Sezvo kugadzirwa kwema semiconductor kuri kufambira mberi kuenda kuma geometries madiki emidziyo, kuwanda kwewafer throughput, uye mitemo yakasimba yekudzora kusvibiswa, michina yekugadzirisa kupisa iri kutarisana nematambudziko einjiniya asina kumboitika. Maitiro akadai seLPCVD, thermal oxidation, dopant diffusion, uye high-temperature annealing ikozvino anoda kwete chete kufanana kwetembiricha, asiwo nguva yakareba yekushanda kwemidziyo, kuderedzwa kwekugadzirwa kwezvikamu, uye kuvandudzwa kwemaitiro ekudzokorora.
Kunyangwe ichiwanzo furatirwa kana ichienzaniswa nemagasi emagetsi, machubhu emoto, kana machemistries ekuisa zvinhu mumidziyo, paddle ye cantilever ndiyo inonyanya kusarudza kuti mawafers anoita sei munzvimbo dzinopisa zvakanyanya. Muzvinhu zvakawanda zvemazuva ano, haichaonekwi sechinhu chiri nyore chekushandisa, asi sechinhu chakakosha chinogonesa kugadzirwa kwe semiconductor yakagadzikana uye inodzokororwa.
Chii chinonzi SiC Cantilever Paddle?
SiC Cantilever Paddle chinhu chakagadzirwa nesilicon carbide chakachena kwazvo chinoshandiswa zvakanyanya mumafurniture e semiconductor diffusion uye maLPCVD systems. Chinowanzo gadzirwa sechimiro che cantilever beam chakareba chinokwanisa kutsigira quartz kana SiC wafer boats panguva yekugadzirwa kwekupisa kwakanyanya.
Chikamu ichi chinowanzogadzirwa uchishandisa:
● silicon carbide yakadzorerwazve (RSiC)
● makemikari anoiswa mu silicon carbide (CVD SiC)
● zvinhu zveSiC zvakabatana zvakanyanya
Zvichienderana neruzivo rwakabudiswa neCoorsTek naSaint-Gobain Performance Ceramics, zvinhu zveSiC zvakachena zvakanyanya zvinowanzoratidza:
● Kutenderera kwekupisa: inenge 120–200 W/m·K patembiricha yemumba
● Kupisa kwakanyanya kushanda mumhepo isina kusimba: pamusoro pe1600°C.
● Kuwedzerwa kwemafuta muchiyero chenguva dzose (CTE): inenge 4.0–4.5×10⁻⁶/K.
● Inodzivirira zvakanyanya HCl, NH₃, O₂, uye chlorinated process chemistry.
Basa reSiC Cantilever Paddle muLPCVD Processing
Pakati pemashandisirwo ese, masisitimu eLPCVD anomiririra imwe yenyaya dzakakosha dzekushandiswa kweSiC Cantilever Paddles.
Maitiro akadai se:
● kuisa polysilicon.
● silicon nitride (Si₃N₄).
● kuisa oxide ine simba shoma.
Kazhinji inoshanda pakati pe500°C ne900°C, kazhinji pasi pemaitiro marefu uye munzvimbo dzine makemikari anoshandiswa zvakanyanya.
Mukati memasisitimu aya, paddle ye cantilever inoita mabasa akakosha akawanda panguva imwe chete.
Chekutanga, inopa kutakurwa kwakasimba kwezvikepe zvewafer zvinopinda nekubuda muchubhu yefurnace. Nekuti maovheni emazuva ano akamira anogona kutakura mazana ewafers pabhenji imwe neimwe, kunyangwe kuchinja kudiki kwepaddle kunogona kutungamira kune wafer kusarongeka, nzvimbo isina kugadzikana, kana kuunganidzwa kwesimba remuchina.
Chechipiri, paddle inoita basa rakakosha mukufanana kwekupisa. Kufambiswa kwekupisa kwakanyanya kweSiC kunoita kuti kupisa kupararire zvakaenzana pamwe chete nechimiro chekutsigira, zvichideredza ma gradients ekupisa ari munzvimbo imwe chete anogona kukanganisa kufanana kwekuisa zvinhu.
Chechitatu, kugadzira zvidimbu zvishoma kwakakosha. Zvikamu zveSemiconductor zvinouraya goho zvakananga, kunyanya mukugadzirwa kwemhando yepamusoro uye simba re semiconductor. Nekuda kwechimiro chayo chakakora checeramic uye kuramba kwayo ngura kwakasimba, SiC yakachena zvakanyanya inoderedza njodzi yekudonha kwezvikamu zvichienzaniswa nezvinhu zvechinyakare.
Mumitsetse yekugadzirwa kweLPCVD yepamusoro, kugadzikana kwenguva refu kwepaddle kunokanganisa zvakananga:
● Kuenderana kweukobvu hwefirimu.
● Kudzokorora kwewafer kubva kune wafer.
● nguva yekushanda kwechoto.
Ningbo VET Energy inonyanya kugadzira graphite yepamusoro, silicon carbide ceramics, uye zvikamu zve semiconductor zvakagadzirwa neCVD zvakagadzirirwa nzvimbo dzinoda kugadzirwa kwe semiconductor.
Zvigadzirwa zveCore semiconductor zvinosanganisira:
● Chikepe cheSiC Cantilever
● SiC Coated Graphite Susceptor
● Mutakuri weWafer Akaputirwa neSiC
● Zvikamu zveSiC Zvakaputirwa neHalfmoon
● Zvidimbu zveCarbon-Carbon Composite
● Graphite Felt Yakapfava & Yakasimba Graphite Felt
Zvigadzirwa izvi zvinoshandiswa zvakanyanya mu:
● Masisitimu eEpitaxy
● ma "reaktors" eLPCVD
● Zvitofu zvinopararira
● Masisitimu ekukura kwekristaro yeSiC
● Midziyo yekugadzirisa kupisa inodziya zvakanyanya.
Nekukura nekukurumidza kweSiC uye kugadzirwa kwemagetsi emhando yepamusoro, kudiwa kwezvikamu zvefurnace zvine hutsanana hwakanyanya uye zvakagadzikana kucharamba kuchikwira. Mumamiriro ezvinhu aya, tekinoroji yeSiC Cantilever Paddle icharamba iri imwe yezvinhu zvakakosha zvinotsigira kugadzirwa kwemagetsi emhando inotevera.
Nguva yekutumira: Chivabvu-14-2026