Kev tshawb fawb txog cov khoom siv recrystallized silicon carbide ceramics

Rov ua dua tshiabCov khoom siv silicon carbide (RSiC) ceramicsyog ibcov khoom siv ceramic ua tau zooVim nws qhov kub thiab txias zoo heev, oxidation tsis kam, corrosion tsis kam thiab siab hardness, nws tau siv dav hauv ntau qhov chaw, xws li semiconductor manufacturing, photovoltaic kev lag luam, kub kub furnaces thiab cov khoom siv tshuaj lom neeg. Nrog rau qhov kev thov nce ntxiv rau cov ntaub ntawv ua tau zoo hauv kev lag luam niaj hnub no, kev tshawb fawb thiab kev txhim kho ntawm recrystallized silicon carbide ceramics yog tob zuj zus.

1. Kev npaj thev naus laus zis ntawmcov khoom siv rov ua dua tshiab silicon carbide ceramics

Cov txheej txheem npaj ntawm recrystallizedsilicon carbide ceramicsFeem ntau suav nrog ob txoj kev: hmoov sintering thiab vapor deposition (CVD). Ntawm lawv, txoj kev sintering hmoov yog sinter silicon carbide hmoov nyob rau hauv qhov kub siab kom cov silicon carbide me me tsim cov qauv ntom ntom los ntawm kev sib kis thiab recrystallization ntawm cov noob. Txoj kev vapor deposition yog tso silicon carbide rau ntawm qhov chaw ntawm lub substrate los ntawm kev tshuaj lom neeg vapor reaction ntawm qhov kub siab, yog li tsim cov yeeb yaj kiab silicon carbide siab-purity lossis cov khoom siv. Ob txoj kev no muaj lawv tus kheej qhov zoo. Txoj kev sintering hmoov yog qhov tsim nyog rau kev tsim khoom loj thiab muaj tus nqi qis, thaum txoj kev vapor deposition tuaj yeem muab kev huv siab dua thiab cov qauv ntom ntom dua, thiab siv dav hauv thaj chaw semiconductor.

2. Cov khoom siv ntawmcov khoom siv rov ua dua tshiab silicon carbide ceramics

Qhov tshwj xeeb ntawm cov khoom siv recrystallized silicon carbide ceramics yog nws qhov kev ua tau zoo heev hauv qhov chaw kub siab. Lub ntsiab lus yaj ntawm cov khoom siv no yog siab txog 2700 ° C, thiab nws muaj lub zog zoo ntawm qhov kub siab. Tsis tas li ntawd, recrystallized silicon carbide kuj muaj kev tiv thaiv oxidation zoo heev thiab kev tiv thaiv corrosion, thiab tuaj yeem ruaj khov hauv cov chaw muaj tshuaj lom neeg hnyav. Yog li ntawd, RSiC ceramics tau siv dav hauv cov teb ntawm cov cub tawg kub, cov khoom siv refractory kub siab, thiab cov khoom siv tshuaj lom neeg.

Tsis tas li ntawd, recrystallized silicon carbide muaj cov thermal conductivity siab thiab tuaj yeem ua kom sov tau zoo, uas ua rau nws muaj txiaj ntsig tseem ceeb rau kev siv hauvCov reactor MOCVDthiab cov khoom siv kho cua sov hauv kev tsim cov wafer semiconductor. Nws cov thermal conductivity siab thiab thermal shock tsis kam ua kom ntseeg tau tias cov khoom siv ua haujlwm tau zoo hauv qab qhov xwm txheej hnyav.

3. Cov teb thov ntawm cov khoom siv recrystallized silicon carbide ceramics

Kev tsim khoom semiconductor: Hauv kev lag luam semiconductor, recrystallized silicon carbide ceramics yog siv los tsim cov substrates thiab kev txhawb nqa hauv MOCVD reactors. Vim nws qhov kub thiab txias tsis kam, corrosion tsis kam, thiab thermal conductivity siab, RSiC cov ntaub ntawv tuaj yeem tswj tau qhov ruaj khov hauv cov tshuaj lom neeg nyuaj, xyuas kom meej qhov zoo thiab cov txiaj ntsig ntawm semiconductor wafers.

