E hia rau ngā tukanga e hiahiatia ana mō te hanga o ia hua haurua-ā-ira. E waru ngā taahiraa e wehea ana e mātou te tukanga hanga katoa:papate tukatuka-te whakahāora-te whakaahua-te whakairo-te whakatakotoranga kiriata angiangi-te tipu epitaxial-te horapa-te whakatō katote.
Hei āwhina i a koe ki te mārama me te kite i ngā haurua-waenga me ngā tukanga e pā ana, ka tukuna e mātou ngā tuhinga WeChat i roto i ia putanga hei whakaatu i ia o ngā mahi o runga ake nei, takitahi.
I roto i te tuhinga o mua, i whakahuatia ai hei tiaki i tepapaMai i ngā momo poke, i hangaia he kiriata waikura -- te tukanga waikura. I tēnei rā ka matapakihia e tātou te "tukanga whakaahua-ipurangi" o te whakaahua i te ara iahiko hoahoa haurua-ira i runga i te papa whakarewa me te kiriata waikura i hangaia.
Te tukanga whakaahua-ipurangi
1. He aha te tukanga whakaahua-ipurangi
Ko te mahi a te whakaahua-lithography he hanga i ngā ara iahiko me ngā wāhi mahi e hiahiatia ana mō te hanga maramara.
Ko te mārama e tukuna ana e te mīhini whakaahua-ira ka whakamahia hei whakaatu i te kiriata angiangi kua pania ki te ātete-ira mā roto i te kopare me te tauira. Ka huri te ātete-ira i ōna āhuatanga i muri i te kitenga i te mārama, kia tāruatia ai te tauira i runga i te kopare ki te kiriata angiangi, kia rite ai te mahi a te kiriata angiangi ki te hoahoa ara iahiko hiko. Koinei te mahi a te whakaahua-ira, he rite ki te tango pikitia me te kāmera. Ka tāia ngā whakaahua i tangohia e te kāmera ki runga i te kiriata, engari kāore te whakaahua-ira e whakairo i ngā whakaahua, engari ko ngā hoahoa ara iahiko me ētahi atu wāhanga hiko.
He hangarau miihini-iti tino tika te whakaahua-lithography
Ko te whakaahua-ā-ringa tuku iho he tukanga e whakamahi ana i te mārama ultraviolet me te roangaru o te 2000 ki te 4500 angstroms hei kawe mōhiohio whakaahua, ā, e whakamahi ana i te photoresist hei takawaenga (te tuhi whakaahua) hei whakatutuki i te whakawhiti, te whakawhiti me te tukatuka i ngā whakairoiro, ā, i te mutunga ka tukuna ngā mōhiohio whakaahua ki te maramara (te nuinga o te maramara silicon) ki te paparanga dielectric rānei.
Ka taea te kī ko te whakaahua-lithography te tūāpapa o ngā ahumahi semiconductor, microelectronics, me ngā ahumahi mōhiohio hou, ā, ko te whakaahua-lithography te mea e whakatau tika ana i te taumata whanaketanga o ēnei hangarau.
Neke atu i te 60 tau mai i te hanganga angitu o ngā ara iahiko whakauru i te tau 1959, kua whakaitihia te whānui o ngā whakairoiro mā te whā ngā whakarea, ā, kua whakapaitia te whakaurunga ara iahiko mā te ono ngā whakarea. Ko te whanaketanga o te whakaahua-ipurangi te take matua o te tere o te ahunga whakamua o ēnei hangarau.
(Ngā whakaritenga mō te hangarau whakaahua-ipurangi i ngā wāhanga rerekē o te whanaketanga o te hanga ara iahiko whakauru)
2. Ngā mātāpono taketake o te whakaahua-ipurangi
Ko ngā rauemi whakaahua-whakaahua e pā ana ki ngā ātete-whakaahua, e mōhiotia ana ko ngā ātete-whakaahua, koinei ngā rauemi mahi tino nui i roto i te whakaahua-whakaahua. Kei tēnei momo rauemi ngā āhuatanga o te tauhohenga mārama (tae atu ki te mārama e kitea ana, te mārama ultraviolet, te hihi irahiko, me ētahi atu). I muri i te tauhohenga whakaahua-matū, ka tino rerekē tōna wairewatanga.
