Mamiriro ekutsvagisa esimbi dzesilicon carbide dzakagadziriswazve

Yakagadzirwazvesilicon carbide (RSiC) ceramicsvarizvinhu zveceramic zvinoshanda zvakanyanyaNekuda kwekudzivirira kwayo kupisa kwakanyanya, kudzivirira oxidation, kudzivirira ngura uye kuomarara kwakanyanya, yave ichishandiswa zvakanyanya muminda yakawanda, senge kugadzira semiconductor, indasitiri ye photovoltaic, maovheni ekupisa kwakanyanya uye michina yemakemikari. Nekuwedzera kuri kudiwa kwezvinhu zvinoshanda zvakanyanya muindasitiri yemazuva ano, tsvakiridzo nekuvandudzwa kwesimbi dzesilicon carbide dzakagadziriswazve kuri kuwedzera.

1. Tekinoroji yekugadzirirasimbi dzesimbi dzesilicon carbide dzakagadzirwazve

Tekinoroji yekugadzirira recrystallizedzviumbwa zvesimbi zvesilicon carbideZvinonyanya kusanganisira nzira mbiri: kusvina hupfu uye kuburitsa hupfu (CVD). Pakati padzo, nzira yekusvina hupfu ndeyekusvina hupfu hwesilicon carbide pasi pemamiriro ekupisa kwakanyanya kuitira kuti zvidimbu zvesilicon carbide zvigadzire chimiro chakasimba kuburikidza nekupararira uye kudzokororwa pakati pezviyo. Nzira yekusvina hupfu ndeyekuisa silicon carbide pamusoro pe substrate kuburikidza nemakemikari evapor reaction pakupisa kwakanyanya, nokudaro ichigadzira firimu resilicon carbide rakachena zvakanyanya kana zvikamu zvechimiro. Aya matekinoroji maviri ane zvakanakira zvawo. Nzira yekusvina hupfu yakakodzera kugadzirwa kukuru uye ine mutengo wakaderera, nepo nzira yekusvina hupfu ichigona kupa kuchena kwakanyanya uye chimiro chakasimba, uye inoshandiswa zvakanyanya mumunda we semiconductor.

2. Hunhu hwezvinhu zvesimbi dzesimbi dzesilicon carbide dzakagadzirwazve

Hunhu hunoshamisa hwesimbi dzesilicon carbide dzakagadziriswazve hunhu hwadzo hwakanaka kwazvo munzvimbo dzinopisa zvakanyanya. Nzvimbo yekunyunguduka kwesimbi iyi inosvika 2700°C, uye ine simba rakanaka remakanika pakupisa kwakanyanya. Pamusoro pezvo, simbi dzesilicon dzakagadziriswazve dzinewo simba rakanaka rekudzivirira oxidation uye ngura, uye dzinogona kuramba dzakagadzikana munzvimbo dzine makemikari akawandisa. Naizvozvo, simbi dzeRSiC dzave dzichishandiswa zvakanyanya muminda yemidziyo inopisa zvakanyanya, zvinhu zvinopisa zvakanyanya, uye michina yemakemikari.

Pamusoro pezvo, silicon carbide yakadzokororwa ine simba rekupisa rakawanda uye inogona kufambisa kupisa zvinobudirira, izvo zvinoita kuti ive nekushandiswa kwakakosha muMa reactor eMOCVDuye michina yekurapa kupisa mukugadzira semiconductor wafer. Kupisa kwayo kwakanyanya uye kuramba kupisa kunodzivirira kupisa kunoita kuti michina ishande zvakanaka mumamiriro ezvinhu akaoma.

3. Minda yekushandisa yesimbi dzesilicon carbide dzakagadziriswazve

Kugadzira Semiconductor: Muindasitiri yesemiconductor, silicon carbide ceramics inoshandiswazve kugadzira substrates uye inotsigira muMOCVD reactors. Nekuda kwekudzivirira kwayo kupisa kwakanyanya, kuramba ngura, uye kufambisa kwakanyanya kwekupisa, zvinhu zveRSiC zvinogona kuchengetedza kushanda kwakasimba munzvimbo dzakaoma dzemakemikari, zvichivimbisa mhando uye goho remawafers esemiconductor.

Indasitiri yePhotovoltaic: Muindasitiri yephotovoltaic, RSiC inoshandiswa kugadzira chimiro chekutsigira michina yekukura kwekristaro. Sezvo kukura kwekristaro kuchifanirwa kuitwa pakupisa kwakanyanya panguva yekugadzira masero ephotovoltaic, kuramba kupisa kwesilicon carbide yakadzokororwa kunoita kuti michina ishande kwenguva refu.

Maovheni anodziya zvakanyanya: Zviumbwa zveRSiC zvinoshandiswawo zvakanyanya mumaovheni anodziya zvakanyanya, zvakaita semachira nezvikamu zvemaovheni anodziya, maovheni anonyungudutsa nemimwe midziyo. Kusapisa kwayo uye kusaodzwa kweokisijeni zvinoita kuti ive imwe yezvinhu zvisingatsiviwi mumaindasitiri anodziya zvakanyanya.

4. Nzira yekutsvaga yesimbi dzesimbi dzesilicon carbide dzakagadzirwazve

Nekuwedzera kuri kuita kudiwa kwezvinhu zvinoshanda zvakanyanya, nzira yekutsvagisa yesimbi dzesilicon carbide dzakagadziriswazve yave pachena zvishoma nezvishoma. Tsvagiridzo yeramangwana ichatarisa pane zvinotevera:

Kuvandudza kuchena kwezvinhu: Kuti vasangane nezvinodiwa zvekuchena zvakanyanya muminda ye semiconductor ne photovoltaic, vaongorori vari kutsvaga nzira dzekuvandudza kuchena kweRSiC nekuvandudza tekinoroji yekupisa utsi kana kuunza zvinhu zvitsva, nokudaro zvichiwedzera kukosha kwayo muminda iyi yepamusoro-soro.

Kugadzirisa magadzirirwo emuchina: Nekudzora mamiriro ekutsvaira uye kupararira kwezvikamu zveupfu, magadzirirwo emuchina wesilicon carbide yakadzokororwa anogona kugadziriswazve, nokudaro zvichivandudza hunhu hwayo hwemakanika uye kuramba kupisa.

Zvinhu zvinosanganisa zvinoshanda: Kuti zvikwanise kushandiswa munzvimbo dzakaoma, vaongorori vari kuedza kusanganisa RSiC nezvimwe zvinhu kuti vagadzire zvinhu zvinosanganisa zvine hunhu hwakawanda, zvakaita sezvinhu zvinosanganisa silicon carbide zvakagadzirwazve zvine simba rekudzivirira kupfekwa zvakanyanya uye zvinofambisa magetsi.

5. Mhedziso

Sezvinhu zvinoshanda zvakanyanya, zvigadziko zvesilicon carbide zvakagadziriswazve zvakashandiswa zvakanyanya muminda yakawanda nekuda kwehunhu hwazvo hwakanaka mukupisa kwakanyanya, kuramba oxidation uye kuramba ngura. Tsvagiridzo yeramangwana ichatarisa pakuvandudza kuchena kwezvinhu, kugadzirisa magadzirirwo e microstructure uye kugadzira zvinhu zvinoshanda zvakasanganiswa kuti zvisangane nezvinodiwa zviri kukura zvemaindasitiri. Kuburikidza nehunyanzvi uhu hwetekinoroji, zvigadziko zvesilicon carbide zvakagadziriswazve zvinotarisirwa kuita basa rakakura muminda yetekinoroji yepamusoro.