Kev lag luam Photovoltaic: Hauv kev lag luam photovoltaic, RSiC yog siv los tsim cov qauv txhawb nqa ntawm cov khoom siv loj hlob siv lead ua. Txij li thaum kev loj hlob siv lead ua yuav tsum tau ua tiav ntawm qhov kub siab thaum lub sijhawm tsim cov hlwb photovoltaic, qhov kev tiv thaiv cua sov ntawm recrystallized silicon carbide ua kom ntseeg tau tias kev ua haujlwm ruaj khov ntev ntawm cov khoom siv.

Cov cub tawg kub: RSiC ceramics kuj tseem siv dav hauv cov cub tawg kub, xws li cov ntaub thiab cov khoom ntawm cov cub tawg nqus tsev, cov cub tawg yaj thiab lwm yam khoom siv. Nws qhov kev tiv thaiv thermal shock thiab kev tiv thaiv oxidation ua rau nws yog ib qho ntawm cov ntaub ntawv tsis tuaj yeem hloov pauv hauv kev lag luam kub.

4. Kev tshawb fawb kev taw qhia ntawm cov khoom siv recrystallized silicon carbide ceramics

Nrog rau qhov kev thov nce ntxiv rau cov ntaub ntawv ua tau zoo, kev tshawb fawb ntawm cov khoom siv recrystallized silicon carbide ceramics tau maj mam pom tseeb. Kev tshawb fawb yav tom ntej yuav tsom mus rau cov hauv qab no:

Txhim kho cov khoom siv huv: Txhawm rau kom ua tau raws li qhov xav tau huv siab dua hauv cov teb semiconductor thiab photovoltaic, cov kws tshawb fawb tab tom tshawb nrhiav txoj hauv kev los txhim kho qhov huv ntawm RSiC los ntawm kev txhim kho cov thev naus laus zis vapor deposition lossis qhia cov khoom siv raw tshiab, yog li txhim kho nws cov nqi thov hauv cov teb high-tech no.

Kev Txhim Kho Microstructure: Los ntawm kev tswj cov xwm txheej sintering thiab kev faib tawm ntawm cov hmoov me me, cov microstructure ntawm recrystallized silicon carbide tuaj yeem txhim kho ntxiv, yog li txhim kho nws cov khoom siv kho tshuab thiab thermal shock tsis kam.

Cov ntaub ntawv sib xyaw ua haujlwm: Yuav kom hloov kho rau cov chaw siv nyuaj dua, cov kws tshawb fawb tab tom sim ua ke RSiC nrog lwm cov ntaub ntawv los tsim cov ntaub ntawv sib xyaw nrog cov khoom siv ntau yam, xws li cov ntaub ntawv sib xyaw recrystallized silicon carbide-based nrog kev tiv thaiv kev hnav siab dua thiab kev coj hluav taws xob.

5. Xaus Lus

Ua ib yam khoom siv ua tau zoo, cov khoom siv recrystallized silicon carbide ceramics tau siv dav hauv ntau qhov chaw vim lawv cov khoom zoo heev hauv qhov kub siab, tiv taus oxidation thiab tiv taus corrosion. Kev tshawb fawb yav tom ntej yuav tsom mus rau kev txhim kho cov khoom siv purity, optimizing microstructure thiab tsim cov khoom siv sib xyaw ua ke kom tau raws li qhov xav tau kev lag luam loj hlob. Los ntawm cov kev tsim kho tshiab no, cov khoom siv recrystallized silicon carbide ceramics yuav tsum ua lub luag haujlwm ntau dua hauv ntau qhov chaw siv high-tech.