Boemo ba lipatlisiso tsa li-ceramics tsa silicon carbide tse entsoeng hape

E nchafalitsoe hapeliseramike tsa silicon carbide (RSiC)kethepa ea letsopa e sebetsang hantle haholoKa lebaka la ho hanyetsa mocheso o phahameng haholo, ho hanyetsa oxidation, ho hanyetsa mafome le ho thatafala ho hoholo, e sebelisitsoe haholo masimong a mangata, joalo ka tlhahiso ea semiconductor, indasteri ea photovoltaic, lionto tsa mocheso o phahameng le lisebelisoa tsa lik'hemik'hale. Ka lebaka la tlhoko e ntseng e eketseha ea thepa e sebetsang hantle indastering ea sejoale-joale, lipatlisiso le nts'etsopele ea li-ceramics tsa silicon carbide tse nchafalitsoeng li ntse li teba.

1. Theknoloji ea ho lokisali-ceramic tsa silicon carbide tse entsoeng hape

Theknoloji ea ho lokisa li-recrystallizedli-ceramic tsa silicon carbideHaholo-holo e kenyelletsa mekhoa e 'meli: ho sila phofo le ho beha mouoane (CVD). Har'a tsona, mokhoa oa ho sila phofo ke ho sila phofo ea silicon carbide tlas'a tikoloho ea mocheso o phahameng e le hore likaroloana tsa silicon carbide li thehe sebopeho se teteaneng ka ho hasana le ho sebelisoa hape lipakeng tsa lithollo. Mokhoa oa ho beha mouoane ke ho beha silicon carbide holim'a substrate ka karabelo ea mouoane oa lik'hemik'hale mochesong o phahameng, ka hona ho theha filimi ea silicon carbide e hloekileng haholo kapa likarolo tsa sebopeho. Mahlale ana a mabeli a na le melemo ea 'ona. Mokhoa oa ho sila phofo o loketse tlhahiso e kholo 'me o na le litšenyehelo tse tlase, ha mokhoa oa ho beha mouoane o ka fana ka bohloeki bo phahameng le sebopeho se teteaneng, 'me o sebelisoa haholo tšimong ea semiconductor.

2. Thepa ea thepa eali-ceramic tsa silicon carbide tse entsoeng hape

Tšobotsi e ikhethang ea liserami tsa silicon carbide tse nchafalitsoeng ke ts'ebetso ea tsona e ntle haholo libakeng tse nang le mocheso o phahameng. Sebaka sa ho qhibiliha ha thepa ena se hodimo ho 2700°C, 'me se na le matla a matle a mechini maemong a mocheso o phahameng. Ho feta moo, silicon carbide e nchafalitsoeng e boetse e na le khanyetso e ntle ea oxidation le khanyetso ea mafome, 'me e ka lula e tsitsitse libakeng tse feteletseng tsa lik'hemik'hale. Ka hona, liserami tsa RSiC li 'nile tsa sebelisoa haholo masimong a lionto tse nang le mocheso o phahameng, thepa e hanyetsang mocheso o phahameng le lisebelisoa tsa lik'hemik'hale.

Ho phaella moo, carbide ea silicon e nchafalitsoeng e na le conductivity e phahameng ea mocheso 'me e ka tsamaisa mocheso ka katleho, e leng se etsang hore e be le bohlokoa ba ts'ebeliso hoLi-reactor tsa MOCVDle disebediswa tsa kalafo ya mocheso tlhahisong ya wafer ya semiconductor. Ho tsamaisa ha yona mocheso ka matla le ho hanyetsa ho thothomela ha mocheso ho netefatsa tshebetso e tshepahalang ya disebediswa tlasa maemo a feteletseng.

3. Masimo a ts'ebeliso ea li-ceramics tsa silicon carbide tse entsoeng hape

Tlhahiso ea li-semiconductor: Indastering ea li-semiconductor, li-ceramic tsa silicon carbide tse nchafalitsoeng li sebelisoa ho etsa li-substrate le litšehetso ho li-reactor tsa MOCVD. Ka lebaka la ho hanyetsa mocheso o phahameng, ho hanyetsa mafome, le ho khanna mocheso o phahameng, thepa ea RSiC e ka boloka ts'ebetso e tsitsitseng libakeng tse rarahaneng tsa karabelo ea lik'hemik'hale, ho netefatsa boleng le chai ea li-wafer tsa semiconductor.

