Yini i-Quartz Boat?
A isikebhe se-quartziwukuba umthwali onembayo owenziwe nge-silica exutshiwe ehlanzekile, ngokuvamile efaka idizayini yezikhala eziningi. Isetshenziselwa ukubamba ama-wafers e-silicon, ama-semiconductor substrates, noma ezinye izinto ngesikhathi sezinqubo zokushisa okuphezulu. Ekwenziweni kwe-photovoltaic kanye ne-semiconductor, izikebhe ze-quartz zingamathuluzi abalulekile ezinqubo ezibucayi ezifana ne-diffusion, chemical vapor deposition (CVD), kanye ne-annealing, okunomthelela ngqo ekusebenzeni kahle kokukhiqiza kanye nesivuno somkhiqizo.
Imisebenzi Esemqoka:
Ama-Photovoltaics: Isetshenziswa ekusakazeni kwe-phosphorus (ukwenza ukuhlangana kwe-PN) kanye nokubekwa kongqimba lwe-passivation kuma-wafer e-silicon eziko lokushisa eliphezulu.
Ama-semiconductors: Ithwala ama-wafers ngesikhathi se-oxidation, i-etching, kanye nokufakwa kwefilimu emincane ekwenziweni kwama-chip.
Siklanywe Kanjani Futhi Senziwe Isikebhe Se-Quartz?
Umklamo weisikebhe se-quartz waferkumele ihlangabezane nalezi zidingo ezilandelayo:
-Ukuhlanzeka Okuphezulu Okuphezulu:
Impahla ye-SiO2 eluhlaza kufanele yeqe ubumsulwa obungu-99.99% ukuze kugwenywe ukungcoliswa.
-Ukumelana Nokushisa Okuphezulu:
Ukumelana nokuchayeka isikhathi eside emazingeni okushisa angaphezu kuka-1200 ℃ ngaphandle kokuwohloka kwesakhiwo.
-Ukwandiswa Okuphansi Kokushisa:
I-coefficient of thermal expansion (CTE) kufanele incishiswe (≈5.5 10-6/℃) ukuze kuvinjelwe ukungqubuzana noma ukuqhekeka.
-Precision Slot Design:
Ukubekezelelwa kwesikhala sesikhala kulawulwa ngaphakathi kuka±0.1mm ukuqinisekisa ukushisisa okufanayo.
Senziwa kanjani isikebhe se-quartz?
Ukuhlanzwa kwe-Raw Material:
Isihlabathi se-quartz yemvelo sincibilika esithandweni se-arc sikagesi ku-2000°C ukuze kususwe ukungcola okufana no-Fe, Al, no-Na.
Amasu Okwakha:
CNC Machining: Amathuluzi aqondiswa ikhompuyutha abaza izikhala ngokunemba kwe-sub-millimeter.
Ukubunjwa Kwesikhunta: Kumajometri ayinkimbinkimbi, i-silica ehlanganisiwe ithululelwa ekubunjweni kwe-graphite futhi i-sintered.
Ukuphelela Kobuso:
Ukupholishwa kwethuluzi ledayimane kufeza ubulukhuni obungaphezulu (Ra) <0.5 μm, kunciphisa ukunamathela kwezinhlayiyana.
Ukugeza nge-asidi (isb, i-HCl) kususa ukungcola okusele.
Ukuhlola Okuqinile:
Ukuhlolwa Kwe-Thermal Shock: Kuhamba ngebhayisikili ngokushesha phakathi kuka-25 ℃ no-1200 ℃ ukuhlola ukumelana nokuqhekeka.
Ukuhlaziywa Kobumsulwa: I-Glow discharge mass spectrometry (GDMS) ithola ukungcola komkhondo.
Kungani izikebhe ze-quartz zingenakushintshwa kulezi zimboni?
Ukungabi Nalutho Kwekhemikhali: Imelana nokusabela ngama-asidi, ama-alkali, i-chlorine, namagesi okucubungula emazingeni okushisa aphezulu.
Ukuzinza Okushisayo: Iphakeme kakhulu kunezinsimbi noma izitsha zobumba ekuhambeni kwebhayisikili eshisayo ngenxa ye-CTE ephansi kakhulu.
I-Optical Transparency: Ivumela ukudluliswa kokukhanya kwe-UV-IR kuzinqubo ze-CVD ezisizwa isithombe.
