Kupanga chinthu chilichonse cha semiconductor kumafuna njira zambirimbiri. Timagawa njira yonse yopangira m'magawo asanu ndi atatu:chikwama cha mkatekukonza-kukhetsa-photolithography-kuchotsa-kuonda-kuika filimu-kukula-kufalikira-kuika ma ion mu epitaxial.
Kuti tikuthandizeni kumvetsetsa ndi kuzindikira ma semiconductor ndi njira zina zokhudzana nazo, tidzakakamiza nkhani za WeChat mu magazini iliyonse kuti zifotokozere njira iliyonse yomwe ili pamwambapa.
Mu nkhani yapitayi, zatchulidwa kuti pofuna kutetezachikwama cha mkateKuchokera ku zinthu zodetsedwa zosiyanasiyana, filimu ya okosijeni inapangidwa - njira yopangira okosijeni. Lero tikambirana za "njira yojambula zithunzi" yojambulira dera lopangira semiconductor pa wafer ndi filimu ya okosijeni yopangidwa.
Njira yojambulira zithunzi
1. Kodi njira yojambulira zithunzi ndi chiyani?
Photolithography ndi njira yopangira ma circuits ndi malo ogwirira ntchito ofunikira popanga ma chip.
Kuwala komwe kumatulutsidwa ndi makina ojambulira zithunzi kumagwiritsidwa ntchito kuwonetsa filimu yopyapyala yokutidwa ndi photoresist kudzera mu chigoba chokhala ndi pateni. Photoresist idzasintha mawonekedwe ake itaona kuwalako, kotero kuti pateni yomwe ili pa chigobacho ikopidwe ku filimu yopyapyala, kotero kuti filimu yopyapyalayo ikhale ndi ntchito ngati chithunzi chamagetsi. Iyi ndi ntchito ya photolithography, yofanana ndi kujambula zithunzi ndi kamera. Zithunzi zomwe kamera imajambula zimasindikizidwa pa filimuyo, pomwe photolithography sijambula zithunzi, koma zithunzi za circuit ndi zigawo zina zamagetsi.
Photolithography ndi ukadaulo wolondola wa makina ang'onoang'ono
Kujambula zithunzi mwachizolowezi ndi njira yomwe imagwiritsa ntchito kuwala kwa ultraviolet komwe kumakhala ndi mafunde a 2000 mpaka 4500 angstroms ngati chonyamulira chidziwitso cha chithunzi, ndipo imagwiritsa ntchito photoresist ngati njira yapakati (yojambulira zithunzi) kuti ikwaniritse kusintha, kusamutsa ndi kukonza zithunzi, ndipo pamapeto pake imatumiza chidziwitso cha chithunzicho ku chip (makamaka silicon chip) kapena dielectric layer.
Tinganene kuti kujambula zithunzi ndiye maziko a mafakitale amakono a semiconductor, microelectronics, ndi information, ndipo kujambula zithunzi kumatsimikizira mwachindunji kukula kwa ukadaulo uwu.
Kwa zaka zoposa 60 kuchokera pamene zinthu zopangidwa ndi ma circuits ophatikizidwa zinapangidwa bwino mu 1959, kukula kwa mizere ya zithunzi zake kwachepetsedwa ndi ma orders anayi, ndipo kuphatikiza ma circuits kwasinthidwa ndi ma orders oposa asanu ndi limodzi. Kupita patsogolo kwachangu kwa ukadaulo kumeneku kumachitika makamaka chifukwa cha chitukuko cha photolithography.
(Zofunikira pa ukadaulo wa photolithography pa magawo osiyanasiyana a chitukuko cha kupanga ma circuit ophatikizidwa)
2. Mfundo zazikulu za photolithography
Zipangizo za Photolithography nthawi zambiri zimatchula ma photoresists, omwe amadziwikanso kuti ma photoresists, omwe ndi zinthu zofunika kwambiri pa photolithography. Mtundu uwu wa zinthu uli ndi mawonekedwe a kuwala (kuphatikizapo kuwala kooneka, kuwala kwa ultraviolet, kuwala kwa ma electron, ndi zina zotero). Pambuyo pa photochemical reaction, kusungunuka kwake kumasintha kwambiri.
Pakati pawo, kusungunuka kwa photoresist yabwino mu wopanga mapulogalamu kumawonjezeka, ndipo mawonekedwe omwe apezeka ndi ofanana ndi chigoba; photoresist yoipa ndi yosiyana, ndiko kuti, kusungunuka kumachepa kapena sikusungunuka pambuyo poti kwa wopanga mapulogalamu, ndipo mawonekedwe omwe apezeka ndi osiyana ndi chigoba. Magawo ogwiritsira ntchito a mitundu iwiri ya photoresists ndi osiyana. Photoresists yabwino ndi omwe amagwiritsidwa ntchito kwambiri, omwe amapanga zoposa 80% ya zonse.
Zomwe zili pamwambapa ndi chithunzi cha njira yojambulira zithunzi
(1) Kumatira:
Ndiko kuti, kupanga filimu yotsutsa kuwala yokhala ndi makulidwe ofanana, yomatirira mwamphamvu komanso yopanda zolakwika pa wafer ya silicon. Pofuna kulimbitsa kugwirizana pakati pa filimu yotsutsa kuwala ndi wafer ya silicon, nthawi zambiri ndikofunikira kusintha kaye pamwamba pa wafer ya silicon ndi zinthu monga hexamethyldisilazane (HMDS) ndi trimethylsilyldiethylamine (TMSDEA). Kenako, filimu yotsutsa kuwala imakonzedwa ndi spin coating.
(2) Kuphika musanayambe:
Pambuyo pophimba ndi spin, filimu ya photoresist imakhalabe ndi solvent inayake. Pambuyo pophika pa kutentha kwakukulu, solvent imatha kuchotsedwa pang'ono momwe ingathere. Pambuyo pophika kale, kuchuluka kwa photoresist kumachepetsedwa kufika pa 5%.
(3) Kuwonetsedwa:
Ndiko kuti, choletsa kuwala chimaonekera pa kuwala. Panthawiyi, kuwala kumachitika, ndipo kusiyana kwa kusungunuka pakati pa gawo lowunikira ndi gawo losawunikira kumachitika.
(4) Kukula ndi kuuma:
Chogulitsacho chimalowa m'makina opanga mapulogalamu. Panthawiyi, malo owonekera a positive photoresist ndi malo osawonekera a negative photoresist adzasungunuka mu kapangidwe kake. Izi zikuwonetsa mawonekedwe amitundu itatu. Pambuyo pa kapangidwe kake, chip imafunika njira yochizira kutentha kwambiri kuti ikhale filimu yolimba, yomwe makamaka imathandizira kukulitsa kumatirira kwa photoresist ku substrate.
(5) Kudula:
Zinthu zomwe zili pansi pa photoresist zimadulidwa. Zimaphatikizapo kudulidwa kwamadzimadzi ndi kudulidwa kouma kwa mpweya. Mwachitsanzo, podulidwa kwa silicon, njira yothetsera madzi ya hydrofluoric acid imagwiritsidwa ntchito; podulidwa kwamadzi, njira yothetsera asidi yamphamvu monga nitric acid ndi sulfuric acid imagwiritsidwa ntchito, pomwe kudulidwa kouma nthawi zambiri kumagwiritsa ntchito plasma kapena ma ion amphamvu kwambiri kuti awononge pamwamba pa chinthucho ndikuchidula.
(6) Kuchotsa gum:
Pomaliza, choletsa kuwala kwa dzuwa chiyenera kuchotsedwa pamwamba pa lenzi. Gawoli limatchedwa kuchotsa kuwala kwa dzuwa.
Chitetezo ndiye nkhani yofunika kwambiri pakupanga ma semiconductor onse. Mpweya woopsa komanso woopsa wa photolithography mu njira ya chip lithography ndi motere:
1. Hydrogen peroxide
Hydrogen peroxide (H2O2) ndi mankhwala amphamvu ophera tizilombo toyambitsa matenda. Kukhudzana mwachindunji kungayambitse kutupa ndi kupsa pakhungu ndi m'maso.
2. Xylene
Xylene ndi chosungunulira komanso chopangidwa ndi opanga omwe amagwiritsidwa ntchito mu negative lithography. Chimayaka ndipo chimakhala ndi kutentha kochepa kwa 27.3℃ yokha (pafupifupi kutentha kwa chipinda). Chimaphulika pamene kuchuluka kwa xylene mumlengalenga kuli 1%-7%. Kukhudzana mobwerezabwereza ndi xylene kungayambitse kutupa pakhungu. Nthunzi ya Xylene ndi yotsekemera, yofanana ndi fungo la aircraft tack; kukhudzana ndi xylene kungayambitse kutupa m'maso, mphuno ndi pakhosi. Kupuma mpweya kungayambitse mutu, chizungulire, kusowa chilakolako cha chakudya komanso kutopa.
3. Hexamethyldisilazane (HMDS)
Hexamethyldisilazane (HMDS) imagwiritsidwa ntchito kwambiri ngati primer layer kuti iwonjezere kumatirira kwa photoresist pamwamba pa chinthucho. Imatha kuyaka ndipo imakhala ndi flashpoint ya 6.7°C. Imaphulika pamene kuchuluka kwa mpweya kuli 0.8%-16%. HMDS imachitapo kanthu mwamphamvu ndi madzi, mowa ndi mchere acids kuti itulutse ammonia.
4. Tetramethylammonium hydroxide
Tetramethylammonium hydroxide (TMAH) imagwiritsidwa ntchito kwambiri ngati njira yopangira lithography yabwino. Ndi poizoni komanso yowononga. Ikhoza kupha ngati itamezedwa kapena ikakhudzana mwachindunji ndi khungu. Kukhudzana ndi fumbi kapena nthunzi ya TMAH kungayambitse kutupa kwa maso, khungu, mphuno ndi pakhosi. Kupuma mpweya wambiri wa TMAH kungayambitse imfa.
5. Chlorine ndi fluorine
Chlorine (Cl2) ndi fluorine (F2) zimagwiritsidwa ntchito mu ma laser a excimer monga magwero a kuwala kwa ultraviolet kozama komanso magwero a kuwala kwa ultraviolet koopsa (EUV). Mpweya wonsewu ndi woopsa, umawoneka wobiriwira pang'ono, ndipo umakhala ndi fungo loipa kwambiri. Kupuma mpweya wambiri kumabweretsa imfa. Mpweya wa fluorine ukhoza kuyanjana ndi madzi kuti upange mpweya wa hydrogen fluoride. Mpweya wa hydrogen fluoride ndi asidi wamphamvu womwe umakwiyitsa khungu, maso ndi njira yopumira ndipo ungayambitse zizindikiro monga kutentha ndi kuvutika kupuma. Kuchuluka kwa fluoride kungayambitse poizoni m'thupi la munthu, zomwe zimayambitsa zizindikiro monga mutu, kusanza, kutsegula m'mimba, ndi chikomokere.
6. Argon
Argon (Ar) ndi mpweya wopanda mphamvu womwe nthawi zambiri suvulaza thupi la munthu mwachindunji. Nthawi zambiri, mpweya umene anthu amapuma uli ndi pafupifupi 0.93% ya argon, ndipo kuchuluka kumeneku sikukhudza thupi la munthu. Komabe, nthawi zina, argon ikhoza kuvulaza thupi la munthu.
Nazi zina mwa zinthu zomwe zingatheke: Mu malo otsekeka, kuchuluka kwa argon kumatha kuwonjezeka, motero kuchepetsa kuchuluka kwa okosijeni mumlengalenga ndikuyambitsa hypoxia. Izi zingayambitse zizindikiro monga chizungulire, kutopa, komanso kupuma movutikira. Kuphatikiza apo, argon ndi mpweya wopanda mpweya, koma ungaphulike kutentha kwambiri kapena kuthamanga kwambiri.
7. Neon
Neon (Ne) ndi mpweya wokhazikika, wopanda mtundu komanso wopanda fungo womwe sugwira ntchito. Mpweya wa neon sukhudzidwa ndi njira yopumira ya munthu, kotero kupuma mpweya wambiri wa neon kungayambitse hypoxia. Ngati muli ndi hypoxia kwa nthawi yayitali, mutha kukhala ndi zizindikiro monga mutu, nseru, ndi kusanza. Kuphatikiza apo, mpweya wa neon ukhoza kuyanjana ndi zinthu zina zomwe zimakhala ndi kutentha kwambiri kapena kupanikizika kwakukulu kuti zichititse moto kapena kuphulika.
8. Mpweya wa Xenon
Mpweya wa Xenon (Xe) ndi mpweya wokhazikika, wopanda mtundu komanso wopanda fungo womwe sumalowa nawo mu njira yopumira ya munthu, kotero kupuma mpweya wambiri wa xenon kungayambitse hypoxia. Ngati muli ndi hypoxia kwa nthawi yayitali, mutha kukhala ndi zizindikiro monga mutu, nseru, ndi kusanza. Kuphatikiza apo, mpweya wa neon ukhoza kuyanjana ndi zinthu zina zomwe zimakhala ndi kutentha kwambiri kapena kupanikizika kwakukulu kuti zibweretse moto kapena kuphulika.
9. Gasi wa Krypton
Mpweya wa Krypton (Kr) ndi mpweya wokhazikika, wopanda mtundu komanso wopanda fungo womwe sumalowa nawo mu njira yopumira ya munthu, kotero kupuma mpweya wa krypton wambiri kumayambitsa hypoxia. Ngati muli mu mkhalidwe wa hypoxia kwa nthawi yayitali, mutha kukhala ndi zizindikiro monga mutu, nseru, ndi kusanza. Kuphatikiza apo, mpweya wa xenon ukhoza kuyanjana ndi zinthu zina zomwe zili ndi kutentha kwakukulu kapena kupanikizika kwakukulu kuti zibweretse moto kapena kuphulika. Kupuma pamalo omwe mpweya ulibe mpweya kungayambitse hypoxia. Ngati muli mu mkhalidwe wa hypoxia kwa nthawi yayitali, mutha kukhala ndi zizindikiro monga mutu, nseru, ndi kusanza. Kuphatikiza apo, mpweya wa krypton ukhoza kuyanjana ndi zinthu zina zomwe zili ndi kutentha kwakukulu kapena kupanikizika kwakukulu kuti zibweretse moto kapena kuphulika.
Mayankho odziwira mpweya woopsa kwa makampani opanga ma semiconductor
Makampani opanga zinthu zamagetsi zamagetsi amagwiritsa ntchito kupanga, kupanga, ndi njira zopangira mpweya woyaka, wophulika, wapoizoni, komanso woopsa. Monga wogwiritsa ntchito mpweya m'mafakitale opanga zinthu zamagetsi zamagetsi zamagetsi, wogwira ntchito aliyense ayenera kumvetsetsa zambiri zachitetezo cha mpweya woopsa wosiyanasiyana asanagwiritse ntchito, ndipo ayenera kudziwa momwe angathanirane ndi njira zadzidzidzi pamene mpweyawu ukutuluka.
Pakupanga, kupanga, ndi kusungira mafakitale a semiconductor, kuti tipewe kutayika kwa miyoyo ndi katundu chifukwa cha kutuluka kwa mpweya woopsawu, ndikofunikira kuyika zida zodziwira mpweya kuti zizindikire mpweya womwe ukufunidwa.
Zipangizo zodziwira mpweya zakhala zida zofunika kwambiri zowunikira chilengedwe m'makampani opanga ma semiconductor masiku ano, ndipo ndi zida zowunikira mwachindunji kwambiri.
Riken Keiki nthawi zonse wakhala akuyang'ana kwambiri pa chitukuko chotetezeka cha makampani opanga zinthu zamagetsi, ndi cholinga chopanga malo ogwirira ntchito otetezeka kwa anthu, ndipo wadzipereka kupanga masensa a gasi oyenera makampani opanga zinthu zamagetsi zamagetsi, kupereka mayankho oyenera pamavuto osiyanasiyana omwe ogwiritsa ntchito amakumana nawo, komanso kupititsa patsogolo ntchito za malonda ndi kukonza makina.
Nthawi yotumizira: Julayi-16-2024