I roto i ēnei, ka piki ake te wairewatanga o te ātete-whakaahua pai i roto i te kaiwhakawhanake, ā, ko te tauira i whiwhihia he rite tonu ki te kopare; ko te ātete-whakaahua kino te ritenga kē, arā, ka heke te wairewatanga, ka kore rānei e wairewa i muri i te whakaaturanga ki te kaiwhakawhanake, ā, ko te tauira i whiwhihia he ritenga kē ki te kopare. He rerekē ngā mara tono o ngā momo ātete-whakaahua e rua. Ko ngā ātete-whakaahua pai te nuinga o te whakamahinga, neke atu i te 80% o te katoa.
Ko te hoahoa kauwhata o runga ake nei o te tukanga whakaahua-ipurangi
(1) Te whakapiripiri:
Arā, te hanga i tētahi kiriata ātete-whakaahua me te matotoru ōrite, te piri kaha, me te kore he hapa i runga i te papa silicon. Hei whakarei ake i te piri i waenga i te kiriata ātete-whakaahua me te papa silicon, he maha ngā wā e tika ana kia whakarerekētia te mata o te papa silicon ki ngā matū pēnei i te hexamethyldisilazane (HMDS) me te trimethylsilyldiethylamine (TMSDEA). Kātahi ka whakaritea te kiriata ātete-whakaahua mā te paninga hurihuri.
(2) Te tunu i mua i te tunu:
Whai muri i te paninga hurihuri, kei roto tonu i te kiriata ātete-whakaahua tētahi nui o te whakarewa. Whai muri i te tunu i te pāmahana teitei ake, ka taea te tango i te whakarewa kia iti rawa te taea. Whai muri i te tunu i mua, ka whakaitihia te nui o te ātete-whakaahua ki te 5%.
(3) Te Whakamārama:
Arā, ka whakaatuhia te ātete-whakaahua ki te māramatanga. I tēnei wā, ka puta he tauhohenga-whakaahua, ā, ka puta te rerekētanga wairewa i waenga i te wāhanga kua whakamāramahia me te wāhanga kāore i whakamāramahia.
(4) Te whanaketanga me te whakapakeketanga:
Ka rumakina te hua ki roto i te kaiwhakawhanake. I tēnei wā, ka memeha te wāhi e kitea ana o te ātete whakaahua pai me te wāhi kāore e kitea ana o te ātete whakaahua kino i roto i te whanaketanga. Ka puta he tauira toru-ahu. I muri i te whanaketanga, me whai tukanga maimoatanga pāmahana teitei te maramara kia huri hei kiriata mārō, ko te mahi matua he whakapai ake i te piri o te ātete whakaahua ki te papa.
(5) Te whakairo:
Ka whakairohia te rauemi i raro i te ātete whakaahua. Kei roto ko te whakairo wai mākū me te whakairo hau maroke. Hei tauira, mō te whakairo mākū o te silicon, ka whakamahia he otinga wai waikawa o te waikawa hauwaiwhaoriki; mō te whakairo mākū o te parahi, ka whakamahia he otinga waikawa kaha pērā i te waikawa hauota me te waikawa whanariki, ko te whakairo maroke ia ka whakamahia he hihi plasma, he hihi katote kaha-teitei rānei hei whakakino i te mata o te rauemi, hei whakairo hoki.
(6) Te tango i te kapia:
Hei whakamutunga, me tango te ātete whakaahua i te mata o te arotahi. Ka kiia tēnei mahi ko te tango i te kapia.