Ukuqhathanisa:
Isikebhe seSilicon Carbide (SiC).: Izindleko eziphakeme nokusebenza kabusha nge-oxygen (ikhiqiza i-CO2).
Isikebhe se-graphite: Ingozi yokungcoliswa kwekhabhoni ethinta ukumelana ne-wafer.
Zisebenza kanjani izikebhe ze-quartz emigqeni yokukhiqiza ye-photovoltaic?
Ukuhlukaniswa kwe-Phosphorus:
Inqubo: Amawafa e-Silicon alayishwa ezikebheni ze-quartz futhi avezwe kugesi we-POCl3 ku-850-950 ℃ ukuze akhe ukuhlangana kwe-PN.
I-Quartz inokumelana nokugqwala okuphakeme ngokumelene nezindawo ezinolaka ze-POCl3.
I-PERC Cell Passivation:
Inqubo: Ibamba ama-wafers ngesikhathi se-Al2O3 deposition ukuze kudlule indawo engemuva, kukhuphule ukusebenza kahle kokuguqulwa.
Ipharamitha Ebalulekile: I-Slot design iqinisekisa ukufana kwefilimu ≤3%.
Izikebhe ze-quartz ziqinisekisa kanjani ukunemba ekucutshungulweni kwe-wafer?
Izinqubo ze-Oxidation:
Inqubo: Ama-wafer alayishwa aqonde esikebheni se-quartz ukuze kufakwe i-oxidation eyomile/emanzi ku-1100℃ ukuze kukhule izingqimba ze-SiO2.
Isici Sokuklama: Izindonga zesikhala zi-engeli ku-5-10° ukuvimbela ukushelela kwe-wafer.
Izinqubo ze-CVD:
Inqubo: Inika amandla ukusatshalaliswa kwe-plasma okufanayo ngesikhathi se-Si3N4 noma i-polysilicon deposition.
Ukuqamba okusha: Imiklamo ethuthukisiwe ihlanganisa iziteshi zokugeleza kwegesi ukuze kuthuthukiswe ukungaguquguquki kwefilimu.
Yiziphi izinqubo ezinweba isikhathi sempilo ye-quartz boa kuyilapho kunciphisa isikhathi sokuphumula?
Ukuhlanza Imijikelezo:
Nsuku zonke: Amanzi ahlanganisiwe + i-CO2 yokuhlanza indiza yeqhwa kususa izinhlayiya ezixekethile.
Maviki onke: Ukucwiliswa ku-5% citric acid ku-80℃ kuncibilikisa ama-oxide ensimbi.
Uhlu Lokuhlola Lokuhlola:
I-Devitrification: Amabala amhlophe ku-quartz abonisa ukucwebezela; shintsha uma ukufakwa kudlula ama-5%.
Ama-Microcracks: Sebenzisa ukuhlola kokungena kodayi ukuze uthole amaphutha angaphansi komhlaba.
Yikuphi ukuphumelela okuzochaza kabusha ubuchwepheshe besikebhe se-quartz?
Izikebhe ezinikwe amandla yi-IoT:
Izinzwa ze-fiber Bragg grating (FBG) ezishumekiwe ziqapha ama-gradients wesikhathi sangempela (±1°C ukunemba).
Izembatho Ezithuthukile:
Izigqoko ze-zirconia eziqinile ze-Yttria (YSZ) zehlisa i-silicon carbide buildup ngo-70% kuma-epitaxial reactors.
Ukukhiqiza Okungeziwe:
Izikebhe zequartz eziphrinte i-3D ezinezakhiwo ze-lattice zinciphisa isisindo ngo-40% ngenkathi zigcina amandla.
Isiphetho
Ukusuka ekunikeni amandla amapulazi elanga esikali se-terawatt kuya ekunikezeni amandla uguquko lwe-AI ngama-semiconductors athuthukile,isikebhe se-quartzingamahhashi okusebenza angenasizotha obuchwepheshe besimanje. Njengoba izimboni zicindezela imingcele ye-miniaturization nokusebenza kahle, izinto ezintsha ekwakhiweni kwezikebhe ze-quartz kanye nesayensi yezinto ezibonakalayo zizohlala zibalulekile-okufakazela ukuthi ngisho nasenkathini ye-AI ne-quantum computing, ezinye izinto "zesikole esidala" zisabambe okhiye bekusasa.
Isikhathi sokuthumela: Mar-20-2025