daxalka oo sareysa;
• Soo saarista walxaha yaryar;
• Cimri dheer oo hawlgal ah.

Sida laga soo xigtay heerarka agabka qalabka semiconductor iyo dhaqamada warshadaha, agabka tuubada foornada ee ugu isticmaalka badan waxaa ka mid ah:

• Quartz Nadiif Sare leh (Silica la isku daray, SiO₂)
• Silikoon Kaarboohaydrayt (SiC Seeraar)
• Dhoobada Alumina (Al₂O₃)
• Dhoobada Silicon Nitride (Si₃N₄)

Tuubo Quartz ah oo saafi ah oo sarreeya

Dhammaan agabka tuubada foornada semiconductor-ka, tuubada quartz-ka saafiga ah ee sare ayaa weli ah xalka ugu weyn ee wax soo saarka wafer-ka silicon-ka caadiga ah sababtoo ah daahirnimadeeda aadka u fiican, xasilloonida kulaylka iyo tignoolajiyada farsamaynta ee bislaaday.

Tuubooyinka quartz-ka heerka semiconductor-ka waxaa laga sameeyaa silica isku dhafan oo saafi ah, halkaas oo qaybta ugu weyni ay tahay silicon dioxide (SiO₂). Heerka daahirnimadu wuxuu caadi ahaan ka badan yahay 99.99%, iyadoo si adag loo xakameeyo wasakhda birta ah oo ay ku jiraan: Fe; Na; K; Cu; Al.

Hawsha oksaydhka kuleylka, tuubooyinka foornada quartz waxay bixiyaan jawi falcelin oo ku habboon sameynta lakabyada oksaydhka silicon.

Falcelinta caadiga ah waxaa ka mid ah:

Oksaydh qalalan:

Si + O₂ → SiO₂

Oksaydhaynta qoyan:

Si + H₂O → SiO₂ + H₂

Nidaamyadan oksaydhka ayaa lagama maarmaan u ah:

• Samaynta dielectric-ka albaabka;
• Raacitaanka dusha sare;
• Qaab-dhismeedka go'doominta.

Tuubooyinka Quartz ayaa sidoo kale si ballaaran loogu isticmaalaa hababka faafinta daawada, oo ay ku jiraan:

• Faafinta fosfooraska iyadoo la adeegsanayo POCl₃;
• Faafinta boron iyadoo la adeegsanayo BBr₃;
• Geedi socodka faafinta arsenic.

Intaa waxaa dheer, tuubooyinka foornada quartz ayaa si ballaaran loogu isticmaalaa nidaamyada LPCVD: 

• dhigista nitride-ka silikoon;
• Kaydinta siliconka polycrystalline.

Faa'iidooyinka ugu muhiimsan ee tuubooyinka foornada quartz waxaa ka mid ah:

• Nadiifin Kiimiko oo Heer Sare ah
• Ballaarinta Kulaylka Hoose
• Midnimo Kulayl oo Aad u Fiican

Si kastaba ha ahaatee, tuubooyinka quartz sidoo kale waxay leeyihiin xaddidaadyo gaar ah. Xaddidaadda ugu weyn waa xasilloonida farsamada heerkulka sare. Hawlgalka muddada dheer ka sarreeya qiyaastii 1100-1200°C, quartz wuxuu la kulmi karaa:

• Isbeddelka tuubada;
• Dabayl;
• Xoogga farsamada oo yaraada.

Sidaa darteed, quartz ayaa weli ah doorashada la door bidayo ee wax soo saarka semiconductor-ka silicon ee caadiga ah laakiin kuma habboona hababka heerkulka aadka u sarreeya ama kuwa aadka u daxalka badan.

Tuubada Silikoon Carbide: Xal Heerkul Sare ah oo loogu talagalay Soo-saarista Semiconductor-ka Sare

Dhoobada silikoon carbide (SiC) ayaa soo baxday iyadoo ah agab kale oo rajo leh oo loogu talagalay tuubooyinka foornada ee casriga ah.

SiC waa isku-dhis dhoobo ah oo isku-dhafan oo ka kooban silikoon iyo atamka kaarboon. Dhoobada SiC ee heerka semiconductor-ka ah badanaa waxaa ka mid ah:

• SiC oo ku xiran fal-celinta;
• SiC-ga Sintered;
• Agabka CVD SiC ee saafiga ah.

Marka la barbardhigo quartz, SiC waxay bixisaa horumar aad u wanaagsan:

• Iska caabbinta heerkulka;
• Xoogga farsamada;
• Gudbinta kulaylka;
• Adkeysiga kiimikada.

Mid ka mid ah faa'iidooyinka ugu muhiimsan ee tuubooyinka foornada SiC waa awooddooda heerkulka sare ee sare.

