Gukora buri gicuruzwa cya semiconductor bisaba inzira amagana. Tugabanyamo intambwe umunani inzira yose yo gukora:agace gatogutunganya-oxidation-photolithography-gushushanya-agace gato k'urupapuro-guteranya imikurire-gukwirakwiza-iyoni mu gice cyo hejuru cy'inyuma.
Kugira ngo tugufashe gusobanukirwa no kumenya semiconductors n'imikorere bifitanye isano, tuzashyira ingingo za WeChat muri buri nomero kugira ngo zigaragaze buri ntambwe yavuzwe haruguru imwe ku yindi.
Mu nkuru ibanziriza iyi, byavuzwe ko kugira ngo habeho kurengeraagace gatoKuva ku myanda itandukanye, hakozwe firime ya okiside - inzira yo gusiga okiside. Uyu munsi turaganira ku "nzira ya photolithography" yo gufotora uruziga rw'igishushanyo cya semiconductor kuri wafer hamwe na firime ya okiside yakozwe.
Uburyo bwo gufotora
1. Uburyo bwo gufotora (photolithography) ni iki?
Fotolithography ni ugukora imiyoboro n'ahantu hakenewe kugira ngo hakorwe chips.
Urumuri rutangwa n'imashini ikora photolithography rukoreshwa mu kwerekana agace gato gatwikiriwe na photoresist binyuze muri mask ifite ishusho. Photoresist izahindura imiterere yayo nyuma yo kubona urumuri, ku buryo ishusho iri kuri mask ifatwa nk'agace gato, ku buryo agace gato gafite akazi nk'agashushanyo k'amashanyarazi. Uru ni uruhare rwa photolithography, nk'uko bigenda no gufata amafoto ukoresheje kamera. Amafoto yafashwe na kamera acapishwa kuri iyo filime, mu gihe photolithography idashushanya amafoto, ahubwo ishushanya imiterere n'ibindi bice by'ikoranabuhanga.
Photolithography ni ikoranabuhanga rigezweho ryo gukora imashini nto
Gukoresha ikoranabuhanga risanzwe rya fotolithography ni uburyo bukoresha urumuri rwa ultraviolet rufite ubunini bw'uburebure bwa angstroms 2000 kugeza 4500 nk'uburyo bwo gutwara amakuru y'ishusho, kandi bugakoresha ikoranabuhanga rya fotoresist nk'uburyo bwo hagati (gufata amashusho) kugira ngo bugere ku ihinduka, kohereza no gutunganya amashusho, hanyuma bugahita bwohereza amakuru y'ishusho kuri firigo (cyane cyane firigo ya silicon) cyangwa urwego rwa dielectric.
Dushobora kuvuga ko fotolithography ari ryo shingiro ry'inganda zigezweho za semiconductor, microelectronics, n'amakuru, kandi fotolithography ni yo igena mu buryo butaziguye urwego rw'iterambere ry'iri koranabuhanga.
Mu myaka irenga 60 ishize habayeho kuvumbura neza imiyoboro ya “integrated circuits” mu 1959, ubugari bw'umurongo w'amashusho yayo bwagabanutseho imiterere ine y'ubunini, kandi guhuza imiyoboro byarushijeho kunozwaho imiterere irenga itandatu y'ubunini. Iterambere ryihuse ry'ubu buryo bw'ikoranabuhanga riterwa ahanini n'iterambere rya “photolithography”.
(Ibisabwa ku ikoranabuhanga rya fotolithography mu byiciro bitandukanye byo guteza imbere inganda zikora imiyoboro y’amashanyarazi)
2. Amahame shingiro yo gufotora
Ibikoresho bya Fotolithography muri rusange bivuga abafite ubumuga bwo gufotora, bazwi kandi nka abafite ubumuga bwo gufotora, ari na byo bikoresho by'ingenzi cyane muri photolithography. Ubu bwoko bw'ibikoresho bufite imiterere y'urumuri (harimo urumuri rugaragara, urumuri rwa ultraviolet, electron beam, nibindi). Nyuma y'uburyo bwo gufotora, gushonga kwabyo kurahinduka cyane.
