SOI yog dab tsi?

SOI yog lub npe luv rauSilicon-On-Insulator. Txhais tau tias, nws txhais tau tias "silicon ntawm ib lub insulator." Hauv kev xyaum, cov qauv yog tias muaj ib txheej ultra-thin insulating, xws li SiO₂, nyob rau sab saum toj ntawm lub silicon wafer, thiab tom qab ntawd ib txheej silicon nyias nyias yog tsim rau saum cov txheej insulating no. Cov qauv no cais cov txheej silicon nquag ntawm lub silicon substrate. Hauv cov txheej txheem silicon ib txwm muaj, txawm li cas los xij, lub chip yog tsim ncaj qha rau ntawm lub silicon substrate yam tsis siv ib txheej insulating.

SOI wafermuaj peb txheej tseem ceeb: ib txheej silicon uas siv lead ua ib txheej, ib txheej silicon dioxide insulating (cov oxide faus, lossis BOX), thiab ib txheej silicon substrate. Ua ke, peb txheej no tsim ib puag ncig hluav taws xob ywj pheej thiab ruaj khov, txhua txheej ua nws lub luag haujlwm thaum ua haujlwm ua ke los txhim kho kev ua tau zoo thiab kev ntseeg siab.

Cov txheej txheem silicon ib leeg-siv lead ua sab saud (feem ntau yog li ntawm 5 nm txog 2 μm tuab) yog thaj chaw tseem ceeb uas cov transistors thiab lwm yam khoom siv nquag tau tsim. Nws cov qauv ultra-thin yog lub hauv paus tseem ceeb rau kev txhim kho kev ua haujlwm ntawm cov khoom siv thiab ua kom muaj kev nthuav dav tas mus li.

Cov txheej oxide faus nruab nrab (BOX) muab kev sib cais hluav taws xob. Cov txheej silicon dioxide no, feem ntau yog 5 nm txog 2 μm hauv tuab, zoo thaiv kev sib txuas hluav taws xob ntawm cov txheej cuab yeej thiab cov khoom hauv qab los ntawm ob qho tib si lub cev thiab tshuaj lom neeg sib cais.

Lub silicon substrate hauv qab feem ntau muab kev ruaj khov ntawm cov qauv thiab kev ruaj khov ntawm cov khoom siv, ua kom ntseeg tau tias wafer muaj kev ntseeg siab thaum lub sijhawm tsim khoom thiab kev ua haujlwm tom qab. Nws cov tuab feem ntau yog nyob rau hauv qhov ntau ntawm 200 μm txog 700 μm, muab kev txhawb nqa txaus thaum xav txog kev ua tiav thiab cov kev cai ntawm daim ntawv thov.

Cov txiaj ntsig tseem ceeb ntawm SOI Wafers
1. Kev Ceev Dua

• Nrog ib txheej oxide faus rau hauv qab cov khoom siv, cov transistors raug cais tawm ntawm silicon substrate. Qhov no txo ​​cov peev xwm parasitic, ua kom ceev nrooj switching, thiab ua rau SOI zoo rau cov logic ceev thiab RF circuits.

2. Siv zog tsawg dua

• Qhov capacitance me dua txhais tau tias qhov kev them thiab kev tso tawm tsawg dua.
• Txoj kev xau tsawg dua ua rau kev siv hluav taws xob standby (static), ua rau lub kaw lus siv hluav taws xob tau zoo dua.

3. Kev Rho Tawm Zoo Dua

• Txhua lub cuab yeej "zaum" rau ntawm ib txheej oxide, uas txo qhov cuam tshuam hluav taws xob ntawm cov khoom siv. Qhov no txhim kho kev ruaj khov thaum koom ua ke cov voj voog analog + digital, cov chaw tswj hwm hluav taws xob, thiab cov modules RF ntawm tib lub chip.

4. Txhim Kho Kev Hluav Taws Xob thiab Kev kam rau siab kub

• Cov nqi hluav taws xob tsim los ntawm cov hluav taws xob yuav tsis tshua kis mus rau hauv lub substrate, ua rau SOI cov khoom siv muaj kev nyab xeeb dua thiab txhim khu kev qha dua hauv cov chaw muaj hluav taws xob siab xws li aerospace.
• Qhov nce ntawm cov hluav taws xob xau ntawm qhov kub siab tsis hnyav heev, uas yog qhov zoo rau cov khoom siv hluav taws xob hauv tsheb thiab cov ntawv thov tswj kev lag luam.

5. Zoo rau kev nce qib ntxiv

• Nrog ib txheej silicon nyias heev nyob rau sab saum toj thiab ib txheej oxide faus rau hauv qab, cov teebmeem luv luv tau tswj tau zoo dua, ua rau nws yooj yim dua los tswj cov cwj pwm ruaj khov thaum cov txheej txheem txuas ntxiv mus me dua.

SOI thev naus laus zis twb tau siv rau ntau qhov chaw lawm. Hauv cov khoom siv hluav taws xob rau cov neeg siv khoom, nws yog siv rau hauv RF pem hauv ntej ntawm cov xov tooj ntse, xws li 5G lim dej. Hauv cov khoom siv hluav taws xob hauv tsheb, nws muab lub platform ruaj khov rau cov chips radar hauv tsheb. Hauv kev lag luam aerospace, nws yog siv rau hauv cov khoom siv sib txuas lus satellite uas muaj kev ntseeg siab. Hauv cov khoom siv kho mob, SOI txhawb nqa kev tsim thiab kev siv cov sensors kho mob uas cog tau thiab ntau hom chips saib xyuas qis zog.

Peb lub tuam txhab muaj cov haujlwm tshwj xeeb rau cov wafers silicon ib leeg siv lead ua ke:

• Silicon substrate tuab: 100 μm / 300 μm / 400 μm / 500 μm / 625 μm thiab siab dua

• SiO₂ tuab: txij li 100 nm txog 10 μm

• Txheej silicon nquag: ≥ 20 nm