Ibikoresho bya Semiconductor Diffusion Furnace Tube: Quartz, SiC na Advanced Ceramic Solutions

Intangiriro: Uruhare rw'ingenzi rw'ibikoresho by'umuyoboro w'ifuru mu gukora ibikoresho bya semiconductor

Mu gukora wafer ya semiconductor, Diffusion Furnace Tube ni kimwe mu bice by'ingenzi cyane bikoresha ubushyuhe bwinshi bikoreshwa mu bikoresho bitunganya ubushyuhe. Itanga ibidukikije bigenzurwa mu bikorwa byinshi by'ingenzi bya semiconductor, birimo:

• ogisijeni y'ubushyuhe;
• Gukwirakwiza dopant;
• Kubika ibiryo;
• Gutanga LPCVD;
• Uburyo bwo kuvura wafer mu bushyuhe bwinshi.

Bitandukanye n'ibice bisanzwe by'itanura ry'inganda, imiyoboro y'itanura ya semiconductor igomba kuzuza ibisabwa bikomeye cyane kuko n'ibyandujwe n'uduce duto cyangwa gukora uduce duto bishobora kugira ingaruka ku musaruro wa wafer no ku buryo ibikoresho byizewe.

Mu gihe cyo gukwirakwiza no gutwika ibikoresho bya semiconductor, imiyoboro y'itanura ikunze guhura n'ibi bikurikira:

• Ubushyuhe bwinshi buri hagati ya 800°C na 1200°C;
• Imyuka igabanya ubushyuhe nka O₂ na H₂O;
• Imyuka idafite imbaraga irimo N₂ na Ar;
• Ibikoresho bya mbere bya Dopant nka POCl₃ na BBr₃;
• Ubwoko bw'ibinyabutabire byangiza nka HCl.

Bityo, ibikoresho by'umuyoboro w'itanura bigomba gutanga icyarimwe:

• Ubuziranenge buhanitse cyane bw'ibinyabutabire;
• Ubushyuhe buhamye cyane;
• Umwanda muke w'icyuma;
• Ubudahangarwa bwinshi bwo kwangirika;
• Gukora uduce duto duto;
• Igihe kirekire cyo gukora.

Dukurikije amahame ngenderwaho y'ibikoresho bya semiconductor n'imikorere y'inganda, ibikoresho bikoreshwa cyane mu gutwika ifuru birimo:

• Quartz yo mu bwoko bwa High Purity (Fused Silica, SiO₂)
• Karubide ya Silicone (SiC Ceramic)
• Alumina Ceramic (Al₂O₃)
• Ceramic ya Silicon Nitride (Si₃N₄)

Umuyoboro wa Quartz Ufite Isuku Rinini

Mu bikoresho byose by’ifuru ya semiconductor, umuyoboro wa quartz ufite isuku nyinshi ukomeje kuba igisubizo cy’ingenzi mu gukora silicon wafer isanzwe bitewe n’uko ifite isuku idasanzwe, ubushyuhe buhamye n’ikoranabuhanga ryo kuyitunganya rikuze.

Imiyoboro ya quartz yo mu rwego rwa semiconductor ikorwa muri silica ifite purity nyinshi, aho igice cy'ingenzi ari silicone dioxide (SiO₂). Igipimo cy'ubuziranenge gikunze kurenga 99.99%, hamwe no kugenzura neza imyanda y'icyuma irimo: Fe; Na; K; Cu; Al.

Mu mikorere ya oxidation y'ubushyuhe, imiyoboro ya quartz itanga ibidukikije byiza byo gukora ibice bya silicon oxide.

Ibitekerezo bisanzwe birimo:

Gusukura uruhu rwumye:

Si + O₂ → SiO₂

Gusukura amazi mu mazi:

Si + H₂O → SiO₂ + H₂

Izi nzira zo gusiga ogisijeni ni ingenzi kuri:

• Imiterere ya dielectric y'irembo;
• Guhagarara ku buso;
• Inyubako zo kwitandukanya.

Imiyoboro ya Quartz nayo ikoreshwa cyane mu bikorwa byo gukwirakwiza dopant, harimo:

• Gukwirakwiza fosifore hakoreshejwe POCl₃;
• Gukwirakwiza Boron hakoreshejwe BBr₃;
• Uburyo bwo gukwirakwiza Arsenic.

Byongeye kandi, imiyoboro ya quartz ikoreshwa cyane muri sisitemu za LPCVD kuri: 

• Gushyiramo silicon nitride;
• Gushyira silikoni ya polycrystalline.

Ibyiza by'ingenzi by'imiyoboro ya quartz irimo:

• Ubuziranenge bwiza bwa shimi
• Kwaguka guke k'ubushyuhe
• Ubushyuhe Bungana Cyane

Ariko, imiyoboro ya quartz nayo ifite imbogamizi zimwe na zimwe. Imbogamizi nyamukuru ni ugukomera kw'ubushyuhe bwinshi. Iyo ikoreshwa igihe kirekire hejuru ya 1100–1200°C, quartz ishobora kugira:

• Guhindura imiyoboro y'amazi;
• Kugwa;
• Ingufu za mekanike zagabanutse.

Bityo rero, quartz iracyari amahitamo meza cyane mu nganda zisanzwe za silikoni ariko ntabwo ikwiriye cyane mu nganda zikoresha ubushyuhe bwinshi cyane cyangwa zikoresha ubushyuhe bwinshi.

Umuyoboro wa Silicon Carbide: Igisubizo cy'ubushyuhe bwinshi mu gukora ibikoresho bya semiconductor bigezweho

Ibumba rya silicon carbide (SiC) ryagaragaye nk'igikoresho cyiza cyo gukoresha imiyoboro igezweho y'itanura.