Muri byo, ubushobozi bwo gushonga bwa positive photoresist mu mushinga w’ibikoresho buriyongera, kandi imiterere yabonetse ni imwe n’iya mask; fotoresist negative ni ikinyuranyo, ni ukuvuga ko gushonga kugabanuka cyangwa se ntibishobora gushonga nyuma yo kugaragara kuri porogisi, kandi imiterere yabonetse iri mu buryo butandukanye n’iyo mask. Imiterere y’uburyo bubiri bwo gushonga butandukanye. Polizites nziza ni zo zikoreshwa cyane, zirenga 80% by’umubare wose.
Ibivuzwe haruguru ni ishusho y'icyitegererezo cy'uburyo fotolithography ikorwa
(1) Gushyiramo kole:
Ni ukuvuga gukora firime irwanya ubushyuhe ifite ubugari bumwe, ifite gufatana gukomeye kandi nta nenge iri kuri firime ya silicon. Kugira ngo wongere gufatana hagati ya firime irwanya ubushyuhe n'firime ya silicon, akenshi ni ngombwa kubanza guhindura ubuso bwa firime ya silicon ukoresheje ibintu nka hexamethyldisilazane (HMDS) na trimethylsilyldiethylamine (TMSDEA). Hanyuma, firime irwanya ubushyuhe itegurwa hakoreshejwe spin coating.
(2) Guteka mbere:
Nyuma yo gusiga irangi ku buso, agapapuro ka fotoresisti karacyafite ingano runaka ya solvent. Nyuma yo guteka ku bushyuhe buri hejuru, solvent ishobora gukurwaho gake gashoboka. Nyuma yo guteka mbere, ingano ya fotoresisti igabanuka ikagera kuri 5%.
(3) Kugaragara:
Ni ukuvuga ko icyuma gikingira urumuri kiba kigaragara ku mucyo. Muri iki gihe, habaho uburyo bwo gupima urumuri, maze itandukaniro ry’uburyo bwo gushonga hagati y’igice cyamuritswe n’igice kitamuritswe ribaho.
(4) Iterambere n'ubukonje:
Icyo gicuruzwa kiba cyinjijwe mu mushinga w’ikoranabuhanga. Muri iki gihe, agace kagaragara k’umusemburo wa photoresist mwiza n’agace kagaragara k’umusemburo wa photoresist utagaragara bizashonga mu iterambere. Ibi bigaragaza imiterere y’ibice bitatu. Nyuma yo guteza imbere, chip ikenera uburyo bwo kuyitunganya mu bushyuhe bwinshi kugira ngo ibe firime ikomeye, ahanini ituma yongera uburyo umusemburo wa photoresist ufatana n’umusemburo.
(5) Gushushanya:
Ibikoresho biri munsi ya photoresist biracukurwa. Birimo gucukurwa amazi no gucukurwa mu mwuka. Urugero, mu gucukurwa kwa silikoni, hakoreshwa umuti w’amazi uvanze na aside hydrofluoric; mu gucukurwa kw’umuringa, hakoreshwa umuti w’aside ikomeye nka aside nitrike na aside sulfurike, mu gihe gucukurwa kw’umwuma akenshi bikoresha plasma cyangwa imirasire ya iyoni ifite ingufu nyinshi kugira ngo byangize ubuso bw’ikintu no kugicukurwa.
(6) Gukuraho igum:
Amaherezo, photoresist igomba gukurwa ku buso bwa lens. Iyi ntambwe yitwa degumming.
Umutekano ni cyo kibazo cy'ingenzi mu ikorwa ry'ibikoresho bya semiconductor. Imyuka ikomeye kandi yangiza ikoreshwa muri photolithography muri gahunda ya chip lithography ni iyi ikurikira:
1. Peroxide ya hydrogen
Hydrogen peroxide (H2O2) ni okisidasiyo ikomeye. Kuyikoraho bishobora gutera ubushye no kubyimba k'uruhu n'amaso.
