He aha te SOI?

Ko te SOI te whakarāpopototanga mōTe Ārai-i-runga-i-te-Hikorona. Ko tōna tikanga tūturu ko te "silicon i runga i te insulator." I roto i te mahi, ko te hanganga he paparanga whakamarumaru tino angiangi, pērā i te SiO₂, i runga i te paparanga silicon, kātahi ka hangaia he paparanga silicon angiangi ki runga i tēnei paparanga whakamarumaru. Mā tēnei hanganga ka wehea te paparanga silicon hohe mai i te paparanga silicon. Heoi, i roto i te tukanga silicon tuku iho, ka hangaia te maramara tika ki runga i te paparanga silicon me te kore e whakamahi i tētahi paparanga whakamarumaru.

Wafer SOIe toru ngā paparanga hanganga matua: he paparanga taputapu silicon kotahi-kiriata, he paparanga ārai hauhā silicon (te waikura tanumia, te POUAKA rānei), me te papa silicon. Mā ēnei paparanga e toru ka hangaia he taiao hiko motuhake, pumau hoki, me ia paparanga e mahi tahi ana me te mahi tahi hei whakarei ake i te mahi whānui me te pono.

Ko te paparanga o runga o te taputapu silicon kotahi-kiriata (he matotoru tata ki te 5 nm ki te 2 μm te nuinga) te rohe matua e hangaia ai ngā transistors me ētahi atu taputapu hohe. Ko tōna hanganga tino angiangi he tūāpapa nui mō te whakapai ake i te mahi a te taputapu me te whakahohe i te tauine tonu.

Mā te paparanga waikura huna o waenganui (BOX) ka wehea te hiko. Ko tēnei paparanga hauhā silicon, he 5 nm ki te 2 μm te matotoru, ka ārai i te hononga hiko i waenga i te paparanga taputapu me te papa o raro mā roto i ngā tikanga wehe ā-tinana me te matū.

Ko te papa silicon o raro te mea nui hei whakarato i te pakari o te hanganga me te pumau ā-pūkaha, kia tika ai te hanga o te anga i te wā e hangaia ana me te mahi i muri mai. Ko tōna matotoru i te nuinga o te wā kei waenga i te 200 μm ki te 700 μm, e whakarato ana i te tautoko ā-pūkaha e ranea ana me te whai whakaaro ki ngā whakaritenga tukatuka me te tono.

Ngā Painga Matua o ngā Wafer SOI
1. Tere Tere

• Mā te paparanga waikura kua tanumia ki raro i ngā taputapu, ka wehea ngā transistors mai i te papa silicon. Ka whakaitihia e tēnei te kaha o te pirinoa, ka tere ake te whakawhiti, ā, ka pai te SOI mō ngā ara iahiko arorau me te RF tere-tiketike.

2. Te Whakamahinga Mana Iti

• Ko te iti o te kaha hiko he iti ake ngā ngaronga utu me ngā ngaronga tuku.
• Mā te iti ake o ngā ara turuturu ka iti ake te whakapaunga hiko tūtatari (pūmau), ka nui ake te penapena hiko o te pūnaha.

3. Te Wehenga Pai Ake

• Kei runga i tētahi paparanga waikura ia taputapu, e whakaiti ana i te pokanoa hiko i waenga i ngā taputapu. Ka whakapai ake tēnei i te pumau ina whakauruhia ngā ara iahiko anaro me te mamati, ngā waeine whakahaere hiko, me ngā kōwae RF ki te maramara kotahi.

4. Te Whakapai Ake i te Irahiko me te Manawanui ki te Mahana Teitei

• He iti ake te tūponotanga o te horapa o ngā utu e puta mai ana i te hihi puta noa i te papa, ā, he pai ake te haumaru me te pono o ngā taputapu SOI i roto i ngā taiao e nui ana te hihi pērā i te rererangi.
• Kāore i te tino kaha te pikinga o te ia turuturu i ngā pāmahana tiketike, ā, he mea pai tēnei mō ngā tono hikohiko motuka me ngā tono whakahaere ahumahi.

5. He pai mō te Whakanui Anō

• He tino angiangi te paparanga silicon i runga, ā, he paparanga waikura kua tanumia ki raro, ka pai ake te whakahaere i ngā pānga hongere-poto, kia māmā ake ai te pupuri i te whanonga pumau o te taputapu i te mea ka mimiti haere tonu ngā pona tukanga.

Kua whakamahia kētia te hangarau SOI puta noa i ngā mara maha. I roto i ngā hikohiko kaihoko, ka whakamahia i roto i ngā kōwae RF o mua o ngā waea atamai, pērā i ngā tātari 5G. I roto i ngā hikohiko motuka, ka whakaratohia he tūāpapa tukatuka pumau mō ngā maramara radar i roto i te waka. I roto i te rāngai rererangi, ka whakamahia i roto i ngā taputapu whakawhitiwhiti amiorangi pono-teitei. I roto i ngā taputapu hauora, ka tautoko a SOI i te hoahoa me te whakatinanatanga o ngā pūoko hauora ka taea te whakauru me ngā momo maramara aroturuki iti-mana.

Kei tā mātou kamupene ngā kaupapa ritenga mō ngā anga kawe silicon kotahi-kiriata:

• Te matotoru o te papa silicon: 100 μm / 300 μm / 400 μm / 500 μm / 625 μm me runga ake

• Matotoru SiO₂: mai i te 100 nm ki te 10 μm

• Paparanga silicon hohe: ≥ 20 nm