Itanura rya silicon carbide (SiC) crystal growth ni iki?

SiCIfite imiterere y’icyuho kinini, ubwikorezi bw’ubushyuhe bwinshi, imbaraga nyinshi zo kugabanya ingufu, hamwe n’umuvuduko mwinshi wo guhindagurika kwa electron. Ishobora guhaza ibisabwa mu ikoreshwa ryayo mu gihe cy’ubushyuhe bwinshi, umuvuduko mwinshi, imbaraga nyinshi, n’imbaraga nyinshi. Ishobora gukoreshwa cyane mu modoka nshya zikoresha ingufu, photovoltaics, igenzura ry’inganda, itumanaho rya radiyo n’izindi nzego. Bitewe n’iterambere ryihuse ry’inganda zifitanye isano, isoko rya semiconductor ry’ikinyejana cya gatatu rihagarariwe na silicon carbide ryazanye amahirwe mashya.

Gukura kwa kristu ni ihuriro ry'ingenzi ry'umusaruro wa kristu ya karuboni, kandi ibikoresho by'ingenzi ni itanura rikura rya kristu. Kimwe n'amatanura asanzwe akura ya kristu ya kristu, imiterere y'itanura ntabwo igoye cyane. Igizwe ahanini n'umubiri w'itanura, sisitemu yo gushyushya, uburyo bwo kohereza uruziga, sisitemu yo gupima no gupima imvange, sisitemu yo gukonjesha, sisitemu yo kugenzura, n'ibindi. Imiterere y'ubushyuhe n'imiterere y'imikorere bigena ibipimo by'ingenzi by'ubwiza bwa kristu ya karuboni ya kristu, ingano, ubushobozi bwo gutwara n'ibindi bipimo by'ingenzi.

Ⅰ. Ingorane mu ikoranabuhanga ryo gukura kwa silicon carbide crystal

Ubushyuhe bw'ikura rya kristale ya silikoni karuboni buri hejuru cyane kandi ntibushobora gukurikiranwa, bityo ingorane nyamukuru iri mu gikorwa ubwacyo:

(1)Ingorane mu kugenzura ingufu z'ubushyuhe: Gukurikirana umwobo ufunze w’ubushyuhe bwinshi biragoye kandi ntibigenzurwa. Bitandukanye n’ibikoresho bisanzwe byo gukuramo kristu bishingiye kuri silicon, bifite urwego rwo hejuru rw’imikorere kandi inzira yo gukuramo kristu ishobora kugaragara, ikagenzurwa kandi igahindurwa, kristu za kristu za kristu zikurira ahantu hafunze ahantu hari ubushyuhe bwinshi buri hejuru ya 2.000°C, kandi ubushyuhe bw’ikura bugomba kugenzurwa neza mu gihe cyo gukora, ibyo bigatuma kugenzura ubushyuhe bigorana;

(2)Ingorane mu kugenzura imiterere ya kristale: Imiyoboro mito, ibice bya polymorphic, kwimuka n'ibindi bidafite ubusembwa bikunze kubaho mu gihe cyo gukura, kandi bigira ingaruka no guhinduka hagati yabyo. Imiyoboro mito (MP) ni ubusembwa bunyura mu bwoko bufite ingano ya mikoroni nyinshi kugeza kuri mikoroni icumi, ari na byo bitagira ubusembwa ku bikoresho. Kristale imwe ya silicon carbide irimo imiterere irenga 200 itandukanye ya kristu, ariko imiterere mike ya kristu (Ubwoko bwa 4H) ni ibikoresho bya semiconductor bikenewe mu gukora. Ihinduka ry'imiterere ya kristu rikunze kubaho mu gihe cyo gukura, bigatera inenge zo gushyiramo ibintu bitandukanye. Kubwibyo, ni ngombwa kugenzura neza ibipimo nka silicon-carbon ratio, ubushyuhe bw'ikura, igipimo cy'ikura rya kristu, n'umuvuduko w'umwuka uva mu kirere.

Byongeye kandi, hari ubushyuhe bukabije mu gice cy’ubushyuhe cya silicon carbide single crystal growth, bigatera stress y’imbere mu mubiri ndetse n’ingaruka zabyo (basal plane dislocation BPD, screw dislocation TSD, edge dislocation TED) mu gihe cy’ikura rya crystal, bityo bigira ingaruka ku bwiza n’imikorere ya epitaxy n’ibikoresho bikurikiraho.

