Pono ka hana ʻana o kēlā me kēia huahana semiconductor i nā haneli o nā kaʻina hana. Hoʻokaʻawale mākou i ke kaʻina hana holoʻokoʻa i ʻewalu mau ʻanuʻu:waferka hana ʻana-oxidation-photolithography-etching-thin film deposition-epitaxial growth-diffusion-ion implantation.
I mea e kōkua iā ʻoe e hoʻomaopopo a ʻike i nā semiconductors a me nā kaʻina hana e pili ana, e hoʻolaha mākou i nā ʻatikala WeChat ma kēlā me kēia pukana e hoʻolauna i kēlā me kēia o nā ʻanuʻu i luna hoʻokahi.
Ma ka ʻatikala ma mua, ua ʻōlelo ʻia no ka mālama ʻana i kawafermai nā ʻano haumia like ʻole, ua hana ʻia kahi kiʻiʻoniʻoni oxide--ke kaʻina hana oxidation. I kēia lā e kūkākūkā mākou i ke "kaʻina hana photolithography" o ke kiʻi ʻana i ke kaapuni hoʻolālā semiconductor ma ka wafer me ke kiʻiʻoniʻoni oxide i hoʻokumu ʻia.
Kaʻina hana photolithography
1. He aha ke kaʻina hana photolithography
ʻO ka Photolithography ka hana ʻana i nā kaapuni a me nā wahi hana e pono ai no ka hana ʻana i nā chip.
Hoʻohana ʻia ke kukui i hoʻopuka ʻia e ka mīkini photolithography e hōʻike i ka ʻili lahilahi i uhi ʻia me ka photoresist ma o kahi mask me kahi ʻano. E hoʻololi ka photoresist i kona mau waiwai ma hope o ka ʻike ʻana i ke kukui, i kope ʻia ke ʻano ma ka mask i ka ʻili lahilahi, i loaʻa i ka ʻili lahilahi ka hana o kahi kiʻikuhi kaapuni uila. ʻO kēia ke kuleana o ka photolithography, e like me ke kiʻi ʻana i nā kiʻi me kahi kāmela. Paʻi ʻia nā kiʻi i lawe ʻia e ke kāmela ma ka ʻili, ʻoiai ʻaʻole i kālai ʻia nā kiʻi e ka photolithography, akā nā kiʻikuhi kaapuni a me nā ʻāpana uila ʻē aʻe.
He ʻenehana micro-machining pololei ka Photolithography
ʻO ka photolithography maʻamau kahi hana e hoʻohana ana i ka mālamalama ultraviolet me ka nalu o 2000 a 4500 angstroms ma ke ʻano he mea lawe ʻike kiʻi, a hoʻohana i ka photoresist ma ke ʻano he waena (hoʻopaʻa kiʻi) e hoʻokō i ka hoʻololi ʻana, ka hoʻoili ʻana a me ka hana ʻana o nā kiʻi, a ma hope e hoʻouna i ka ʻike kiʻi i ka chip (ʻo ia hoʻi ka silicon chip) a i ʻole ka papa dielectric.
Hiki ke ʻōlelo ʻia ʻo ka photolithography ke kumu o nā ʻoihana semiconductor hou, microelectronics, a me ka ʻike, a ʻo ka photolithography ke kumu o ka pae hoʻomohala o kēia mau ʻenehana.
I loko o nā makahiki he 60 a ʻoi aku mai ka hoʻokumu ʻia ʻana o nā kaapuni hoʻohui ʻia i ka makahiki 1959, ua hoʻemi ʻia ka laulā laina o kāna mau kiʻi ma kahi o ʻehā mau kauoha o ka nui, a ua hoʻomaikaʻi ʻia ka hoʻohui ʻana o ke kaapuni ma mua o ʻeono mau kauoha o ka nui. ʻO ka holomua wikiwiki o kēia mau ʻenehana ua pili nui ʻia i ka hoʻomohala ʻana o ka photolithography.
(Nā koi no ka ʻenehana photolithography ma nā pae like ʻole o ka hoʻomohala ʻana o ka hana kaapuni hoʻohui)
2. Nā loina kumu o ka photolithography
ʻO nā mea photolithography ma ke ʻano laulā e pili ana i nā photoresists, i ʻike ʻia hoʻi he photoresists, ʻo ia nā mea hana koʻikoʻi loa i ka photolithography. Loaʻa i kēia ʻano mea nā ʻano o ka mālamalama (me ka mālamalama ʻike ʻia, ke kukui ultraviolet, ke kukuna electron, a me nā mea ʻē aʻe). Ma hope o ka hopena photochemical, loli nui kona solubility.
