He aha te oumu tipu tioata silicon carbide (SiC)?

SiCHe āhuatanga o te āputa whānui, te kawe wera nui, te kaha o te mara pakaru nui, me te tere tere o te nekehanga irahiko. Ka taea e ia te whakatutuki i ngā whakaritenga tono i raro i ngā āhuatanga pāmahana teitei, pēhanga teitei, auau teitei, me te mana teitei. Ka taea te whakamahi whānui i roto i ngā waka pūngao hou, photovoltaics, whakahaere ahumahi, whakawhitiwhitinga auau reo irirangi me ētahi atu mara. I te tere o te whanaketanga o ngā ahumahi e pā ana, kua puta mai ngā whai wāhitanga hou i te mākete semiconductor tuatoru-whakatupuranga e tohuhia ana e te silicon carbide.

Ko te tipu tioata te hononga matua o te hanga papa hanga silicon carbide, ā, ko te taputapu matua ko te oumu tipu tioata. He rite ki ngā oumu tipu tioata silicon-grade tuku iho, kāore i te tino uaua te hanganga o te oumu. Ko te nuinga o te mea he tinana oumu, he pūnaha whakamahana, he tikanga tuku koiri, he pūnaha hopu me te ine korehau, he pūnaha ara hau, he pūnaha whakamatao, he pūnaha whakahaere, me ētahi atu. Ko ngā āhuatanga o te mara wera me te tukanga e whakatau ana i ngā tohu matua o te kounga tioata silicon carbide, te rahi, te kawe hiko me ētahi atu tohu matua.

Ⅰ. Ngā uauatanga i roto i te hangarau tipu tioata silicon carbide

He tino tiketike te pāmahana o te tipu o te tioata silicon carbide, ā, kāore e taea te aroturuki, nō reira ko te uauatanga matua kei roto i te tukanga tonu:

(1)He uaua ki te whakahaere i te papa weraHe uaua, he kore e taea te whakahaere i te aroturukitanga o te kōhao pāmahana-tiketike kua kati. He rerekē ki ngā taputapu whakatipu tioata kume-wairewa tuku iho e ahu mai ana i te silicon, he tino aunoa te mahi, ā, ka taea te tirotiro, te whakahaere me te whakarerekē i te tukanga tipu tioata, ka tipu ngā tioata silicon carbide i roto i te wāhi kati i roto i te taiao pāmahana-tiketike i runga ake i te 2,000°C, ā, me whakahaere tika te pāmahana tipu i te wā whakaputa, ka uaua ai te whakahaere pāmahana;

(2)He uaua ki te whakahaere i te āhua o te tioata: He ngāwari te puta o ngā paipa iti, ngā whakaurunga maha-momo, ngā nekehanga me ētahi atu hapa i te wā o te tukanga tipu, ā, ka pāngia, ka whanakehia hoki e rātou tetahi ki tetahi. Ko ngā paipa iti (MP) he hapa momo-roto me te rahi mai i te maha o ngā maikoroni ki te tekau maikoroni, he hapa nui ēnei o ngā taputapu. Kei roto i ngā tioata takitahi silicon carbide neke atu i te 200 ngā momo tioata rerekē, engari he torutoru noa ngā hanganga tioata (Momo 4H) ko ngā rauemi haurua-ira e hiahiatia ana mō te hanga. Ka puta te panonitanga āhua tioata i te wā o te tukanga tipu, ka hua ake he hapa whakaurunga maha-āhua. Nō reira, me whakahaere tika ngā tawhā pēnei i te ōwehenga silicon-waro, te pikinga pāmahana tipu, te tere tipu tioata, me te pēhanga rere hau.

Hei tāpiritanga, kei roto i te mara wera o te tipu tioata kotahi o te silicon carbide he pikinga pāmahana, ka hua ake te ahotea ā-roto taketake me ngā nekehanga hua (nekehanga papa turanga BPD, nekehanga tīwiri TSD, nekehanga taha TED) i te wā o te tukanga tipu tioata, ā, ka pā ki te kounga me te mahi o ngā epitaxy me ngā taputapu e whai ake nei.

