Nā te whakairo mākū o mua i whakatairanga te whanaketanga o ngā tukanga horoi, te mahi tahu rānei. I ēnei rā, kua noho te whakairo maroke mā te whakamahi i te plasma hei mea rongonui.tukanga whakairoKei roto i te parāma ngā irahiko, ngā kationi me ngā rauropi. Mā te pūngao e pā ana ki te parāma ka tangohia ngā irahiko o waho rawa o te hau pūtake i roto i te āhua kūpapa, ā, ka hurihia ēnei irahiko hei kationi.
Hei tāpiritanga, ka taea te tango atu i ngā ngota koretake i roto i ngā ngota mā te whakamahi i te pūngao hei hanga i ngā irahiko hiko kore. Ka whakamahia e te whakairo maroke ngā kationa me ngā irahiko e hanga ana i te parāuma, he anisotropic ngā kationa (he pai mō te whakairo i tētahi ahunga) ā, he isotropic ngā irahiko (he pai mō te whakairo i ngā ahunga katoa). He nui ake te maha o ngā irahiko i te maha o ngā kationa. I tēnei wā, me isotropic te whakairo maroke pērā i te whakairo mākū.
Heoi, ko te whakairo anisotropic o te whakairo maroke te mea e taea ai ngā ara iahiko tino iti. He aha te take mō tēnei? Hei tāpiri, he tino puhoi te tere whakairo o ngā kationa me ngā rauropi. Nō reira, me pēhea e taea ai e tātou te whakamahi i ngā tikanga whakairo plasma ki te whakaputa papatipu i mua i tēnei ngoikoretanga?
1. Tauwehenga Āhua (A/R)
Pikitia 1. Te ariā o te ōwehenga āhua me te pānga o te ahunga whakamua hangarau ki runga
Ko te Tauwehenga Āhuatanga ko te tauwehenga o te whānui whakapae ki te teitei poutū (arā, te teitei wehea e te whānui). Ko te iti o te inenga matua (CD) o te ara iahiko, ko te nui ake o te uara tauwehenga āhua. Arā, ki te whakaarohia he uara tauwehenga āhua o te 10 me te whānui o te 10nm, ko te teitei o te kōhao i keria i te wā o te mahi whakairo me 100nm. Nō reira, mō ngā hua o te whakatupuranga e whai ake nei e hiahia ana ki te whakawhāiti rawa (2D) me te kiato teitei rānei (3D), me whai uara tauwehenga āhua tino teitei kia taea ai e ngā kationa te uru ki te kiriata o raro i te wā e whakairo ana.
Hei whakatutuki i te hangarau ultra-miniturization me te rahinga nui o raro iho i te 10nm i roto i ngā hua 2D, me pupuri te uara ōwehenga āhuatanga pūnga o te mahara urunga matapōkere hihiri (DRAM) ki runga ake i te 100. Waihoki, me nui ake ngā uara ōwehenga āhuatanga mō te mahara uira 3D NAND hei tāpae i te 256 paparanga, neke atu rānei, o ngā paparanga tāpae pūtau. Ahakoa ka tutuki ngā tikanga e hiahiatia ana mō ētahi atu tukanga, kāore e taea te whakaputa i ngā hua e hiahiatia ana mēnā ko tetukanga whakairokāore i te eke ki te paerewa. Koia te take e nui haere ana te hiranga o te hangarau whakairo.
2. Tirohanga whānui o te whakairo plasma
Pikitia 2. Te whakatau i te pūtake hau plasma e ai ki te momo kiriata
Ina whakamahia he paipa tuwhera, ka whaiti ake te whānui o te paipa, ka māmā ake te tomo mai o te wai, koinei te mea e kiia nei ko te āhuatanga kapi. Heoi, ki te pokaia he kōhao (pito kua kati) ki te wāhi e kitea ana, ka tino uaua te whakauru mai o te wai. Nō reira, i te mea ko te rahi matua o te ara iahiko he 3um ki te 5um i waenganui o te tekau tau atu i 1970, marokewhakairokua āta whakakapia te whakairo mākū hei mea matua. Arā, ahakoa kua whaka-ionia, he māmā ake te uru ki ngā kōhao hohonu nā te mea he iti ake te rōrahi o te ngota kotahi i te rōrahi o te ngota otinga polymer waro.
I te wā e whakairohia ana te parāma, me whakarite te roto o te rūma tukatuka e whakamahia ana mō te whakairo ki te āhua korehau i mua i te werohanga i te hau pūtake parāma e tika ana mō te paparanga e tika ana. I te wā e whakairohia ana ngā kiriata waikura totoka, me whakamahi ngā hau pūtake kaha ake e ahu mai ana i te waro pūhaumāota. Mō ngā kiriata silicon, konganuku ngoikore rānei, me whakamahi ngā hau pūtake parāma e ahu mai ana i te haurore.