I waena o lākou, piʻi ka solubility o ka photoresist maikaʻi i loko o ka mea hoʻomohala, a ua like ke ʻano i loaʻa me ka mask; ʻo ka photoresist maikaʻi ʻole ke kū'ē, ʻo ia hoʻi, emi ka solubility a lilo paha i mea hiki ʻole ke hoʻoheheʻe ʻia ma hope o ka hōʻike ʻia ʻana i ka mea hoʻomohala, a ʻo ke ʻano i loaʻa ke kū'ē i ka mask. He ʻokoʻa nā kahua noi o nā ʻano photoresist ʻelua. Hoʻohana pinepine ʻia nā photoresist maikaʻi, e helu ana ma mua o 80% o ka huina.
ʻO ka mea i luna aʻe he kiʻikuhi hoʻolālā o ke kaʻina hana photolithography
(1) Ke kāpili ʻana:
ʻO ia hoʻi, ke hana ʻana i kahi kiʻiʻoniʻoni photoresist me ka mānoanoa like, ka hoʻopili ikaika a ʻaʻohe hemahema ma ka wafer silicon. I mea e hoʻonui ai i ka hoʻopili ʻana ma waena o ka kiʻiʻoniʻoni photoresist a me ka wafer silicon, pono pinepine e hoʻololi mua i ka ʻili o ka wafer silicon me nā mea e like me hexamethyldisilazane (HMDS) a me trimethylsilyldiethylamine (TMSDEA). A laila, hoʻomākaukau ʻia ka kiʻiʻoniʻoni photoresist e ka uhi wili.
(2) Ka hoʻomoʻa mua ʻana:
Ma hope o ka uhi ʻana i ka wili, aia nō i loko o ka ʻili photoresist kahi nui o ka solvent. Ma hope o ka hoʻomoʻa ʻana ma kahi mahana kiʻekiʻe, hiki ke wehe iki ʻia ka solvent. Ma hope o ka hoʻomoʻa mua ʻana, ua hoʻemi ʻia ka nui o ka photoresist i kahi 5%.
(3) Hōʻike ʻia:
ʻO ia hoʻi, ua hōʻike ʻia ka photoresist i ka mālamalama. I kēia manawa, hana ʻia kahi photoreaction, a hana ʻia ka ʻokoʻa solubility ma waena o ka ʻāpana i hoʻomālamalama ʻia a me ka ʻāpana i hoʻomālamalama ʻole ʻia.
(4) Hoʻomohala a me ka paʻakikī:
Hoʻokomo ʻia ka huahana i loko o ka mea hoʻomohala. I kēia manawa, e hoʻoheheʻe ʻia ka wahi i hōʻike ʻia o ka photoresist maikaʻi a me ka wahi i hōʻike ʻole ʻia o ka photoresist maikaʻi ʻole i loko o ka hoʻomohala ʻana. Hōʻike kēia i kahi ʻano ʻekolu-dimensional. Ma hope o ka hoʻomohala ʻana, pono ka chip i kahi kaʻina hana mālama wela kiʻekiʻe e lilo i ʻili paʻakikī, kahi e lawelawe nui ai e hoʻomaikaʻi hou i ka hoʻopili ʻana o ka photoresist i ka substrate.
(5) Ke kālai ʻana:
Ua kālai ʻia ka mea ma lalo o ka photoresist. Hoʻokomo pū ia me ke kālai pulu wai a me ke kālai maloʻo kinoea. No ka laʻana, no ke kālai pulu ʻana o ka silicon, hoʻohana ʻia kahi hopena wai waikawa o ka waikawa hydrofluoric; no ke kālai pulu ʻana o ke keleawe, hoʻohana ʻia kahi hopena waikawa ikaika e like me ka waikawa nitric a me ka waikawa sulfuric, ʻoiai ʻo ke kālai maloʻo e hoʻohana pinepine i nā kukuna ion plasma a i ʻole ka ikehu kiʻekiʻe e hōʻino i ka ʻili o ka mea a kālai iā ia.
(6) Wehe ʻana i ka gum:
ʻO ka mea hope loa, pono e wehe ʻia ka photoresist mai ka ʻili o ka lens. Ua kapa ʻia kēia kaʻina hana ʻo degumming.
ʻO ka palekana ka mea nui loa i ka hana semiconductor āpau. ʻO nā kinoea photolithography weliweli a ʻino hoʻi i ke kaʻina hana chip lithography penei:
1. ʻO ka hydrogen peroxide
He mea hoʻoheheʻe ikaika ka hydrogen peroxide (H2O2). Hiki i ka pili pololei ke hoʻoulu i ka mumū a me nā kuni o ka ʻili a me nā maka.
2. Xylene
He mea hoʻoheheʻe a he mea hoʻomohala ʻo Xylene i hoʻohana ʻia i ka lithography maikaʻi ʻole. He mea lapalapa ia a he haʻahaʻa kona mahana he 27.3℃ wale nō (ma kahi o ka mahana o ka lumi). He mea pahū ia ke 1%-7% ka nui o ka lewa. Hiki i ka hoʻopili pinepine ʻana me ka xylene ke hoʻoulu i ka mumū o ka ʻili. He ʻono ka mahu o Xylene, ua like ia me ke ʻala o ka mokulele; ʻo ka ʻike ʻana i ka xylene hiki ke hoʻoulu i ka mumū o nā maka, ka ihu a me ka puʻu. ʻO ka hanu ʻana i ke kinoea hiki ke hoʻoulu i ke poʻo ʻeha, ka poniuniu, ka nalowale o ka makemake a me ka luhi.
3. Hexamethyldisilazane (HMDS)
ʻO ka Hexamethyldisilazane (HMDS) ka mea maʻamau i hoʻohana ʻia ma ke ʻano he papa mua e hoʻonui i ka hoʻopili ʻana o ka photoresist ma luna o ka ʻili o ka huahana. He mea lapalapa ia a he 6.7°C kona kiko lapalapa. He mea pahū ia ke 0.8%-16% ka nui o ka lewa. Hoʻopili ikaika ka HMDS me ka wai, ka waiʻona a me nā waikawa mineral e hoʻokuʻu i ka ammonia.
4. ʻO ka Tetramethylammonium hydroxide
Hoʻohana nui ʻia ʻo Tetramethylammonium hydroxide (TMAH) ma ke ʻano he mea hoʻomohala no ka lithography maikaʻi. He mea ʻawahia a ʻinoʻino hoʻi. Hiki ke make inā moni ʻia a i ʻole e pili pono ana me ka ʻili. ʻO ka pili ʻana me ka lepo a i ʻole ka noe TMAH hiki ke hoʻoulu i ka mumū o nā maka, ka ʻili, ka ihu a me ka puʻu. ʻO ka hanu ʻana i nā nui kiʻekiʻe o ka TMAH e alakaʻi i ka make.
5. Chlorine a me fluorine
Hoʻohana ʻia ʻo Chlorine (Cl2) a me fluorine (F2) i nā lasers excimer ma ke ʻano he kumu kukui ultraviolet hohonu a me nā kumu kukui ultraviolet koʻikoʻi (EUV). He ʻawahia nā kinoea ʻelua, ʻōmaʻomaʻo māmā ke ʻano, a he ʻala hoʻonāukiuki ikaika. ʻO ka hanu ʻana i nā nui kiʻekiʻe o kēia kinoea e alakaʻi i ka make. Hiki i ke kinoea Fluorine ke hana me ka wai e hana i ke kinoea hydrogen fluoride. ʻO ke kinoea hydrogen fluoride kahi waikawa ikaika e hoʻonāukiuki i ka ʻili, nā maka a me ke ala hanu a hiki ke hana i nā hōʻailona e like me ke kuni a me ka paʻakikī o ka hanu ʻana. ʻO nā nui kiʻekiʻe o ka fluoride hiki ke hana i ka lāʻau make i ke kino o ke kanaka, e hana ana i nā hōʻailona e like me ke poʻo, ka luaʻi, ka maʻi diarrhea, a me ka coma.
6. ʻAkekona
He kinoea inert ka Argon (Ar) ʻaʻole ia e hōʻeha pololei i ke kino o ke kanaka. Ma lalo o nā kūlana maʻamau, aia ma kahi o 0.93% argon ka ea a ka poʻe e hanu ai, a ʻaʻohe hopena maopopo o kēia ʻano i ke kino o ke kanaka. Eia nō naʻe, i kekahi mau hihia, hiki i ka argon ke hōʻeha i ke kino o ke kanaka.
Eia kekahi mau kūlana hiki ke hana ʻia: I loko o kahi paʻa, hiki ke piʻi aʻe ka nui o ka argon, a laila e hōʻemi ana i ka nui o ka oxygen i ka lewa a e hoʻoulu ai i ka hypoxia. Hiki i kēia ke hana i nā hōʻailona e like me ka poniuniu, ka luhi, a me ka pōkole o ka hanu. Eia kekahi, he kinoea inert ka argon, akā hiki ke pahū ma lalo o ke kiʻekiʻe o ka mahana a i ʻole ke kaomi kiʻekiʻe.
