SiCYana da halaye na babban bandgap, babban ƙarfin zafi, ƙarfin filin fashewa mai mahimmanci, da kuma yawan juzu'in electrons mai yawa. Yana iya biyan buƙatun aikace-aikacen a ƙarƙashin yanayin zafi mai yawa, matsin lamba mai yawa, mita mai yawa, da yanayin wutar lantarki mai yawa. Ana iya amfani da shi sosai a cikin sabbin motocin makamashi, na'urorin ɗaukar hoto, sarrafa masana'antu, sadarwa ta mitar rediyo da sauran fannoni. Tare da saurin ci gaban masana'antu masu alaƙa, kasuwar semiconductor ta ƙarni na uku da aka wakilta ta hanyar silicon carbide ta haifar da sabbin damammaki.
Girman kristal shine babban haɗin samar da sinadarin silicon carbide, kuma kayan aikin shine tanderun girma na kristal. Kamar tanderun girma na kristal na gargajiya na silicon, tsarin tanderun ba shi da rikitarwa sosai. Ya ƙunshi jikin tanderun, tsarin dumama, tsarin watsa coil, tsarin tara iska da aunawa, tsarin hanyar iskar gas, tsarin sanyaya, tsarin sarrafawa, da sauransu. Filin zafi da yanayin aiki suna ƙayyade mahimman alamun ingancin kristal na silicon carbide, girma, watsawa da sauran mahimman alamun.
Ⅰ. Matsalolin da ke tattare da fasahar ci gaban lu'ulu'u na silicon carbide
Zafin girman lu'ulu'u na silicon carbide yana da girma sosai kuma ba za a iya sa ido a kansa ba, don haka babban wahalar tana cikin tsarin da kanta:
(1)Wahala wajen sarrafa filin zafi: Kula da ramin da aka rufe mai zafi sosai yana da wahala kuma ba za a iya sarrafa shi ba. Ba kamar kayan aikin girma na lu'ulu'u na gargajiya da aka ja da silicon ba, wanda ke da babban matakin sarrafa kansa kuma ana iya lura da shi, sarrafawa da daidaita tsarin girma na lu'ulu'u, lu'ulu'u na silicon carbide suna girma a cikin rufaffiyar sarari a cikin yanayin zafi mai yawa sama da 2,000°C, kuma zafin girma yana buƙatar a sarrafa shi daidai lokacin samarwa, wanda ke sa sarrafa zafin jiki ya yi wahala;
(2)Wahala wajen sarrafa siffar lu'ulu'u: Ƙananan bututu, abubuwan da suka haɗa da polymorphic, tarwatsewa da sauran lahani suna iya faruwa a lokacin girma, kuma suna shafar juna da kuma haɓaka juna. Ƙananan bututu (MP) lahani ne ta hanyar nau'in da girmansu ya kai microns da yawa zuwa goma na microns, waɗanda sune manyan lahani na na'urori. Lu'ulu'u guda ɗaya na silicon carbide sun ƙunshi nau'ikan lu'ulu'u sama da 200 daban-daban, amma kaɗan ne kawai daga cikin tsarin lu'ulu'u (Nau'in 4H) su ne kayan semiconductor da ake buƙata don samarwa. Canjin siffar lu'ulu'u yana iya faruwa yayin tsarin girma, wanda ke haifar da lahani ga haɗakar polymorphic. Saboda haka, ya zama dole a sarrafa sigogi daidai kamar rabon silicon-carbon, canjin zafin jiki na girma, ƙimar girma na lu'ulu'u, da matsin lamba na kwararar iskar gas.
Bugu da ƙari, akwai canjin zafin jiki a cikin filin zafi na haɓakar lu'ulu'u guda ɗaya na silicon carbide, wanda ke haifar da damuwa ta ciki da kuma rushewar da ke haifar da shi (basal plane dislocation BPD, screw dislocation TSD, edge dislocation TED) yayin tsarin haɓakar lu'ulu'u, wanda hakan ke shafar inganci da aikin epitaxy da na'urori masu zuwa.
(3)Rashin wahalar sarrafa shan ƙwayoyi: Dole ne a sarrafa shigar da ƙazanta daga waje sosai don samun lu'ulu'u mai sarrafa abubuwa tare da allurar da ke juyawa;
(4)Sannu a hankali saurin girma: Yawan ci gaban silicon carbide yana da jinkiri sosai. Na gargajiyakayan siliconKwanaki 3 ne kawai ake buƙata don girma zuwa sandar lu'ulu'u, yayin da sandunan lu'ulu'u na silicon carbide ke buƙatar kwanaki 7. Wannan yana haifar da ƙarancin ingancin samarwa na silicon carbide da ƙarancin fitarwa.
A gefe guda kuma, sigogin girma na sinadarin silicon carbide epitaxial suna da matuƙar wahala, ciki har da rashin iskar da kayan aiki ke yi, kwanciyar hankali na matsin iskar gas a cikin ɗakin amsawa, daidaitaccen sarrafa lokacin shigar da iskar gas, daidaiton rabon iskar gas, da kuma tsauraran kula da zafin wurin ajiyewa. Musamman ma, tare da inganta matakin ƙarfin lantarki mai jurewa na na'urar, wahalar sarrafa mahimman sigogi na wafer epitaxial ya ƙaru sosai.
