Selelekela: Karolo ea Bohlokoa ea Lisebelisoa tsa Tube ea Sefurnace ho Tlhahisong ea Semiconductor
Tlhahisong ea wafer ea semiconductor, Diffusion Furnace Tube ke e 'ngoe ea likarolo tsa bohlokoa ka ho fetisisa tsa ts'ebetso ea mocheso o phahameng tse sebelisoang lisebelisoa tsa ts'ebetso ea mocheso. E fana ka tikoloho e laoloang ea karabelo bakeng sa lits'ebetso tse 'maloa tsa bohlokoa tsa semiconductor, ho kenyeletsoa:
- Ho qhibilihisa mocheso;
- Ho hasana ha Dopant;
- Ho tshwasa;
- Ho kenngoa ha LPCVD;
- Kalafo ea wafer e nang le mocheso o phahameng.
Ho fapana le dikarolo tsa sebōpi sa indasteri tse tloaelehileng, li-tube tsa sebōpi sa semiconductor li tlameha ho fihlela litlhoko tse thata haholo hobane esita le tšilafalo e sa fellang kapa tlhahiso ea likaroloana li ka ama ka kotloloho tlhahiso ea wafer le ts'epo ea sesebelisoa.
Nakong ea lits'ebetso tsa ho hasana ha semiconductor le oxidation, li-tubes tsa sebōpi hangata li pepesetsoa ho:
- Maemo a mocheso o phahameng a tloha ho 800°C ho isa ho 1200°C;
- Likhase tse oxidisang tse kang O₂ le H₂O;
- Likhase tse se nang matla tse kenyeletsang N₂ le Ar;
- Li-precursor tsa Dopant tse kang POCl₃ le BBr₃;
- Mefuta ea lik'hemik'hale tse senyang tse kang HCl.
Ka hona, thepa ea tube ea sebōpi e tlameha ho fana ka nako e le 'ngoe:
- Bohloeki ba lik'hemik'hale bo phahameng haholo;
- Botsitso bo botle ba mocheso;
- Tšilafalo e tlase ea tšepe;
- Ho hanyetsa ho bola ho hoholo;
- Tlhahiso e tlase ea likaroloana;
- Nako e telele ea ts'ebetso.
Ho ea ka litekanyetso tsa thepa ea lisebelisoa tsa semiconductor le mekhoa ea indasteri, thepa ea tube ea sebōpi e sebelisoang haholo e kenyelletsa:
- Quartz e Hloekileng Haholo (Fused Silica, SiO₂)
- Silicon Carbide (SiC Ceramic)
- Alumina Ceramic (Al₂O₃)
- Silicone Nitride Ceramic (Si₃N₄)
Tube ea Quartz e Hloekileng Haholo
Har'a thepa eohle ea tube ea sehatsetsi sa semiconductor, tube ea quartz e hloekileng haholo e ntse e le tharollo e ka sehloohong bakeng sa tlhahiso ea silicon wafer ea setso ka lebaka la bohloeki ba eona bo ikhethang, botsitso ba mocheso le theknoloji ea ts'ebetso e butsoitseng.
Li-tube tsa quartz tsa sehlopha sa semiconductor li etsoa ka silica e kopantsoeng e hloekileng haholo, moo karolo ea mantlha e leng silicon dioxide (SiO₂). Boemo ba bohloeki hangata bo feta 99.99%, ka taolo e tiileng ea litšila tsa tšepe tse kenyeletsang: Fe; Na; K; Cu; Al.
Mekhoa ea ho futhumatsa ka oxidation, li-tubes tsa sebōpi sa quartz li fana ka tikoloho e ntle ea karabelo bakeng sa ho theha likarolo tsa silicon oxide.
Likarabelo tse tloaelehileng li kenyelletsa:
Ho hema ka omisi:
Si + O₂ → SiO₂
Ho qhibilihisa metsi:
Si + H₂O → SiO₂ + H₂
Mekhoa ena ea oxidation e bohlokoa bakeng sa:
- Sebopeho sa dielectric sa heke;
- Ho se sebetse hantle ha bokaholimo;
- Meaho ea ho itšehla thajana.
