Kugadzirwa kwechigadzirwa chega chega che semiconductor kunoda mazana emaitiro. Tinokamura maitiro ese ekugadzira kuita matanho masere:chifukidzirokugadzirisa-oxidation-photolithography-etching-thin film deposition-epitaxial growth-diffusion-ion implantation.
Kuti tikubatsirei kunzwisisa nekuziva ma semiconductors uye maitiro akafanana, tichakurudzira zvinyorwa zveWeChat mumagazini yega yega kuti zvikupei danho rimwe nerimwe riri pamusoro apa.
Munyaya yapfuura, zvakataurwa kuti kuitira kuchengetedzachifukidzirokubva mutsvina yakasiyana-siyana, firimu re oxide rakagadzirwa -- maitiro e oxidation. Nhasi tichakurukura nezve "maitiro e photolithography" ekufotora sekitori yekugadzira semiconductor pa wafer nefirimu re oxide rakagadzirwa.
Maitiro ekutora mifananidzo
1. Chii chinonzi photolithography process
Photolithography inogadzira macircuit nenzvimbo dzinoshanda dzinodiwa pakugadzira machipisi.
Chiedza chinoburitswa nemuchina we photolithography chinoshandiswa kuburitsa firimu rakatetepa rakaputirwa ne photoresist kuburikidza ne mask ine pattern. Photoresist inochinja hunhu hwayo mushure mekuona chiedza, kuitira kuti pattern iri pa mask ikoperwe kufirimu rakatetepa, kuitira kuti firimu rakatetepa rive nebasa re electronic circuit diagram. Iri ndiro basa re photolithography, rakafanana nekutora mifananidzo nekamera. Mifananidzo inotorwa nekamera inodhindwa pafirimu, nepo photolithography isinganyore mifananidzo, asi ma circuit diagram nezvimwe zvikamu zvemagetsi.
Photolithography tekinoroji chaiyo yekugadzira michina midiki
Kudhirowa kwemifananidzo kwakajairika inzira inoshandisa chiedza che ultraviolet chine urefu hwemaawa kubva pa 2000 kusvika 4500 angstroms senzira yekutakura ruzivo rwemifananidzo, uye inoshandisa photoresist senzira yepakati (yekurekodha mifananidzo) kuti iwane shanduko, kutamiswa uye kugadziriswa kwemifananidzo, uye pakupedzisira inotumira ruzivo rwemufananidzo kune chip (kunyanya silicon chip) kana dielectric layer.
Zvinogona kutaurwa kuti photolithography ndiyo hwaro hwemaindasitiri emazuva ano e semiconductor, microelectronics, uye information, uye photolithography inosarudza zvakananga nhanho yekukura kwetekinoroji idzi.
Mumakore anopfuura makumi matanhatu kubva pakagadzirwa ma "integrated circuits" muna 1959, upamhi hwemitsara yema "graphics" ayo hwakaderedzwa ne "ma" mana ehukuru, uye "circuit integration" yakavandudzwa ne "ma" anopfuura matanhatu ehukuru. Kufambira mberi nekukurumidza kwematekinoroji aya kunonyanya kukonzerwa nekuvandudzwa kwe "photolithography".
(Zvinodiwa zve tekinoroji ye photolithography pamatanho akasiyana-siyana ekuvandudzwa kwekugadzirwa kwezvikamu zvakabatana)
2. Nheyo huru dze photolithography
Zvinhu zvePhotolithography zvinowanzoreva maphotoresists, anozivikanwawo semaphotoresists, izvo zvinonyanya kushanda muphotolithography. Rudzi urwu rwezvinhu rune hunhu hwechiedza (kusanganisira chiedza chinoonekwa, chiedza cheultraviolet, electron beam, nezvimwewo). Mushure mephotochemical reaction, kunyunguduka kwaro kunochinja zvakanyanya.
Pakati pazvo, kunyungudika kwe positive photoresist mumugadziri kunowedzera, uye patani yakawanikwa yakafanana ne mask; negative photoresist inopesana, kureva kuti, kunyungudika kunoderera kana kutopera mushure mekusangana nemugadziri, uye patani yakawanikwa inopesana ne mask. Nzvimbo dzekushandisa dzemhando mbiri dze photoresists dzakasiyana. Positive photoresists dzinonyanya kushandiswa, dzichiita zvinopfuura 80% yehuwandu hwese.
Zviri pamusoro apa idhayagiramu yemaitiro e photolithography
(1) Kunamira:
Kureva kuti, kugadzira firimu rekudzivirira kupisa rine ukobvu hwakafanana, rinonamira zvakasimba uye risina zvikanganiso pawafer yesilicon. Kuti uwedzere kunamira pakati pefirimu rekudzivirira kupisa newafer yesilicon, zvinowanzodiwa kutanga wagadzirisa pamusoro pewafer yesilicon nezvinhu zvakaita sehexamethyldisilazane (HMDS) uye trimethylsilyldiethylamine (TMSDEA). Zvadaro, firimu rekudzivirira kupisa rinogadzirwa ne spin coating.
