Isimo socwaningo lwe-silicon carbide ceramics ephinde yasetshenziswa

Kuphinde kwakhiwe kabushai-silicon carbide (RSiC) ceramicskukhonaizinto zobumba ezisebenza kahle kakhuluNgenxa yokumelana kwayo nokushisa okuphezulu, ukumelana nokushiswa kwe-oxidation, ukumelana nokugqwala kanye nokuqina okuphezulu, isetshenziswe kabanzi emikhakheni eminingi, njengokukhiqiza ama-semiconductor, imboni ye-photovoltaic, izitofu zokushisa okuphezulu kanye nemishini yamakhemikhali. Njengoba isidingo esikhulayo sezinto ezisebenza kahle embonini yanamuhla sikhula, ucwaningo kanye nentuthuko ye-silicon carbide ceramics ephinde yasetshenziswa iyajula.

1. Ubuchwepheshe bokulungiselelaizitsha zobumba ze-silicon carbide ezenziwe kabusha

Ubuchwepheshe bokulungiselela i-recrystallizedizitsha zobumba ze-silicon carbideikakhulukazi kuhlanganisa izindlela ezimbili: ukuthungwa kwempuphu kanye nokufakwa komusi (CVD). Phakathi kwazo, indlela yokuthungwa kwempuphu iwukuthungwa kwempuphu ye-silicon carbide ngaphansi kwendawo yokushisa okuphezulu ukuze izinhlayiya ze-silicon carbide zakhe isakhiwo esiminyene ngokusabalala kanye nokuphinda kusetshenziswe phakathi kwezinhlayiya. Indlela yokufaka umusi iwukufaka i-silicon carbide ebusweni be-substrate ngokusebenzisa ukusabela komusi wamakhemikhali ekushiseni okuphezulu, ngaleyo ndlela kwakhiwe ifilimu ye-silicon carbide ehlanzekile kakhulu noma izingxenye zesakhiwo. Lobu buchwepheshe obubili bunezinzuzo zabo. Indlela yokuthungwa kwempuphu ifanele ukukhiqizwa okukhulu futhi inezindleko eziphansi, kuyilapho indlela yokufaka umusi inganikeza ubumsulwa obuphezulu kanye nesakhiwo esiminyene, futhi isetshenziswa kabanzi ensimini ye-semiconductor.

2. Izakhiwo zezinto ezibonakalayoizitsha zobumba ze-silicon carbide ezenziwe kabusha

Isici esivelele se-recrystallized silicon carbide ceramics ukusebenza kwayo okuhle kakhulu ezindaweni ezinokushisa okuphezulu. Indawo yokuncibilika yale nto iphakeme njengo-2700°C, futhi inamandla amahle okusebenza emazingeni okushisa aphezulu. Ngaphezu kwalokho, i-recrystallized silicon carbide nayo inokumelana okuhle kakhulu nokugqwala, futhi ingahlala izinzile ezindaweni ezinokushisa okuphezulu. Ngakho-ke, i-RSiC ceramics isetshenziswe kabanzi emikhakheni yezitofu ezinokushisa okuphezulu, izinto ezivimbela ukushisa okuphezulu, kanye nemishini yamakhemikhali.

Ngaphezu kwalokho, i-silicon carbide ephinde yasetshenziswa inokushisa okuphezulu futhi ingaqhuba ukushisa ngempumelelo, okwenza ibe nenani elibalulekile lokusetshenziswa kuAma-reactor e-MOCVDkanye nemishini yokwelapha ukushisa ekukhiqizeni i-semiconductor wafer. Ukushisa kwayo okuphezulu kanye nokumelana nokushaqeka kokushisa kuqinisekisa ukusebenza okuthembekile kwemishini ngaphansi kwezimo ezimbi kakhulu.

3. Amasimu okusetshenziswa kwe-silicon carbide ceramics ephinde yasetshenziswa

Ukukhiqizwa kwe-semiconductor: Embonini ye-semiconductor, i-silicon carbide ceramics ephinde yasetshenziswa isetshenziselwa ukukhiqiza ama-substrate kanye nezisekelo kuma-reactor e-MOCVD. Ngenxa yokumelana nokushisa okuphezulu, ukumelana nokugqwala, kanye nokuqhuba okuphezulu kokushisa, izinto ze-RSiC zingagcina ukusebenza okuzinzile ezindaweni eziyinkimbinkimbi zokusabela kwamakhemikhali, ziqinisekise ikhwalithi kanye nokukhiqizwa kwama-wafers e-semiconductor.