Nā, me pēhea te whakairo i te paparanga kuaha me te paparanga ārai hiko hāora rua (SiO2) kei raro?
Tuatahi, mō te paparanga kuaha, me tango te silicon mā te whakamahi i te plasma e hangai ana ki te chlorine (silicon + chlorine) me te whiriwhiringa whakairo polysilicon. Mō te paparanga ārai raro, me whakairo te kiriata silicon dioxide i roto i ngā taahiraa e rua mā te whakamahi i te hau pūtake plasma e hangai ana ki te waro fluoride (silicon dioxide + carbon tetrafluoride) me te whiriwhiringa whakairo kaha ake me te whai hua.
3. Te tukanga whakairo katote tauhohe (whakairo RIE, whakairo ā-tinana, matū rānei)
Ahua 3. Ngā painga o te whakairo katote tauhohe (anisotropy me te tere whakairo teitei)
Kei roto i te parāuma ngā rauropi kore utu isotropic me ngā kationa anisotropic, nō reira, me pēhea tana mahi i te whakairo anisotropic?
Ko te whakairo maroke plasma te nuinga o te wā mā te whakairo ion tauhohe (RIE, Reactive Ion Etching) me ngā tono rānei e hangai ana ki tēnei tikanga. Ko te kaupapa matua o te tikanga RIE ko te whakaiti i te kaha here i waenga i ngā ngota ūnga i roto i te kiriata mā te whakaeke i te wāhi whakairo ki ngā kationa anisotropic. Ka mimitihia te wāhi ngoikore e ngā rauropi kore utu, ka honoa ki ngā matūriki e hanga ana i te paparanga, ka hurihia hei hau (he matū pupuhi) ka tukuna.
Ahakoa he āhuatanga isotropic ngā rauropi kore utu, ko ngā ngota e hanga ana i te mata o raro (ko tōna kaha here ka ngoikore i te whakaekenga o ngā kationa) ka ngāwari ake te hopu e ngā rauropi kore utu, ā, ka huri hei matū hou atu i ngā pakitara taha he kaha te kaha here. Nō reira, ko te whakairo ki raro ka noho hei kaupapa matua. Ko ngā matūriki kua hopukina ka huri hei hau me ngā rauropi kore utu, ka mimitihia, ka tukuna mai i te mata i raro i te mahi a te korehau.
I tēnei wā, ka whakakotahihia ngā kationa i whiwhihia mā te mahi ā-tinana me ngā rauropi kore utu i whiwhihia mā te mahi matū mō te whakairo ā-tinana me te whakairo matū, ā, ka piki ake te tere whakairo (Te Tere Whakairo, te nui o te whakairo i roto i tētahi wā) mā te 10 ngā wā ki te whakataurite ki te whakairo kationa, ki te whakairo rauropi kore utu rānei anake. E kore e taea e tēnei tikanga te whakanui ake i te tere whakairo o te whakairo anisotropic ki raro, engari ka whakaoti hoki i te raruraru o ngā toenga polymer i muri i te whakairo. Ka kiia tēnei tikanga ko te whakairo ion tauhohe (RIE). Ko te kī ki te angitu o te whakairo RIE ko te kimi i te hau pūtake plasma e tika ana mō te whakairo i te kiriata. Kia mōhio: Ko te whakairo plasma he whakairo RIE, ā, ka taea te kī ko te ariā kotahi ēnei e rua.
4. Te Reiti Whakairo me te Tāurangi Mahi Matua
Pikitia 4. Te Taupū Mahi Whakairo Matua e pā ana ki te Tere Whakairo
Ko te tere keri e pā ana ki te hohonutanga o te kiriata e tumanakohia ana kia tae ki roto i te meneti kotahi. Nō reira, he aha te tikanga o te rerekētanga o te tere keri i ia wāhanga ki ia wāhanga i runga i te anga kotahi?
Ko te tikanga o tēnei, he rerekē te hohonutanga o te keri i ia wāhanga ki ia wāhanga o te anga. Nā reira, he mea nui rawa te whakatakoto i te pūwāhi mutunga (EOP) me mutu te keri mā te whakaaro ki te tere keri toharite me te hohonutanga keri. Ahakoa kua whakatakotoria te EOP, kei reira tonu ētahi wāhi he hohonu ake te hohonutanga keri (he nui rawa te keri) he papaku ake rānei (he iti rawa te keri) i te mea i whakamaheretia i te tīmatanga. Heoi, he nui ake te kino o te keri iti i te keri nui i te wā keri. Nā te mea i roto i te take o te keri iti, ka ārai te wāhanga kāore i te nui te keri i ngā tukanga e whai ake nei pērā i te whakaurunga katote.
