Chii chinonzi TaC Coating?

Muindasitiri ye semiconductor iri kuchinja nekukurumidza, zvinhu zvinowedzera mashandiro, kugara kwenguva refu, uye kushanda zvakanaka zvakakosha. Imwe nzira itsva yakadaro ndeye Tantalum Carbide (TaC) coating, iyo inodzivirira zvinhu zve graphite. Blog rino rinoongorora tsananguro yeTaC coating, zvakanakira zvehunyanzvi, uye mashandisirwo ayo mukugadzira semiconductor.

Ⅰ. Chii chinonzi TaC Coating?

Kuputira TaC ipurasitiki ine simba guru inoumbwa netantalum carbide (musanganiswa wetantalum nekabhoni) yakaiswa pamusoro pegirafiti. Kuputira uku kunowanzo shandiswa uchishandisa nzira dzeChemical Vapor Deposition (CVD) kana Physical Vapor Deposition (PVD), zvichigadzira chipingamupinyi chakasimba, chakachena kwazvo chinodzivirira girafiti kubva mumamiriro ezvinhu akaipisisa.

Hunhu Hukuru hweTaC Coating

●Kugadzikana Kwekupisa Kwakakwirira: Inotsungirira tembiricha inodarika 2200°C, ichipfuura zvinhu zvechinyakare zvakaita sesilicon carbide (SiC), iyo inoderera pamusoro pe1600°C.

●Kuramba Kemikari: Inodzivirira ngura kubva kuhydrogen (H₂), ammonia (NH₃), silicon vapors, uye simbi dzakanyungudutswa, zvakakosha munzvimbo dzekugadzirisa semiconductor.

●Kuchena Kwakanyanya: Kusachena kuri pasi pe5 ppm, zvichideredza njodzi dzekusvibiswa mukukura kwemakristaro.

●Kugara Kwekupisa uye Kwemakanika: Kunamatira kwakasimba pagrafiti, kuwedzera kushoma kwekupisa (6.3×10⁻⁶/K), uye kuomarara (~2000 HK) zvinoita kuti igare kwenguva refu pasi pekupisa.

Ⅱ. Kufukidza TaC muKugadzira Semiconductor: Mashandisirwo Akakosha

Zvikamu zvegrafiti zvakaputirwa neTaC zvakakosha mukugadzirwa kwema semiconductor epamusoro, kunyanya pamidziyo yesilicon carbide (SiC) ne gallium nitride (GaN). Heano mashandisirwo azvo akakosha:

1. Kukura kweSiC Single Crystal

Mawafer eSiC akakosha pamagetsi emagetsi nemotokari dzemagetsi. Zvigadziko zvegrafiti zvakaputirwa neTaC zvinoshandiswa muPhysical Vapor Transport (PVT) uye High-Temperature CVD (HT-CVD) systems kuti:

● Dzivisa Kusvibiswa: Kusachena kwakaderera kweTaC (semuenzaniso, boron <0.01 ppm vs. 1 ppm mu graphite) kunoderedza zvikanganiso mumakristaro eSiC, zvichivandudza resistivity yewafer (4.5 ohm-cm vs. 0.1 ohm-cm ye graphite isina kuputirwa).

● Kuvandudza Kutarisirwa Kwekupisa: Kupisa kwakafanana (0.3 pa1000°C) kunoita kuti kupisa kugovaniswe nguva dzose, zvichiita kuti kristaro ive yakanaka.

2. Kukura kweEpitaxial (GaN/SiC)

Muma reactor eMetal-Organic CVD (MOCVD), zvinhu zvakaputirwa neTaC zvakaita sewafer carriers nema injectors:

●Dzivisa Maitiro eGasi: Inodzivirira kuchekwa neammonia nehydrogen pa1400°C, ichichengetedza kusimba kwereactor.

●Kuvandudza Goho: Nekuderedza kudonha kwezvikamu kubva pagraphite, CVD TaC coating inoderedza zvikanganiso muzvikamu zve epitaxial, zvakakosha kuma LED anoshanda zvakanyanya uye zvishandiso zveRF.

3. Mamwe Mashandisirwo EmaSemiconductor

●MaReactor ekupisa kwakanyanya: Ma ssusceptor nema heater mukugadzirwa kweGaN anobatsirwa nekugadzikana kweTaC munzvimbo dzine hydrogen yakawanda.

●Kubata Wafer: Zvinhu zvakaputirwa zvakaita semhete nezvivharo zvinoderedza kusvibiswa kwesimbi panguva yekufambisa wafer

Ⅲ. Sei TaC Coating Ichishanda Zvikuru?

Kuenzanisa nezvinhu zvemazuva ose kunoratidza hunyanzvi hweTaC:

Data rakawanikwa kubva mukuenzanisa kweindasitiri

IV. Sei uchifanira kusarudza chiremba wemhuka?

Mushure mekudyara mari nguva dzose mukutsvaga nekuvandudza tekinoroji,VETZvikamu zveTantalum carbide (TaC) zvakaputirwa, zvakaita seTaC yakafukidzwa graphite gwara mhete, CVD TaC Coated plate susceptor, TaC Coated Susceptor yeEpitaxy Equipment,Tantalum carbide yakafukidzwa nepurasitiki ine girafuuyeWafer susceptor ine TaC coating, vanozivikanwa zvikuru mumisika yeEurope neAmerica. VET inotarisira nemoyo wese kuva mubatsiri wako wenguva refu.