2. Xylene
Xylene ni umuti ukoreshwa mu gupima neza. Irashya kandi ifite ubushyuhe buri hasi bwa 27.3°C gusa (hafi ubushyuhe bw'icyumba). Iraturika iyo ubwinshi bw'umwuka mu kirere ari 1%-7%. Iyo ikoze kuri xylene inshuro nyinshi ishobora gutera ubushyuhe bw'uruhu. Umuyaga wa Xylene ni mwiza, usa n'impumuro y'indege; iyo ikoreshejwe xylene ishobora gutera ubushyuhe bw'amaso, izuru n'umuhogo. Guhumeka umwuka bishobora gutera ububabare bw'umutwe, isereri, kubura ubushake bwo kurya no kunanirwa.
3. Hexamethyldisilazane (HMDS)
Hexamethyldisilazane (HMDS) ikunze gukoreshwa nk'icyitegererezo cyo kongera uburyo bwo gufatana kwa photoresist ku buso bw'umuti. Irashya kandi ifite aho igera kuri 6.7°C. Iraturika iyo ubwinshi bw'ikirere buri hagati ya 0.8% na 16%. HMDS igirana cyane n'amazi, alcool na aside mineral kugira ngo ikuremo ammonia.
4. Tetramethylammonium hydroxide
Tetramethylammonium hydroxide (TMAH) ikoreshwa cyane mu gukora lithography nziza. Ni uburozi kandi yangiza. Ishobora kwica iyo uyimize cyangwa ikoze ku ruhu. Ikoze ku mukungugu cyangwa igihu cya TMAH bishobora gutera ububyimbirwe bw'amaso, uruhu, amazuru n'umuhogo. Guhumeka TMAH ifite ubunini bwinshi bizatera urupfu.
5. Chlorine na fluorine
Chlorine (Cl2) na fluorine (F2) byombi bikoreshwa muri lazeri za excimer nk'urumuri rwa ultraviolet rwinshi n'urumuri rwa ultraviolet rwinshi (EUV). Imyuka yombi ni uburozi, isa n'icyatsi kibisi cyoroshye, kandi ifite impumuro ikomeye itera ububabare. Guhumeka umwuka mwinshi cyane bizatera urupfu. Imyuka ya fluorine ishobora gukorana n'amazi ikabyara umwuka wa hydrogène fluoride. Imyuka ya hydrogène fluoride ni aside ikomeye itera ububabare uruhu, amaso n'inzira z'ubuhumekero kandi ishobora gutera ibimenyetso nko gushya no kugorwa no guhumeka. Fluoride nyinshi ishobora gutera uburozi ku mubiri w'umuntu, igatera ibimenyetso nko kuribwa umutwe, kuruka, impiswi, no koma.
6. Argon
Argon (Ar) ni umwuka udakora neza, ubusanzwe ntugira ingaruka mbi ku mubiri w'umuntu. Mu bihe bisanzwe, umwuka abantu bahumeka urimo hafi 0.93% bya argon, kandi ubu buryo nta ngaruka bugaragara bugira ku mubiri w'umuntu. Ariko, mu bihe bimwe na bimwe, argon ishobora kwangiza umubiri w'umuntu.
Dore zimwe mu mpamvu zishobora kubaho: Mu mwanya ufunze, urugero rwa argon rushobora kwiyongera, bityo bikagabanya urugero rwa ogisijeni mu kirere bigatera hypoxia. Ibi bishobora gutera ibimenyetso nko kuzungera, umunaniro, no kubura umwuka. Byongeye kandi, argon ni umwuka udakora, ariko ushobora guturika bitewe n'ubushyuhe bwinshi cyangwa umuvuduko mwinshi.
