Zipangizo za Semiconductor Diffusion Furnace Tube: Quartz, SiC ndi Advanced Ceramic Solutions

Chiyambi: Udindo Wofunika Kwambiri wa Zipangizo za Furnace Tube mu Kupanga Semiconductors

Pakupanga ma wafer a semiconductor, Diffusion Furnace Tube ndi imodzi mwa zigawo zofunika kwambiri pa kutentha kwambiri zomwe zimagwiritsidwa ntchito pazida zotenthetsera kutentha. Imapereka malo owongolera machitidwe pazinthu zingapo zofunika kwambiri za semiconductor, kuphatikizapo:

• Kutentha kwa okosijeni;
• Kufalikira kwa Dopant;
• Kuphimba;
• Kuyika kwa LPCVD;
• Chithandizo cha wafer chotentha kwambiri.

Mosiyana ndi zida zachikhalidwe za ng'anjo ya mafakitale, machubu a ng'anjo ya semiconductor ayenera kukwaniritsa zofunikira kwambiri chifukwa ngakhale kuipitsidwa pang'ono kapena kupanga tinthu tating'onoting'ono kumatha kukhudza mwachindunji kukolola kwa wafer ndi kudalirika kwa chipangizocho.

Pa nthawi ya kufalikira kwa semiconductor ndi njira zophikira, machubu a ng'anjo nthawi zambiri amawonetsedwa ku:

• Malo otentha kwambiri kuyambira 800°C mpaka 1200°C;
• Mpweya wowonjezera kutentha monga O₂ ndi H₂O;
• Mpweya wopanda mphamvu kuphatikizapo N₂ ndi Ar;
• Zoyambira za Dopant monga POCl₃ ndi BBr₃;
• Mitundu ya mankhwala owononga monga HCl.

Chifukwa chake, zipangizo za chubu cha ng'anjo ziyenera kupereka nthawi imodzi:

• Kuyera kwa mankhwala kwambiri;
• Kukhazikika kwabwino kwambiri kwa kutentha;
• Kuipitsidwa kochepa kwa zitsulo;
• Kukana dzimbiri kwambiri;
• Kupanga tinthu tating'onoting'ono kochepa;
• Nthawi yayitali yogwira ntchito.

Malinga ndi miyezo ya zida za semiconductor ndi machitidwe amakampani, zida zogwiritsidwa ntchito kwambiri pa chubu cha ng'anjo ndi izi:

• Quartz Yoyera Kwambiri (Fused Silica, SiO₂)
• Silicon Carbide (SiC Ceramic)
• Alumina Ceramic (Al₂O₃)
• Silikoni Nitride Ceramic (Si₃N₄)

Chubu Choyera Kwambiri cha Quartz

Pakati pa zipangizo zonse za chubu cha ng'anjo ya semiconductor, chubu cha quartz choyera kwambiri chimakhalabe yankho lalikulu pakupanga ma silicon wafer wamba chifukwa cha kuyera kwake kwapadera, kukhazikika kwa kutentha komanso ukadaulo wokonza zinthu mokhwima.

Machubu a quartz opangidwa ndi semiconductor-grade amapangidwa kuchokera ku silica yosakanikirana bwino kwambiri, komwe gawo lalikulu ndi silicon dioxide (SiO₂). Mlingo wa kuyera nthawi zambiri umapitirira 99.99%, ndi kuwongolera mwamphamvu zinyalala zachitsulo kuphatikizapo: Fe; Na; K; Cu; Al.

Mu njira zotenthetsera kutentha, machubu a ng'anjo ya quartz amapereka malo abwino kwambiri opangira zigawo za silicon oxide.

Machitidwe wamba ndi awa:

Kutulutsa mpweya wouma:

Si + O₂ → SiO₂

Kusungunuka kwa Madzi:

Si + H₂O → SiO₂ + H₂

Njira izi za okosijeni ndizofunikira kwambiri pa:

• Kupanga kwa dielectric ya chipata;
• Kusuntha kwa pamwamba;
• Kapangidwe ka kudzipatula.

Machubu a quartz amagwiritsidwanso ntchito kwambiri mu njira zofalitsira dopant, kuphatikizapo:

• Kufalikira kwa phosphorous pogwiritsa ntchito POCl₃;
• Kufalikira kwa Boron pogwiritsa ntchito BBr₃;
• Njira zofalitsira za Arsenic.

Kuphatikiza apo, machubu a ng'anjo ya quartz amagwiritsidwa ntchito kwambiri mu makina a LPCVD pa: 

• Kuyika kwa silicon nitride;
• Kuyika kwa silicon ya polycrystalline.

Ubwino waukulu wa machubu a ng'anjo ya quartz ndi awa:

• Ukhondo Wabwino Kwambiri wa Mankhwala
• Kuwonjezeka kwa Kutentha Kochepa
• Kufanana Kwabwino Kwambiri kwa Kutentha

Komabe, machubu a quartz alinso ndi zoletsa zina. Choletsa chachikulu ndi kukhazikika kwa makina kutentha kwambiri. Mukagwira ntchito kwa nthawi yayitali pamwamba pa pafupifupi 1100–1200°C, quartz ikhoza kukhala ndi:

• kusintha kwa chubu;
• Kutsika;
• Kuchepa kwa mphamvu ya makina.

Chifukwa chake, quartz ikadali chisankho chomwe chimakondedwa kwambiri popanga zinthu zodziwika bwino za silicon semiconductor koma sichiyenera kwambiri pazinthu zotentha kwambiri kapena zowononga kwambiri.