Indasteri ea photovoltaic: Indastering ea photovoltaic, RSiC e sebelisoa ho etsa sebopeho sa tšehetso sa lisebelisoa tsa kholo ea kristale. Kaha kholo ea kristale e hloka ho etsoa mochesong o phahameng nakong ea ts'ebetso ea tlhahiso ea lisele tsa photovoltaic, khanyetso ea mocheso ea carbide ea silicon e nchafalitsoeng e netefatsa ts'ebetso e tsitsitseng ea nako e telele ea lisebelisoa.

Lifono tse nang le mocheso o phahameng: Li-ceramic tsa RSiC li boetse li sebelisoa haholo lifonong tse nang le mocheso o phahameng, joalo ka masela le likarolo tsa lifono tse se nang mokelikeli, lifono tse qhibilihang le lisebelisoa tse ling. Ho hanyetsa ha eona mocheso le ho hanyetsa oxidation ho etsa hore e be e 'ngoe ea thepa e ke keng ea nkeloa sebaka liindastering tse nang le mocheso o phahameng.

4. Tataiso ea lipatlisiso tsa li-ceramic tsa silicon carbide tse entsoeng hape

Ka lebaka la tlhoko e ntseng e hola ea thepa e sebetsang hantle, tataiso ea lipatlisiso tsa liseramike tsa silicon carbide tse entsoeng hape e se e hlakile butle-butle. Lipatlisiso tsa nakong e tlang li tla shebana le lintlha tse latelang:

Ho ntlafatsa bohloeki ba thepa: E le ho fihlela litlhoko tse phahameng tsa bohloeki masimong a semiconductor le photovoltaic, bafuputsi ba ntse ba hlahloba litsela tsa ho ntlafatsa bohloeki ba RSiC ka ho ntlafatsa theknoloji ea ho boloka mouoane kapa ho hlahisa thepa e ncha e tala, ka hona ho ntlafatsa boleng ba ts'ebeliso ea eona masimong ana a theknoloji e phahameng.

Ho ntlafatsa sebopeho sa micro: Ka ho laola maemo a ho sila le kabo ea likaroloana tsa phofo, sebopeho sa micro sa carbide ea silicon e nchafalitsoeng se ka ntlafatsoa haholoanyane, ka hona se ntlafatsa litšobotsi tsa sona tsa mechini le ho hanyetsa ho ts'oaroa ke mocheso.

Disebediswa tse kopaneng tse sebetsang: E ​​le ho ikamahanya le maemo a tshebediso a rarahaneng haholoanyane, bafuputsi ba leka ho kopanya RSiC le disebediswa tse ding ho ntshetsa pele disebediswa tse kopaneng tse nang le dibopeho tse ngata tse sebetsang, tse kang disebediswa tse kopaneng tse thehilweng ho silicon carbide tse nang le kganyetso e phahameng ya ho tsofala le ho tsamaisa motlakase.

5. Qetello

Jwalo ka thepa e sebetsang hantle haholo, diserame tsa silicon carbide tse fumanweng hape di sebedisitswe haholo masimong a mangata ka lebaka la thepa ya tsona e ntle haholo mochesong o phahameng, kganyetsong ya oxidation le kganyetsong ya mafome. Diphuputso tsa nakong e tlang di tla shebana le ho ntlafatsa bohloeki ba thepa, ho ntlafatsa sebopeho sa micro le ho ntshetsa pele thepa e sebetsang ka ho kopanya ho fihlela ditlhoko tse ntseng di hola tsa indasteri. Ka boqapi bona ba theknoloji, diserame tsa silicon carbide tse fumanweng hape di lebelletswe ho bapala karolo e kgolo masimong a theknoloji e hodimo.