(2) Kubika usati wabika:
Mushure mekumonera, firimu rekudzivirira kupenya kwemvura richiri nechikamu chakati che solvent. Mushure mekubheka patembiricha yakakwira, solvent inogona kubviswa zvishoma sezvinobvira. Mushure mekubheka zvisati zvaitika, huwandu hwe photoresist hunoderedzwa kusvika pa5%.
(3) Kuratidzwa:
Kureva kuti, photoresist inoonekwa nechiedza. Panguva iyi, photoreaction inoitika, uye musiyano wekunyungudika pakati pechikamu chakavhenekerwa nechikamu chisina kuvhenekerwa unoitika.
(4) Kukura & Kuomesa:
Chigadzirwa chacho chinonyudzwa mumugadziri. Panguva ino, nzvimbo yakaratidzwa ye positive photoresist nenzvimbo isina kuratidzwa ye negative photoresist zvichanyungudika mukugadzirwa. Izvi zvinopa patani ine mativi matatu. Mushure mekugadzirwa, chip inoda kurapwa nekupisa kwakanyanya kuti ive firimu rakaoma, iro rinonyanya kubatsira kuwedzera kunamira kwe photoresist kune substrate.
(5) Kucheka:
Zvinhu zviri pasi pe photoresist zvakachekwa. Zvinosanganisira kuchekwa kwemvura uye kuchekwa kwegasi. Semuenzaniso, pakuchekwa kwesilicon, mvura inoshandiswa ne hydrofluoric acid; pakuchekwa kwemhangura, mvura inoshandiswa ne strong acid senge nitric acid ne sulfuric acid, nepo kuchekwa kwemvura kunowanzo shandisa plasma kana ion beams ine simba rakawanda kukuvadza pamusoro pechinhu chacho nekuchichekwa.
(6) Kubvisa gum:
Pakupedzisira, photoresist inofanira kubviswa pamusoro pe lenzi. Danho iri rinonzi degumming.
Kuchengetedzeka ndiyo nyaya inonyanya kukosha mukugadzirwa kwe semiconductor. Magasi makuru ane njodzi uye anokuvadza e photolithography mukuita kwe chip lithography ndeaya anotevera:
1. Hydrogen peroxide
Hydrogen peroxide (H2O2) ine simba guru rekuchengetedza ganda. Kuibata zvakananga kunogona kukonzera kuzvimba uye kutsva kweganda nemaziso.
2. Xylene
Xylene chinhu chinonyungudutsa uye chinoshandiswa mu negative lithography. Chinobvira uye chine tembiricha yakaderera ye27.3℃ chete (inenge tembiricha yemukamuri). Chinoputika kana huwandu hwemhepo huri 1%-7%. Kugara uchibata xylene kunogona kukonzera kuzvimba kweganda. Xylene vapor inotapira, yakafanana nekunhuhwirira kwe aircraft tack; kusangana nexylene kunogona kukonzera kuzvimba kwemaziso, mhino nepahuro. Kufema gasi kunogona kukonzera musoro, dzungu, kurasikirwa nechido uye kuneta.
3. Hexamethyldisilazane (HMDS)
Hexamethyldisilazane (HMDS) inonyanya kushandiswa se primer layer yekuwedzera kunamira kwe photoresist pamusoro pechigadzirwa. Inogona kutsva uye ine flash point ye6.7°C. Inoputika kana huwandu hwemhepo huri pakati pe0.8%-16%. HMDS inosangana nesimba nemvura, doro uye mineral acids kuti ibudise ammonia.
4. Tetramethylammonium hydroxide
Tetramethylammonium hydroxide (TMAH) inoshandiswa zvakanyanya senzira yekuvandudza lithography yakanaka. Ine chepfu uye inoparadza. Inogona kuuraya kana ikamedzwa kana kuti ikasangana neganda zvakananga. Kusangana neguruva kana mhute yeTMAH kunogona kukonzera kuzvimba kwemaziso, ganda, mhino nepahuro. Kufema TMAH yakawanda kunotungamira kurufu.
5. Chlorine ne fluorine
Chlorine (Cl2) nefluorine (F2) zvinoshandiswa muma laser e excimer se deep ultraviolet uye extreme ultraviolet (EUV) light sources. Magasi ese ari maviri ane chepfu, anoita segirini rakapfava, uye ane hwema hwakasimba hunotsamwisa. Kufema huwandu hwakawanda hwegasi iri kunotungamira kurufu. Gsi refluorine rinogona kusangana nemvura kuti riburitse gasi re hydrogen fluoride. Gsi re hydrogen fluoride iasidhi yakasimba inotsamwisa ganda, maziso nemweya uye inogona kukonzera zviratidzo zvakaita sekutsva uye kuoma kufema. Kuwanda kwe fluoride kunogona kukonzera chepfu mumuviri wemunhu, zvichikonzera zviratidzo zvakaita semusoro, kurutsa, manyoka, uye coma.