Chubu cha Silicon Carbide: Yankho Lotentha Kwambiri la Kupanga Zinthu Zapamwamba za Semiconductor

Silika ya silicon carbide (SiC) yakhala ngati chinthu china chabwino kwambiri chopangira machubu apamwamba a uvuni.

SiC ndi chosakaniza cha covalent ceramic chomwe chili ndi maatomu a silicon ndi carbon. Ma ceramic a SiC a semiconductor-grade nthawi zambiri amakhala ndi:

• SiC yolumikizidwa ndi reaction;
• Sintered SiC;
• Zipangizo za CVD SiC zoyera kwambiri.

Poyerekeza ndi quartz, SiC imapereka bwino kwambiri:

• Kukana kutentha;
• Mphamvu ya makina;
• Kutentha kwa matenthedwe;
• Kulimba kwa mankhwala.

Chimodzi mwa ubwino waukulu wa machubu a SiC furnace ndi kuthekera kwawo kotentha kwambiri.

Ngakhale kuti quartz nthawi zambiri imakhala ndi kutentha kwa pafupifupi 1200°C, SiC ceramics imatha kupirira kutentha kopitilira 1500°C, zomwe zimapangitsa kuti ikhale yoyenera kutentha kwambiri.

Kusiyana kwa kutentha kwa ma conductivity n'kofunika kwambiri:

• Quartz: ~1.4 W/m·K
• Kabide ya Silikoni: 120–200 W/m·K

Kuchuluka kwa kutentha kwa SiC kumapangitsa kuti:

• Kuyankha mwachangu kwa kutentha;
• Kusinthasintha kwa kutentha;
• Kuchepa kwa kutentha.

Mu ntchito za semiconductor, machubu a ng'anjo ya SiC amaganiziridwa makamaka pa:

• Kuphimba kwa kutentha kwambiri;
• Njira zoyendetsera bwino kufalikira kwa zinthu;
• Kupanga zida zamagetsi za silicon carbide;
• Kukonza ma semiconductor a GaN.

Chubu cha Alumina (Al₂O₃): Chida cha Ceramic Chotentha Kwambiri Chotsika Mtengo

Machubu a alumina ceramic amapangidwa makamaka ndi aluminiyamu oxide (Al₂O₃), nthawi zambiri amakhala ndi chiyero kuyambira 95% mpaka 99.8%.

Mphamvu yogwiritsira ntchito kutentha kwa alumina ceramics imatha kufika pafupifupi: 1400–1700°C. zomwe ndi zapamwamba kuposa quartz wamba.

Chifukwa cha makhalidwe awa, machubu a alumina ng'anjo amagwiritsidwa ntchito kwambiri mu:

Zitofu za semiconductor za m'ma laboratories;

• Zipangizo zofufuzira ndi chitukuko;
• l Machitidwe oyesera kutentha.

Komabe, alumina imagwiritsidwa ntchito pang'ono popanga zinthu zambiri zopangira semiconductor. Chifukwa chachikulu ndi kuchepetsa kuipitsidwa.

Poyerekeza ndi quartz, alumina ceramics ikhoza kuyambitsa:

• Kuipitsidwa ndi aluminiyamu;
• l Kuchuluka kwa zinyalala.

Pakupanga kwapamwamba kwa semiconductor komwe kumafuna kuchuluka kochepa kwambiri kwa kuipitsidwa, quartz ndi high-pure SiC zimakhalabe zosankha zomwe zimakondedwa.

Silicon Nitride Chubu (Si₃N₄): Chomera Chopangidwa Mwapamwamba Choteteza Kutentha Kwambiri

Silicon nitride (Si₃N₄) ndi chinthu china chapamwamba cha ceramic chomwe chimadziwika ndi mphamvu zake zapadera zamakaniko. Ntchito zina zomwe zingagwiritsidwe ntchito ndi semiconductor ndi izi:

• Zigawo zapadera za uvuni;
• Kafukufuku wa zida za semiconductor;
• Nyumba zadothi zotentha kwambiri.

Komabe, machubu a ng'anjo ya Si₃N₄ sagwiritsidwa ntchito kwambiri mu ng'anjo zazikulu zofalitsa za semiconductor chifukwa cha:

• Kuvuta kwambiri kupanga zinthu;
• Mtengo wokwera;
• Kutha kwa unyolo woperekera zinthu m'mafakitale ndi kochepa.

Mapeto

Chitoliro cha Diffusion Furnace ndi gawo lofunika kwambiri koma nthawi zambiri silimaganiziridwa kwambiri popanga zinthu za semiconductor. Zinthu zake zimakhudza mwachindunji:

• Kuchuluka kwa ma wafer;
• Kukhazikika kwa ndondomeko;
• Kugwira ntchito kwa tinthu tating'onoting'ono;
• Nthawi yonse ya zida.

Pakadali pano:

Machubu a QuartzKuchuluka kwa okosijeni ndi kufalikira kwa zinthu kumachitika chifukwa cha kuyera kwawo komanso kukhwima kwawo.

Machubu a SiCkupereka mphamvu yapamwamba ya kutentha kwa ntchito za semiconductor za m'badwo wotsatira.

Machubu a Alumina ndi silicon nitride amagwiritsidwa ntchito makamaka kutentha kwambiri komwe magwiridwe antchito amakina amayikidwa patsogolo.

Pamene kupanga ma semiconductor kukupitilira kutentha kwambiri, ma wafer akuluakulu ndi zida zopingasa, zipangizo zamakono za ceramic furnace zidzakhala ndi gawo lofunika kwambiri pazida zamakono za semiconductor mtsogolo.