Imboni ye-Photovoltaic: Embonini ye-photovoltaic, i-RSiC isetshenziselwa ukukhiqiza isakhiwo sokusekela imishini yokukhulisa ikristalu. Njengoba ukukhula kwekristalu kudingeka kwenziwe ekushiseni okuphezulu ngesikhathi senqubo yokukhiqiza amaseli e-photovoltaic, ukumelana nokushisa kwe-silicon carbide ephinde yasetshenziswa kuqinisekisa ukusebenza okuzinzile kwesikhathi eside kwemishini.

Izithando zokushisa okuphezulu: Izitsha zobumba ze-RSiC zisetshenziswa kabanzi ezithandweni zokushisa okuphezulu, njengezingxenye ze-lining kanye nezingxenye zezithando zokushisa, izithando zokuncibilikisa kanye neminye imishini. Ukumelana kwayo nokushaqeka kokushisa kanye nokumelana nokushiswa kwe-oxidation kwenza kube ngenye yezinto ezingenakuphikwa ezimbonini zokushisa okuphezulu.

4. Isiqondiso socwaningo lwe-silicon carbide ceramics ephinde yasetshenziswa

Njengoba isidingo sezinto zokwakha ezisebenza kahle kakhulu sikhula, isiqondiso socwaningo lwe-silicon carbide ceramics ephinde yasetshenziswa siye sacaca kancane kancane. Ucwaningo lwesikhathi esizayo luzogxila kulezi zici ezilandelayo:

Ukuthuthukisa ubumsulwa bezinto ezibonakalayo: Ukuze kuhlangatshezwane nezidingo zobumsulwa obuphezulu emasimini e-semiconductor kanye ne-photovoltaic, abacwaningi bahlola izindlela zokuthuthukisa ubumsulwa be-RSiC ngokuthuthukisa ubuchwepheshe bokufaka umusi noma ukwethula izinto ezintsha zokusetshenziswa, ngaleyo ndlela kuthuthukiswe inani lokusetshenziswa kwayo kulezi zinsimu zobuchwepheshe obuphezulu.

Ukuthuthukisa isakhiwo esincane: Ngokulawula izimo zokusha kanye nokusatshalaliswa kwezinhlayiya zempuphu, isakhiwo esincane se-silicon carbide ephinde yasetshenziswa singathuthukiswa kakhulu, ngaleyo ndlela sithuthukise izakhiwo zaso zomshini kanye nokumelana nokushaqeka kokushisa.

Izinto ezihlanganisiwe ezisebenzayo: Ukuze zivumelane nezimo zokusetshenziswa eziyinkimbinkimbi kakhulu, abacwaningi bazama ukuhlanganisa i-RSiC nezinye izinto zokwakha izinto ezihlanganisiwe ezinezakhiwo eziningi, njengezinto ezihlanganisiwe ezisekelwe ku-silicon carbide eziphinde zasetshenziswa ezinokumelana nokuguguleka okuphezulu kanye nokuqhuba kukagesi.

5. Isiphetho

Njengezinto ezisebenza kahle kakhulu, izitsha zobumba ze-silicon carbide eziphinde zasetshenziswa ziye zasetshenziswa kabanzi emikhakheni eminingi ngenxa yezakhiwo zazo ezinhle kakhulu ekushiseni okuphezulu, ukumelana nokugqwala kanye nokumelana nokugqwala. Ucwaningo lwesikhathi esizayo luzogxila ekuthuthukiseni ubumsulwa bezinto, ukwenza ngcono isakhiwo esincane kanye nokuthuthukisa izinto ezisebenzayo ezihlanganisiwe ukuze kuhlangatshezwane nezidingo zezimboni ezikhulayo. Ngalezi zinto ezintsha zobuchwepheshe, izitsha zobumba ze-silicon carbide eziphinde zasetshenziswa kulindeleke ukuthi zidlale indima enkulu emikhakheni yobuchwepheshe obuphezulu.