SOI ni iki?

SOI ni ijambo rihinnye ryaIngufu zo Gukingira Zikoresheje Silicon. Mu buryo burambuye, bisobanura "silicone iri ku gikoresho gikingira ibidukikije." Mu by'ukuri, imiterere ni uko hari urwego rworoshye cyane rukingira ibidukikije, nka SiO₂, hejuru ya wafer ya silicon, hanyuma urwego rworoshye rwa silicon rugakora hejuru y'uru rwego rukingira ibidukikije. Uru rwego rutandukanya urwego rwa silicon rukora n'urwego rwa silicon. Ariko, mu buryo busanzwe bwa silicon, chip ikorwa neza kuri substrate ya silicon nta gukoresha urwego rukingira ibidukikije.

wafer ya SOIIgizwe n'ibice bitatu by'ingenzi by'imiterere: urwego rw'ibikoresho bya silikoni imwe, urwego rw'ibikoresho bya silikoni bikingira (oxide yahishwe, cyangwa BOX), n'igice cya silikoni. Ibi bice bitatu hamwe, bigize ibidukikije by'amashanyarazi byigenga kandi bihamye, buri gice kigira uruhare rwacyo mu gihe gikorana kugira ngo cyongere imikorere n'ubwizigirwa muri rusange.

Urusobe rw'ibikoresho bya silikoni bifite ishusho imwe (ubusanzwe rufite ubugari bwa 5 nm kugeza kuri 2 μm) ni akarere k'ibanze aho transistors n'ibindi bikoresho bikora bikorwa. Imiterere yabyo ni ingenzi cyane mu kunoza imikorere y'ibikoresho no gutuma bikomeza gukwirakwira.

Urusobe rwo hagati rwa okiside (BOX) rutanga uburyo bwo gutandukanya amashanyarazi. Uru rusobe rwa silicon dioxide, ubusanzwe rufite ubunini bwa 5 nametero 2, ruhagarika neza uburyo amashanyarazi ahurira hagati y’urusobe rw’igikoresho n’igice kiri munsi yacyo binyuze mu buryo bwo gutandukanya amashanyarazi haba mu buryo bw’umubiri no mu buryo bwa shimi.

Igice cyo hasi cya silikoni gitanga ubukana bw’imiterere n’ubudahangarwa bw’imashini, bigatuma habaho ubwiza bw’imashini mu gihe cyo kuyikora no kuyikoresha nyuma yayo. Ubunini bwayo muri rusange buri hagati ya μm 200 na 700, butanga ubufasha buhagije mu imashini mu gihe hazirikanwa ubushobozi bwo kuyitunganya no kuyikoresha.

Ibyiza by'ingenzi bya SOI Wafers
1. Umuvuduko wo hejuru

• Hamwe n'urwego rwa okiside ruri munsi y'ibikoresho, transistors ziba zitandukanyijwe na substrate ya silicon. Ibi bigabanya ubushobozi bwa parasite, bikihutisha guhinduranya, kandi bigatuma SOI ikwiriye neza imikorere ya logic yihuta cyane na RF.

2. Ikoreshwa ry'amashanyarazi make

• Ubushobozi buke bw'amashanyarazi busobanura ko hagabanuka igihombo cyo gusharija no gusohora umuriro.
• Inzira nke zo gusohora amazi zituma ikoreshwa ry'amashanyarazi rigabanuka (ritajegajega), bigatuma sisitemu ikoresha ingufu neza.

3. Kwishyira mu kato neza

• Buri gikoresho kiba "cyicaye" ku gice cya okiside, bigabanya cyane ubwinjiracyaha bw'amashanyarazi hagati y'ibikoresho. Ibi byongera ubusugire iyo bihujwe na analog + digital circuits, power management units, na RF modules kuri chip imwe.

4. Imirasire myiza no kwihanganira ubushyuhe bwinshi

• Ingufu ziterwa n’imirasire ntizikunze gukwirakwira muri substrate, bigatuma ibikoresho bya SOI birushaho kuba byiza kandi byizewe mu duce dufite imirasire myinshi nko mu kirere.
• Ubwiyongere bw'umuyoboro w'amazi usohoka mu bushyuhe bwinshi ntabwo bukabije, ibyo bikaba ingirakamaro ku bikoresho by'ikoranabuhanga by'imodoka no ku nganda.

5. Bikwiriye kongera ubwiyongere bw'ibiciro

• Hamwe n'urwego rwo hasi rw'icyuma cya silikoni rugufi cyane n'urwego rwo hasi rw'icyuma cya okiside, ingaruka z'imiyoboro migufi zigenzurwa neza, bigatuma byoroha kugumana imyitwarire ihamye y'igikoresho uko uduce tw'imikorere dukomeza kugabanuka.

Ikoranabuhanga rya SOI ryamaze gukoreshwa mu nzego nyinshi. Mu bikoresho by'ikoranabuhanga bikoreshwa n'abaguzi, rikoreshwa muri module za RF za telefoni zigendanwa, nka filters za 5G. Mu bikoresho by'ikoranabuhanga bikoresha imodoka, ritanga urubuga ruhamye rwo gukora uduce twa radar two mu modoka. Mu rwego rw'indege, rikoreshwa mu bikoresho by'itumanaho bya satelite byizewe cyane. Mu bikoresho by'ubuvuzi, SOI ishyigikira igishushanyo mbonera n'ishyirwa mu bikorwa rya sensors z'ubuvuzi zishobora gushyirwamo hamwe n'ubwoko butandukanye bwa utundi duce duto two kugenzura.

Isosiyete yacu itanga imishinga yihariye ku bikoresho bya silikoni bitwara wafers bya crystal imwe:

• Ubunini bwa silicon substrate: 100 μm / 300 μm / 400 μm / 500 μm / 625 μm no hejuru yayo

• Ubunini bwa SiO₂: kuva kuri 100 nm kugeza kuri 10 μm

• Urusobe rwa silikoni rukora: ≥ 20 nm