Uko ubushakashatsi buhagaze ku bibumbano bya silikoni byasubiwemo

Yongeye gukoreshwaibumba rya silikoni karubide (RSiC)niibikoresho bya ceramic bikora neza cyaneBitewe n’ubushyuhe bwayo bukabije, kurwanya ogisijeni, kurwanya ingese no gukomera kwayo cyane, yakoreshejwe cyane mu nzego nyinshi, nko mu nganda zikora ibikoresho bya semiconductor, inganda zikora amashanyarazi aturutse kuri photovoltaic, amatanura akoresha ubushyuhe bwinshi n’ibikoresho bya chimique. Bitewe n’ubwiyongere bw’ibikenewe ku bikoresho bigezweho mu nganda zigezweho, ubushakashatsi n’iterambere rya ceramics za silicon carbide zikoreshwa mu gusimbuza zirimo kwiyongera.

1. Ikoranabuhanga ryo guteguraibumba rya silicon carbide ryasubiwemo

Ikoranabuhanga ryo gutegura imashini zisubiramoibumba rya karubide rya silikoniMuri rusange harimo uburyo bubiri: gusya ifu no gushyira umwuka mu kirere (CVD). Muri bwo, uburyo bwo gusya ifu ni ugusya ifu ya silicon carbide mu bushyuhe bwinshi kugira ngo uduce twa silicon carbide dukore imiterere ikomeye binyuze mu gukwirakwiza no kongera gukoresha ibinyampeke hagati y’ibinyampeke. Uburyo bwo gushyira umwuka mu kirere ni ugushyira silicon carbide ku buso bwa substrate binyuze mu buryo bw’umwuka w’ibinyabutabire ku bushyuhe bwinshi, bityo bikarema firime ya silicon carbide cyangwa ibice by’imiterere. Ubu buryo bwombi bufite ibyiza byabwo. Uburyo bwo gusya ifu bukwiriye gukorwa ku bwinshi kandi bufite ikiguzi gito, mu gihe uburyo bwo gushyira umwuka mu kirere bushobora gutanga ubuziranenge n’imiterere ikomeye, kandi bukoreshwa cyane mu rwego rwa semiconductor.

2. Imiterere y'ibikoresho byaibumba rya silicon carbide ryasubiwemo

Ikintu kidasanzwe kiranga ibyuma bya silikoni byasubijwemo karuboni ni imikorere yabyo myiza cyane mu bushyuhe bwinshi. Aho ibi bikoresho bishongesha ni 2700°C, kandi bifite imbaraga nziza za mekanike mu bushyuhe bwinshi. Byongeye kandi, ibyuma bya silikoni byasubijwemo karuboni bifite ubudahangarwa bwiza bwo kurwanya ogisijeni no kurwanya ingese, kandi bishobora kuguma mu buryo buhamye mu bidukikije bikoresha imiti. Kubwibyo, ibyuma bya silikoni bya RSiC byakoreshejwe cyane mu bikoresho by'amatanura bishyushye cyane, ibikoresho birwanya ubushyuhe bwinshi, n'ibikoresho bya shimi.

Byongeye kandi, karubide ya silikoni isubijwemo ifite ubushobozi bwo gutwara ubushyuhe bwinshi kandi ishobora gutwara ubushyuhe neza, ibyo bigatuma igira akamaro kanini muIngufu za MOCVDn'ibikoresho byo gutunganya ubushyuhe mu nganda za semiconductor wafer. Ifite ubushobozi bwo gutwara ubushyuhe bwinshi no kudashyuha cyane bituma ibikoresho bikora neza mu gihe habaye impanuka zikomeye.

3. Ahantu ho gukoresha ibikoresho bya silikoni bya karubide byasubiwemo

Gukora ibikoresho bya semiconductor: Mu nganda za semiconductor, ibumba rya silicon carbide ryasubiwemo rikoreshwa mu gukora substrates no gushyigikira muri MOCVD reactors. Bitewe n'ubushyuhe bwinshi, kurwanya ingese, no gutwara ubushyuhe bwinshi, ibikoresho bya RSiC bishobora kugumana imikorere ihamye mu bidukikije bigoye, bigatuma habaho ubwiza n'umusaruro wa wafer za semiconductor.

Inganda zikora imashini zikoresha amashanyarazi ashyushye: Mu nganda zikora imashini zikoresha amashanyarazi ashyushye, RSiC ikoreshwa mu gukora imiterere y’ibikoresho bifasha gukuramo amashanyarazi ashyushye. Kubera ko gukuramo amashanyarazi ashyushye bigomba gukorwa ku bushyuhe bwinshi mu gihe cyo gukora uturemangingo dukoresha amashanyarazi ashyushye, ubwiyongere bw’ubushyuhe bwa silicon carbide ikoreshwa mu gushya butuma ibikoresho bihora bikora neza mu gihe kirekire.

Amatanura ashyushye cyane: Ibumba rya RSiC rikoreshwa cyane mu matanura ashyushye cyane, nk'amabati n'ibice by'amatanura ashyushye, amatanura ashongesha n'ibindi bikoresho. Kuba rirwanya ubushyuhe n'ubudahangarwa bwa ogisijeni bituma riba kimwe mu bikoresho bidasimburwa mu nganda zishyushye cyane.

4. Icyerekezo cy'ubushakashatsi ku bimera bya silikoni byasubiwemo

Kubera ko hari kwiyongera gukenerwa kw'ibikoresho bifite imikorere myiza, icyerekezo cy'ubushakashatsi ku bikoresho bya silikoni byasubijwemo karuboni cyagiye kigaragara buhoro buhoro. Ubushakashatsi bw'ejo hazaza buzibanda ku ngingo zikurikira:

Kunoza ubuziranenge bw'ibikoresho: Kugira ngo huzuzwe ibisabwa mu buziranenge mu ishami rya semiconductor na photovoltaic, abashakashatsi barimo gushakisha uburyo bwo kunoza ubuziranenge bwa RSiC binyuze mu kunoza ikoranabuhanga ryo gushyira umwuka mu kirere cyangwa gushyiraho ibikoresho bishya fatizo, bityo bikongera agaciro kabyo muri izi shami zigezweho.

Kunoza imiterere mito: Mu kugenzura imiterere y’ibintu bishyuha no gukwirakwiza uduce tw’ifu, imiterere mito ya silicon carbide ishobora kongera kunozwa, bityo bikanoza imiterere yayo ya mekanike no kurwanya ubushyuhe.

Ibikoresho bivanze bikora: Kugira ngo bihuze n'ahantu hagoye gukoreshwa, abashakashatsi barimo kugerageza guhuza RSiC n'ibindi bikoresho kugira ngo bakore ibikoresho bivanze bifite imiterere myinshi, nk'ibikoresho bivanze bya silikoni byasubiwemo bifite ubushobozi bwo kwangirika cyane kandi bitwara amashanyarazi menshi.

5. Umwanzuro

Nk'ibikoresho bikora neza cyane, ibumba rya silicon carbide ryasubiwemo ryakoreshejwe cyane mu nzego nyinshi bitewe n'imiterere yaryo myiza mu bushyuhe bwinshi, kurwanya oxidation no kurwanya ingese. Ubushakashatsi bw'ejo hazaza buzibanda ku kunoza ubuziranenge bw'ibikoresho, kunoza imiterere mito no guteza imbere ibikoresho bikora neza kugira ngo bihuze n'ibikenewe mu nganda. Binyuze muri ubu buvumbuzi bw'ikoranabuhanga, ibumba rya silicon carbide ryasubiwemo ryitezweho kugira uruhare runini mu nzego zigezweho z'ikoranabuhanga.