Ko te haumaru te take nui rawa atu i roto i ngā mahi hanga haurua-ā-ira katoa. Ko ngā hau whakaahua-whakairoiro matua mōrearea me ngā hau kino i roto i te tukanga whakaahua-whakairoiro maramara koia ēnei:
1. Hauwai waikura
He matū waikura kaha te hauwai peroxide (H2O2). Ka mumura, ka wera hoki te kiri me ngā kanohi i te pānga tika.
2. Xylene
He whakarewa me te kaiwhakawhanake te Xylene e whakamahia ana i roto i te mahi peita kino. He mura ngāwari, ā, he iti noa te pāmahana, 27.3℃ anake (tata ki te pāmahana rūma). Ka pahū ina 1%-7% te kukū i te hau. Ka mumura te kiri mēnā ka pā tonu ki te xylene. He reka te kohu xylene, he rite ki te kakara o te taputapu rererangi; mēnā ka pāngia e te xylene, ka mumura ngā kanohi, te ihu me te korokoro. Mā te hongi i te hau ka pā te ānini, te whanoke, te ngaro o te hiahia kai me te ngenge.
3. Hexamethyldisilazane (HMDS)
Ko te Hexamethyldisilazane (HMDS) te mea e whakamahia whānuitia ana hei paparanga tuatahi hei whakanui ake i te piri o te photoresist ki te mata o te hua. He mura ngāwari, ā, ko te pāmahana mura he 6.7°C. He pahū ina ko te kukū i te hau he 0.8%-16%. Ka kaha te tauhohe a te HMDS ki te wai, te waipiro me ngā waikawa kohuke hei tuku i te haukini.
4. Tetramethylammonium hydroxide
He whānuitia te whakamahinga o te Tetramethylammonium hydroxide (TMAH) hei kaiwhakawhanake mō te pai o te hanga ira. He paitini, he waikura hoki. Ka mate pea mēnā ka horomia, ka pā tika rānei ki te kiri. Ka mumura ngā kanohi, te kiri, te ihu me te korokoro mēnā ka pā ki te puehu, ki te kohu rānei o te TMAH. Ka mate pea te tangata mēnā ka hongihia he nui o te TMAH.
5. Te hauota me te wheorine
E whakamahia ana te chlorine (Cl2) me te fluorine (F2) i roto i ngā taiaho excimer hei pūtake mārama ultraviolet hohonu me te ultraviolet tino kaha (EUV). He paitini ngā hau e rua, he āhua kakariki mārama, ā, he kakara whakapataritari kaha. Mā te hongi i ngā kukū tiketike o tēnei hau ka mate. Ka tauhohe pea te hau fluorine ki te wai ka puta he hau hauwai fluoride. He waikawa kaha te hau hauwai fluoride e whakapataritari ana i te kiri, i ngā kanohi me te ara manawa, ā, ka puta pea ngā tohu pēnei i te wera me te uaua ki te manawa. Ka taea e ngā kukū tiketike o te fluoride te whakapōrearea i te tinana tangata, ka puta ai ngā tohu pēnei i te ānini, te ruaki, te korere, me te koma.
6. Ākona
He hau koretake te Ākona (Ar) e kore e pā kino tika ki te tinana tangata. I raro i ngā āhuatanga noa, tata ki te 0.93% te ākona kei roto i te hau e manawahia ana e te tangata, ā, kāore he pānga kitea o tēnei kukū ki te tinana tangata. Heoi, i ētahi wā, ka pā kino pea te ākona ki te tinana tangata.
Anei ētahi āhuatanga pea: I roto i tētahi wāhi kuiti, ka piki ake pea te kukū o te argon, ka whakaiti i te kukū o te hāora i te hau, ā, ka puta te hypoxia. Ka puta pea ngā tohu pēnei i te whanoke, te ngenge, me te poto o te manawa. Hei tāpiri, he hau kore mahi te argon, engari ka pahū pea i raro i te pāmahana teitei, i te pēhanga teitei rānei.