(3)Te whakahaere uaua i te dopingMe tino whakahaere te whakaurunga mai o ngā poke o waho kia puta ai he tioata arataki me te tāpiringa aronga;

(4)Te tere tipu puhoiHe tino puhoi te tere tipu o te silicon carbide. Tuku ihongā rauemi siliconE toru noa ngā rā e hiahiatia ana hei tipu hei tokotoko karaihe, engari e whitu ngā rā e hiahiatia ana mō ngā tokotoko karaihe silicon carbide. Nā tēnei ka iti ake te pai o te whakaputanga o te silicon carbide, ā, he iti noa iho te putanga.

I tētahi atu taha, he tino uaua ngā tawhā o te tipu epitaxial silicon carbide, tae atu ki te ātete hau o te taputapu, te pumau o te pēhanga hau i roto i te rūma tauhohenga, te whakahaere tika i te wā whakauru hau, te tika o te ōwehenga hau, me te whakahaere pakari o te pāmahana whakatakotoranga. Ina koa, me te whakapainga o te taumata ngaohiko ātete o te taputapu, kua tino piki ake te uaua o te whakahaere i ngā tawhā matua o te wafer epitaxial.

Hei tāpiritanga, me te pikinga ake o te matotoru o te paparanga epitaxial, me pēhea te whakahaere i te ōritetanga o te ātete me te whakaiti i te kiato hapa me te whakarite i te matotoru kua noho hei wero nui anō. I roto i te pūnaha whakahaere hiko, me whakauru ngā pūoko me ngā kaiwhakaoho tino tika kia taea ai te whakahaere tika me te pumau i ngā tawhā rerekē. I te wa ano, he mea nui hoki te arotau i te raupapatanga whakahaere. Me taea te whakarite i te rautaki whakahaere i te wā tūturu kia rite ki te tohu urupare kia urutau ki ngā huringa rerekē o tete tipu epitaxial o te silicon carbidetukanga

Ⅱ. Ngā uauatanga matua i roto i te hanga o ngā paparanga silicon carbide:

1. Kei runga ake i te 2000℃ te pāmahana tipu, e rua te teitei ake i te pāmahana tipu o te silicon.

2. He iti te matotoru o te tokotoko tioata i te wā tipu tioata, ā, ka tupu te tokotoko tioata silicon carbide 2cm i roto i ngā rā e whitu.

3. He nui ngā whakaritenga mō te momo tioata, ā, he torutoru noa iho ngā mea he karaihe kotahi te karaihe me ngā hanganga tioata.

4. He nui te pakaru o te tapahi, ā, he tino pakari te silicon carbide.

Hei whakarāpopototanga, ko te utu nui o te wā me te hangarau tukatuka uaua e whakatau ana i te utu nui o ngā papa silicon carbide, e whakawhāiti ana i te tono o te silicon carbide.

III. Te whakarōpūtanga o ngā oumu tipu karaihe

E ai ki ngā tikanga whakamahana rerekē, ka taea te wehewehe i ngā oumu whakatipu karaihe ki te momo whakapūngao me te momo ātete. I tēnei wā, ko te nuinga o ngā taputapu kei te mākete he momo whakapūngao, he iti te utu, he māmā te hanganga, he watea te tiaki me te pai o te wera. Heoi, nā te pānga whakapūngao hikohiko, e honoa ana te pāmahana tuaka me te pāmahana radial o te whakamahana whakapūngao, ā, kāore e taea te whakaaro ki te tere tipu karaihe me te kounga tipu karaihe.

Ka taea e te tūāpapa tipu ātete wera te whakahaere tika i te pāmahana tuaka me te pāmahana radial, e whai hua ana ki te tipu o ngā tioata rahi-rahi, ā, e whakapai ake ana hoki i te tere tipu tioata. Ko tētahi o ngā otinga mō te tipu tioata silicon carbide 8-inihi kounga teitei ā muri ake nei.

Te whakataurite i waenga i te tikanga whakaawe me te tikanga ātete: