Chii chinonzi silicon carbide (SiC) crystal growth furnace?

SiCine hunhu hwebandgap yakakura, thermal conductivity yakanyanya, high critical field strength, uye high electron saturation drift rate. Inogona kusangana nezvinodiwa zvekushandisa pasi pekupisa kwakanyanya, kumanikidzwa kwakanyanya, frequency yakanyanya, uye mamiriro emagetsi akakwira. Inogona kushandiswa zvakanyanya mumotokari itsva dzesimba, photovoltaics, industrial control, radio frequency communications nedzimwe nzvimbo. Nekukura nekukurumidza kwemaindasitiri ane hukama, musika we semiconductor wechizvarwa chechitatu unomiririrwa nesilicon carbide waunza mikana mitsva.

Kukura kwekristaro ndiyo nzira huru yekugadzira silicon carbide substrate, uye midziyo mikuru ikristaro kukura kwekristaro. Kufanana nemidziyo yekukura kwekristaro yekristaro yekristaro yekristaro yechinyakare, chimiro chechoto hachina kuoma zvakanyanya. Chinonyanya kuumbwa nemuviri wechoto, sisitimu yekupisa, nzira yekutumira coil, nzira yekutora vacuum uye yekuyera, sisitimu yenzira yegesi, sisitimu yekutonhodza, sisitimu yekudzora, nezvimwewo. Munda wekupisa nemamiriro ekushanda zvinosarudza zviratidzo zvakakosha zvemhando yekristaro yekristaro yesilicon carbide, saizi, conductivity nezvimwe zviratidzo zvikuru.

Ⅰ. Matambudziko mukukura kwetekinoroji yesilicon carbide crystal

Kupisa kwekukura kwesilicon carbide crystal kwakakwira zvikuru uye hakugone kutariswa, saka dambudziko guru riri mukuita kwacho pacharo:

(1)Dambudziko rekudzora simba rekupisa: Kuongororwa kwenzvimbo yakavharwa ine tembiricha yepamusoro kwakaoma uye hakudzoreki. Kusiyana nemidziyo yekukura kwekristaro yakavakirwa pasilicon-based solution-pulled crystal, ine mwero wepamusoro we automation uye maitiro ekukura kwekristaro anogona kuonekwa, kudzorwa uye kugadziriswa, makristaro esilicon carbide anokura munzvimbo yakavharwa munzvimbo ine tembiricha yepamusoro pamusoro pe2,000°C, uye tembiricha yekukura inoda kudzorwa nemazvo panguva yekugadzira, izvo zvinoita kuti kudzora tembiricha kuve kwakaoma;

(2)Dambudziko rekudzora chimiro chekristaro: Ma micropipes, polymorphic inclusions, dislocations nezvimwe zvikanganiso zvinowanzoitika panguva yekukura, uye zvinokanganisana uye zvinoshanduka. Ma micropipes (MP) zvikanganiso zvemhando yepamusoro zvine saizi yema microns akati wandei kusvika kumakumi ema microns, izvo zvinokanganisa zvikuru zvemidziyo. Silicon carbide single crystals ine mafomu akasiyana e crystal anopfuura 200, asi zvivakwa zve crystal zvishoma chete (Rudzi rwe4H) ndizvo zvinhu zve semiconductor zvinodiwa pakugadzirwa. Kuchinja kwechimiro chekristaro kunowanzoitika panguva yekukura, zvichikonzera zvikanganiso zve polymorphic inclusion. Nokudaro, zvakakosha kudzora nemazvo parameters dzakadai se silicon-carbon ratio, gradient yekukura kwekushisa, crystal growth rate, uye gas flow pressure.

Pamusoro pezvo, kune kuderera kwekushisa mumunda wekupisa wekukura kwesilicon carbide single crystal, izvo zvinotungamira mukushushikana kwemukati memuviri uye kukanganiswa kunokonzerwa nekukanganiswa (basal plane dislocation BPD, screw dislocation TSD, edge dislocation TED) panguva yekukura kwekristaro, nokudaro zvichikanganisa kunaka uye mashandiro e epitaxy nemidziyo inotevera.

(3)Kudzora kwakaoma kwekushandisa zvinodhaka: Kuiswa kwetsvina yekunze kunofanirwa kudzorwa zvakasimba kuti pave nekristaro inofambisa mhepo ine doping inotungamira;

(4)Kukura kunonoka: Kukura kwesilicon carbide kunonoka zvikuru.zvinhu zvesiliconzvinongoda mazuva matatu chete kuti zvikure kuita crystal rod, nepo silicon carbide crystal rods dzichida mazuva manomwe. Izvi zvinoita kuti silicon carbide ishande zvakanaka uye kuti pave nebudiriro shoma.

Kune rumwe rutivi, zviyero zvekukura kwesilicon carbide epitaxial zvinoda simba guru, zvinosanganisira kusava nemhepo kwemidziyo, kugadzikana kwekumanikidzwa kwegasi mukamuri rekuita, kudzora kwakaringana nguva yekupinza gasi, kururama kwehuwandu hwegasi, uye kutonga kwakasimba kwekupisa kwekuisa. Kunyanya, nekuvandudzwa kwehuwandu hwemagetsi emuchina, kuoma kwekudzora ma core parameters e epitaxial wafer kwakawedzera zvakanyanya.

Pamusoro pezvo, nekuwedzera kweukobvu hwe epitaxial layer, maitiro ekudzora kufanana kwe resistivity uye kuderedza defect density uku uchivimbisa kuti ukobvu hwacho hwave rimwe dambudziko guru. Mu system yekudzora ine magetsi, zvakakosha kubatanidza ma sensors nema actuators akanyatsogadzirwa kuitira kuti ma parameter akasiyana-siyana agone kudzorwa nemazvo uye zvakagadzikana. Panguva imwe chete, kugadzirisa algorithm yekudzora kwakakoshawo. Inofanirwa kukwanisa kugadzirisa nzira yekudzora munguva chaiyo zvichienderana ne feedback signal kuti ienderane neshanduko dzakasiyana-siyana mukukura kwesilicon carbide epitaxialmaitiro.

Ⅱ. Matambudziko makuru mukugadzirwa kwe silicon carbide substrates:

1. Tembiricha yekukura kwayo iri pamusoro pe2000℃, inova yakapetwa kaviri pane yesilicon.

2. Ukobvu hwetsvimbo yekristaro hudiki panguva yekukura kwekristaro, uye tsvimbo yekristaro yesilicon carbide ye2cm inokura mumazuva manomwe.

3. Zvinodiwa zvemhando yekristaro zvakanyanya, uye kune mashoma chete makristaro esilicon carbide ane maumbirwo ekristaro.

4. Kucheka kwacho kwakanyanya kusakara, uye silicon carbide ine kuomarara kwakanyanya.

Muchidimbu, mutengo wenguva inodhura uye tekinoroji yakaoma yekugadzirisa ndiyo inosarudza mutengo wakakwira we silicon carbide substrates, izvo zvinoderedza kushandiswa kwe silicon carbide.

III. Kupatsanurwa kwezvitofu zvinokura kristalo

Zvichienderana nenzira dzakasiyana dzekupisa, magirazi ekukura anogona kukamurwa kuva mhando yekudzikisa uye mhando yekudzivirira. Parizvino, midziyo yakawanda iri pamusika ndeyemhando yekudzikisa, iyo ine zvakanakira zvemutengo wakaderera, chimiro chiri nyore, kugadzirisa kuri nyore uye kushanda zvakanaka kwekupisa. Zvisinei, nekuda kwemhedzisiro yemagetsi ekudzikisa, tembiricha yeaxial ne radial yekudzikisa kwekudzikisa zvakabatana, uye hazvigoneke kufunga nezvekumhanya kwekukura kwekristaro uye mhando yekukura kwekristaro.

Chikuva chekukura kwemunda wekupisa chinodzivisa kupisa chinogona kudzora tembiricha yeaxial netembiricha ye radial zvakateerana, izvo zvinobatsira kukura kwemakristaro makuru uye zvinovandudza mwero wekukura kwekristaro. Ndiyo imwe yemhinduro dzekukura kwekristaro yesilicon carbide yemhando yepamusoro ye 8-inch mune ramangwana.

Kuenzanisa pakati penzira yekudzikisa simba nenzira yekudzivirira: