Kev tsim khoom ntawm txhua yam khoom semiconductor xav tau ntau pua txoj kev ua. Peb faib tag nrho cov txheej txheem tsim khoom ua yim kauj ruam:ncuav mog qab zibKev ua tiav-oxidation-photolithography-etching-thin film deposition-epitaxial growth-diffusion-ion implantation.
Yuav kom pab koj nkag siab thiab paub txog cov khoom siv semiconductor thiab cov txheej txheem cuam tshuam, peb yuav thawb cov lus WeChat hauv txhua qhov teeb meem los qhia txhua kauj ruam saum toj no ib qho zuj zus.
Hauv tsab xov xwm dhau los, nws tau hais tias txhawm rau tiv thaiv qhovncuav mog qab ziblos ntawm ntau yam tsis huv, ib daim zaj duab xis oxide tau tsim - txheej txheem oxidation. Hnub no peb yuav tham txog "txheej txheem photolithography" ntawm kev thaij duab lub voj voog tsim semiconductor ntawm lub wafer nrog daim zaj duab xis oxide tsim.
Cov txheej txheem photolithography
1. Cov txheej txheem photolithography yog dab tsi
Photolithography yog ua kom cov voj voog thiab cov chaw ua haujlwm xav tau rau kev tsim cov chip.
Lub teeb uas lub tshuab photolithography tso tawm yog siv los qhia cov zaj duab xis nyias uas muaj photoresist los ntawm lub ntsej muag uas muaj tus qauv. Lub photoresist yuav hloov nws cov khoom tom qab pom lub teeb, yog li ntawd tus qauv ntawm lub ntsej muag raug theej rau zaj duab xis nyias, yog li ntawd zaj duab xis nyias muaj lub luag haujlwm ntawm daim duab hluav taws xob. Qhov no yog lub luag haujlwm ntawm photolithography, zoo ib yam li kev thaij duab nrog lub koob yees duab. Cov duab uas lub koob yees duab thaij tau luam tawm rau ntawm zaj duab xis, thaum lub photolithography tsis kos duab, tab sis cov duab hluav taws xob thiab lwm yam khoom siv hluav taws xob.
Photolithography yog ib qho kev siv tshuab micro-machining uas meej heev
Kev siv tshuab photolithography ib txwm yog ib qho txheej txheem uas siv lub teeb ultraviolet nrog lub wavelength ntawm 2000 txog 4500 angstroms ua tus nqa cov ntaub ntawv duab, thiab siv photoresist ua qhov nruab nrab (sau duab) nruab nrab kom ua tiav kev hloov pauv, hloov pauv thiab ua cov duab, thiab thaum kawg xa cov ntaub ntawv duab mus rau lub nti (feem ntau yog silicon nti) lossis txheej dielectric.
Nws tuaj yeem hais tias photolithography yog lub hauv paus ntawm cov khoom siv semiconductor niaj hnub, microelectronics, thiab cov ntaub ntawv lag luam, thiab photolithography ncaj qha txiav txim siab qib kev txhim kho ntawm cov thev naus laus zis no.
Txij li thaum xyoo 1959, ntau tshaj 60 xyoo dhau los, kev tsim cov integrated circuits tau ua tiav, thiab qhov dav ntawm nws cov duab tau raug txo kom txog plaub qhov kev txiav txim siab, thiab kev sib koom ua ke ntawm lub voj voog tau raug txhim kho ntau tshaj rau qhov kev txiav txim siab. Kev nce qib sai ntawm cov thev naus laus zis no feem ntau yog vim muaj kev txhim kho ntawm photolithography.
(Cov kev cai rau kev siv tshuab photolithography ntawm ntau theem ntawm kev txhim kho kev tsim khoom siv hluav taws xob sib xyaw)
2. Cov ntsiab cai yooj yim ntawm kev thaij duab photolithography
Cov ntaub ntawv Photolithography feem ntau yog hais txog photoresists, tseem hu ua photoresists, uas yog cov ntaub ntawv tseem ceeb tshaj plaws hauv photolithography. Hom khoom no muaj cov yam ntxwv ntawm lub teeb (suav nrog lub teeb pom kev, lub teeb ultraviolet, lub teeb hluav taws xob, thiab lwm yam) kev cuam tshuam. Tom qab kev cuam tshuam photochemical, nws cov solubility hloov pauv ntau heev.
Ntawm lawv, qhov solubility ntawm cov photoresist zoo hauv tus tsim tawm nce ntxiv, thiab tus qauv tau txais yog tib yam li lub ntsej muag; photoresist tsis zoo yog qhov sib txawv, uas yog, qhov solubility txo qis lossis txawm tias tsis yaj tom qab raug rau tus tsim tawm, thiab tus qauv tau txais yog qhov sib txawv ntawm lub ntsej muag. Cov teb thov ntawm ob hom photoresists sib txawv. Cov photoresists zoo feem ntau siv, suav txog ntau dua 80% ntawm tag nrho.
Qhov saum toj no yog daim duab qhia txog cov txheej txheem photolithography
(1) Kev nplaum:
Uas yog, tsim ib zaj duab xis photoresist nrog cov tuab sib npaug, muaj zog nplaum thiab tsis muaj qhov tsis zoo ntawm lub silicon wafer. Yuav kom txhim kho qhov nplaum ntawm zaj duab xis photoresist thiab lub silicon wafer, feem ntau yuav tsum tau hloov kho qhov chaw ntawm lub silicon wafer nrog cov tshuaj xws li hexamethyldisilazane (HMDS) thiab trimethylsilyldiethylamine (TMSDEA). Tom qab ntawd, zaj duab xis photoresist raug npaj los ntawm kev txheej txheej.
(2) Ua ntej ci:
Tom qab txheej txheej, cov zaj duab xis photoresist tseem muaj qee qhov tshuaj yaj. Tom qab ci ntawm qhov kub siab dua, cov tshuaj yaj tuaj yeem tshem tawm tsawg li tsawg tau. Tom qab ua ntej ci, cov ntsiab lus ntawm photoresist raug txo kom txog li 5%.
(3) Kev Raug:
Uas yog, tus photoresist raug rau lub teeb. Lub sijhawm no, muaj kev cuam tshuam photoreaction tshwm sim, thiab qhov sib txawv ntawm qhov ci ntsa iab thiab qhov tsis ci ntsa iab tshwm sim.
(4) Kev loj hlob & kev tawv:
Cov khoom raug muab tso rau hauv tus tsim tawm. Lub sijhawm no, thaj chaw raug nthuav tawm ntawm tus photoresist zoo thiab thaj chaw tsis raug ntawm tus photoresist tsis zoo yuav yaj hauv kev txhim kho. Qhov no nthuav tawm tus qauv peb-seem. Tom qab kev txhim kho, lub chip xav tau cov txheej txheem kho kub siab kom dhau los ua zaj duab xis tawv, uas feem ntau ua haujlwm los txhim kho qhov kev nplaum ntawm tus photoresist rau lub substrate.
(5) Kev txiav:
Cov khoom siv hauv qab lub photoresist yog etched. Nws suav nrog kua ntub etching thiab gaseous qhuav etching. Piv txwv li, rau ntub etching ntawm silicon, cov kua qaub aqueous ntawm hydrofluoric acid yog siv; rau ntub etching ntawm tooj liab, cov kua qaub muaj zog xws li nitric acid thiab sulfuric acid yog siv, thaum qhuav etching feem ntau siv plasma lossis high-energy ion beams los ua puas rau qhov chaw ntawm cov khoom siv thiab etch nws.
(6) Tshem cov kua nplaum:
Thaum kawg, tus photoresist yuav tsum tau muab tshem tawm ntawm qhov chaw ntawm lub lens. Cov kauj ruam no hu ua degumming.
Kev nyab xeeb yog qhov teeb meem tseem ceeb tshaj plaws hauv txhua qhov kev tsim khoom semiconductor. Cov pa roj photolithography txaus ntshai thiab ua rau muaj kev phom sij hauv cov txheej txheem chip lithography yog raws li nram no:
1. Cov tshuaj hydrogen peroxide
Hydrogen peroxide (H2O2) yog ib qho oxidant muaj zog heev. Kev sib cuag ncaj qha tuaj yeem ua rau daim tawv nqaij thiab qhov muag o thiab kub hnyiab.
2. Xylene
Xylene yog ib yam khoom siv los ua kom yaj thiab tsim cov khoom siv hauv kev luam ntawv tsis zoo. Nws yooj yim hlawv thiab muaj qhov kub qis tsuas yog 27.3 ℃ (kwv yees li qhov kub hauv chav). Nws tawg thaum qhov concentration hauv huab cua yog 1% -7%. Kev sib cuag nrog xylene ntau zaus tuaj yeem ua rau daim tawv nqaij o. Xylene vapor qab zib, zoo ib yam li ntxhiab ntawm lub dav hlau; kev raug xylene tuaj yeem ua rau lub qhov muag, qhov ntswg thiab caj pas o. Kev nqus pa ntawm cov pa tuaj yeem ua rau mob taub hau, kiv taub hau, tsis xav noj mov thiab qaug zog.
3. Hexamethyldisilazane (HMDS)
Hexamethyldisilazane (HMDS) feem ntau yog siv ua txheej primer los ua kom cov photoresist lo rau ntawm qhov chaw ntawm cov khoom. Nws yog flammable thiab muaj lub flash point ntawm 6.7 ° C. Nws yog tawg thaum qhov concentration hauv huab cua yog 0.8% -16%. HMDS reacts nrog dej, cawv thiab cov kua qaub minerals kom tso ammonia.
4. Tetramethylammonium hydroxide
Tetramethylammonium hydroxide (TMAH) yog siv dav ua tus tsim cov tshuaj rau kev luam theej duab zoo. Nws muaj tshuaj lom thiab xeb. Nws tuaj yeem ua rau tuag taus yog tias nqos lossis kov ncaj qha rau ntawm daim tawv nqaij. Kev kov nrog hmoov av lossis pa phem TMAH tuaj yeem ua rau o ntawm qhov muag, daim tawv nqaij, qhov ntswg thiab caj pas. Kev nqus pa ntawm cov tshuaj TMAH ntau yuav ua rau tuag taus.
5. Cov tshuaj chlorine thiab fluorine
Chlorine (Cl2) thiab fluorine (F2) ob leeg siv rau hauv excimer lasers ua lub teeb ci ultraviolet tob thiab ultraviolet heev (EUV). Ob lub roj yog lom, zoo li ntsuab kaj, thiab muaj ntxhiab tsw phem heev. Kev nqus pa ntawm cov roj no ntau yuav ua rau tuag. Cov roj fluorine yuav ua rau dej tsis haum los tsim cov roj hydrogen fluoride. Cov roj hydrogen fluoride yog cov kua qaub muaj zog uas ua rau daim tawv nqaij, qhov muag thiab txoj hlab pa khaus thiab yuav ua rau muaj cov tsos mob xws li kub hnyiab thiab ua pa nyuaj. Cov tshuaj fluoride ntau tuaj yeem ua rau lom rau lub cev tib neeg, ua rau muaj cov tsos mob xws li mob taub hau, ntuav, raws plab, thiab tsis nco qab.
6. Argon
Argon (Ar) yog ib hom roj inert uas feem ntau tsis ua rau tib neeg lub cev raug mob. Feem ntau, cov pa uas tib neeg ua pa muaj li ntawm 0.93% argon, thiab qhov concentration no tsis muaj feem cuam tshuam rau tib neeg lub cev. Txawm li cas los xij, qee zaum, argon yuav ua rau tib neeg lub cev raug mob.
Nov yog qee qhov xwm txheej uas yuav tshwm sim tau: Hauv qhov chaw kaw, qhov concentration ntawm argon yuav nce ntxiv, yog li ntawd qhov concentration ntawm oxygen hauv huab cua yuav txo qis thiab ua rau hypoxia. Qhov no yuav ua rau muaj cov tsos mob xws li kiv taub hau, qaug zog, thiab ua tsis taus pa. Tsis tas li ntawd, argon yog cov roj inert, tab sis nws yuav tawg thaum kub lossis siab.
7. Neon
Neon (Ne) yog ib qho roj ruaj khov, tsis muaj xim thiab tsis muaj ntxhiab uas tsis koom nrog. Cov roj neon tsis koom nrog tib neeg txoj kev ua pa, yog li ua pa hauv cov roj neon ntau yuav ua rau hypoxia. Yog tias koj nyob hauv lub xeev hypoxia ntev, koj yuav muaj cov tsos mob xws li mob taub hau, xeev siab, thiab ntuav. Tsis tas li ntawd, cov roj neon yuav ua rau muaj lwm yam tshuaj nyob rau hauv qhov kub siab lossis siab siab ua rau hluav taws lossis tawg.
8. Roj Xenon
Cov roj Xenon (Xe) yog cov roj ruaj khov, tsis muaj xim thiab tsis muaj ntxhiab uas tsis koom nrog tib neeg txoj kev ua pa, yog li ua pa rau hauv cov roj xenon ntau yuav ua rau hypoxia. Yog tias koj nyob hauv qhov xwm txheej hypoxia ntev, koj yuav muaj cov tsos mob xws li mob taub hau, xeev siab, thiab ntuav. Tsis tas li ntawd, cov roj neon yuav ua rau muaj kev cuam tshuam nrog lwm yam tshuaj hauv qab qhov kub thiab txias lossis siab siab ua rau hluav taws lossis tawg.
9. Krypton roj
Cov roj Krypton (Kr) yog cov roj ruaj khov, tsis muaj xim thiab tsis muaj ntxhiab uas tsis koom nrog tib neeg txoj kev ua pa, yog li ua pa hauv cov roj krypton ntau yuav ua rau hypoxia. Yog tias koj nyob hauv lub xeev hypoxia ntev, koj yuav muaj cov tsos mob xws li mob taub hau, xeev siab, thiab ntuav. Tsis tas li ntawd, cov roj xenon yuav ua rau muaj kev cuam tshuam nrog lwm yam khoom hauv qab qhov kub thiab txias lossis siab siab ua rau muaj hluav taws lossis tawg. Ua pa hauv ib puag ncig uas tsis muaj oxygen tuaj yeem ua rau hypoxia. Yog tias koj nyob hauv lub xeev hypoxia ntev, koj yuav muaj cov tsos mob xws li mob taub hau, xeev siab, thiab ntuav. Tsis tas li ntawd, cov roj krypton yuav ua rau muaj kev cuam tshuam nrog lwm yam khoom hauv qab qhov kub thiab txias lossis siab siab ua rau muaj hluav taws lossis tawg.
Cov kev daws teeb meem nrhiav cov pa roj txaus ntshai rau kev lag luam semiconductor
Kev lag luam semiconductor muaj feem cuam tshuam nrog kev tsim khoom, kev tsim khoom, thiab cov txheej txheem ntawm cov pa roj uas yooj yim hlawv, tawg, lom, thiab cov pa phem. Ua tus neeg siv cov pa roj hauv cov chaw tsim khoom semiconductor, txhua tus neeg ua haujlwm yuav tsum nkag siab txog cov ntaub ntawv kev nyab xeeb ntawm ntau yam pa roj txaus ntshai ua ntej siv, thiab yuav tsum paub yuav ua li cas nrog cov txheej txheem thaum muaj xwm txheej ceev thaum cov pa roj no xau.
Hauv kev tsim khoom, kev tsim khoom, thiab kev khaws cia ntawm kev lag luam semiconductor, txhawm rau kom tsis txhob muaj kev poob ntawm lub neej thiab khoom vaj khoom tsev los ntawm kev xau ntawm cov pa phem no, nws yog qhov tsim nyog los teeb tsa cov cuab yeej kuaj roj kom ntes tau cov roj uas xav tau.
Cov cuab yeej ntes roj tau dhau los ua cov cuab yeej saib xyuas ib puag ncig tseem ceeb hauv kev lag luam semiconductor niaj hnub no, thiab kuj yog cov cuab yeej saib xyuas ncaj qha tshaj plaws.
Riken Keiki yeej ib txwm mob siab rau kev txhim kho kev lag luam semiconductor kom muaj kev nyab xeeb, nrog lub hom phiaj los tsim kom muaj ib puag ncig ua haujlwm zoo rau tib neeg, thiab tau mob siab rau kev tsim cov roj sensors uas haum rau kev lag luam semiconductor, muab cov kev daws teeb meem tsim nyog rau ntau yam teeb meem uas cov neeg siv ntsib, thiab txuas ntxiv txhim kho cov haujlwm ntawm cov khoom thiab ua kom zoo dua qub.
Lub sijhawm tshaj tawm: Lub Xya Hli-16-2024