In kasta oo quartz guud ahaan lagu xaddiday xaaladaha hawlgalka qiyaastii 1200°C, dhoobada SiC waxay u adkeysan kartaa heerkulka ka sarreeya 1500°C, taasoo ka dhigaysa kuwo ku habboon hababka kulaylka ee horumarsan.

Farqiga u dhexeeya heerkulka kulaylka ayaa sidoo kale muhiim ah:

• Quartz: ~1.4 W/m·K
• Silikoon Karbohaydrayt: 120–200 W/m·K

Gudbinta kulaylka sare ee SiC waxay suurtogal ka dhigaysaa:

• Jawaab celin kuleyl oo degdeg ah;
• Isku mid ahaanshaha heerkulka oo la hagaajiyay;
• Heerkulbeegga oo yaraada.

Codsiyada semiconductor-ka, tuubooyinka foornada SiC waxaa inta badan loo tixgeliyaa:

• Qaboojinta heerkulka sare;
• Habab faafin oo horumarsan;
• Soo saarista qalabka korontada ee silikoon carbide;
• Habaynta semiconductor-ka GaN.

Tuubada Alumina (Al₂O₃): Qalab Dhoobo ah oo Heerkul Sare leh oo kharash-ool ah

Tuubooyinka dhoobada ah ee Alumina waxaa inta badan laga sameeyaa aluminium oksaydh (Al₂O₃), badanaa heerarka daahirnimada waxay u dhexeeyaan 95% ilaa 99.8%.

Awoodda heerkulka hawlgalka ee dhoobada alumina waxay gaari kartaa qiyaastii: 1400–1700°C. taasoo ka sarreysa quartz-ka caadiga ah.

Sababtoo ah sifooyinkan, tuubooyinka foornada alumina waxaa badanaa loo isticmaalaa:

Foornooyinka semiconductor-ka shaybaarka;

• l Qalabka cilmi-baarista iyo horumarinta;
• l Nidaamyada farsamaynta kulaylka ee tijaabada ah.

Si kastaba ha ahaatee, alumina waxay leedahay xad xadidan oo ku saabsan wax soo saarka semiconductor-ka mugga sare leh. Sababta ugu weyn waa xakamaynta wasakhowga.

Marka la barbardhigo quartz, dhoobada alumina waxay soo bandhigi kartaa:

• Wasakheynta aluminiumka;
• Heerarka wasakhda sare.

Soo saarista semiconductor-ka horumarsan ee u baahan heerarka wasakhowga aadka u hooseeya, quartz iyo SiC-ga saafiga ah ayaa weli ah xulashooyinka la doorbidayo.

Tuubada Silicon Nitride (Si₃N₄): Dhoobo Sare oo loogu talagalay iska caabbinta Shoogga Kulaylka

Silicon nitride (Si₃N₄) waa walxo kale oo dhoobo ah oo horumarsan oo loo yaqaan sifooyin farsamo oo gaar ah. Codsiyada semiconductor-ka ee suurtagalka ah waxaa ka mid ah:

• Qaybaha foornada ee gaarka ah;
• Qalabka cilmi-baarista semiconductor-ka;
• Qaab-dhismeedka dhoobada heerkulka sare leh.

Si kastaba ha ahaatee, tuubooyinka foornada Si₃N₄ si weyn looguma qaato foornooyinka faafinta semiconductor-ka ee caadiga ah sababtoo ah:

• Kakanaanta wax soo saarka oo sareysa;
• Kharash sare;
• Cimri xaddidan oo silsilad sahay warshadeed ah.

Gunaanad

Tuubada Foornada Kala-baxa waa qayb muhiim ah laakiin inta badan aan la dhayalsan karin oo ku jirta wax-soo-saarka semiconductor-ka. Maaddadeedu si toos ah ayay u saamaysaa:

• Wax soo saarka Wafer;
• Xasilloonida habka;
• Waxqabadka walxaha;
• Cimriga qalabka.

Hadda:

Tuubooyinka QuartzWaxay xukumaan hababka oksaydhka iyo faafinta caadiga ah sababtoo ah daahirnimadooda iyo qaan-gaarnimadooda gaarka ah.

Tuubooyinka SiCwaxay bixiyaan awood kuleyl oo heer sare ah oo loogu talagalay codsiyada semiconductor-ka jiilka soo socda.

Tuubooyinka Alumina iyo silicon nitride waxay u adeegaan codsiyo gaar ah oo heerkul sare leh halkaas oo waxqabadka farsamada la mudnaanta siiyo.

Maadaama wax soo saarka semiconductor-ka uu ku sii socdo heerkul sare, buskudyo waaweyn iyo aaladaha bandgap-ka ballaaran, agabka tuubooyinka foornada dhoobada ee horumarsan ayaa door muhiim ah ka ciyaari doona qalabka habka semiconductor-ka mustaqbalka.