6. Argon
Argon (Ar) imhepo isina simba iyo kazhinji isingakuvadzi muviri wemunhu zvakananga. Mumamiriro ezvinhu akajairwa, mweya unofemwa nevanhu une 0.93% argon, uye huwandu uhwu hahuna zvahunoita pamuviri wemunhu. Zvisinei, mune dzimwe nguva, argon inogona kukuvadza muviri wemunhu.
Heano mamwe mamiriro ezvinhu angangoitika: Munzvimbo yakamanikana, huwandu hweargon hunogona kuwedzera, nokudaro zvichideredza huwandu hweokisijeni mumhepo uye zvichikonzera hypoxia. Izvi zvinogona kukonzera zviratidzo zvakaita sedzungu, kuneta, uye kufema zvishoma. Pamusoro pezvo, argon imhepo isina simba, asi inogona kuputika kana tembiricha yakakwira kana kumanikidzwa kwakanyanya.
7. Neon
Neon (Ne) igesi rakagadzikana, risina ruvara uye risina hwema risingabatanidzwe mukufema kwevanhu. Gasi reNeon haribatanidzwi mukufema kwevanhu, saka kufema huwandu hwakawanda hwegasi reNeon kunokonzera hypoxia. Kana uri mumamiriro ekushaya hypoxia kwenguva yakareba, unogona kuona zviratidzo zvakaita semusoro, kuda kurutsa, uye kurutsa. Pamusoro pezvo, gasi reNeon rinogona kusangana nezvimwe zvinhu pasi pekupisa kwakanyanya kana kumanikidzwa kwakanyanya kukonzera moto kana kuputika.
8. Gasi reXenon
Gasi reXenon (Xe) igesi rakagadzikana, risina ruvara uye risina hwema risingabatanidzwe mukufema kwevanhu, saka kufema huwandu hwakawanda hwegasi reXenon kunokonzera hypoxia. Kana uri mumamiriro ehypoxia kwenguva yakareba, unogona kuona zviratidzo zvakaita semusoro, kuda kurutsa, uye kurutsa. Pamusoro pezvo, gasi reNeon rinogona kusangana nezvimwe zvinhu pasi pekupisa kwakanyanya kana kumanikidzwa kwakanyanya kukonzera moto kana kuputika.
9. Gasi reKrypton
Krypton gas (Kr) igesi rakagadzikana, risina ruvara uye risina hwema risingabatanidzwe mukufema kwevanhu, saka kufema huwandu hwakawanda hwegasi rekrypton kunokonzera hypoxia. Kana uri mumamiriro ekushaya hypoxia kwenguva yakareba, unogona kuona zviratidzo zvakaita semusoro, kuda kurutsa, uye kurutsa. Pamusoro pezvo, xenon gas inogona kusangana nezvimwe zvinhu zviri pasi pekupisa kwakanyanya kana kumanikidzwa kwakanyanya kukonzera moto kana kuputika. Kufema munzvimbo ine oxygen shoma kunogona kukonzera hypoxia. Kana uri mumamiriro ekushaya hypoxia kwenguva yakareba, unogona kuona zviratidzo zvakaita semusoro, kuda kurutsa, uye kurutsa. Pamusoro pezvo, krypton gas inogona kusangana nezvimwe zvinhu zviri pasi pekupisa kwakanyanya kana kumanikidzwa kwakanyanya kukonzera moto kana kuputika.
Mhinduro dzekuona gasi rine njodzi kuindasitiri yesemiconductor
Indasitiri yesemiconductor inosanganisira kugadzirwa, kugadzirwa, uye maitiro emagasi anobvira moto, anoputika, ane chepfu, uye anokuvadza. Semushandisi wemagasi mufekitori dzekugadzira semiconductor, mushandi wese anofanira kunzwisisa data rekuchengetedza remagasi akasiyana-siyana ane njodzi asati ashandiswa, uye anofanira kuziva maitiro ekugadzirisa matanho ekukurumidza kana magasi aya achibuda.
Mukugadzira, kugadzira, uye kuchengetwa kweindasitiri ye semiconductor, kuitira kudzivirira kurasikirwa nehupenyu nezvinhu zvinokonzerwa nekubuda kwegasi idzi dzine njodzi, zvakakosha kuisa zvishandiso zvekuona gasi kuti zvione gasi raunoda.
Zvishandiso zvinoongorora gasi zvave zvishandiso zvakakosha zvekutarisa zvakatipoteredza muindasitiri ye semiconductor yanhasi, uye ndizvo zvinoshandiswawo zvakanyanya pakuongorora zvakatipoteredza.
Riken Keiki agara achitarisa kusimudzirwa kwakachengeteka kweindasitiri yekugadzira semiconductor, nechinangwa chekugadzira nzvimbo yakachengeteka yekushandira yevanhu, uye akazvipira kugadzira masensa egasi akakodzera indasitiri ye semiconductor, achipa mhinduro dzakakodzera kumatambudziko akasiyana-siyana anosangana nevashandisi, uye achiramba achivandudza mashandiro ezvigadzirwa uye kugadzirisa masisitimu.
Nguva yekutumira: Chikunguru-16-2024