(3)Kugenzura imiti igabanya ubukana bw'ibiyobyabwenge bigoranye: Kwinjira kw'imyanda yo hanze bigomba kugenzurwa neza kugira ngo haboneke kristale iyobora ibintu irimo doping iyobora icyerekezo;

(4)Igipimo cy'izamuka rigenda buhoro: Igipimo cyo gukura kwa karubide ya silikoni kiri hasi cyane. Gakondoibikoresho bya silikoniikenera iminsi 3 gusa kugira ngo ikure ibe inkoni ya kristu, mu gihe inkoni za kristu ...

Ku rundi ruhande, ibipimo by'izamuka rya epitaxial ya silikoni karubide birasaba cyane, birimo ubushobozi bwo guhumeka bw'ibikoresho, umuvuduko wa gaze mu cyumba cy'imyitozo, kugenzura neza igihe cyo gutangiza gaze, ukuri kw'ikigereranyo cya gaze, no gucunga neza ubushyuhe bwo gushyiramo. By'umwihariko, bitewe no kunoza urwego rw'amashanyarazi yo kwihanganira igikoresho, ingorane zo kugenzura ibipimo by'ingenzi bya epitaxial wafer zariyongereye cyane.

Byongeye kandi, bitewe n’ubwiyongere bw’ubugari bw’urwego rwa epitaxial, uburyo bwo kugenzura uburinganire bw’ubudahangarwa no kugabanya ubucucike bw’ibice mu gihe ugenzura ko ubugari bwabyo bwabaye ikindi kibazo gikomeye. Muri sisitemu yo kugenzura amashanyarazi, ni ngombwa gushyiramo sensors na actuators bifite ubuhanga bwo hejuru kugira ngo harebwe ko ibipimo bitandukanye bishobora kugenzurwa neza kandi neza. Muri icyo gihe, kunoza algorithme yo kugenzura nabyo ni ingenzi. Igomba kuba ishobora guhindura ingamba zo kugenzura mu gihe nyacyo hakurikijwe ikimenyetso cy’ibitekerezo kugira ngo ihuze n’impinduka zitandukanye murigukura kwa silicon carbide epitaxialinzira.

Ⅱ. Ingorane nyamukuru mu gukora substrates za silicon carbide:

1. Ubushyuhe bw'ikura buri hejuru ya 2000°C, bungana kabiri n'ubunini bwa silicon.

2. Ubunini bw'inkoni ya kristu ni buto mu gihe cy'ikura rya kristu, kandi inkoni ya kristu ya silikoni ya 2cm ikura mu minsi 7.

3. Ibisabwa mu bwoko bwa kristu biri hejuru, kandi hari karubide nke za silicone imwe gusa zifite imiterere ya kristu.

4. Gukata birashaje cyane, kandi karubide ya silikoni ifite ubukana bwinshi cyane.

Muri make, ikiguzi gihenze n'ikoranabuhanga rihambaye ryo gutunganya ibintu rigena ikiguzi kinini cya substrates za silicon carbide, ibyo bikaba bigabanya ikoreshwa rya silicon carbide.

III. Gushyira mu byiciro amatanura akuramo kristu

Dukurikije uburyo butandukanye bwo gushyushya, amatanura yo gukuramo kristu ashobora kugabanywamo ubwoko bw’inyongera n’ubwoko bw’ubudahangarwa. Kuri ubu, ibikoresho byinshi biri ku isoko ni ubwoko bw’inyongera, bifite ibyiza byo kugabanuka, imiterere yoroshye, kubungabunga byoroshye no gukoresha neza ubushyuhe. Ariko, bitewe n’ingaruka za electromagnetic induction, ubushyuhe bw’umurongo n’ubushyuhe bw’imirasire by’inyongera birahuzwa, kandi ntibishoboka kwita ku muvuduko w’ikura rya kristu n’ubwiza bw’ikura rya kristu.

Urubuga rwo gukuraho ubushyuhe rushobora kugenzura neza ubushyuhe bw'umurongo n'ubushyuhe bwa radial, ibyo bikaba bifasha mu gukura kwa kristu nini kandi bikanoza umuvuduko wo gukura kwa kristu. Ni kimwe mu bisubizo by'iterambere ry'ubushyuhe bwa kristu ya silikoni ya santimetero 25 mu gihe kizaza.

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