I taua wā, ko te whiriwhiringa (e inehia ana e te tere haehae) he tohu matua mō te mahi whakairo. Ko te paerewa ine e hangai ana ki te whakataurite i te tere haehae o te paparanga kopare (kiriata photoresist, kiriata waikura, kiriata silicon nitride, me ētahi atu) me te paparanga ūnga. Ko te tikanga o tēnei, ko te teitei ake o te whiriwhiringa, ko te tere ake o te whakairo i te paparanga ūnga. Ko te teitei ake o te taumata o te whakaitiitinga, ko te teitei ake o te whakaritenga whiriwhiringa kia tino kitea ai ngā tauira pai. Nā te mea he tika te ahunga whakairo, he iti te whiriwhiringa o te whakairo cationic, engari he teitei te whiriwhiringa o te whakairo radical, e whakapai ake ana i te whiriwhiringa o te RIE.
5. Te tukanga whakairo
Pikitia 5. Te tukanga whakairo
Tuatahi, ka whakanohoia te angaanga ki roto i te oumu whakahāngai me te pāmahana e mau tonu ana i waenga i te 800 me te 1000℃, kātahi ka hangaia he kiriata hauhā silicon (SiO2) me ngā āhuatanga whakamarumaru teitei ki runga i te mata o te angaanga mā te tikanga maroke. Muri iho, ka whakauruhia te tukanga whakatakoto hei hanga i tētahi paparanga silicon, i tētahi paparanga kawe hiko rānei ki runga i te kiriata waikura mā te whakatakoto kohu matū (CVD)/te whakatakoto kohu ā-tinana (PVD). Mena ka hangaia he paparanga silicon, ka taea te mahi i tētahi tukanga horapa paru hei whakanui ake i te kawe hiko mena e tika ana. I roto i te tukanga horapa paru, he maha ngā paru ka tāpirihia kia maha ngā wā.
I tēnei wā, me whakakotahi te paparanga ārai me te paparanga polysilicon mō te whakairo. Tuatahi, ka whakamahia he ātete whakaahua. Muri iho, ka whakatakotoria he kopare ki runga i te kiriata ātete whakaahua, ā, ka tukuna te whakaaturanga mākū mā te rumaki hei tā i te tauira e hiahiatia ana (e kore e kitea e te kanohi tahanga) ki runga i te kiriata ātete whakaahua. Ina kitea te āhua o te tauira mā te whanaketanga, ka tangohia te ātete whakaahua i te wāhi aro ki te whakaahua. Kātahi ka whakawhitia te anga i tukatukahia e te tukanga whakaahua ki te tukanga whakairo mō te whakairo maroke.
Ko te whakairo maroke te nuinga o te wā mā te whakairo ira tauhohe (RIE), arā, ka whakahokia te whakairo mā te whakakapi i te hau pūtake e tika ana mō ia kiriata. Ko te whakairo maroke me te whakairo mākū e whai ana kia whakanui ake i te ōwehenga āhua (uara A/R) o te whakairo. Hei tāpiri, me horoi auau kia tangohia te polymer kua kohia i raro i te kōhao (te āputa i hangaia e te whakairo). Ko te mea nui ko te whakatikatika i ngā taurangi katoa (pērā i ngā rauemi, te hau pūtake, te wā, te āhua me te raupapa) kia rite ki te tikanga kia taea ai e te otinga horoi, te hau pūtake plasma rānei te rere ki raro i te rua. Mēnā he iti noa te panoni o tētahi taurangi, me tatau anō ētahi atu taurangi, ā, ka whakahokia anō tēnei tukanga tatau kia tutuki rā anō te kaupapa o ia wāhanga. Nō nā tata nei, kua angiangi, kua pakeke ake ngā paparanga monoatomic pērā i ngā paparanga whakatakoto paparanga atomic (ALD). Nō reira, kei te neke te hangarau whakairo ki te whakamahi i ngā pāmahana me ngā pēhanga iti. Ko te whāinga o te tukanga whakairo he whakahaere i te rahinga nui (CD) kia puta ai ngā tauira pai, me te whakarite kia karohia ngā raruraru i puta mai i te tukanga whakairo, inā koa ko te whakairo iti me ngā raruraru e pā ana ki te tango toenga. Ko te whāinga o ngā tuhinga e rua mō te whakairo i runga ake nei he whakarato i te māramatanga ki ngā kaipānui mō te kaupapa o te tukanga whakairo, ngā arai ki te whakatutuki i ngā whāinga i runga ake nei, me ngā tohu mahi i whakamahia hei wikitoria i aua arai.
Wā tuku: Hepetema-10-2024