I-Graphite Boat C/C Carrier For Silicon Wafer PECVD

I-Graphite Boat C/C Carrier Ye-Silicon Wafer PECVD Isithombe Esifakiwe

Incazelo emfushane:

Isikebhe se-VET Energy PECVD segraphite sephaneli yelanga siwumkhiqizo osebenza kahle kakhulu oklanyelwe ukuhlinzeka ngokusebenza okungaguquki nokuthembekile esikhathini eside. sisebenzisa impahla ye-graphite engenisiwe ngokuhlanzeka okuphezulu, okuqukethwe kokungcola okuphansi namandla aphezulu, okuqinisekisa ikhwalithi ephezulu nokusebenza kanye nempilo ende yesevisi.

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Imininingwane Yomkhiqizo

Omaka bomkhiqizo

Incazelo Yomkhiqizo

Isikebhe se-graphite esisetshenziswa ku-PECVD yomugqa wokukhiqiza amaseli elanga

Ukukhiqizwa kwamaseli elanga kudinga izinqubo eziyisithupha ezinkulu: ukuthumela umbhalo, ukusabalalisa, ukunamathisela, ukumboza, ukuphrinta isikrini kanye ne-sintering. Ekwenziweni kwamaseli elanga, inqubo yokumboza ishubhu ye-PECVD isebenzisa isikebhe segraphite njengomzimba osebenzayo. Inqubo yokumboza isebenzisa i-plasma ethuthukisiwe umhwamuko wamakhemikhali ukuze ifake ifilimu ye-silicon nitride ngaphambili kwewafa ye-silicon ukuze kuncishiswe ukukhanya kwelanga kanye nengaphezulu lewafa ye-silicon.

Izici zesikebhe sethu se-graphite se-PECVD:
1). Kuvunyelwe ukuqeda ubuchwepheshe "amalensi ombala" , ukuze uqiniseke ngaphandle kwe "coloe lens" ngesikhathi senqubo yesikhathi eside.
2). Yenziwe ngezinto ezingenisiwe zegraphite ezinobumsulwa obukhulu, okuqukethwe kokungcola okuphansi namandla aphezulu.
3). Kusetshenziswa i-ceramic engu-99.9% yokuhlanganiswa kwe-ceramic enokumelana nokugqwala okuqinile kanye nobufakazi be-brust.
4). Ukusebenzisa imishini yokucubungula ngokunemba ukuqinisekisa ukunemba kwengxenye ngayinye.

Ukucaciswa

Into	Uhlobo	Inombolo yenethiwekhi ye-wafer
Isikebhe se-PEVCD Graphite --- Uchungechunge lwe-156	156-13 isikebhe se-graphite	144
	156-19 isikebhe se-graphite	216
	156-21 isikebhe se-graphite	240
	156-23 isikebhe se-graphite	308
Isikebhe se-PEVCD Graphite --- Uchungechunge lwe-125	125-15 isikebhe se-graphite	196
	125-19 isikebhe se-graphite	252
	125-21 isikebhe se-graphite	280

Ulwazi Lwenkampani

I-Ningbo VET Energy Technology Co., Ltd iyibhizinisi lobuchwepheshe obuphezulu eligxile ekukhiqizeni nasekuthengisweni kwezinto eziphambili ezisezingeni eliphezulu, izinto zokwakha kanye nobuchwepheshe obuhlanganisa igraphite, i-silicon carbide, i-ceramics, ukwelashwa kwendawo efana ne-SiC coating, i-TaC coating, i-glassy carbon coating, i-pyrolytic carbon coating, njll.

Ithimba lethu lezobuchwepheshe livela ezikhungweni eziphezulu zocwaningo lwasekhaya, futhi selithuthukise ubuchwepheshe obuningi obunamalungelo obunikazi ukuze kuqinisekiswe ukusebenza komkhiqizo nekhwalithi, linganikeza amakhasimende izixazululo zezinto ezibonakalayo.