7. Neon
Neon (Ne) ni umwuka uhoraho, utagira ibara kandi utagira impumuro, utitabira. Gazi ya neon ntabwo igira uruhare mu mikorere y'ubuhumekero bw'umuntu, bityo guhumeka umwuka wa neon mwinshi bitera hypoxia. Niba umaze igihe kirekire ufite hypoxia, ushobora kugira ibimenyetso nko kuribwa umutwe, isesemi, no kuruka. Byongeye kandi, gaze ya neon ishobora kugirana n'ibindi bintu biri mu bushyuhe bwinshi cyangwa umuvuduko mwinshi bigatera inkongi cyangwa guturika.
8. Gazi ya Xenon
Gazi ya Xenon (Xe) ni umwuka udahinduka, utagira ibara kandi utagira impumuro, utitabira uburyo bwo guhumeka bw'umuntu, bityo guhumeka gaze ya xenon nyinshi bitera kubura umwuka uhagije. Niba umaze igihe kirekire ufite ikibazo cyo kubura umwuka uhagije, ushobora kugira ibimenyetso nko kuribwa umutwe, isesemi no kuruka. Byongeye kandi, gaze ya neon ishobora kugirana n'ibindi bintu biri mu bushyuhe bwinshi cyangwa umuvuduko mwinshi bigatera inkongi cyangwa guturika.
9. Gazi ya Krypton
Gazi ya Krypton (Kr) ni umwuka uhoraho, utagira ibara kandi utagira impumuro, utitabira inzira y'ubuhumekero bw'umuntu, bityo guhumeka umwuka wa krypton mwinshi bitera kubura umwuka. Niba umaze igihe kirekire ufite ikibazo cyo kubura umwuka, ushobora kugira ibimenyetso nko kuribwa umutwe, isesemi, no kuruka. Byongeye kandi, gazi ya xenon ishobora kugirana n'ibindi bintu biri mu bushyuhe bwinshi cyangwa igitutu kinini bigatuma habaho umuriro cyangwa guturika. Guhumeka ahantu hari umwuka wa ogisijeni ubuze bishobora gutera kubura umwuka. Niba umaze igihe kirekire ufite ikibazo cyo kubura umwuka, ushobora kugira ibimenyetso nko kuribwa umutwe, isesemi, no kuruka. Byongeye kandi, gazi ya krypton ishobora kugirana n'ibindi bintu biri mu bushyuhe bwinshi cyangwa igitutu kinini bigatuma habaho umuriro cyangwa guturika.
Uburyo bwo gupima imyuka iteza akaga mu nganda zikora ibikoresho bya semiconductor
Inganda za semiconductor zikora, zikora, kandi zikora imyuka ishobora gushya, guturika, uburozi, n'iyangiza. Nk'umukoresha imyuka mu nganda zikora semiconductor, buri mukozi agomba gusobanukirwa amakuru y'umutekano w'imyuka itandukanye iteza akaga mbere yo kuyikoresha, kandi akamenya uburyo bwo guhangana n'ibikorwa byihutirwa iyo iyo myuka ivuye.
Mu gukora, gukora no kubika inganda za semiconductor, kugira ngo hirindwe ko ubuzima n'umutungo byangirika bitewe no kuva kw'iyo myuka ihumanya, ni ngombwa gushyiraho ibikoresho byo gutahura gazi kugira ngo bimenye iyo myuka igamije.
Ibikoresho bipima gazi byahindutse ibikoresho by'ingenzi byo kugenzura ibidukikije mu nganda za semiconductor zo muri iki gihe, kandi ni nabyo bikoresho byo kugenzura bitaziguye.
Riken Keiki yahoraga yita ku iterambere ry’inganda zikora ibikoresho bya semiconductor, afite intego yo gushyiraho ahantu hatekanye ho gukorera abantu, kandi yiyeguriye guteza imbere ibikoresho bya gaze bikwiranye n’inganda zikora ibikoresho bya semiconductor, atanga ibisubizo bikwiye ku bibazo bitandukanye abakoresha bahura nabyo, no gukomeza kunoza imikorere y’ibicuruzwa no kunoza sisitemu.
Igihe cyo kohereza: Nyakanga-16-2024