Li-tube tsa Quartz li boetse li sebelisoa haholo lits'ebetsong tsa ho hasana ha dopant, ho kenyeletsoa:
- Ho hasana ha phosphorus ho sebelisoa POCl₃;
- Ho hasana ha Boron ho sebelisoa BBr₃;
- Mekhoa ea ho hasana ha arsenic.
Ho phaella moo, lipeipi tsa sebōpi sa quartz li sebelisoa haholo lits'ebetsong tsa LPCVD bakeng sa:
- Ho kenngoa ha silicon nitride;
- Ho kenngoa ha silicon ea polycrystalline.
Melemo ea bohlokoa ea li-tubes tsa sebōpi sa quartz e kenyelletsa:
- Bohloeki bo Hloahloa ba Lik'hemik'hale
- Katoloso e Tlase ea Thermal
- Tšoanang e Hlollang ea Thermal
Leha ho le jwalo, diphaephe tsa quartz le tsona di na le mefokolo e itseng. Moedi o ka sehloohong ke botsitso ba mechini mochesong o phahameng. Tlas'a ts'ebetso e telele ho feta hoo e ka bang 1100–1200°C, quartz e ka ba le:
- Ho fetoha ha tube;
- Ho thekesela;
- Matla a fokolang a mechini.
Ka hona, quartz e ntse e le khetho e ratoang bakeng sa tlhahiso ea semiconductor ea silicon e tloaelehileng empa ha e lokele haholo lits'ebetso tsa mocheso o phahameng haholo kapa tse senyang haholo.
Tube ea Silicon Carbide: Tharollo ea Mocheso o Phahameng bakeng sa Tlhahiso ea Semiconductor e Tsoetseng Pele
Sesepa sa silicon carbide (SiC) se hlahile e le thepa e 'ngoe e tšepisang bakeng sa lipeipi tsa sebōpi tse tsoetseng pele.
SiC ke motsoako oa letsopa o kopantsoeng o nang le liathomo tsa silicon le carbon. Hangata liserami tsa SiC tsa sehlopha sa semiconductor li kenyelletsa:
- SiC e kopantsoeng le karabelo;
- SiC e sintered;
- Lisebelisoa tsa CVD SiC tse hloekileng haholo.
Ha e bapisoa le quartz, SiC e fana ka ntlafatso e kholo:
- Ho hanyetsa mocheso;
- Matla a mechini;
- Ho tsamaisa mocheso ka mocheso;
- Ho tšoarella ha lik'hemik'hale.
E 'ngoe ea melemo ea bohlokoa ka ho fetisisa ea li-tube tsa sebōpi sa SiC ke bokhoni ba tsona bo phahameng ba ho sebelisa mocheso o phahameng.
Le hoja quartz ka kakaretso e lekanyelitsoe maemong a ts'ebetso a ka bang 1200°C, liserame tsa SiC li ka mamella mocheso o fetang 1500°C, e leng se etsang hore li lokele lits'ebetso tse tsoetseng pele tsa mocheso.
Phapang ea conductivity ea mocheso le eona ea bohlokoa:
- Quartz: ~1.4 W/m·K
- Silicon Carbide: 120–200 W/m·K
Ho khanna ha SiC mochesong ho phahameng ho nolofalletsa:
- Karabelo e potlakileng ea mocheso;
- Ho tšoana ha mocheso ho ntlafetseng;
- Ho fokotseha ha maemo a mocheso.
Litšebelisong tsa semiconductor, li-tube tsa sebōpi sa SiC li nahanoa haholo bakeng sa:
- Ho kenya metsi mochesong o phahameng;
- Mekhoa e tsoetseng pele ea ho hasana;
- Tlhahiso ea lisebelisoa tsa motlakase tsa silicon carbide;
- Ts'ebetso ea semiconductor ea GaN.
