Chii chinonzi Quartz Boat?
A quartz boatinotakura chaiyo yakagadzirwa neyepamusoro-kuchena fused silica, kazhinji iine akawanda-slot dhizaini. Inoshandiswa kubata silicon wafers, semiconductor substrates, kana zvimwe zvinhu panguva yepamusoro-tembiricha maitiro. Mukugadzira photovoltaic uye semiconductor, mabhoti equartz maturusi akakosha emaitiro akakosha senge diffusion, kemikari vapor deposition (CVD), uye annealing, zvichikanganisa kugadzirwa kwakanaka uye goho rechigadzirwa.
Core Mabasa:
Photovoltaics: Inoshandiswa mu phosphorus diffusion (kuumba PN junctions) uye passivation layer deposition yesilicon wafers mune yakakwirira-tembiricha vira.
Semiconductors: Inotakura zvimedu panguva ye oxidation, etching, uye nhete-firimu deposition mukugadzira chip.
Iro Quartz Boat Yakagadzirwa uye Yakagadzirwa sei?
Magadzirirwo equartz wafer boatinofanirwa kuzadzisa zvinotevera maitiro:
-Ultra-Yakakwirira Kuchena:
Raw SiO2 zvinhu zvinofanirwa kudarika 99.99% kuchena kudzivirira kusvibiswa.
-High-Temperature Resistance:
Kumira kuratidzwa kwenguva refu kune tembiricha iri pamusoro pe1200 ℃ pasina kushatiswa kwechimiro.
-Low Thermal Kuwedzera:
Coefficient of thermal expansion (CTE) inofanira kudzikiswa (≈5.5 10-6/℃) kudzivirira kurwa kana kutsemuka.
-Precision Slot Design:
Slot spacing kushivirira inodzorwa mukati me± 0.1mm kuve nechokwadi chekudziya kwakafanana.
Igwa requartz rinogadzirwa sei?
Raw Material Kucheneswa:
Natural quartz jecha rinonyungudutswa muchoto chemagetsi arc pa2000 ° C kubvisa tsvina seFe, Al, uye Na.
Magadzirirwo Ekugadzira:
CNC Machining: Zvishandiso zvinotungamirwa nekombuta zvinoveza slots ine sub-millimeter chaiyo.
Mold Casting: Kune yakaoma geometries, yakasanganiswa silica inodururwa mumagraphite molds uye sintered.
Surface Perfection:
Dhaimondi-chishandiso polishing inowana kushata kwepamusoro (Ra) <0.5 μm, kuderedza kunamatira.
Acid washing (eg, HCl) inobvisa zvakasara zvinosvibisa.
Rigorous Testing:
Thermal Shock Testing: Nekukurumidza bhasikoro pakati pe25 ℃ uye 1200 ℃ kutarisa kutsemuka kuramba.
Purity Analysis: Glow discharge mass spectrometry (GDMS) inoona tsvina yekutsvaga.
Sei zvikepe zvequartz zvisingadzoreki mumaindasitiri aya?
Kemikari Inertness: Inopikisa maitiro ane acids, alkalis, chlorine, uye magasi ekugadzira pakupisa kwakanyanya.
Thermal Kugadzikana: Kureba kupfuura simbi kana ceramics mukukurumidza kupisa bhasikoro nekuda kweCte-yakaderera CTE.
Optical Transparency: Inobvumira UV-IR mwenje kuendesa kune mafoto-anobatsira CVD maitiro.
Kuenzanisa:
Silicon Carbide (SiC) Boat: Mutengo wepamusoro uye reactivity neokisijeni (inogadzira CO2).
Graphite Boat: Njodzi yekusvibiswa kwekabhoni inokanganisa wafer resistivity.
Mabhoti equartz anoshanda sei mumitsara yekugadzira photovoltaic?
Phosphorus Diffusion:
Maitiro: Silicon wafers anoiswa mumabhoti equartz uye akafumurwa kuPOCl3 gasi pa850-950 ℃ kugadzira PN junctions.
Quartz ine yepamusoro corrosion kuramba inopesana nehutsinye POCl3 nharaunda.
PERC Cell Passivation:
Maitiro: Inobata wafers panguva yeAl2O3deposition yekumashure-yepamusoro passivation, inowedzera kutendeuka kushanda zvakanaka.
Critical Parameter: Slot dhizaini inovimbisa firimu ukobvu kufanana ≤3%.
Mabhoti e quartz anoita sei chokwadi mukugadzirisa wafer?
Oxidation Maitiro:
Maitiro: Mawafer anoiswa muchikepe chequartz kune yakaoma / yakanyorova oxidation pa1100 ℃ kukura SiO2 layer.
Dhizaini Feature: Slot madziro akachinjika pa5-10 ° kudzivirira wafer kutsvedza.
CVD Maitiro:
Maitiro: Inogonesa yunifomu yeplasma kugovera panguva yeSi3N4 kana polysilicon deposition.
Innovation: Madhizaini epamberi anosanganisira nzira dzekuyerera kwegasi yekuvandudza kuenderana kwemafirimu.
Ndeapi maitiro anowedzera hupenyu hwequartz boa achideredza nguva yekuderera?
Cleaning Cycles:
Zuva nezuva: Deionized mvura + CO2 snow jet yekuchenesa inobvisa yakasununguka zvimedu.
Vhiki nevhiki: Kunyudzwa mu5% citric acid pa80 ℃ inonyungudutsa simbi okisidi.
Inspection Checklist:
Devitrification: Mavara machena pa quartz anoratidza crystallization; kutsiva kana kufukidzwa kunopfuura 5%.
Microcracks: Shandisa dhayi inopinda muyedzo kuti uone hurema hwepasi-pasi.
Ndeapi mabudiro achatsanangudza tekinoroji yequartz boat?
IoT-Enabled Boats:
Embedded fiber Bragg grating (FBG) sensors inotarisisa chaiyo-nguva tembiricha gradients (± 1°C kunyatsoita).
Advanced Coatings:
Yttria-yakadzikama zirconia (YSZ) coatings inoderedza silicon carbide buildup ne70% mune epitaxial reactor.
Additive Manufacturing:
3D-yakadhindwa quartz mabhoti ane lattice zvimiro anocheka huremu ne40% uku achichengetedza simba.
Mhedziso
Kubva pakugonesa terawatt-scale solar mapurazi kusvika pakugonesa shanduko yeAI kuburikidza nepamusoro semiconductors,quartz boatndiwo mabhiza asingashamisi ehunyanzvi hwemazuva ano. Sezvo maindasitiri achisundira miganhu yeminiaturization uye kugona, hutsva mukugadzirwa kwechikepe chequartz uye sainzi yenyama icharamba yakakosha-zvichiratidza kuti kunyangwe muzera reAI uye quantum computing, zvimwe zvinhu zve "chikoro chekare" zvichiri kubata makiyi eramangwana.
Nguva yekutumira: Mar-20-2025