7. Neon
He hau pumau, kāore he tae, kāore he kakara te Neon (Ne), kāore e whai wāhi ki te tukanga manawa o te tangata, nō reira, mā te manawa i te nui o te hau neon ka puta he hypoxia. Mēnā kei roto koe i te āhua hypoxia mō te wā roa, ka pāngia pea koe e ngā tohu pēnei i te ānini, te whakapairuaki, me te ruaki. Hei tāpiri, ka tauhohe pea te hau neon ki ētahi atu matū i raro i te pāmahana teitei, i te pēhanga teitei rānei, ka puta he ahi, he pahūtanga rānei.
8. Hau Xenon
He hau pumau, kāore he tae, kāore he kakara te hau Xenon (Xe) kāore e uru ki te tukanga manawa o te tangata, nō reira ka puta te hypoxia mēnā ka manawa koe i te nui o te hau xenon. Mēnā kei roto koe i te āhua hypoxia mō te wā roa, ka pāngia pea koe e ngā tohu pēnei i te ānini, te whakapairuaki, me te ruaki. Hei tāpiri, ka tauhohe pea te hau neon ki ētahi atu matū i raro i te pāmahana teitei, i te pēhanga teitei rānei, ka puta te ahi, te pahūtanga rānei.
9. Hau kripton
He hau pumau, kāore he tae, kāore he kakara te hau Krypton (Kr) kāore e uru ki te tukanga manawa tangata, nō reira, mā te manawa i te nui o te hau krypton ka puta te hypoxia. Mena kei roto koe i te āhua hypoxia mō te wā roa, ka pāngia pea koe e ngā tohu pēnei i te ānini, te whakapairuaki, me te ruaki. Hei tāpiri, ka tauhohe pea te hau xenon ki ētahi atu matū i raro i te pāmahana teitei, i te pēhanga teitei rānei, ka puta te ahi, te pahū rānei. Mā te manawa i roto i te taiao kore hāora ka puta te hypoxia. Mena kei roto koe i te āhua hypoxia mō te wā roa, ka pāngia pea koe e ngā tohu pēnei i te ānini, te whakapairuaki, me te ruaki. Hei tāpiri, ka tauhohe pea te hau krypton ki ētahi atu matū i raro i te pāmahana teitei, i te pēhanga teitei rānei, ka puta te ahi, te pahū rānei.
Ngā otinga kimi hau mōrearea mō te umanga haurua-ira
Ko te umanga haurua-haurua e pā ana ki te whakaputa, te hanga, me te tukanga o ngā hau mura, ngā hau pahū, ngā hau paitini, me ngā hau kino. Hei kaiwhakamahi hau i roto i ngā whare hanga haurua-haurua, me mārama ia mema kaimahi ki ngā raraunga haumaru o ngā momo hau morearea i mua i te whakamahinga, ā, me mōhio hoki me pēhea te whakahaere i ngā tikanga ohorere ina turuturu ēnei hau.
I roto i te whakaputanga, te hanga, me te rokiroki o te umanga haurua-ira, kia kore ai e ngaro te ora me te taonga i puta mai i te turuturu o ēnei hau morearea, me tāuta ngā taputapu kimi hau hei kimi i te hau e whaia ana.
Kua noho ngā pūoko hau hei taputapu aroturuki taiao nui i roto i te umanga haurua-waea o ēnei rā, ā, koinei anō hoki ngā taputapu aroturuki tino tika.
Kua aro tonu a Riken Keiki ki te whanaketanga haumaru o te umanga hanga haurua-ira, me te kaupapa matua ki te waihanga i tētahi taiao mahi haumaru mō te tangata, ā, kua whakatapua ia ki te whakawhanake i ngā pūoko hau e tika ana mō te umanga haurua-ira, me te whakarato i ngā otinga whaitake mō ngā raruraru maha e pā ana ki ngā kaiwhakamahi, me te whakapai tonu i ngā mahi hua me te arotau i ngā pūnaha.
Te wā tuku: Hurae-16-2024