Alumina Tube (Al₂O₃): Thepa ea Ceramic ea Mocheso o Phahameng e Sebetsang ka Theko e Tlase
Li-tubes tsa ceramic tsa Alumina li etsoa haholo-holo ka aluminium oxide (Al₂O₃), hangata ka maemo a bohloeki a tlohang ho 95% ho isa ho 99.8%.
Bokhoni ba mocheso o sebetsang oa li-ceramic tsa alumina bo ka fihla ho hoo e ka bang: 1400–1700°C. e leng se phahameng ho feta quartz e tloaelehileng.
Ka lebaka la litšobotsi tsena, liphaephe tsa alumina tsa sebōpi li sebelisoa hangata ho:
Lifono tsa semiconductor tsa laboratori;
- l Disebediswa tsa dipatlisiso le ntshetsopele;
- l Mekhoa ea liteko ea ho sebetsana le mocheso.
Leha ho le jwalo, alumina e na le kamohelo e fokolang tlhahisong ya di-semiconductor tse nang le bongata bo boholo. Lebaka le ka sehloohong ke taolo ya tshilafatso.
Ha ho bapisoa le quartz, li-ceramic tsa alumina li ka hlahisa:
- Tšilafalo ea aluminium;
- Maemo a ho se hlweke a hodimo.
Bakeng sa tlhahiso e tsoetseng pele ea li-semiconductor e hlokang maemo a tlase haholo a tšilafalo, quartz le SiC e hloekileng haholo e ntse e le likhetho tse khethiloeng.
Tube ea Silicon Nitride (Si₃N₄): Ceramic e Tsoetseng Pele bakeng sa Khanyetso ea Thermal Shock
Silicon nitride (Si₃N₄) ke thepa e 'ngoe e tsoetseng pele ea letsopa e tsejoang ka thepa ea eona e ikhethang ea mechini. Litšebeliso tse ka bang teng tsa semiconductor li kenyelletsa:
- Likarolo tse khethehileng tsa sebōpi;
- Disebediswa tsa dipatlisiso tsa semiconductor;
- Meaho ea letsopa e nang le mocheso o phahameng.
Leha ho le jwalo, diphaephe tsa sehatsetsi sa Si₃N₄ ha di amohelwe haholo diphaepheng tse kgolo tsa ho hasana ha semiconductor ka lebaka la:
- Ho rarahana ho hoholo ha tlhahiso;
- Litšenyehelo tse phahameng;
- Kemiso ea phepelo ea indasteri e lekanyelitsoe.
Qetello
Phaephe ea Sefuru sa ho Fapana ke karolo ea bohlokoa empa hangata e sa nyenyefatsoe tlhahisong ea li-semiconductor. Thepa ea eona e susumetsa ka ho toba:
- Tlhahiso ea wafer;
- Botsitso ba ts'ebetso;
- Tshebetso ya dikarolwana;
- Nako ea bophelo ea lisebelisoa.
Hona jwale:
Liphaephe tsa Quartzlaola lits'ebetso tsa oxidation le phatlalatso tse tloaelehileng ka lebaka la bohloeki ba tsona bo ikhethang le khōlo.
Liphaephe tsa SiCfana ka bokgoni bo tswetseng pele ba mocheso bakeng sa ditshebediso tsa semiconductor tsa moloko o latelang.
Li-tube tsa Alumina le silicon nitride li sebeletsa lits'ebetso tse ikhethileng tsa mocheso o phahameng moo ts'ebetso ea mechini e etelletsoang pele.
Ha tlhahiso ea li-semiconductor e ntse e tsoela pele ho ea lithempereichareng tse phahameng, li-wafer tse kholo le lisebelisoa tse se nang le lekhalo le leholo, thepa e tsoetseng pele ea tube ea sebōpi sa letsopa e tla bapala karolo ea bohlokoa haholoanyane lisebelisoa tsa ts'ebetso ea li-semiconductor tsa nakong e tlang.
Nako ea poso: Phupu-24-2026