Bugu da ƙari, tare da ƙaruwar kauri na layin epitaxial, yadda za a sarrafa daidaiton juriya da rage yawan lahani yayin da ake tabbatar da kauri ya zama wani babban ƙalubale. A cikin tsarin sarrafawa mai amfani da wutar lantarki, ya zama dole a haɗa na'urori masu auna firikwensin da masu kunna wutar lantarki masu inganci don tabbatar da cewa ana iya daidaita sigogi daban-daban daidai kuma cikin kwanciyar hankali. A lokaci guda, inganta tsarin sarrafawa shi ma yana da mahimmanci. Yana buƙatar iya daidaita dabarun sarrafawa a ainihin lokaci bisa ga siginar amsawa don daidaitawa da canje-canje daban-daban a cikingirma na silica carbide epitaxialtsari.
Ⅱ. Babban matsaloli wajen kera abubuwan da ke ɗauke da silicon carbide:
1. Zafin girma ya wuce 2000℃, wanda ya ninka na silicon sau biyu.
2. Kauri na sandar lu'ulu'u ƙanana ne a lokacin girman lu'ulu'u, kuma sandar lu'ulu'u mai tsawon santimita 2 tana girma cikin kwana 7.
3. Bukatun nau'in lu'ulu'u suna da yawa, kuma akwai kaɗan daga cikin carbide na silicon guda ɗaya mai tsarin lu'ulu'u.
4. Yankewa yana da ƙarfi sosai, kuma silicon carbide yana da matuƙar tauri.
A taƙaice, tsadar lokaci da fasahar sarrafawa mai sarkakiya suna ƙayyade tsadar abubuwan da ke cikin silicon carbide, wanda ke iyakance amfani da silicon carbide.
III. Rarraba tanderun girma na lu'ulu'u
Dangane da hanyoyin dumama daban-daban, ana iya raba tanderun girma na lu'ulu'u zuwa nau'in induction da nau'in juriya. A halin yanzu, yawancin kayan aikin da ake da su a kasuwa nau'in induction ne, wanda ke da fa'idodin ƙarancin farashi, tsari mai sauƙi, kulawa mai dacewa da ingantaccen zafi. Duk da haka, saboda tasirin induction na lantarki, zafin axial da zafin radial na induction dumama suna haɗuwa, kuma ba zai yiwu a yi la'akari da saurin girma na lu'ulu'u da ingancin girma na lu'ulu'u ba.
Dandalin haɓakar zafin jiki na juriya zai iya sarrafa zafin axial da zafin radial daidai bi da bi, wanda ke taimakawa wajen haɓaka manyan lu'ulu'u kuma yana inganta ƙimar haɓakar lu'ulu'u. Yana ɗaya daga cikin mafita don haɓakar lu'ulu'u mai inganci mai inci 8 na silicon carbide na gaba.
Kwatanta tsakanin hanyar induction da hanyar juriya:
| Hanyar shigarwa | Hanyar juriya | |
| Ka'idar aiki | Dumamawar induction wata hanya ce ta maganin zafi wadda ke amfani da tasirin maganadisu na wutar lantarki don ƙirƙirar yawan wutar da aka haifar a saman saman aikin, tana dumama shi da sauri zuwa yanayin austenite, sannan ta sanyaya shi da sauri don samun tsarin martensitic. | Dumama juriya tana amfani da zafin Joule da wutar lantarki ke fitarwa ta cikin na'urar jagora a matsayin tushen zafi. Ana iya raba shi zuwa rukuni biyu: dumama juriya kai tsaye (abin dumama lantarki ko matsakaici mai sarrafawa) da dumama juriya kai tsaye. |
| Kula da zafin jiki | Hanyar shigar da na'urar tana dumama filin maganadisu na ciki ta hanyar na'urar shigar da na'urar a wajen na'urar. Saurin dumama yana da sauri, amma nisan da ke tsakanin na'urar shigar da na'urar da kuma na'urar ta yi nisa, yankin radiation ya bazu, kuma yana da wuya a sarrafa yadda zafin saman na'urar ke samarwa a kwance. | Hanyar juriya tana saita wani hita daban, wanda yake kusa da ginshiƙin. Ta hanyar daidaita hita, za a iya sarrafa zafin saman ginshiƙin daidai. |
| Girman lu'ulu'u mai girma | Lokacin da ake ƙara na'urorin dumama da yawa a cikin tsarin filin zafi na hanyar induction, filayen maganadisu na iya haɗuwa da juna, wanda ke haifar da rashin rarraba filin maganadisu da zafi cikin sauƙi bisa ga manufar ƙira, wanda ke shafar tasirin dumama da haɓakar lu'ulu'u. | Yana da sauƙi a tsara tsarin dumama mai zaman kansa mai matakai da yawa don kayan aikin haɓaka lu'ulu'u masu juriya, kuma yanayin radial na kayan aikin da kansa ƙarami ne, wanda zai iya biyan buƙatun girman lu'ulu'u mai girma. |
| Zagayen girma na lu'ulu'u | Tsarin shigar da kristal yana ɗaukar kimanin kwanaki 10, cirewar yana ɗaukar kwanaki 10-15, kuma jimlar zagayowar girma shine kwanaki 20-25. | Zagayen girma na lu'ulu'u yana ɗaukar kimanin kwanaki 5-7, kuma ana iya cire shi ta atomatik, kuma zafin jiki yana raguwa a hankali bayan gazawar wutar lantarki. |
| Amfani da makamashi | Yawan amfani da makamashin hanyar juriya ya ninka sau 2-3 fiye da na hanyar shigarwa. | |
| Matsayin yawan amfanin ƙasa | Yawan lu'ulu'u da aka noma ta hanyar juriya tanderun girma na kristal yana da matuƙar inganta idan aka kwatanta da tanderun girma na kristal ta hanyar induction | |
Lokacin Saƙo: Yuni-24-2025