Chii chinonzi TaC Coating?

Muindasitiri inokurumidza kubuda semiconductor, zvinhu zvinosimudzira mashandiro, kusimba, uye kushanda nesimba zvakakosha. Imwe hunyanzvi hwakadaro ndeyeTantalum Carbide (TaC) yekuputira, yekucheka-kumucheto inodzivirira layer yakaiswa kune graphite zvikamu. Iyi blog inoongorora tsananguro yeTaC coating, zvakanakira hunyanzvi, uye mashandisirwo ayo ekushandura mukugadzira semiconductor.

Ⅰ. Chii chinonzi TaC Coating?

TaC yekupfekedza ndeyepamusoro-inoshanda ceramic layer inoumbwa netantalum carbide (musanganiswa wetantalum uye kabhoni) yakaiswa panzvimbo yegraphite. Iyo yekupfekedza inowanzo shandiswa uchishandisa Chemical Vapor Deposition (CVD) kana Physical Vapor Deposition (PVD) maitiro, kugadzira dense, yekupedzisira-yakachena barrier inodzivirira graphite kubva kune yakanyanyisa mamiriro.

Zvinhu zvakakosha zveTaC Coating

●High-Temperature Kugadzikana: Inoshingirira tembiricha inodarika 2200°C, inokunda zvechinyakare zvinhu zvakaita sesilicon carbide (SiC), inodzikisira pamusoro pe1600°C.

●Chemical Resistance: Inorambira mukuora kubva kuhydrogen (H₂), ammonia (NH₃), vapors yesilicon, uye simbi dzakanyungudutswa, yakakosha kune semiconductor kugadzirisa nharaunda.

●Ultra-Yakakwirira Kuchena: Kusachena mazinga ari pasi pe5 ppm, kuderedza kusvibiswa kwengozi mukukura kwekristaro maitiro.

●Thermal uye Mechanical Durability: Kunamatira kwakasimba kune graphite, kuderera kwekuwedzera kwekushisa (6.3 × 10⁻⁶ / K), uye kuoma (~ 2000 HK) kunovimbisa hupenyu hurefu pasi pebhasikoro rinopisa.

Ⅱ. TaC Coating muSemiconductor Manufacturing: Key Applications

TaC-yakavharwa magirafu zvikamu zvakakosha mukugadzirwa kwepamusoro semiconductor, kunyanya kune silicon carbide (SiC) uye gallium nitride (GaN) zvishandiso. Pazasi pane zviitiko zvakakosha zvekushandisa kwavo:

1. SiC Single Crystal Kukura

SiC wafers yakakosha kune magetsi emagetsi uye mota dzemagetsi. TaC-yakavharwa graphite crucibles uye susceptors anoshandiswa muPhysical Vapor Transport (PVT) uye High-Temperature CVD (HT-CVD) masisitimu ku:

● Dzivisa Kusvibiswa: TaC yakaderera tsvina yemukati (eg, boron <0.01 ppm vs. 1 ppm mu graphite) inoderedza kukanganisa muSiC crystals, inovandudza wafer resistivity (4.5 ohm-cm vs. 0.1 ohm-cm ye graphite isina kuvharwa).

● Enhance Thermal Management: Uniform emissivity (0.3 pa 1000 ° C) inochengetedza kugovera kwekupisa kwakafanana, kugadzirisa kristall quality.

2. Epitaxial Kukura (GaN/SiC)

MuMetal-Organic CVD (MOCVD) reactor, TaC-yakavharwa zvinhu senge wafer carriers uye majekiseni:

●Kudzivirira Gasi Reactions: Inoramba etching neammonia uye hydrogen pa1400°C, inochengetedza reactor kuperera.

●Vandudza Goho: Nekudzikisa kudonhedzwa kwechikamu kubva kugraphite, CVD TaC coating inoderedza kuremara muepitaxial layers, yakakosha kune yakakwirira-inoshanda maLED uye RF zvishandiso.

3. Zvimwe Semiconductor Applications

●High-Temperature Reactors: Masusceptors uye maheater muGaN kugadzirwa anobatsirwa nekugadzikana kweTaC munzvimbo dzine hydrogen-rich.

●Wafer Kubata: Zvikamu zvakavharidzirwa semhete nemavharo zvinoderedza kusvibiswa kwesimbi panguva yekufambisa kwewafer

Ⅲ. Sei TaC Coating Ichipfuura dzimwe nzira?

Kuenzanisa nezvinhu zvakajairika kunosimbisa hukuru hweTaC:

Data inotorwa kubva kuindasitiri kuenzanisa

IV. Sei uchisarudza VET?

Mushure mekuenderera mberi kwekudyara mukutsvaga tekinoroji nekusimudzira,VET's Tantalum carbide (TaC) yakavharwa zvikamu, sengeTaC yakavharwa graphite gwara mhete, CVD TaC Coated plate susceptor, TaC Coated Susceptor yeEpitaxy Equipment,Tantalum carbide yakavharwa porous graphite zvinhuuyeWafer susceptor ine TaC coating, anozivikanwa zvikuru mumisika yeEurope neAmerica. VET inotarisira nemoyo wose kuve mudiwa wako wenguva refu.