7. Neon
He kinoea paʻa, ʻaʻohe kala a ʻala ʻole ʻo Neon (Ne) ʻaʻole ia e komo i loko o ke kaʻina hana hanu kanaka, no laila ʻo ka hanu ʻana i kahi nui o ke kinoea neon e hoʻoulu ai i ka hypoxia. Inā ʻoe i loko o ke kūlana o ka hypoxia no ka manawa lōʻihi, hiki iā ʻoe ke ʻike i nā hōʻailona e like me ke poʻo ʻeha, ka nausea, a me ka luaʻi. Eia kekahi, hiki i ke kinoea neon ke hana me nā mea ʻē aʻe ma lalo o ke ana wela a i ʻole ke kaomi kiʻekiʻe e hana ai i ke ahi a i ʻole ka pahū.
8. Kinoea Xenon
He kinoea paʻa, ʻaʻohe kala a ʻala ʻole ke kinoea Xenon (Xe) ʻaʻole ia e komo i ke kaʻina hana hanu kanaka, no laila ʻo ka hanu ʻana i kahi nui o ke kinoea xenon e hoʻoulu ai i ka hypoxia. Inā ʻoe i loko o ke kūlana o ka hypoxia no ka manawa lōʻihi, hiki iā ʻoe ke ʻike i nā hōʻailona e like me ke poʻo ʻeha, ka nausea, a me ka luaʻi. Eia kekahi, hiki i ke kinoea neon ke hana me nā mea ʻē aʻe ma lalo o ke ana wela a i ʻole ke kaomi kiʻekiʻe e hana ai i ke ahi a i ʻole ka pahū.
9. Kinoea Krypton
He kinoea paʻa, ʻaʻohe kala a ʻala ʻole ke kinoea Krypton (Kr) ʻaʻole ia e komo i ke kaʻina hana hanu kanaka, no laila ʻo ka hanu ʻana i kahi kiʻekiʻe o ke kinoea krypton e hoʻoulu ai i ka hypoxia. Inā ʻoe i loko o ke kūlana hypoxia no ka manawa lōʻihi, hiki iā ʻoe ke ʻike i nā hōʻailona e like me ke poʻo ʻeha, ka nausea, a me ka luaʻi. Eia kekahi, hiki i ke kinoea xenon ke pane me nā mea ʻē aʻe ma lalo o ke ana wela kiʻekiʻe a i ʻole ke kaomi kiʻekiʻe e hana ai i ke ahi a i ʻole ka pahū. ʻO ka hanu ʻana i kahi kaiapuni me ka nele o ka oxygen hiki ke hana i ka hypoxia. Inā ʻoe i loko o ke kūlana hypoxia no ka manawa lōʻihi, hiki iā ʻoe ke ʻike i nā hōʻailona e like me ke poʻo ʻeha, ka nausea, a me ka luaʻi. Eia kekahi, hiki i ke kinoea krypton ke pane me nā mea ʻē aʻe ma lalo o ke ana wela kiʻekiʻe a i ʻole ke kaomi kiʻekiʻe e hana ai i ke ahi a i ʻole ka pahū.
Nā hoʻonā ʻike kinoea weliweli no ka ʻoihana semiconductor
Pili ka ʻoihana semiconductor i ka hana ʻana, ka hana ʻana, a me ke kaʻina hana o nā kinoea lapalapa, pahū, ʻawahia, a me nā kinoea ʻino. Ma ke ʻano he mea hoʻohana i nā kinoea i nā hale hana hana semiconductor, pono i kēlā me kēia limahana ke hoʻomaopopo i ka ʻikepili palekana o nā kinoea weliweli like ʻole ma mua o ka hoʻohana ʻana, a pono e ʻike pehea e hana ai me nā kaʻina hana ulia pōpilikia ke liki kēia mau kinoea.
I ka hana ʻana, ka hana ʻana, a me ka mālama ʻana o ka ʻoihana semiconductor, i mea e pale aku ai i ka nalowale o ke ola a me ka waiwai i hoʻokumu ʻia e ka leakage o kēia mau kinoea weliweli, pono e hoʻokomo i nā mea ʻike kinoea e ʻike i ke kinoea i manaʻo ʻia.
Ua lilo nā mea ʻike kinoea i mau mea hana nānā kaiapuni koʻikoʻi i ka ʻoihana semiconductor o kēia wā, a ʻo ia hoʻi nā mea hana nānā pololei loa.
Ua hoʻolohe mau ʻo Riken Keiki i ka hoʻomohala palekana o ka ʻoihana hana semiconductor, me ka misionari o ka hoʻokumu ʻana i kahi hana palekana no nā kānaka, a ua hoʻolaʻa iā ia iho i ka hoʻomohala ʻana i nā mea ʻike kinoea kūpono no ka ʻoihana semiconductor, e hāʻawi ana i nā hopena kūpono no nā pilikia like ʻole i loaʻa i nā mea hoʻohana, a me ka hoʻomaikaʻi mau ʻana i nā hana huahana a me ka hoʻomaikaʻi ʻana i nā ʻōnaehana.
Ka manawa hoʻouna: Iulai-16-2024