SiC ni imvange ya keramike igizwe na atome za silikoni na karuboni. Imvange ya keramike ya SiC yo mu rwego rwa semiconductor isanzwe ikubiyemo:

• SiC ifitanye isano n'ingaruka;
• SiC ya Sintered;
• Ibikoresho bya CVD SiC bifite isuku nyinshi.

Ugereranyije na quartz, SiC itanga umusaruro mwiza cyane:

• Ubudahangarwa bw'ubushyuhe;
• Imbaraga za mekanike;
• Ubushobozi bwo gutwara ubushyuhe;
• Kuramba kw'imiti.

Kimwe mu byiza by'ingenzi by'imiyoboro ya SiC furnace ni ubushobozi bwayo bwo gukoresha ubushyuhe bwinshi.

Nubwo muri rusange quartz igarukira ku bushyuhe bugera kuri 1200°C, ceramic za SiC zishobora kwihanganira ubushyuhe burenga 1500°C, bigatuma ziba nziza ku bushyuhe buhanitse.

Itandukaniro ry'uburyo ubushyuhe butwaramo ibintu naryo rirakomeye:

• Quartz: ~1.4 W/m·K
• Karubide ya silikoni: 120–200 W/m·K

Ubushobozi bwo hejuru bwo gutwara ubushyuhe bwa SiC butuma:

• Uburyo bwo kwihuta mu bushyuhe;
• Ubushyuhe bungana neza;
• Kugabanuka k'ubushyuhe.

Mu ikoreshwa rya semiconductor, imiyoboro ya SiC furnace yitabwaho cyane cyane kuri:

• Gufunga ibinyabiziga mu bushyuhe bwinshi;
• Uburyo bwo gukwirakwiza buteye imbere;
• Gukora ibikoresho by'amashanyarazi bya karubide ya silikoni;
• Gutunganya semiconductor ya GaN.

Umuyoboro wa Alumina (Al₂O₃): Igikoresho cya Ceramic gihendutse kandi gitanga ubushyuhe bwinshi

Imiyoboro ya alumina ikorwa ahanini muri okiside ya aluminiyumu (Al₂O₃), ubusanzwe ifite urwego rw'ubuziranenge ruri hagati ya 95% na 99.8%.

Ubushyuhe bw'imikorere y'ibinyabutabire bya alumina bushobora kugera kuri: 1400–1700°C. Ni ukuvuga ko ari hejuru y'ubushyuhe busanzwe bwa quartz.

Kubera iyi miterere, imiyoboro y'ifuru ya alumina ikunze gukoreshwa muri:

Amatanura ya semiconductor yo muri laboratwari;

• l Ibikoresho by'ubushakashatsi n'iterambere;
• l Sisitemu zo gukora ubushyuhe mu buryo bw'igerageza.

Ariko, alumina ntikoreshwa cyane mu nganda zikora ibikoresho byinshi bya semiconductor. Impamvu nyamukuru ni ukurwanya ubwandu.

Ugereranyije na quartz, alumina ceramics ishobora gushyiramo:

• Kwanduzwa na aluminiyumu;
• l Ingano y'umwanda iri hejuru.

Ku musaruro w’ibice bya semiconductor bigezweho bisaba urwego ruto cyane rw’ubwandu, quartz na SiC ifite isuku nyinshi ni byo bigikunze kuba amahitamo meza.

Umuyoboro wa Silicon Nitride (Si₃N₄): Ceramic igezweho yo kurwanya imihindagurikire y'ubushyuhe

Silikoni nitride (Si₃N₄) ni ikindi gikoresho cya keramike kizwiho imiterere yacyo idasanzwe ya mekanike. Ikoreshwa rya semiconductor rishobora gukoreshwa harimo:

• Ibice byihariye by'itanura;
• Ubushakashatsi ku bikoresho bya semiconductor;
• Inyubako za ceramic zishyushye cyane.

Ariko, imiyoboro ya Si₃N₄ ntabwo ikoreshwa cyane mu itanura rinini rikwirakwiza ibikoresho bya semiconductor bitewe na:

• Ubuhanga bwinshi mu gukora ibintu;
• Ikiguzi kiri hejuru;
• Igihe cyo gutanga ibicuruzwa mu nganda kigabanuka.

Umwanzuro

Umuyoboro w'ifuru utembanwa ni igice cy'ingenzi ariko gikunze kugaragara nk'ikidakwiye mu nganda za semiconductor. Ibikoresho byawo bigira ingaruka zitaziguye kuri ibi bikurikira:

• Umusaruro w'umugati;
• Guhagarara neza mu mikorere;
• Imikorere y'uduce duto;
• Igihe cyose ibikoresho bimara.

Ubu:

Imiyoboro ya Quartzbiganza inzira zisanzwe zo gusiga no gukwirakwiza ibintu bitewe n'uko bisukuye kandi bikuze cyane.

Imiyoboro ya SiCgutanga ubushobozi buhanitse bwo gukoresha ubushyuhe mu bikoresho bya semiconductor byo mu gisekuru gitaha.

Imiyoboro ya alumina na silikoni nitride ikoreshwa mu buryo bwihariye mu bushyuhe bwo hejuru aho imikorere ya mekanike ishyirwa imbere.

Uko inganda za semiconductor zikomeje kugera ku bushyuhe bwinshi, wafer nini n'ibikoresho binini bya bandgap, ibikoresho bya keramike byo mu ifuru bizagira uruhare runini mu bikoresho bya semiconductor bizaza.